US5763879A - Diamond probe tip - Google Patents
Diamond probe tip Download PDFInfo
- Publication number
- US5763879A US5763879A US08/714,606 US71460696A US5763879A US 5763879 A US5763879 A US 5763879A US 71460696 A US71460696 A US 71460696A US 5763879 A US5763879 A US 5763879A
- Authority
- US
- United States
- Prior art keywords
- probe
- tip
- card
- wire
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
- G01R1/06761—Material aspects related to layers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/714,606 US5763879A (en) | 1996-09-16 | 1996-09-16 | Diamond probe tip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/714,606 US5763879A (en) | 1996-09-16 | 1996-09-16 | Diamond probe tip |
Publications (1)
Publication Number | Publication Date |
---|---|
US5763879A true US5763879A (en) | 1998-06-09 |
Family
ID=24870741
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/714,606 Expired - Fee Related US5763879A (en) | 1996-09-16 | 1996-09-16 | Diamond probe tip |
Country Status (1)
Country | Link |
---|---|
US (1) | US5763879A (en) |
Cited By (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0893695A2 (en) * | 1997-07-24 | 1999-01-27 | Mitsubishi Denki Kabushiki Kaisha | Test probe for semiconductor devices and method of manufacturing of the same |
US6084420A (en) * | 1998-11-25 | 2000-07-04 | Chee; Wan Soo | Probe assembly for testing |
US6252226B1 (en) * | 1994-07-28 | 2001-06-26 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
US6339217B1 (en) * | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
US6364662B1 (en) | 1998-11-12 | 2002-04-02 | Nobel Biocare Ab | Diamond-like carbon coated dental instrument |
US6447295B1 (en) | 1999-04-15 | 2002-09-10 | Nobel Biocare Ab | Diamond-like carbon coated dental retaining screws |
US6507553B2 (en) | 1995-07-24 | 2003-01-14 | General Nanotechnology Llc | Nanometer scale data storage device and associated positioning system |
US6547562B2 (en) | 2000-05-11 | 2003-04-15 | Nobel Biocare Ab | Pseudo-etching of diamond-like carbon coated instruments |
US20030087096A1 (en) * | 2001-08-21 | 2003-05-08 | Kabushiki Kaisha Toshiba | Carbon film coated member |
DE10201491C1 (en) * | 2002-01-16 | 2003-08-28 | Gfd Ges Fuer Diamantprodukte M | Probe system and method for its production |
US20030210065A1 (en) * | 2002-05-09 | 2003-11-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip |
US6727719B2 (en) * | 2002-01-11 | 2004-04-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Piercer combined prober for CU interconnect water-level preliminary electrical test |
US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US20040118192A1 (en) * | 2002-09-09 | 2004-06-24 | General Nanotechnology Llc | Fluid delivery for scanning probe microscopy |
US6759858B2 (en) * | 1999-10-20 | 2004-07-06 | Intel Corporation | Integrated circuit test probe having ridge contact |
US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
US6802646B1 (en) | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
US6864481B2 (en) * | 2001-12-04 | 2005-03-08 | Sii Nanotechnology Inc. | Probe for scanning probe microscope |
US20050056783A1 (en) * | 1999-07-01 | 2005-03-17 | General Nanotechnology, Llc | Object inspection and/or modification system and method |
US20050115047A1 (en) * | 2001-01-30 | 2005-06-02 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
US20050172703A1 (en) * | 1994-07-28 | 2005-08-11 | General Nanotechnology Llc | Scanning probe microscopy inspection and modification system |
US20050190684A1 (en) * | 1995-07-24 | 2005-09-01 | General Nanotechnology Llc | Nanometer scale data storage device and associated positioning system |
US6974452B1 (en) | 2000-01-12 | 2005-12-13 | Clinicon Corporation | Cutting and cauterizing surgical tools |
US20060174384A1 (en) * | 2001-10-19 | 2006-08-03 | Rave Llc | Scan data collection for better overall data accurancy |
US7112974B1 (en) * | 2002-05-23 | 2006-09-26 | Cypress Semiconductor Corporation | Proble for testing integrated circuits |
US20080036479A1 (en) * | 2004-03-05 | 2008-02-14 | Katsuya Okumura | Probe and Method of Manufacturing Probe |
US20080110019A1 (en) * | 2004-03-26 | 2008-05-15 | Nulty James E | Probe card and method for constructing same |
