JP2018067582A - 半導体製造装置及び半導体装置の製造方法 - Google Patents
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Abstract
Description
図1に示すように、本実施形態に係る半導体製造装置1は、半導体基板処理室2を有するCVD成膜装置である。さらに、半導体基板処理室2内には、ボート3が設けられていて、半導体基板4を載置する。ボート3は、上端と下端に設けられた支持リング(支柱支持部)5と、上下の支持リング5間に相互に離間して設けられた複数の支柱6とを有する。
図5は、第1の実施形態の変形例に係るボートの底部付近の構成を示す支持リング及び支持リング付近の支柱のみを図3におけるL−M方向で切り出して、インナーボート3b側を左側として示す斜視図である。図5に示すようにアウターボート3aの支柱6aの底面に、インナーボート3bの支持リングに隣接する部分において、凹部(窪み)25が設けられている。
以下、上述した第1の実施形態の半導体製造装置と同様の構成要素には同じ符号を付し、詳細な説明を省略する。本実施形態においても、図1に示すような概略構成となっている。本実施形態では、ボートを斜めから見た図9(a)に示すように、ボートは、上端と下端に設けられた支持リング5と、上下の支持リング5間に相互に離間して設けられた第1支柱群50と、第1支柱群50と離間して設けられた第2支柱51と、第1支柱群50及び第2支柱51と離間して設けられた第3支柱52を有している。第1の実施形態では、主として第2ボートを昇降させる説明を行ったが、本実施形態では、第2支柱及び第3支柱を昇降させる。
Claims (6)
- 半導体基板処理室と、
半導体基板処理室内に半導体基板処理用ガスを供給するガス供給装置と、
前記半導体基板処理室内に設けられ、上端と下端に設けられた支持リングと、上下の前記支持リング間に相互に離間して設けられた複数の支柱とを有し、前記複数の支柱には半導体基板を載置する支持用突起部が設けられている第1ボートと、
前記半導体基板処理室内に設けられ、上端と下端に設けられた支持リングと、上下の前記支持リング間に相互に離間して設けられた複数の支柱とを有し、前記複数の支柱には前記半導体基板を載置する支持用突起部が設けられていて、前記支持用突起部の上面の上下方向の位置は前記第1ボートの支持用突起部の上面位置よりも下方となっていて、前記第1ボートの外側又は内側に配置された第2ボートと、
前記第1ボートに設けられた前記支持用突起部の上面位置よりも前記第2ボートに設けられた前記支持用突起部の上面位置を上方に位置させるまで、前記第2ボートを上昇させる支柱昇降装置と
を有する半導体製造装置。 - 前記第1ボートに設けられた前記複数の支柱下部には、前記第2ボートに設けられた前記複数の支持リングが上昇する高さ分の凹部が設けられている請求項1記載の半導体製造装置。
- 半導体基板処理室と、
前記半導体基板処理室内に半導体基板処理用ガスを供給するガス供給装置と、
前記半導体基板処理室内に設けられ、上端と下端に設けられた支持リングと、上下の支持リング間に相互に離間して設けられた第1支柱群と、前記第1支柱群から離間して設けられた第2支柱と、前記第1支柱群及び前記第2支柱から離間して設けられた第3支柱とを有するボートとを有し、
前記第1支柱群には半導体基板を載置する複数の第1支持用突起部が設けられ、
前記第2支柱には、前記複数の第1支持用突起部の各々の半導体基板載置領域の面積よりも大きい半導体基板載置領域面積を有し、前記複数の第1支持用突起部よりもその上面位置が高い位置に移動可能な第2支持用突起部が設けられ、
前記第3支柱には、前記複数の第1支持用突起部の各々の半導体基板載置領域の面積よりも大きい半導体基板載置領域面積を有し、前記複数の第1支持用突起部よりもその上面位置が高い位置に移動可能な第3支持用突起部が設けられた半導体製造装置。 - 前記第2支持用突起部又は前記第3支持用突起部は前記半導体基板の水平面内における中心に対して前記複数の第1支持用突起部のいずれか1つと対向する位置に配置されている請求項3記載の半導体製造装置。
- 半導体基板支持ボートの第1支持用突起部上に半導体基板を載置し、
前記半導体基板が載置された前記半導体基板支持ボートを半導体製造装置の処理室内へ搬入し、
処理用ガスを前記処理室内へ導入して、前記半導体基板上に成膜し、
前記処理用ガス供給予定時間を所定時間経過した時点で、前記半導体基板支持ボートの一部を上昇させて、前記半導体基板を半導体基板支持ボートの第2支持用突起部上に載置し、
前記処理用ガス供給予定時間満了時点で、前記処理用ガス供給を停止し、
前記処理室内から前記半導体基板を搬出する半導体装置の製造方法。 - 半導体基板支持ボートの第1支持用突起部上に半導体基板を載置し、
