KR980005440U - 웨이퍼 적재용 보우트 - Google Patents

웨이퍼 적재용 보우트

Info

Publication number
KR980005440U
KR980005440U KR2019960017780U KR19960017780U KR980005440U KR 980005440 U KR980005440 U KR 980005440U KR 2019960017780 U KR2019960017780 U KR 2019960017780U KR 19960017780 U KR19960017780 U KR 19960017780U KR 980005440 U KR980005440 U KR 980005440U
Authority
KR
South Korea
Prior art keywords
wafer loading
loading boat
boat
wafer
loading
Prior art date
Application number
KR2019960017780U
Other languages
English (en)
Other versions
KR200153296Y1 (ko
Inventor
권창헌
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019960017780U priority Critical patent/KR200153296Y1/ko
Publication of KR980005440U publication Critical patent/KR980005440U/ko
Application granted granted Critical
Publication of KR200153296Y1 publication Critical patent/KR200153296Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR2019960017780U 1996-06-27 1996-06-27 웨이퍼 적재용 보우트 KR200153296Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960017780U KR200153296Y1 (ko) 1996-06-27 1996-06-27 웨이퍼 적재용 보우트

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960017780U KR200153296Y1 (ko) 1996-06-27 1996-06-27 웨이퍼 적재용 보우트

Publications (2)

Publication Number Publication Date
KR980005440U true KR980005440U (ko) 1998-03-30
KR200153296Y1 KR200153296Y1 (ko) 1999-08-02

Family

ID=19459700

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960017780U KR200153296Y1 (ko) 1996-06-27 1996-06-27 웨이퍼 적재용 보우트

Country Status (1)

Country Link
KR (1) KR200153296Y1 (ko)

Also Published As

Publication number Publication date
KR200153296Y1 (ko) 1999-08-02

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