US20080186036A1 (en) * | 2007-02-06 | 2008-08-07 | Brian Shumaker | High Speed Electrical Probe |
US20090223826A1 (en) * | 2008-03-04 | 2009-09-10 | Yong Hyup Kim | Manufacturing carbon nanotube ropes |
US20100040529A1 (en) * | 2008-08-14 | 2010-02-18 | Snu R&Db Foundation | Enhanced carbon nanotube |
US20100047568A1 (en) * | 2008-08-20 | 2010-02-25 | Snu R&Db Foundation | Enhanced carbon nanotube wire |
US20100055023A1 (en) * | 2008-08-26 | 2010-03-04 | Snu R&Db Foundation | Manufacturing carbon nanotube paper |
US20100055338A1 (en) * | 2008-08-26 | 2010-03-04 | Snu R&Db Foundation | Carbon nanotube structure |
US20100066402A1 (en) * | 2006-11-30 | 2010-03-18 | Japan Science And Technology Agency | Metallic probe, and method and apparatus for fabricating the same |
US20110055987A1 (en) * | 2009-08-26 | 2011-03-03 | Advanced Diamond Technologies, Inc. | Method to reduce wedge effects in molded trigonal tips |
US7947952B1 (en) | 2001-03-08 | 2011-05-24 | General Nanotechnology Llc | Nanomachining method and apparatus |
ITMI20100724A1 (en) * | 2010-04-28 | 2011-10-29 | Technoprobe Spa | METHOD FOR THE CLEANING OF A CONTACT PITCH OF A MICROSTRUCTURE AND RELATED SHUTTER CONTACT PROBE AND HEAD OF MEASURING PROBES [CANTILEVER]. |
US20120276826A1 (en) * | 2011-03-01 | 2012-11-01 | GFD Gesellschaft für Diamantprodukte mbH. | Cutting tool with blade made of fine-crystalline diamond |
US20130049784A1 (en) * | 2010-05-10 | 2013-02-28 | Kobelco Research Institute, Inc. | Contact probe |
US20150002181A1 (en) * | 2013-06-29 | 2015-01-01 | Keith J. Martin | Probe tip formation for die sort and test |
US20150145546A1 (en) * | 2013-11-22 | 2015-05-28 | Industrial Technology Research Institute | Coated probe and method of fabricating the same |
WO2015200724A1 (en) * | 2014-06-25 | 2015-12-30 | Dcg Systems, Inc. | Apparatus and method for nanoprobing of electronic devices |
WO2016205257A1 (en) * | 2015-06-15 | 2016-12-22 | Dcg Systems, Inc. | Diamond delayering for electrical probing |
US9891280B2 (en) | 2013-06-24 | 2018-02-13 | Fei Efa, Inc. | Probe-based data collection system with adaptive mode of probing controlled by local sample properties |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4943720A (en) * | 1988-08-03 | 1990-07-24 | Jones Barbara L | Electronic probe |
US5010249A (en) * | 1988-09-13 | 1991-04-23 | Seiko Instruments Inc. | Diamond probe and forming method thereof |
US5270543A (en) * | 1991-07-05 | 1993-12-14 | Drukker International B.V. | Electronic probe and method for its manufacture |
US5383354A (en) * | 1993-12-27 | 1995-01-24 | Motorola, Inc. | Process for measuring surface topography using atomic force microscopy |
US5585734A (en) * | 1990-07-09 | 1996-12-17 | Interuniversitair Micro Elektronica Centrum Vzw | Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope |
-
1996
- 1996-09-16 US US08/714,606 patent/US5763879A/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4943720A (en) * | 1988-08-03 | 1990-07-24 | Jones Barbara L | Electronic probe |
US5010249A (en) * | 1988-09-13 | 1991-04-23 | Seiko Instruments Inc. | Diamond probe and forming method thereof |
US5585734A (en) * | 1990-07-09 | 1996-12-17 | Interuniversitair Micro Elektronica Centrum Vzw | Method for determining the resistance and carrier profile of a semiconductor element using a scanning proximity microscope |
US5270543A (en) * | 1991-07-05 | 1993-12-14 | Drukker International B.V. | Electronic probe and method for its manufacture |
US5383354A (en) * | 1993-12-27 | 1995-01-24 | Motorola, Inc. | Process for measuring surface topography using atomic force microscopy |
Cited By (74)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070022804A1 (en) * | 1994-07-28 | 2007-02-01 | General Nanotechnology Llc | Scanning probe microscopy inspection and modification system |
US6252226B1 (en) * | 1994-07-28 | 2001-06-26 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
US20050172703A1 (en) * | 1994-07-28 | 2005-08-11 | General Nanotechnology Llc | Scanning probe microscopy inspection and modification system |
US20050190684A1 (en) * | 1995-07-24 | 2005-09-01 | General Nanotechnology Llc | Nanometer scale data storage device and associated positioning system |
US6507553B2 (en) | 1995-07-24 | 2003-01-14 | General Nanotechnology Llc | Nanometer scale data storage device and associated positioning system |
US6339217B1 (en) * | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
EP0893695B1 (en) * | 1997-07-24 | 2005-10-26 | Mitsubishi Denki Kabushiki Kaisha | Test probe for semiconductor devices and method of manufacturing of the same |
EP0893695A2 (en) * | 1997-07-24 | 1999-01-27 | Mitsubishi Denki Kabushiki Kaisha | Test probe for semiconductor devices and method of manufacturing of the same |
US10610995B2 (en) | 1998-01-21 | 2020-04-07 | Victor B. Kley | Method and apparatus for nanolapping |
US6364662B1 (en) | 1998-11-12 | 2002-04-02 | Nobel Biocare Ab | Diamond-like carbon coated dental instrument |
US6084420A (en) * | 1998-11-25 | 2000-07-04 | Chee; Wan Soo | Probe assembly for testing |
US6447295B1 (en) | 1999-04-15 | 2002-09-10 | Nobel Biocare Ab | Diamond-like carbon coated dental retaining screws |
US20050056783A1 (en) * | 1999-07-01 | 2005-03-17 | General Nanotechnology, Llc | Object inspection and/or modification system and method |
US6759858B2 (en) * | 1999-10-20 | 2004-07-06 | Intel Corporation | Integrated circuit test probe having ridge contact |
US6974452B1 (en) | 2000-01-12 | 2005-12-13 | Clinicon Corporation | Cutting and cauterizing surgical tools |
US6547562B2 (en) | 2000-05-11 | 2003-04-15 | Nobel Biocare Ab | Pseudo-etching of diamond-like carbon coated instruments |
US20050115047A1 (en) * | 2001-01-30 | 2005-06-02 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
US7947952B1 (en) | 2001-03-08 | 2011-05-24 | General Nanotechnology Llc | Nanomachining method and apparatus |
US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US6802646B1 (en) | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
US20050058384A1 (en) * | 2001-04-30 | 2005-03-17 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
US20030087096A1 (en) * | 2001-08-21 | 2003-05-08 | Kabushiki Kaisha Toshiba | Carbon film coated member |
US7988786B2 (en) | 2001-08-21 | 2011-08-02 | Kabushiki Kaisha Toshiba | Carbon film coated member |
US20060040105A1 (en) * | 2001-08-21 | 2006-02-23 | Kabushiki Kaisha Toshiba | Carbon film coated member |
US20060174384A1 (en) * | 2001-10-19 | 2006-08-03 | Rave Llc | Scan data collection for better overall data accurancy |
US20050172739A1 (en) * | 2001-11-28 | 2005-08-11 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
US6864481B2 (en) * | 2001-12-04 | 2005-03-08 | Sii Nanotechnology Inc. | Probe for scanning probe microscope |
US6727719B2 (en) * | 2002-01-11 | 2004-04-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Piercer combined prober for CU interconnect water-level preliminary electrical test |
DE10201491C1 (en) * | 2002-01-16 | 2003-08-28 | Gfd Ges Fuer Diamantprodukte M | Probe system and method for its production |
US9075082B2 (en) | 2002-03-07 | 2015-07-07 | Victor B. Kley | Fluid delivery for scanning probe microscopy |
US20030210065A1 (en) * | 2002-05-09 | 2003-11-13 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip |
US6909300B2 (en) | 2002-05-09 | 2005-06-21 | Taiwan Semiconductor Manufacturing Co., Ltd | Method for fabricating microelectronic fabrication electrical test apparatus electrical probe tip having pointed tips |
US7112974B1 (en) * | 2002-05-23 | 2006-09-26 | Cypress Semiconductor Corporation | Proble for testing integrated circuits |
US20040118192A1 (en) * | 2002-09-09 | 2004-06-24 | General Nanotechnology Llc | Fluid delivery for scanning probe microscopy |
US20080036479A1 (en) * | 2004-03-05 | 2008-02-14 | Katsuya Okumura | Probe and Method of Manufacturing Probe |
US7649369B2 (en) * | 2004-03-05 | 2010-01-19 | Octec Inc. | Probe and method of manufacturing probe |
US20080110019A1 (en) * | 2004-03-26 | 2008-05-15 | Nulty James E | Probe card and method for constructing same |
US7685705B2 (en) | 2004-03-26 | 2010-03-30 | Cypress Semiconductor Corporation | Method of fabricating a probe card |
US20100066402A1 (en) * | 2006-11-30 | 2010-03-18 | Japan Science And Technology Agency | Metallic probe, and method and apparatus for fabricating the same |
US20080186036A1 (en) * | 2007-02-06 | 2008-08-07 | Brian Shumaker | High Speed Electrical Probe |
