KR970046819U - 웨이퍼의 운송장치 - Google Patents

웨이퍼의 운송장치

Info

Publication number
KR970046819U
KR970046819U KR2019950038047U KR19950038047U KR970046819U KR 970046819 U KR970046819 U KR 970046819U KR 2019950038047 U KR2019950038047 U KR 2019950038047U KR 19950038047 U KR19950038047 U KR 19950038047U KR 970046819 U KR970046819 U KR 970046819U
Authority
KR
South Korea
Prior art keywords
wafer transporter
transporter
wafer
Prior art date
Application number
KR2019950038047U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950038047U priority Critical patent/KR970046819U/ko
Publication of KR970046819U publication Critical patent/KR970046819U/ko

Links

KR2019950038047U 1995-12-04 1995-12-04 웨이퍼의 운송장치 KR970046819U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950038047U KR970046819U (ko) 1995-12-04 1995-12-04 웨이퍼의 운송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950038047U KR970046819U (ko) 1995-12-04 1995-12-04 웨이퍼의 운송장치

Publications (1)

Publication Number Publication Date
KR970046819U true KR970046819U (ko) 1997-07-31

Family

ID=60874373

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950038047U KR970046819U (ko) 1995-12-04 1995-12-04 웨이퍼의 운송장치

Country Status (1)

Country Link
KR (1) KR970046819U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application