DE69832010D1 - Prüfspitze für Halbleiterschaltungen und Verfahren zu ihrer Herstellung - Google Patents

Prüfspitze für Halbleiterschaltungen und Verfahren zu ihrer Herstellung

Info

Publication number
DE69832010D1
DE69832010D1 DE69832010T DE69832010T DE69832010D1 DE 69832010 D1 DE69832010 D1 DE 69832010D1 DE 69832010 T DE69832010 T DE 69832010T DE 69832010 T DE69832010 T DE 69832010T DE 69832010 D1 DE69832010 D1 DE 69832010D1
Authority
DE
Germany
Prior art keywords
probe
manufacture
semiconductor circuits
circuits
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69832010T
Other languages
English (en)
Other versions
DE69832010T2 (de
Inventor
Shigeki Maekawa
Mogumi Takemoto
Kazunobu Miki
Mutsumi Kano
Takahiro Nagata
Yoshihiro Kashiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP03843098A external-priority patent/JP3279246B2/ja
Priority claimed from JP03842998A external-priority patent/JP3238659B2/ja
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of DE69832010D1 publication Critical patent/DE69832010D1/de
Publication of DE69832010T2 publication Critical patent/DE69832010T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755—Material aspects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
DE69832010T 1997-07-24 1998-07-23 Prüfspitze für Halbleiterschaltungen und Verfahren zu ihrer Herstellung Expired - Lifetime DE69832010T2 (de)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP19853497 1997-07-24
JP19853497 1997-07-24
JP24849397 1997-09-12
JP24849397 1997-09-12
JP03843098A JP3279246B2 (ja) 1997-09-12 1998-02-20 半導体装置のテスト用プローブ針とその製造方法、このプローブ針を用いたプローブ装置、このプローブ針による半導体装置のテスト方法、およびこのプローブ針によりテストされた半導体装置
JP3842998 1998-02-20
JP3843098 1998-02-20
JP03842998A JP3238659B2 (ja) 1997-07-24 1998-02-20 プローブ先端付着異物の除去部材および除去部材の製造方法

Publications (2)

Publication Number Publication Date
DE69832010D1 true DE69832010D1 (de) 2005-12-01
DE69832010T2 DE69832010T2 (de) 2006-07-13

Family

ID=27460602

Family Applications (3)

Application Number Title Priority Date Filing Date
DE69832110T Expired - Lifetime DE69832110T2 (de) 1997-07-24 1998-07-23 Herstellungsverfahren für eine Prüfnadel für Halbleitergeräte
DE69837690T Expired - Lifetime DE69837690T2 (de) 1997-07-24 1998-07-23 Gerät zur Entfernung von an einer Prüfspitzenendfläche haftenden Fremdstoffen
DE69832010T Expired - Lifetime DE69832010T2 (de) 1997-07-24 1998-07-23 Prüfspitze für Halbleiterschaltungen und Verfahren zu ihrer Herstellung

Family Applications Before (2)

Application Number Title Priority Date Filing Date
DE69832110T Expired - Lifetime DE69832110T2 (de) 1997-07-24 1998-07-23 Herstellungsverfahren für eine Prüfnadel für Halbleitergeräte
DE69837690T Expired - Lifetime DE69837690T2 (de) 1997-07-24 1998-07-23 Gerät zur Entfernung von an einer Prüfspitzenendfläche haftenden Fremdstoffen

Country Status (6)