US20090223826A1 (en) * | 2008-03-04 | 2009-09-10 | Yong Hyup Kim | Manufacturing carbon nanotube ropes |
US8308930B2 (en) | 2008-03-04 | 2012-11-13 | Snu R&Db Foundation | Manufacturing carbon nanotube ropes |
US20100040529A1 (en) * | 2008-08-14 | 2010-02-18 | Snu R&Db Foundation | Enhanced carbon nanotube |
KR101085276B1 (en) * | 2008-08-14 | 2011-11-22 | 서울대학교산학협력단 | Enhanced carbon nanotube |
US8673258B2 (en) * | 2008-08-14 | 2014-03-18 | Snu R&Db Foundation | Enhanced carbon nanotube |
US8357346B2 (en) | 2008-08-20 | 2013-01-22 | Snu R&Db Foundation | Enhanced carbon nanotube wire |
US20100047568A1 (en) * | 2008-08-20 | 2010-02-25 | Snu R&Db Foundation | Enhanced carbon nanotube wire |
US20100055338A1 (en) * | 2008-08-26 | 2010-03-04 | Snu R&Db Foundation | Carbon nanotube structure |
US7959842B2 (en) | 2008-08-26 | 2011-06-14 | Snu & R&Db Foundation | Carbon nanotube structure |
US20100055023A1 (en) * | 2008-08-26 | 2010-03-04 | Snu R&Db Foundation | Manufacturing carbon nanotube paper |
US8021640B2 (en) | 2008-08-26 | 2011-09-20 | Snu R&Db Foundation | Manufacturing carbon nanotube paper |
US8287695B2 (en) | 2008-08-26 | 2012-10-16 | Snu R&Db Foundation | Manufacturing carbon nanotube paper |
US8701211B2 (en) * | 2009-08-26 | 2014-04-15 | Advanced Diamond Technologies, Inc. | Method to reduce wedge effects in molded trigonal tips |
US20110055987A1 (en) * | 2009-08-26 | 2011-03-03 | Advanced Diamond Technologies, Inc. | Method to reduce wedge effects in molded trigonal tips |
US8981803B2 (en) | 2010-04-28 | 2015-03-17 | Technoprobe S.P.A. | Method for cleaning a contact pad of a microstructure and corresponding cantilever contact probe and probe testing head |
ITMI20100724A1 (en) * | 2010-04-28 | 2011-10-29 | Technoprobe Spa | METHOD FOR THE CLEANING OF A CONTACT PITCH OF A MICROSTRUCTURE AND RELATED SHUTTER CONTACT PROBE AND HEAD OF MEASURING PROBES [CANTILEVER]. |
WO2011134645A1 (en) * | 2010-04-28 | 2011-11-03 | Technoprobe S.P.A. | Method for cleaning a contact pad of a microstructure and corresponding cantilever contact probe |
US20130049784A1 (en) * | 2010-05-10 | 2013-02-28 | Kobelco Research Institute, Inc. | Contact probe |
US9116173B2 (en) * | 2010-05-10 | 2015-08-25 | Kobe Steel, Ltd. | Contact probe having carbon film on surface thereof |
US20120276826A1 (en) * | 2011-03-01 | 2012-11-01 | GFD Gesellschaft für Diamantprodukte mbH. | Cutting tool with blade made of fine-crystalline diamond |
US8904650B2 (en) * | 2011-03-01 | 2014-12-09 | Gfd Gesellschaft Für Diamantprodukte Mbh | Cutting tool with blade made of fine-crystalline diamond |
US9891280B2 (en) | 2013-06-24 | 2018-02-13 | Fei Efa, Inc. | Probe-based data collection system with adaptive mode of probing controlled by local sample properties |
US20150002181A1 (en) * | 2013-06-29 | 2015-01-01 | Keith J. Martin | Probe tip formation for die sort and test |
US9823273B2 (en) * | 2013-06-29 | 2017-11-21 | Intel Corporation | Probe tip formation for die sort and test |
US9970959B2 (en) * | 2013-11-22 | 2018-05-15 | Industrial Technology Research Institute | Coated probe and method of fabricating the same |
US20150145546A1 (en) * | 2013-11-22 | 2015-05-28 | Industrial Technology Research Institute | Coated probe and method of fabricating the same |
CN107004553A (en) * | 2014-06-25 | 2017-08-01 | Fei埃法有限公司 | Device and method for the nanometer detection of electronic device |
TWI603087B (en) * | 2014-06-25 | 2017-10-21 | Dcg系統公司 | Method for nanoprobing of electronic devices |
WO2015200724A1 (en) * | 2014-06-25 | 2015-12-30 | Dcg Systems, Inc. | Apparatus and method for nanoprobing of electronic devices |
CN107004553B (en) * | 2014-06-25 | 2019-07-26 | Fei埃法有限公司 | The device and method of nanometer detection for electronic device |
US10539589B2 (en) | 2014-06-25 | 2020-01-21 | Fei Efa, Inc. | Through process flow intra-chip and inter-chip electrical analysis and process control using in-line nanoprobing |
WO2016205257A1 (en) * | 2015-06-15 | 2016-12-22 | Dcg Systems, Inc. | Diamond delayering for electrical probing |
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Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
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Effective date: 20100609 |