DE69526126D1 - 300 mm behälter mit mikroumgebung und seitentür und erdungsleitung - Google Patents

300 mm behälter mit mikroumgebung und seitentür und erdungsleitung

Info

Publication number
DE69526126D1
DE69526126D1 DE69526126T DE69526126T DE69526126D1 DE 69526126 D1 DE69526126 D1 DE 69526126D1 DE 69526126 T DE69526126 T DE 69526126T DE 69526126 T DE69526126 T DE 69526126T DE 69526126 D1 DE69526126 D1 DE 69526126D1
Authority
DE
Germany
Prior art keywords
container
side door
grounding line
micro environment
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69526126T
Other languages
English (en)
Other versions
DE69526126T2 (de
Inventor
Barry Gregerson
Brian Wiseman
Gary Gallagher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Empak Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Empak Inc filed Critical Empak Inc
Application granted granted Critical
Publication of DE69526126D1 publication Critical patent/DE69526126D1/de
Publication of DE69526126T2 publication Critical patent/DE69526126T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67396—Closed carriers characterised by the presence of antistatic elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/02—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon
    • G11B33/04—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon modified to store record carriers
    • G11B33/0405—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon modified to store record carriers for storing discs
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/14—Reducing influence of physical parameters, e.g. temperature change, moisture, dust
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
DE69526126T 1995-10-13 1995-10-13 300 mm behälter mit mikroumgebung und seitentür und erdungsleitung Expired - Lifetime DE69526126T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1995/012516 WO1997013710A1 (en) 1995-10-13 1995-10-13 300mm MICROENVIRONMENT POD WITH DOOR ON SIDE

Publications (2)

Publication Number Publication Date
DE69526126D1 true DE69526126D1 (de) 2002-05-02
DE69526126T2 DE69526126T2 (de) 2002-11-07

Family

ID=22249868

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69526126T Expired - Lifetime DE69526126T2 (de) 1995-10-13 1995-10-13 300 mm behälter mit mikroumgebung und seitentür und erdungsleitung

Country Status (9)

Country Link
US (4) USRE41231E1 (de)
EP (1) EP0857150B1 (de)
JP (1) JP3483573B2 (de)
KR (1) KR100428827B1 (de)
CA (1) CA2218260C (de)
DE (1) DE69526126T2 (de)
HK (1) HK1017325A1 (de)
TW (1) TW278312B (de)
WO (1) WO1997013710A1 (de)

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CA2218260C (en) 1995-10-13 2006-05-23 Empak, Inc. 300mm microenvironment pod with door on side
US6736268B2 (en) 1997-07-11 2004-05-18 Entegris, Inc. Transport module
US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module
KR100460309B1 (ko) * 1998-02-06 2004-12-04 미라이얼 가부시키가이샤 박판지지용기
US6808668B2 (en) 1998-05-28 2004-10-26 Entegris, Inc. Process for fabricating composite substrate carrier
US6871741B2 (en) 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
US6216874B1 (en) * 1998-07-10 2001-04-17 Fluoroware, Inc. Wafer carrier having a low tolerance build-up
TW437723U (en) 2000-06-16 2001-05-28 Ind Tech Res Inst Wafer box with foldable handle
US20020114686A1 (en) * 2000-12-04 2002-08-22 Phil Glynn Wafer carrier with stacking adaptor plate
US20020090282A1 (en) * 2001-01-05 2002-07-11 Applied Materials, Inc. Actuatable loadport system
WO2002079053A1 (en) * 2001-04-01 2002-10-10 Entegris, Inc. Thin wafer insert
US6923325B2 (en) 2001-07-12 2005-08-02 Entegris, Inc. Horizontal cassette
EP1429976A1 (de) * 2001-08-27 2004-06-23 Entegris, Inc. Modularer träger für halbleiterwaferscheiben und ähnlichem inventar
US20030188990A1 (en) * 2001-11-14 2003-10-09 Bhatt Sanjiv M. Composite kinematic coupling
US6951284B2 (en) * 2001-11-14 2005-10-04 Entegris, Inc. Wafer carrier with wafer retaining system
AU2002359492A1 (en) * 2001-11-27 2003-06-10 Entegris Inc. Front opening wafer carrier with path to ground effectuated by door
US7175026B2 (en) 2002-05-03 2007-02-13 Maxtor Corporation Memory disk shipping container with improved contaminant control
US20040074808A1 (en) * 2002-07-05 2004-04-22 Entegris, Inc. Fire retardant wafer carrier
EP1566058A4 (de) * 2002-10-18 2007-05-02 Intellocity Usa Inc Ichoose-videowerbung
TWI283038B (en) 2002-12-02 2007-06-21 Miraial Co Ltd Thin plate storage container
US7145157B2 (en) * 2003-09-11 2006-12-05 Applied Materials, Inc. Kinematic ion implanter electrode mounting
US7182203B2 (en) * 2003-11-07 2007-02-27 Entegris, Inc. Wafer container and door with vibration dampening latching mechanism
US7252199B2 (en) * 2004-03-26 2007-08-07 Entegris, Inc. Disk cassette system
US7528936B2 (en) * 2005-02-27 2009-05-05 Entegris, Inc. Substrate container with pressure equalization
US7422107B2 (en) * 2006-01-25 2008-09-09 Entegris, Inc. Kinematic coupling with textured contact surfaces
JP4668133B2 (ja) * 2006-06-28 2011-04-13 三甲株式会社 ウエハ容器の位置決め構造
JP2009543374A (ja) * 2006-07-07 2009-12-03 インテグリス・インコーポレーテッド ウエハカセット
US20080157455A1 (en) * 2006-12-29 2008-07-03 Applied Materials, Inc. Compliant substrate holding assembly
TWM336941U (en) * 2007-11-15 2008-07-21 Gudeng Prec Ind Co Ltd Storage apparatus for storing semiconductor element or reticle
CN102939254A (zh) 2010-02-19 2013-02-20 信越聚合物株式会社 基板收纳容器
WO2012151431A2 (en) 2011-05-03 2012-11-08 Entergris, Inc. Wafer container with particle shield
SG11201508809SA (en) 2013-04-26 2015-11-27 Entegris Inc Wafer container with latching mechanism for large diameter wafers
NL2022185B1 (nl) * 2018-12-12 2020-07-02 Suss Microtec Lithography Gmbh Substratkassette

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Also Published As

Publication number Publication date
DE69526126T2 (de) 2002-11-07
KR100428827B1 (ko) 2005-04-20
EP0857150A4 (de) 1999-04-14
JP3483573B2 (ja) 2004-01-06
CA2218260C (en) 2006-05-23
JPH11513347A (ja) 1999-11-16
WO1997013710A1 (en) 1997-04-17
USRE42402E1 (en) 2011-05-31
EP0857150B1 (de) 2002-03-27
HK1017325A1 (en) 1999-11-19
KR19980703789A (ko) 1998-12-05
USRE38221E1 (en) 2003-08-19
USRE41231E1 (en) 2010-04-20
US5944194A (en) 1999-08-31
EP0857150A1 (de) 1998-08-12
TW278312B (en) 1996-06-11
CA2218260A1 (en) 1997-04-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENTEGRIS, INC., CHASKA, MINN., US