JPS6413717A - Wafer carrier - Google Patents
Wafer carrierInfo
- Publication number
- JPS6413717A JPS6413717A JP62170342A JP17034287A JPS6413717A JP S6413717 A JPS6413717 A JP S6413717A JP 62170342 A JP62170342 A JP 62170342A JP 17034287 A JP17034287 A JP 17034287A JP S6413717 A JPS6413717 A JP S6413717A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier body
- static electricity
- base
- lowering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
PURPOSE:To avoid generating both change of characteristics and lowering of yield owing to static electricity, by arranging a grounding means which discharges electric charges on wafer into the ground. CONSTITUTION:A wafer 1 is engaged in a longitudinal groove of a carrier body 4 to be disposed in the carrier body 4. Then, the bottom edge 1a of the wafer 1 is in contact with two parallel Al rods 2, 2 to be supported be the supporting means 4b which is arranged at the bottom of the carrier body 4. Accordingly, when a wafer carrier is placed on a conductive base with the earth plate 3 of the carrier body 4 being in contact with the base, electric charges on the wafer 1 are discharged into the base through the Al rods 2 and the earth plate 3, thereby static electricity on the wafer 1 is eliminated effectively. Therefore, it is possible to eliminate both degradation of characteristics and lowering of yield owing to static electricity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170342A JPS6413717A (en) | 1987-07-08 | 1987-07-08 | Wafer carrier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170342A JPS6413717A (en) | 1987-07-08 | 1987-07-08 | Wafer carrier |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6413717A true JPS6413717A (en) | 1989-01-18 |
Family
ID=15903151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62170342A Pending JPS6413717A (en) | 1987-07-08 | 1987-07-08 | Wafer carrier |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6413717A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08274061A (en) * | 1995-03-30 | 1996-10-18 | Nec Yamaguchi Ltd | Rotationally drying device for semiconductor wafer |
KR100287024B1 (en) * | 1996-07-12 | 2001-04-16 | 플루오로웨어, 아이엔씨. | Wafer carrier |
USRE42402E1 (en) | 1995-10-13 | 2011-05-31 | Entegris, Inc. | 300 mm microenvironment pod with door on side |
US8276759B2 (en) | 2001-11-27 | 2012-10-02 | Entegris, Inc. | Front opening wafer carrier with path to ground effectuated by door |
-
1987
- 1987-07-08 JP JP62170342A patent/JPS6413717A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08274061A (en) * | 1995-03-30 | 1996-10-18 | Nec Yamaguchi Ltd | Rotationally drying device for semiconductor wafer |
USRE42402E1 (en) | 1995-10-13 | 2011-05-31 | Entegris, Inc. | 300 mm microenvironment pod with door on side |
KR100287024B1 (en) * | 1996-07-12 | 2001-04-16 | 플루오로웨어, 아이엔씨. | Wafer carrier |
US8276759B2 (en) | 2001-11-27 | 2012-10-02 | Entegris, Inc. | Front opening wafer carrier with path to ground effectuated by door |
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