DE69716796T2 - Distanzstück-Maske für Plättchen auf einer Substratträger-Spannvorrichtung und Herstellungsverfahren dafür - Google Patents

Distanzstück-Maske für Plättchen auf einer Substratträger-Spannvorrichtung und Herstellungsverfahren dafür

Info

Publication number
DE69716796T2
DE69716796T2 DE69716796T DE69716796T DE69716796T2 DE 69716796 T2 DE69716796 T2 DE 69716796T2 DE 69716796 T DE69716796 T DE 69716796T DE 69716796 T DE69716796 T DE 69716796T DE 69716796 T2 DE69716796 T2 DE 69716796T2
Authority
DE
Germany
Prior art keywords
platelets
manufacturing
method therefor
substrate carrier
spacer mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69716796T
Other languages
English (en)
Other versions
DE69716796D1 (de
Inventor
Vincent E Burkhart
Michael N Sugarman
Howard E Grunes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69716796D1 publication Critical patent/DE69716796D1/de
Application granted granted Critical
Publication of DE69716796T2 publication Critical patent/DE69716796T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/903—Work holder for electrical circuit assemblages or wiring systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Jigs For Machine Tools (AREA)
  • Prostheses (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
DE69716796T 1996-03-08 1997-03-06 Distanzstück-Maske für Plättchen auf einer Substratträger-Spannvorrichtung und Herstellungsverfahren dafür Expired - Fee Related DE69716796T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/612,652 US5656093A (en) 1996-03-08 1996-03-08 Wafer spacing mask for a substrate support chuck and method of fabricating same

Publications (2)

Publication Number Publication Date
DE69716796D1 DE69716796D1 (de) 2002-12-12
DE69716796T2 true DE69716796T2 (de) 2003-07-31

Family

ID=24454076

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69716796T Expired - Fee Related DE69716796T2 (de) 1996-03-08 1997-03-06 Distanzstück-Maske für Plättchen auf einer Substratträger-Spannvorrichtung und Herstellungsverfahren dafür

Country Status (6)

Country Link
US (1) US5656093A (de)
EP (1) EP0794566B1 (de)
JP (1) JP3266537B2 (de)
KR (1) KR100274768B1 (de)
AT (1) ATE227471T1 (de)
DE (1) DE69716796T2 (de)

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EP0794566A1 (de) 1997-09-10
KR100274768B1 (ko) 2001-01-15
US5656093A (en) 1997-08-12
DE69716796D1 (de) 2002-12-12
EP0794566B1 (de) 2002-11-06
KR970067579A (ko) 1997-10-13

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