DE69716811D1 - Vertikalboot für Halbleiterscheiben - Google Patents

Vertikalboot für Halbleiterscheiben

Info

Publication number
DE69716811D1
DE69716811D1 DE69716811T DE69716811T DE69716811D1 DE 69716811 D1 DE69716811 D1 DE 69716811D1 DE 69716811 T DE69716811 T DE 69716811T DE 69716811 T DE69716811 T DE 69716811T DE 69716811 D1 DE69716811 D1 DE 69716811D1
Authority
DE
Germany
Prior art keywords
semiconductor wafers
vertical boat
boat
vertical
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69716811T
Other languages
English (en)
Other versions
DE69716811T2 (de
Inventor
Toshio Nakajima
Hisao Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Application granted granted Critical
Publication of DE69716811D1 publication Critical patent/DE69716811D1/de
Publication of DE69716811T2 publication Critical patent/DE69716811T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67306—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S206/00—Special receptacle or package
    • Y10S206/832—Semiconductor wafer boat
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE69716811T 1996-05-17 1997-05-16 Vertikalboot für Halbleiterscheiben Expired - Lifetime DE69716811T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14814596A JPH09306980A (ja) 1996-05-17 1996-05-17 縦型ウエハボート

Publications (2)

Publication Number Publication Date
DE69716811D1 true DE69716811D1 (de) 2002-12-12
DE69716811T2 DE69716811T2 (de) 2003-09-04

Family

ID=15446278

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69716811T Expired - Lifetime DE69716811T2 (de) 1996-05-17 1997-05-16 Vertikalboot für Halbleiterscheiben

Country Status (6)

Country Link
US (1) US5858103A (de)
EP (1) EP0807961B1 (de)
JP (1) JPH09306980A (de)
KR (1) KR100474157B1 (de)
DE (1) DE69716811T2 (de)
TW (1) TW392275B (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
KR100284567B1 (ko) * 1997-04-15 2001-04-02 후지이 아키히로 수직 웨이퍼 보트
US6474474B2 (en) * 1998-02-06 2002-11-05 Sumitomo Metal Industries, Ltd. Sheet support container
US5931666A (en) * 1998-02-27 1999-08-03 Saint-Gobain Industrial Ceramics, Inc. Slip free vertical rack design having rounded horizontal arms
US6073828A (en) * 1998-06-30 2000-06-13 Lam Research Corporation End effector for substrate handling and method for making the same
US6171400B1 (en) * 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US6225594B1 (en) 1999-04-15 2001-05-01 Integrated Materials, Inc. Method and apparatus for securing components of wafer processing fixtures
US6196211B1 (en) 1999-04-15 2001-03-06 Integrated Materials, Inc. Support members for wafer processing fixtures
US6205993B1 (en) 1999-04-15 2001-03-27 Integrated Materials, Inc. Method and apparatus for fabricating elongate crystalline members
JP2001230312A (ja) * 2000-02-16 2001-08-24 Nec Corp 半導体製造装置
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
WO2002003428A2 (en) * 2000-06-30 2002-01-10 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing and method of fabrication
US6450346B1 (en) 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
US6455395B1 (en) * 2000-06-30 2002-09-24 Integrated Materials, Inc. Method of fabricating silicon structures including fixtures for supporting wafers
JP2002043229A (ja) * 2000-07-25 2002-02-08 Hitachi Kokusai Electric Inc 半導体製造装置
US6631935B1 (en) 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US6727191B2 (en) * 2001-02-26 2004-04-27 Integrated Materials, Inc. High temperature hydrogen anneal of silicon wafers supported on a silicon fixture
JP2002270614A (ja) * 2001-03-12 2002-09-20 Canon Inc Ｓｏｉ基体、その熱処理方法、それを有する半導体装置およびその製造方法
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
US6845779B2 (en) * 2001-11-13 2005-01-25 Fsi International, Inc. Edge gripping device for handling a set of semiconductor wafers in an immersion processing system
KR20030048682A (ko) * 2001-12-12 2003-06-25 삼성전자주식회사 반도체 웨이퍼 가이드 및 이를 구비한 반도체 습식세정장치
US6835039B2 (en) * 2002-03-15 2004-12-28 Asm International N.V. Method and apparatus for batch processing of wafers in a furnace
WO2004008008A2 (en) * 2002-07-15 2004-01-22 Aviza Technology, Inc. Control of a gaseous environment in a wafer loading chamber
US6582221B1 (en) * 2002-07-19 2003-06-24 Asm International N.V. Wafer boat and method for treatment of substrates
US7256375B2 (en) * 2002-08-30 2007-08-14 Asm International N.V. Susceptor plate for high temperature heat treatment
US7823730B2 (en) * 2002-09-11 2010-11-02 Shin-Etsu Polymer Co., Ltd. Substrate storage container
US7033126B2 (en) * 2003-04-02 2006-04-25 Asm International N.V. Method and apparatus for loading a batch of wafers into a wafer boat
JP4667376B2 (ja) * 2003-07-02 2011-04-13 クック インコーポレイテッド 小ゲージ針カテーテル挿入器具
DE10334940B4 (de) * 2003-07-31 2007-08-23 Infineon Technologies Ag Trägereinrichtung
TWI310850B (en) * 2003-08-01 2009-06-11 Foxsemicon Integrated Tech Inc Substrate supporting rod and substrate cassette using the same
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
US20060065634A1 (en) * 2004-09-17 2006-03-30 Van Den Berg Jannes R Low temperature susceptor cleaning
US20060060145A1 (en) * 2004-09-17 2006-03-23 Van Den Berg Jannes R Susceptor with surface roughness for high temperature substrate processing
WO2006035894A1 (ja) * 2004-09-29 2006-04-06 Hoya Corporation 薄膜付基板の支持部材、薄膜付基板の収納容器、マスクブランク収納体、転写マスク収納体、及び薄膜付基板の輸送方法
JP2006128316A (ja) * 2004-10-27 2006-05-18 Shin Etsu Handotai Co Ltd 熱処理用縦型ボートおよび熱処理方法
US20060150906A1 (en) * 2005-01-07 2006-07-13 Selen Louis J M Wafer boat for reduced shadow marks
US7241141B2 (en) * 2005-09-19 2007-07-10 Texas Instruments Incorporated Low contact SiC boat for silicon nitride stress reduction
US7736437B2 (en) * 2006-02-03 2010-06-15 Integrated Materials, Incorporated Baffled liner cover
JP2007329173A (ja) * 2006-06-06 2007-12-20 Covalent Materials Corp 縦型ウェーハボート
TW200845265A (en) * 2007-05-10 2008-11-16 Nanya Technology Corp Wafer supporter
EP2505675A4 (de) * 2009-09-02 2013-10-23 Honda Motor Co Ltd Fördergestell, verfahren zur fixierung eines metallrings und verfahren zur wärmebehandlung eines metallrings
US20110259840A1 (en) * 2010-04-23 2011-10-27 Advanced Semiconductor Engineering, Inc. Semiconductor package magazine
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
US20150128863A1 (en) * 2013-11-14 2015-05-14 Taiwan Semiconductor Manufacturing Co., Ltd. Mechanisms for furnace apparatus and wafer boat
US20170175265A1 (en) * 2015-12-18 2017-06-22 Applied Materials, Inc. Flat susceptor with grooves for minimizing temperature profile across a substrate
JP2018067582A (ja) * 2016-10-18 2018-04-26 東芝メモリ株式会社 半導体製造装置及び半導体装置の製造方法
TWI690771B (zh) * 2018-01-11 2020-04-11 家登精密工業股份有限公司 光罩壓抵單元及應用其之極紫外光光罩容器
JP7030604B2 (ja) * 2018-04-19 2022-03-07 三菱電機株式会社 ウエハボートおよびその製造方法
NL2022185B1 (nl) * 2018-12-12 2020-07-02 Suss Microtec Lithography Gmbh Substratkassette
KR102290078B1 (ko) * 2019-10-18 2021-08-17 주식회사 예스파워테크닉스 웨이퍼용 보트
KR20210100798A (ko) 2020-02-06 2021-08-18 삼성디스플레이 주식회사 기판용 카세트

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07120633B2 (ja) * 1987-03-17 1995-12-20 富士通株式会社 半導体用治具の製造方法
JPS644018A (en) * 1987-06-26 1989-01-09 Toshiba Ceramics Co Vertical-type diffusion furnace
US4872554A (en) * 1987-07-02 1989-10-10 Fluoroware, Inc. Reinforced carrier with embedded rigid insert
JP2548949B2 (ja) * 1987-09-01 1996-10-30 東芝セラミックス株式会社 半導体製造用構成部材
JPH02102524A (ja) * 1988-10-11 1990-04-16 Nec Corp ウェハーボート
JPH02123736A (ja) * 1988-11-02 1990-05-11 Tel Sagami Ltd 縦型熱処理炉用ウェハボート
JPH04120000A (ja) * 1990-09-07 1992-04-21 Seiko Epson Corp 半導体熱処理治具
JPH04300262A (ja) * 1991-03-28 1992-10-23 Shin Etsu Chem Co Ltd 炭化珪素質治具
JPH04310373A (ja) * 1991-04-04 1992-11-02 Nippon Steel Corp スライシング用内周刃砥石
JPH06163439A (ja) * 1992-11-16 1994-06-10 Shin Etsu Chem Co Ltd 半導体拡散炉用ボート及びその製造方法
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JP3348936B2 (ja) * 1993-10-21 2002-11-20 東京エレクトロン株式会社 縦型熱処理装置
JPH06302680A (ja) * 1993-04-14 1994-10-28 Shunichi Maekawa ウェハ保持装置
JPH06349758A (ja) * 1993-06-03 1994-12-22 Kokusai Electric Co Ltd 縦型半導体製造装置用ボート
JPH07147258A (ja) * 1993-11-25 1995-06-06 Hitachi Ltd 半導体ウェハの熱処理装置
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
US5638958A (en) * 1995-09-08 1997-06-17 Micron Technology, Inc. Semiconductor film wafer cassette

Also Published As

Publication number Publication date
EP0807961A1 (de) 1997-11-19
DE69716811T2 (de) 2003-09-04
KR970077474A (ko) 1997-12-12
TW392275B (en) 2000-06-01
KR100474157B1 (ko) 2005-04-14
US5858103A (en) 1999-01-12
JPH09306980A (ja) 1997-11-28
EP0807961B1 (de) 2002-11-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition