GB2002547A - Investigation of astigmatism in electron beam probe instruments - Google Patents

Investigation of astigmatism in electron beam probe instruments

Info

Publication number
GB2002547A
GB2002547A GB7831194A GB7831194A GB2002547A GB 2002547 A GB2002547 A GB 2002547A GB 7831194 A GB7831194 A GB 7831194A GB 7831194 A GB7831194 A GB 7831194A GB 2002547 A GB2002547 A GB 2002547A
Authority
GB
United Kingdom
Prior art keywords
astigmatism
derivatives
stigmator
coils
investigation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB7831194A
Other versions
GB2002547B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TEE W
Original Assignee
TEE W
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TEE W filed Critical TEE W
Priority to GB7831194A priority Critical patent/GB2002547B/en
Publication of GB2002547A publication Critical patent/GB2002547A/en
Application granted granted Critical
Publication of GB2002547B publication Critical patent/GB2002547B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

Astigmatism in a scanning electron microscope (10) is detected by comparing the directional derivatives of intensity for corresponding points in two frames with lens settings above and below focus; by taking the difference between the derivatives for each direction of measurement to eliminate the effect of structural directional features; by summing the differences for all directions to obtain a value (S) which represents the magnitude of astigmatism. The required orientation of the stigmator field can be calculated and the excitation current scanned through a range of values to determine the setting for which S is a minimum. Supplies for the objective lens (14) scanning coils (16) and stigmator coils (18) are arranged for digital control by a small computer (30) which receives a digitised input from an imaging electron collector (22). For a specimen of suitable structure the computer can be programmed for automatic focusing and astigmatism correction or the operator can intervene to apply a manual correction. <IMAGE>
GB7831194A 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments Expired GB2002547B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7831194A GB2002547B (en) 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB3208477 1977-07-30
GB7831194A GB2002547B (en) 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments

Publications (2)

Publication Number Publication Date
GB2002547A true GB2002547A (en) 1979-02-21
GB2002547B GB2002547B (en) 1982-01-20

Family

ID=26261206

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7831194A Expired GB2002547B (en) 1977-07-30 1978-07-26 Investigation of astigmatism in electron beam probe instruments

Country Status (1)

Country Link
GB (1) GB2002547B (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123582A (en) * 1982-06-18 1984-02-01 Nat Res Dev Correction of astigmatism in electron beam instruments
EP0100634A2 (en) * 1982-07-22 1984-02-15 Tadao Suganuma Method and apparatus for handling a charged particle beam
EP0148784A2 (en) * 1984-01-10 1985-07-17 Fujitsu Limited Calibration of electron beam apparatus
GB2157852A (en) * 1984-04-18 1985-10-30 Smith Kenneth C A The compensation of instabilities in charged-particle beams
US4567369A (en) * 1982-06-18 1986-01-28 National Research Development Corporation Correction of astigmatism in electron beam instruments
EP0419287A2 (en) * 1989-09-21 1991-03-27 Kabushiki Kaisha Toshiba Method of correcting astigmatism of variable shaped beam
WO2000011702A1 (en) * 1998-08-24 2000-03-02 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
CN111477529A (en) * 2020-05-19 2020-07-31 桂林狮达技术股份有限公司 Automatic astigmatism eliminating electron gun and automatic astigmatism eliminating method for electron gun

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123582A (en) * 1982-06-18 1984-02-01 Nat Res Dev Correction of astigmatism in electron beam instruments
US4567369A (en) * 1982-06-18 1986-01-28 National Research Development Corporation Correction of astigmatism in electron beam instruments
EP0100634A2 (en) * 1982-07-22 1984-02-15 Tadao Suganuma Method and apparatus for handling a charged particle beam
EP0100634A3 (en) * 1982-07-22 1985-04-03 Tadao Suganuma Method and apparatus for handling a charged particle beam
EP0148784A2 (en) * 1984-01-10 1985-07-17 Fujitsu Limited Calibration of electron beam apparatus
EP0148784A3 (en) * 1984-01-10 1987-04-08 Fujitsu Limited Calibration of electron beam apparatus
US4763004A (en) * 1984-01-10 1988-08-09 Fujitsu Limited Calibration method for electron beam exposer
GB2157852A (en) * 1984-04-18 1985-10-30 Smith Kenneth C A The compensation of instabilities in charged-particle beams
EP0419287A2 (en) * 1989-09-21 1991-03-27 Kabushiki Kaisha Toshiba Method of correcting astigmatism of variable shaped beam
EP0419287A3 (en) * 1989-09-21 1992-01-02 Kabushiki Kaisha Toshiba Method of correcting astigmatism of variable shaped beam
US6184524B1 (en) 1996-08-07 2001-02-06 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
WO2000011702A1 (en) * 1998-08-24 2000-03-02 Gatan, Inc. Automated set up of an energy filtering transmission electron microscope
JP2002523869A (en) * 1998-08-24 2002-07-30 ガタン・インコーポレーテッド Automatic setting of energy filtering transmission electron microscope
CN111477529A (en) * 2020-05-19 2020-07-31 桂林狮达技术股份有限公司 Automatic astigmatism eliminating electron gun and automatic astigmatism eliminating method for electron gun
EP3951828A4 (en) * 2020-05-19 2023-06-21 Guilin THD Technology Co., Ltd Automatic astigmatism elimination electronic gun, and automatic astigmatism elimination method of electronic gun
CN111477529B (en) * 2020-05-19 2024-05-14 桂林狮达技术股份有限公司 Automatic astigmatism eliminating electron gun and method for automatically eliminating astigmatism of electron gun

Also Published As

Publication number Publication date
GB2002547B (en) 1982-01-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee