KR970052848U - 반도체 웨이퍼 보트 이송장치 - Google Patents

반도체 웨이퍼 보트 이송장치

Info

Publication number
KR970052848U
KR970052848U KR2019960002294U KR19960002294U KR970052848U KR 970052848 U KR970052848 U KR 970052848U KR 2019960002294 U KR2019960002294 U KR 2019960002294U KR 19960002294 U KR19960002294 U KR 19960002294U KR 970052848 U KR970052848 U KR 970052848U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
wafer boat
boat transporter
transporter
semiconductor
Prior art date
Application number
KR2019960002294U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960002294U priority Critical patent/KR970052848U/ko
Publication of KR970052848U publication Critical patent/KR970052848U/ko

Links

KR2019960002294U 1996-02-14 1996-02-14 반도체 웨이퍼 보트 이송장치 KR970052848U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960002294U KR970052848U (ko) 1996-02-14 1996-02-14 반도체 웨이퍼 보트 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960002294U KR970052848U (ko) 1996-02-14 1996-02-14 반도체 웨이퍼 보트 이송장치

Publications (1)

Publication Number Publication Date
KR970052848U true KR970052848U (ko) 1997-09-08

Family

ID=60844593

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960002294U KR970052848U (ko) 1996-02-14 1996-02-14 반도체 웨이퍼 보트 이송장치

Country Status (1)

Country Link
KR (1) KR970052848U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application