DE69529987T2 - Elektronischer energiefilter - Google Patents

Elektronischer energiefilter Download PDF

Info

Publication number
DE69529987T2
DE69529987T2 DE69529987T DE69529987T DE69529987T2 DE 69529987 T2 DE69529987 T2 DE 69529987T2 DE 69529987 T DE69529987 T DE 69529987T DE 69529987 T DE69529987 T DE 69529987T DE 69529987 T2 DE69529987 T2 DE 69529987T2
Authority
DE
Germany
Prior art keywords
energy filter
electronic energy
electronic
filter
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69529987T
Other languages
English (en)
Other versions
DE69529987D1 (de
Inventor
Shunroku Taya
Yoshifumi Taniguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69529987D1 publication Critical patent/DE69529987D1/de
Publication of DE69529987T2 publication Critical patent/DE69529987T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/055—Arrangements for energy or mass analysis magnetic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/057—Energy or mass filtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
DE69529987T 1994-07-15 1995-07-14 Elektronischer energiefilter Expired - Fee Related DE69529987T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18514094 1994-07-15
PCT/JP1995/001401 WO1996002935A1 (fr) 1994-07-15 1995-07-14 Filtre a energie electronique

Publications (2)

Publication Number Publication Date
DE69529987D1 DE69529987D1 (de) 2003-04-24
DE69529987T2 true DE69529987T2 (de) 2004-01-15

Family

ID=16165580

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69529987T Expired - Fee Related DE69529987T2 (de) 1994-07-15 1995-07-14 Elektronischer energiefilter

Country Status (4)

Country Link
US (1) US6066852A (de)
EP (1) EP0772225B1 (de)
DE (1) DE69529987T2 (de)
WO (1) WO1996002935A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005031537B4 (de) * 2004-06-28 2007-10-11 Grzelakowski, Krzysztof, Dr. Abbildender Energiefilter für geladene Teilchen, insbesondere Elektronen

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19746785A1 (de) * 1997-10-23 1999-04-29 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit Energiefilter
DE19855629A1 (de) * 1998-12-02 2000-06-08 Leo Elektronenmikroskopie Gmbh Teilchenoptische Anordnung und Verfahren zur teilchenoptischen Erzeugung von Mikrostrukturen
JP3441955B2 (ja) * 1998-02-23 2003-09-02 株式会社日立製作所 投射方式の荷電粒子顕微鏡および基板検査システム
DE10005347A1 (de) * 2000-02-08 2001-08-09 Leo Elektronenmikroskopie Gmbh Elektronenenergiefilter mit magnetischen Umlenkbereichen
JP2002025485A (ja) * 2000-07-06 2002-01-25 Jeol Ltd エネルギーフィルタ
US6717141B1 (en) * 2001-11-27 2004-04-06 Schlumberger Technologies, Inc. Reduction of aberrations produced by Wien filter in a scanning electron microscope and the like
JP2003297271A (ja) * 2002-04-03 2003-10-17 Hitachi High-Technologies Corp モノクロメータ付走査形電子顕微鏡
JP3789104B2 (ja) * 2002-05-13 2006-06-21 株式会社日立ハイテクノロジーズ 元素分布観察方法及び装置
US20060063802A1 (en) 2004-03-29 2006-03-23 Matthieu Guitton Methods for the treatment of tinnitus induced by cochlear excitotoxicity
ME01956B (me) * 2005-09-28 2015-05-20 Auris Medical Ag Farmaceutske kompozicije za tretman poremećaja unutrašnjeg uva
CN109613597B (zh) * 2018-11-30 2021-04-06 上海联影医疗科技股份有限公司 一种确定电子束能谱的方法及系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2453492A1 (fr) * 1979-04-03 1980-10-31 Cgr Mev Dispositif de deviation magnetique achromatique d'un faisceau de particules chargees et appareil d'irradiation utilisant un tel dispositif
US4312218A (en) * 1979-09-04 1982-01-26 Li-Cor, Inc. Porometer and method for stomatal measurements
US4425506A (en) * 1981-11-19 1984-01-10 Varian Associates, Inc. Stepped gap achromatic bending magnet
DE3423149A1 (de) * 1984-06-22 1986-01-02 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und anordnung zur elektronenenergiegefilterten abbildung eines objektes oder eines objektbeugungsdiagrammes mit einem transmissions-elektronenmikroskop
JPS61277141A (ja) * 1985-05-31 1986-12-08 Jeol Ltd 磁界型エネルギ−フイルタ−
DE3532698A1 (de) * 1985-09-13 1987-03-26 Zeiss Carl Fa Elektronenenergiefilter vom alpha-typ
DE3532699A1 (de) * 1985-09-13 1987-03-26 Zeiss Carl Fa Elektronenenergiefilter vom omega-typ
US5097126A (en) * 1990-09-25 1992-03-17 Gatan, Inc. High resolution electron energy loss spectrometer
DE4041495A1 (de) * 1990-12-22 1992-06-25 Zeiss Carl Fa Elektronenenergiefilter, vorzugsweise vom alpha- oder omega-typ
JP3397347B2 (ja) * 1992-11-26 2003-04-14 日本電子株式会社 オメガフィルタ
JP3139920B2 (ja) * 1994-07-25 2001-03-05 株式会社日立製作所 エネルギフィルタおよびこれを備えた透過電子顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005031537B4 (de) * 2004-06-28 2007-10-11 Grzelakowski, Krzysztof, Dr. Abbildender Energiefilter für geladene Teilchen, insbesondere Elektronen

Also Published As

Publication number Publication date
US6066852A (en) 2000-05-23
DE69529987D1 (de) 2003-04-24
EP0772225A1 (de) 1997-05-07
WO1996002935A1 (fr) 1996-02-01
EP0772225A4 (de) 1997-10-29
EP0772225B1 (de) 2003-03-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee