DE69917849T2 - Tintenstrahlaufzeichnungskopf und diesen enthaltendes Tintenstrahlaufzeichnungsgerät - Google Patents

Tintenstrahlaufzeichnungskopf und diesen enthaltendes Tintenstrahlaufzeichnungsgerät Download PDF

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Publication number
DE69917849T2
DE69917849T2 DE69917849T DE69917849T DE69917849T2 DE 69917849 T2 DE69917849 T2 DE 69917849T2 DE 69917849 T DE69917849 T DE 69917849T DE 69917849 T DE69917849 T DE 69917849T DE 69917849 T2 DE69917849 T2 DE 69917849T2
Authority
DE
Germany
Prior art keywords
ink jet
jet recording
piezoelectric elements
face
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69917849T
Other languages
English (en)
Other versions
DE69917849D1 (de
Inventor
Yoshinao Miyata
Shinri Sakai
Yutaka Furuhata
Tsutomu Hashizume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69917849D1 publication Critical patent/DE69917849D1/de
Application granted granted Critical
Publication of DE69917849T2 publication Critical patent/DE69917849T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
DE69917849T 1998-08-21 1999-08-18 Tintenstrahlaufzeichnungskopf und diesen enthaltendes Tintenstrahlaufzeichnungsgerät Expired - Lifetime DE69917849T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP23524998 1998-08-21
JP23982598 1998-08-26
JP29977998 1998-10-21
JP3459299 1999-02-12
JP22206299A JP3422364B2 (ja) 1998-08-21 1999-08-05 インクジェット式記録ヘッド及びインクジェット式記録装置

Publications (2)

Publication Number Publication Date
DE69917849D1 DE69917849D1 (de) 2004-07-15
DE69917849T2 true DE69917849T2 (de) 2004-10-07

Family

ID=27521622

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69917849T Expired - Lifetime DE69917849T2 (de) 1998-08-21 1999-08-18 Tintenstrahlaufzeichnungskopf und diesen enthaltendes Tintenstrahlaufzeichnungsgerät
DE69925318T Expired - Lifetime DE69925318T2 (de) 1998-08-21 1999-08-18 Tintenstrahlaufzeichnungskopf und diesen enthaltendes Tintenstrahlaufzeichnungsgerät

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69925318T Expired - Lifetime DE69925318T2 (de) 1998-08-21 1999-08-18 Tintenstrahlaufzeichnungskopf und diesen enthaltendes Tintenstrahlaufzeichnungsgerät

Country Status (4)

Country Link
EP (2) EP1277583B1 (de)
JP (1) JP3422364B2 (de)
AT (2) ATE268693T1 (de)
DE (2) DE69917849T2 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001353871A (ja) 2000-04-12 2001-12-25 Seiko Epson Corp インクジェット式記録ヘッド
JP2003053966A (ja) 2000-06-12 2003-02-26 Seiko Epson Corp インクジェット式記録ヘッド
JP2002316417A (ja) * 2001-02-19 2002-10-29 Seiko Epson Corp インクジェット式記録ヘッド及びインクジェット式記録装置
JP2003159800A (ja) * 2001-09-13 2003-06-03 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP2003080705A (ja) * 2001-09-13 2003-03-19 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
JP4585721B2 (ja) * 2001-09-13 2010-11-24 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
US7618130B2 (en) 2003-05-06 2009-11-17 Seiko Epson Corporation Liquid jet head and liquid jet apparatus
JP4484821B2 (ja) * 2003-05-06 2010-06-16 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP4492051B2 (ja) * 2003-07-17 2010-06-30 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP3952048B2 (ja) * 2003-09-29 2007-08-01 ブラザー工業株式会社 液体移送装置及び液体移送装置の製造方法
US7229152B2 (en) 2003-10-31 2007-06-12 Hewlett-Packard Development Company, L.P. Fluid ejection device with insulating feature
JP4492520B2 (ja) 2005-01-26 2010-06-30 セイコーエプソン株式会社 液滴吐出ヘッドおよび液滴吐出装置。
JP5023488B2 (ja) 2005-03-09 2012-09-12 セイコーエプソン株式会社 デバイス実装構造とデバイス実装方法、液滴吐出ヘッド及び駆動ユニット並びに半導体装置
JP2007045129A (ja) * 2005-08-12 2007-02-22 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置
JP4779636B2 (ja) * 2005-12-20 2011-09-28 セイコーエプソン株式会社 液滴吐出ヘッド及び液滴吐出装置
US7806521B2 (en) 2006-08-01 2010-10-05 Brother Kogyo Kabushiki Kaisha Liquid transport apparatus and method for producing liquid transport apparatus
KR100818282B1 (ko) 2006-10-26 2008-04-01 삼성전자주식회사 잉크젯 프린트헤드
JP5067946B2 (ja) * 2008-09-02 2012-11-07 富士フイルム株式会社 液体吐出ヘッド及び液体吐出ヘッドの製造方法
DE102009028909A1 (de) 2009-08-26 2011-03-17 Nanoplus Gmbh Nanosystems And Technologies Halbleiterlaser mit auf einem Laserspiegel angebrachtem Absorber
KR20120012160A (ko) * 2010-07-30 2012-02-09 삼성전기주식회사 잉크젯 헤드 어셈블리 및 그 제조방법
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
JP6024171B2 (ja) * 2012-04-13 2016-11-09 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター
JP6168385B2 (ja) * 2013-01-23 2017-07-26 株式会社リコー 粒子製造装置及び粒子製造方法
JP6029497B2 (ja) * 2013-03-12 2016-11-24 エスアイアイ・プリンテック株式会社 液体噴射ヘッド及び液体噴射装置
JP6061088B2 (ja) 2013-03-28 2017-01-18 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP2015033799A (ja) * 2013-08-09 2015-02-19 セイコーエプソン株式会社 液体噴射ヘッド、および、液体噴射装置
JP6201584B2 (ja) 2013-09-30 2017-09-27 ブラザー工業株式会社 液滴噴射装置及び液滴噴射装置の製造方法
JP6307890B2 (ja) * 2014-01-17 2018-04-11 セイコーエプソン株式会社 流路ユニット、液体噴射ヘッド、液体噴射装置
JP6337637B2 (ja) * 2014-06-18 2018-06-06 株式会社リコー 液体吐出ヘッド及び画像形成装置
JP6493676B2 (ja) * 2015-06-05 2019-04-03 セイコーエプソン株式会社 液体噴射装置及び液体噴射方法
JP6648459B2 (ja) * 2015-09-25 2020-02-14 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
JP7013124B2 (ja) * 2016-01-08 2022-01-31 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6859600B2 (ja) * 2016-03-28 2021-04-14 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射ヘッドユニット、液体噴射装置及び液体噴射ヘッドユニットの製造方法
JP6443774B2 (ja) * 2017-07-03 2018-12-26 株式会社リコー 粒子製造方法
JP7106828B2 (ja) * 2017-09-13 2022-07-27 セイコーエプソン株式会社 液体噴射ヘッド、液体噴射装置、圧電デバイス、及び、液体噴射ヘッドの製造方法
JP6409944B2 (ja) * 2017-11-20 2018-10-24 セイコーエプソン株式会社 液体噴射ヘッドおよび液体噴射装置
JP7224782B2 (ja) * 2018-05-30 2023-02-20 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP7237480B2 (ja) * 2018-06-29 2023-03-13 キヤノン株式会社 液体吐出ヘッドおよびその製造方法
JP7388028B2 (ja) 2019-07-26 2023-11-29 ブラザー工業株式会社 液体吐出ヘッド

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03243357A (ja) * 1990-02-20 1991-10-30 Sharp Corp インクジェット記録ヘッド
JPH05286131A (ja) * 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JPH07329292A (ja) * 1994-04-13 1995-12-19 Seiko Epson Corp インクジェット式記録ヘッド
JP3196811B2 (ja) * 1994-10-17 2001-08-06 セイコーエプソン株式会社 積層型インクジェット式記録ヘッド、及びその製造方法
EP0974466B1 (de) * 1995-04-19 2003-03-26 Seiko Epson Corporation Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
EP0985535A3 (de) 2001-08-29
DE69925318T2 (de) 2005-10-06
JP2000296616A (ja) 2000-10-24
ATE268693T1 (de) 2004-06-15
EP0985535B1 (de) 2004-06-09
DE69917849D1 (de) 2004-07-15
ATE295265T1 (de) 2005-05-15
EP0985535A2 (de) 2000-03-15
EP1277583A2 (de) 2003-01-22
EP1277583B1 (de) 2005-05-11
DE69925318D1 (de) 2005-06-16
JP3422364B2 (ja) 2003-06-30
EP1277583A3 (de) 2003-03-05

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