KR970046819U - 웨이퍼의 운송장치 - Google Patents

웨이퍼의 운송장치

Info

Publication number
KR970046819U
KR970046819U KR2019950038047U KR19950038047U KR970046819U KR 970046819 U KR970046819 U KR 970046819U KR 2019950038047 U KR2019950038047 U KR 2019950038047U KR 19950038047 U KR19950038047 U KR 19950038047U KR 970046819 U KR970046819 U KR 970046819U
Authority
KR
South Korea
Prior art keywords
wafer transporter
transporter
wafer
Prior art date
Application number
KR2019950038047U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950038047U priority Critical patent/KR970046819U/ko
Publication of KR970046819U publication Critical patent/KR970046819U/ko

Links

KR2019950038047U 1995-12-04 1995-12-04 웨이퍼의 운송장치 KR970046819U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950038047U KR970046819U (ko) 1995-12-04 1995-12-04 웨이퍼의 운송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950038047U KR970046819U (ko) 1995-12-04 1995-12-04 웨이퍼의 운송장치

Publications (1)

Publication Number Publication Date
KR970046819U true KR970046819U (ko) 1997-07-31

Family

ID=60874373

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950038047U KR970046819U (ko) 1995-12-04 1995-12-04 웨이퍼의 운송장치

Country Status (1)

Country Link
KR (1) KR970046819U (ko)

Similar Documents

Publication Publication Date Title
DK0739831T3 (da) Transportør
DK0753474T3 (da) Transportør
DE69631098D1 (de) Halbleiterstrukturen
DE69625265D1 (de) Halbleiterstrukturen
DK0782966T3 (da) Transportør
DE59510981D1 (de) Bohrfutter
DE69612854D1 (de) Spannfutter
DE69432737D1 (de) Halbleiterinspektionssystem
DE69429748T2 (de) Halbleiterinspektionssystem
DE69717671D1 (de) Transportvorrichtung
BR9606756A (pt) Peptídeo
NO981052D0 (no) Peptidderivater
NO981051D0 (no) Peptidderivater
KR970046819U (ko) 웨이퍼의 운송장치
ATA139496A (de) Mattentransporteur
KR970046599U (ko) 웨이퍼척
KR970046959U (ko) 웨이퍼 구조
KR970025846U (ko) 웨이퍼 운반구
KR970046821U (ko) 웨이퍼 프레임 고정장치
KR970011211U (ko) 웨이퍼 척
KR970003265U (ko) 웨이퍼 척
KR960035622U (ko) 웨이퍼 척
DK0680899T3 (da) Transportør
KR970046596U (ko) 웨이퍼 캐리어
KR970046587U (ko) 웨이퍼 캐리어

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application