Country Link
US (2) US6646455B2 (de)
EP (3) EP1621893B1 (de)
KR (1) KR100276422B1 (de)
CN (1) CN1166957C (de)
DE (3) DE69832110T2 (de)
TW (1) TW373074B (de)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3279294B2 (ja) * 1998-08-31 2002-04-30 三菱電機株式会社 半導体装置のテスト方法、半導体装置のテスト用プローブ針とその製造方法およびそのプローブ針を備えたプローブカード
US6777966B1 (en) * 1999-07-30 2004-08-17 International Test Solutions, Inc. Cleaning system, device and method
DE60029483T2 (de) * 1999-10-19 2007-02-15 Solid State Measurements, Inc. Nicht-invasive elektrische messung von halbleiterscheiben
JP2001356134A (ja) 2000-04-13 2001-12-26 Innotech Corp プローブカード装置およびそれに用いられるプローブ
JP2002131334A (ja) * 2000-10-24 2002-05-09 Nec Yamaguchi Ltd プローブ針、プローブカード、及びプローブカードの作製方法
KR20040069259A (ko) * 2001-12-25 2004-08-05 스미토모덴키고교가부시키가이샤 컨택트 프로브
US6612161B1 (en) * 2002-07-23 2003-09-02 Fidelica Microsystems, Inc. Atomic force microscopy measurements of contact resistance and current-dependent stiction
JP2005030790A (ja) * 2003-07-08 2005-02-03 Renesas Technology Corp プローブカード
JP4723195B2 (ja) * 2004-03-05 2011-07-13 株式会社オクテック プローブの製造方法
US7759949B2 (en) * 2004-05-21 2010-07-20 Microprobe, Inc. Probes with self-cleaning blunt skates for contacting conductive pads
US9476911B2 (en) 2004-05-21 2016-10-25 Microprobe, Inc. Probes with high current carrying capability and laser machining methods
US8988091B2 (en) 2004-05-21 2015-03-24 Microprobe, Inc. Multiple contact probes
USRE43503E1 (en) 2006-06-29 2012-07-10 Microprobe, Inc. Probe skates for electrical testing of convex pad topologies
US7659739B2 (en) 2006-09-14 2010-02-09 Micro Porbe, Inc. Knee probe having reduced thickness section for control of scrub motion
US9097740B2 (en) 2004-05-21 2015-08-04 Formfactor, Inc. Layered probes with core
US9833818B2 (en) 2004-09-28 2017-12-05 International Test Solutions, Inc. Working surface cleaning system and method
US20060158208A1 (en) * 2005-01-14 2006-07-20 Applied Materials, Inc. Prober tester
CN101826496B (zh) * 2005-05-23 2015-03-18 揖斐电株式会社 印刷线路板及其制造方法
US7649367B2 (en) 2005-12-07 2010-01-19 Microprobe, Inc. Low profile probe having improved mechanical scrub and reduced contact inductance
US7312617B2 (en) 2006-03-20 2007-12-25 Microprobe, Inc. Space transformers employing wire bonds for interconnections with fine pitch contacts
US20080000499A1 (en) * 2006-06-30 2008-01-03 Delta Design, Inc. System and method for cleaning a contactor device
US20100148813A1 (en) * 2006-07-18 2010-06-17 Multiprobe, Inc. Apparatus and method for combined micro-scale and nano-scale c-v, q-v, and i-v testing of semiconductor materials
US8014760B2 (en) 2006-09-06 2011-09-06 Apple Inc. Missed telephone call management for a portable multifunction device
CN101158700B (zh) * 2006-10-08 2011-09-28 上海华虹Nec电子有限公司 探针卡
US8907689B2 (en) 2006-10-11 2014-12-09 Microprobe, Inc. Probe retention arrangement
US7786740B2 (en) 2006-10-11 2010-08-31 Astria Semiconductor Holdings, Inc. Probe cards employing probes having retaining portions for potting in a potting region
KR101092389B1 (ko) * 2007-04-03 2011-12-09 가부시키가이샤 아드반테스트 콘택터의 제조방법
US7514948B2 (en) 2007-04-10 2009-04-07 Microprobe, Inc. Vertical probe array arranged to provide space transformation
JP4313827B2 (ja) * 2007-05-25 2009-08-12 東光株式会社 球状外部電極を有する半導体装置の検査方法
US7983789B2 (en) 2007-09-14 2011-07-19 Seagate Technology Llc Collecting debris from a tool
US8723546B2 (en) 2007-10-19 2014-05-13 Microprobe, Inc. Vertical guided layered probe
EP2240087B1 (de) * 2008-01-10 2019-07-24 Ethicon, Inc. Nähnadeln aus einer wolfram-legierung
JP5498173B2 (ja) 2008-02-06 2014-05-21 株式会社東芝 プローブ針およびその製造方法
US8230593B2 (en) 2008-05-29 2012-07-31 Microprobe, Inc. Probe bonding method having improved control of bonding material
US8371316B2 (en) 2009-12-03 2013-02-12 International Test Solutions, Inc. Apparatuses, device, and methods for cleaning tester interface contact elements and support hardware
US8484795B2 (en) 2010-08-11 2013-07-16 Seagate Technology Llc Collecting debris from a tool
EP2524648B1 (de) * 2011-05-20 2016-05-04 Imec Verfahren zur schärfung von mikrosondenspitzen
JP2013101043A (ja) * 2011-11-08 2013-05-23 Renesas Electronics Corp 半導体装置の製造方法
JP5452640B2 (ja) * 2012-02-07 2014-03-26 シャープ株式会社 半導体試験装置
JP5789634B2 (ja) * 2012-05-14 2015-10-07 株式会社荏原製作所 ワークピースを研磨するための研磨パッド並びに化学機械研磨装置、および該化学機械研磨装置を用いてワークピースを研磨する方法
CN104251935B (zh) * 2013-06-26 2018-03-06 中芯国际集成电路制造(上海)有限公司 测量晶圆电阻率的装置及方法
DE102013010934A1 (de) * 2013-06-29 2015-01-15 Feinmetall Gmbh Prüfvorrichtung zur elektrischen Prüfung eines elektrischen Prüflings
JP6525620B2 (ja) * 2015-02-05 2019-06-05 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
CN105092908B (zh) * 2015-06-04 2017-11-14 合肥京东方光电科技有限公司 一种测试探针和测试装置
JP6407128B2 (ja) 2015-11-18 2018-10-17 三菱電機株式会社 半導体装置の評価装置および半導体装置の評価方法
US9935024B2 (en) * 2016-04-28 2018-04-03 Taiwan Semiconductor Manufacturing Co., Ltd. Method for forming semiconductor structure
US9825000B1 (en) 2017-04-24 2017-11-21 International Test Solutions, Inc. Semiconductor wire bonding machine cleaning device and method
WO2019165305A1 (en) 2018-02-23 2019-08-29 International Test Solutions, Inc. Novel material and hardware to automatically clean flexible electronic web rolls
US10792713B1 (en) 2019-07-02 2020-10-06 International Test Solutions, Inc. Pick and place machine cleaning system and method
US11756811B2 (en) 2019-07-02 2023-09-12 International Test Solutions, Llc Pick and place machine cleaning system and method
US11318550B2 (en) 2019-11-14 2022-05-03 International Test Solutions, Llc System and method for cleaning wire bonding machines using functionalized surface microfeatures
US11211242B2 (en) 2019-11-14 2021-12-28 International Test Solutions, Llc System and method for cleaning contact elements and support hardware using functionalized surface microfeatures
US11035898B1 (en) 2020-05-11 2021-06-15 International Test Solutions, Inc. Device and method for thermal stabilization of probe elements using a heat conducting wafer
JP2022013347A (ja) * 2020-07-03 2022-01-18 富士電機株式会社 半導体チップの試験装置および試験方法
CN114414862B (zh) * 2020-11-28 2023-03-14 法特迪精密科技（苏州）有限公司 测试探针清洁方法的粘性吸附方法
CN113009324B (zh) * 2021-05-24 2021-08-03 中国电子科技集团公司第二十九研究所 一种曲面多探针测试治具
KR102409029B1 (ko) * 2022-04-12 2022-06-14 이시훈 프로브 핀

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3607607A (en) * 1968-05-27 1971-09-21 Coors Porcelain Co Organic resin ceramic composite and method for making same
US3628144A (en) * 1969-01-15 1971-12-14 Ibm Electrical contact cleaning device
US3676776A (en) * 1970-01-19 1972-07-11 Siemens Ag Testing probe construction
US3882597A (en) * 1971-12-17 1975-05-13 Western Electric Co Method for making a test probe for semiconductor devices
DE3141590C2 (de) * 1980-10-20 1985-01-03 Kobe Steel, Ltd., Kobe, Hyogo Verfahren zur Herstellung von hochdichtem gesintertem Siliziumnitrid
JPS57155331A (en) * 1981-03-19 1982-09-25 Toshiba Corp Production of tungsten wire
US4590422A (en) * 1981-07-30 1986-05-20 Pacific Western Systems, Inc. Automatic wafer prober having a probe scrub routine
US4481467A (en) * 1981-07-30 1984-11-06 At&T Technologies, Inc. Break-away test probe
CH669138A5 (de) * 1982-11-22 1989-02-28 Schweizer Schmirgel Schleif Schleifmittel auf dehnbarer und flexibler unterlage.
US4547923A (en) * 1984-03-15 1985-10-22 Dlp Inc. Surgical knife cleaner
JPS63128264A (ja) 1986-11-18 1988-05-31 Nec Corp プロ−ブ　カ−ド
JPS63148646A (ja) * 1986-12-12 1988-06-21 Toshiba Corp 半導体装置
JPH0254814A (ja) * 1988-08-17 1990-02-23 Sharp Corp コンタクトピン
US5486279A (en) * 1989-10-17 1996-01-23 Robert Bosch Gmbh Electrochemical measuring probe
US5090118A (en) * 1990-07-31 1992-02-25 Texas Instruments Incorporated High performance test head and method of making
US5225037A (en) * 1991-06-04 1993-07-06 Texas Instruments Incorporated Method for fabrication of probe card for testing of semiconductor devices
JPH04364746A (ja) * 1991-06-12 1992-12-17 Tokyo Electron Yamanashi Kk プローブ装置
JP3121400B2 (ja) * 1991-11-21 2000-12-25 日本タングステン株式会社 タングステン焼結体の製造方法
JPH05273237A (ja) 1992-03-26 1993-10-22 Tokyo Electron Yamanashi Kk プローブカード
JPH0618560A (ja) 1992-07-06 1994-01-25 Hitachi Ltd プローブカード
JPH06291167A (ja) 1993-04-01 1994-10-18 Hitachi Ltd プローブカード
JPH06289056A (ja) 1993-04-02 1994-10-18 Kobe Steel Ltd プローブユニット
JPH0726772A (ja) 1993-07-09 1995-01-27 Ishikawajima Harima Heavy Ind Co Ltd 中間乗込型エレベータ方式駐車装置
JPH0752019A (ja) * 1993-08-10 1995-02-28 Fuji Photo Film Co Ltd 研磨テープを用いた清浄方法
US5500607A (en) * 1993-12-22 1996-03-19 International Business Machines Corporation Probe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor wafer
JP2511806B2 (ja) * 1994-03-03 1996-07-03 日本電子材料株式会社 プロ―ブ先端クリ―ニング部材
JPH0850144A (ja) 1994-08-08 1996-02-20 N Pii S Kk 電極探針
JPH08166407A (ja) 1994-10-14 1996-06-25 Kobe Steel Ltd 半導体素子チェック用プローブカード
EP0766829B1 (de) * 1995-04-19 2002-11-27 Koninklijke Philips Electronics N.V. Verfahren zum reinigen von nadelkartenprüfspitzen
JPH08292209A (ja) 1995-04-24 1996-11-05 Nippon Denshi Zairyo Kk プローブカード、それに用いられるプローブ及びプローブの製造方法
AU6406696A (en) * 1996-01-24 1997-08-20 Intel Corporation Improved method and apparatus for scrubbing the bond pads of an integrated circuit during wafer sort
US5763879A (en) * 1996-09-16 1998-06-09 Pacific Western Systems Diamond probe tip
US6118289A (en) * 1997-03-10 2000-09-12 Canon Kabushiki Kaisha Cleaning method and cleaning device and cleaning tool for board electrical-test probes, and board electrical-test device and method
TW377482B (en) * 1997-04-08 1999-12-21 Tokyo Electron Ltd Cleaner with protuberances for inspection, inspection apparatus and inspection method for integrated circuits
JPH1187438A (ja) * 1997-09-03 1999-03-30 Mitsubishi Electric Corp プローブ先端のクリーニング部材ならびにクリーニング方法、および半導体ウェーハのテスト方法
JP3429995B2 (ja) * 1997-11-10 2003-07-28 東京エレクトロン株式会社 クリーニング方法
JP3279294B2 (ja) 1998-08-31 2002-04-30 三菱電機株式会社 半導体装置のテスト方法、半導体装置のテスト用プローブ針とその製造方法およびそのプローブ針を備えたプローブカード

Also Published As

Publication number Publication date
DE69832010T2 (de) 2006-07-13
EP1621893B1 (de) 2007-04-25
KR100276422B1 (ko) 2001-01-15
US20030090280A1 (en) 2003-05-15
EP0893695B1 (de) 2005-10-26
DE69832110D1 (de) 2005-12-01
US20020097060A1 (en) 2002-07-25
EP0893695A3 (de) 2000-12-06
DE69832110T2 (de) 2006-07-20
EP0893695A2 (de) 1999-01-27
KR19990014174A (ko) 1999-02-25
DE69837690D1 (de) 2007-06-06
US6888344B2 (en) 2005-05-03
TW373074B (en) 1999-11-01
EP1351060A2 (de) 2003-10-08
EP1351060A3 (de) 2004-02-04
CN1213083A (zh) 1999-04-07
EP1621893A1 (de) 2006-02-01
CN1166957C (zh) 2004-09-15
EP1351060B1 (de) 2005-10-26
DE69837690T2 (de) 2007-12-27
US6646455B2 (en) 2003-11-11

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