GB2002547B - Investigation of astigmatism in electron beam probe instruments - Google Patents

Investigation of astigmatism in electron beam probe instruments

Info

Publication number
GB2002547B
GB2002547B GB7831194A GB7831194A GB2002547B GB 2002547 B GB2002547 B GB 2002547B GB 7831194 A GB7831194 A GB 7831194A GB 7831194 A GB7831194 A GB 7831194A GB 2002547 B GB2002547 B GB 2002547B
Authority
GB
United Kingdom
Prior art keywords
astigmatism
investigation
electron beam
beam probe
probe instruments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7831194A
Other versions
GB2002547A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEE W
Original Assignee
TEE W
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TEE W filed Critical TEE W
Priority to GB7831194A priority Critical patent/GB2002547B/en
Publication of GB2002547A publication Critical patent/GB2002547A/en
Application granted granted Critical
Publication of GB2002547B publication Critical patent/GB2002547B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB7831194A 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments Expired GB2002547B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7831194A GB2002547B (en) 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB3208477 1977-07-30
GB7831194A GB2002547B (en) 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments

Publications (2)

Publication Number Publication Date
GB2002547A GB2002547A (en) 1979-02-21
GB2002547B true GB2002547B (en) 1982-01-20

Family

ID=26261206

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7831194A Expired GB2002547B (en) 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments

Country Status (1)

Country Link
GB (1) GB2002547B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123582B (en) * 1982-06-18 1986-01-29 Nat Res Dev Correction of astigmatism in electron beam instruments
US4567369A (en) * 1982-06-18 1986-01-28 National Research Development Corporation Correction of astigmatism in electron beam instruments
JPS5918555A (en) * 1982-07-22 1984-01-30 Erionikusu:Kk Method for handling charged particle ray and its device
JPS60147117A (en) * 1984-01-10 1985-08-03 Fujitsu Ltd Method for adjustment of electron beam device
GB8410168D0 (en) * 1984-04-18 1984-05-31 Smith K C A Charged-particle beams
JP2835097B2 (en) * 1989-09-21 1998-12-14 株式会社東芝 Correction method for charged beam astigmatism
US6184524B1 (en) * 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
CN111477529B (en) * 2020-05-19 2024-05-14 桂林狮达技术股份有限公司 Automatic astigmatism eliminating electron gun and method for automatically eliminating astigmatism of electron gun

Also Published As

Publication number Publication date
GB2002547A (en) 1979-02-21

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee