JP4484821B2 - 液体噴射ヘッド及び液体噴射装置 - Google Patents
液体噴射ヘッド及び液体噴射装置 Download PDFInfo
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- JP4484821B2 JP4484821B2 JP2005506017A JP2005506017A JP4484821B2 JP 4484821 B2 JP4484821 B2 JP 4484821B2 JP 2005506017 A JP2005506017 A JP 2005506017A JP 2005506017 A JP2005506017 A JP 2005506017A JP 4484821 B2 JP4484821 B2 JP 4484821B2
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Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
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- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
かかる第1の態様では、各液体供給路とリザーバとの間のそれぞれに連通路を個別に設けることで、クロストークの発生が防止され、安定した液体吐出特性が得られる。
かかる第2の態様では、所望の液体供給特性を確保できる。
かかる第3の態様では、所定の大きさの連通路とすることで、所望の液体供給特性を確保できる。
かかる第4の態様では、液体吐出特性が実質的に安定し且つ信頼性を向上した液体噴射装置を実現することができる。
(実施形態1)
図1は、実施形態1に係るインクジェット式記録ヘッドの分解斜視図であり、図2は、図1の概略平面図及びそのA−A’断面図である。図示するように、流路形成基板10は、本実施形態では面方位(110)のシリコン単結晶基板からなり、その両面には予め熱酸化により形成した二酸化シリコンからなる弾性膜50、及び後述する圧力発生室を形成する際にマスクとして用いられるマスクパターン51が設けられている。
ここで、連通路を設けたヘッド(実施例)と、連通路を設けずインク供給路とリザーバとの間に各圧力発生室の並設方向に亘って流路形成基板のみで構成される空間を設けたヘッド(比較例)とを用意し、両者のクロストーク率(%)を比較する試験を行った。具体的には、基準となる一つのノズル(基準ノズル)を決め、この基準ノズルのみからインクを吐出させた時の吐出速度を基準値「0」(ゼロ)とし、基準ノズルとその両側のノズルから同時にインクを吐出させた時に基準ノズルから吐出されるインク滴の吐出速度を測定した。そして、同時にインク吐出させるノズル数を2つずつ増加させながら、基準ノズルにおける吐出速度の推移(変化率)を調べた。その結果を図5に示す。なお、図5では、基準ノズルにおける吐出速度の変化率をクロストーク率(%)として示す。
以上、本発明の実施形態について説明したが、勿論、本発明は上述の実施形態に限定されるものではない。例えば、上述した実施形態では、流路を幅方向に絞ることでインク供給路14を形成したが、これに限定されず、流路形成基板の厚さ方向に流路を絞ることでインク供給路を形成してもよい。なお、この場合には、インク供給路は、例えば、流路形成基板を厚さ方向に異方性エッチング(ハーフエッチング)することにより形成される。
Claims (4)
- ノズル開口に連通する複数の圧力発生室が並設された流路形成基板と、
前記流路形成基板に振動板を介して設けられた下電極、圧電体層及び上電極を含む圧電素子と、
前記流路形成基板の前記圧電素子側に接合されて、各前記圧力発生室の共通の液体室であるリザーバの一部を構成するリザーバ部が設けられたリザーバ形成基板と、を具備する液体噴射ヘッドであって、
前記リザーバが前記リザーバ部と前記流路形成基板に設けられた連通部とから構成され、
前記圧力発生室の幅方向の両側の隔壁が前記リザーバ部の前記圧力発生室側の壁面近傍に延設されることで、前記圧力発生室に連通して前記圧力発生室の幅より小さい幅を有する液体供給路と、前記液体供給路と前記連通部とを連通して前記液体供給路の幅より大きい幅を有する連通路と、が前記隔壁により前記圧力発生室毎に区画して設けられ、
前記連通路の隔壁の前記リザーバ形成基板側に最も近く且つ前記リザーバ部側に最も突出した端部は、前記リザーバ部の前記圧力発生室側の壁面から距離Sだけ外側に離れて位置し、前記連通路の長さは前記距離Sよりも長いことを特徴とする液体噴射ヘッド。 - 前記連通路の幅w1と前記圧力発生室の幅w2との関係がw1≧w2を満たすことを特徴とする請求項1に記載の液体噴射ヘッド。
- 前記連通路の幅w1と前記液体供給路の幅w3との関係がw1≧2×w3を満たすことを特徴とする請求項1又は2に記載の液体噴射ヘッド。
- 請求項1〜3の何れかに記載の液体噴射ヘッドを具備することを特徴とする液体噴射装置。
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003128258 | 2003-05-06 | ||
JP2003128258 | 2003-05-06 | ||
JP2003358331 | 2003-10-17 | ||
JP2003358331 | 2003-10-17 | ||
JP2004074396 | 2004-03-16 | ||
JP2004074396 | 2004-03-16 | ||
PCT/JP2004/006332 WO2004098894A1 (ja) | 2003-05-06 | 2004-04-30 | 液体噴射ヘッド及び液体噴射装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2004098894A1 JPWO2004098894A1 (ja) | 2006-07-13 |
JP4484821B2 true JP4484821B2 (ja) | 2010-06-16 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005506017A Expired - Lifetime JP4484821B2 (ja) | 2003-05-06 | 2004-04-30 | 液体噴射ヘッド及び液体噴射装置 |
Country Status (2)
Country | Link |
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JP (1) | JP4484821B2 (ja) |
WO (1) | WO2004098894A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4662027B2 (ja) * | 2004-12-22 | 2011-03-30 | ブラザー工業株式会社 | インクジェットヘッド及びその製造方法 |
JP4821982B2 (ja) * | 2006-03-29 | 2011-11-24 | セイコーエプソン株式会社 | 液体噴射ヘッドの製造方法 |
JP7512721B2 (ja) | 2020-07-07 | 2024-07-09 | コニカミノルタ株式会社 | インクジェットヘッドの製造方法、インクジェットヘッド及びインクジェット記録装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2711870B2 (ja) * | 1988-11-01 | 1998-02-10 | 株式会社トーキン | 積層型圧電アクチュエータ |
JPH09262980A (ja) * | 1996-03-29 | 1997-10-07 | Citizen Watch Co Ltd | インクジェットヘッド |
JP3422364B2 (ja) * | 1998-08-21 | 2003-06-30 | セイコーエプソン株式会社 | インクジェット式記録ヘッド及びインクジェット式記録装置 |
-
2004
- 2004-04-30 WO PCT/JP2004/006332 patent/WO2004098894A1/ja active Application Filing
- 2004-04-30 JP JP2005506017A patent/JP4484821B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPWO2004098894A1 (ja) | 2006-07-13 |
WO2004098894A1 (ja) | 2004-11-18 |
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