前記半導体基板が載置された前記半導体基板支持ボートを半導体製造装置の処理室内に搬入し、
処理用ガスを前記処理室内へ導入して、前記半導体基板上に成膜し、
前記処理用ガス供給予定時間が第1所定時間を経過した時点で、前記半導体基板支持ボートの第2支持用突起部を上昇させて、半導体基板支持ボートの第2支持用突起部上及び前記第1支持用突起部のうちの、前記第2支持用突起部に対向する部分に前記半導体基板を載置し、
前記処理用ガス供給予定時間が第2所定時間を経過した時点で、前記半導体基板支持ボートの第3支持用突起部を上昇させると共に、前記第2支持用突起部を下降させて、半導体基板支持ボートの第3支持用突起部上及び前記第1支持用突起部のうちの、前記第3支持用突起部に対向する部分に前記半導体基板を載置し、
前記処理用ガス供給予定時間満了時点で、前記処理用ガス供給を停止し、
前記処理室内から前記半導体基板を搬出する半導体装置の製造方法。
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KR20230013623A (ko) | 2021-07-19 | 2023-01-26 | 도쿄엘렉트론가부시키가이샤 | 기판 보유 지지구 및 기판 처리 장치 |
KR20230017729A (ko) | 2021-07-28 | 2023-02-06 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 |
WO2024062591A1 (ja) * | 2022-09-22 | 2024-03-28 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法、およびプログラム |
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JPH0566990U (ja) * | 1992-02-17 | 1993-09-03 | 大日本スクリーン製造株式会社 | 縦型基板熱処理装置用基板ボート |
JPH09306980A (ja) * | 1996-05-17 | 1997-11-28 | Asahi Glass Co Ltd | 縦型ウエハボート |
JPH11121387A (ja) * | 1997-10-13 | 1999-04-30 | Nec Kyushu Ltd | 縦型拡散炉及び拡散方法 |
JP2000235974A (ja) * | 1999-02-12 | 2000-08-29 | Toshiba Microelectronics Corp | 半導体製造装置 |
JP2004179600A (ja) * | 2002-11-26 | 2004-06-24 | Tera Semicon Corp | 半導体製造装置 |
JP2005183908A (ja) * | 2003-12-15 | 2005-07-07 | Tera Semicon Corp | 半導体製造装置及びこれを利用した半導体基板の薄膜形成方法 |
JP2007329173A (ja) * | 2006-06-06 | 2007-12-20 | Covalent Materials Corp | 縦型ウェーハボート |
JP2012099571A (ja) * | 2010-10-29 | 2012-05-24 | Tokyo Electron Ltd | 縦型熱処理装置 |
JP2013175641A (ja) * | 2012-02-27 | 2013-09-05 | Hitachi Kokusai Electric Inc | 基板処理装置および基板処理方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20230013623A (ko) | 2021-07-19 | 2023-01-26 | 도쿄엘렉트론가부시키가이샤 | 기판 보유 지지구 및 기판 처리 장치 |
KR20230017729A (ko) | 2021-07-28 | 2023-02-06 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 |
WO2024062591A1 (ja) * | 2022-09-22 | 2024-03-28 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法、およびプログラム |
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US20180105936A1 (en) | 2018-04-19 |
US10036091B2 (en) | 2018-07-31 |
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