DE69407318D1 - Nichtflüchtige Halbleiterspeicheranordnung und Verfahren zur Herstellung - Google Patents
Nichtflüchtige Halbleiterspeicheranordnung und Verfahren zur HerstellungInfo
- Publication number
- DE69407318D1 DE69407318D1 DE69407318T DE69407318T DE69407318D1 DE 69407318 D1 DE69407318 D1 DE 69407318D1 DE 69407318 T DE69407318 T DE 69407318T DE 69407318 T DE69407318 T DE 69407318T DE 69407318 D1 DE69407318 D1 DE 69407318D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacture
- memory device
- semiconductor memory
- volatile semiconductor
- volatile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7884—Programmable transistors with only two possible levels of programmation charging by hot carrier injection
- H01L29/7885—Hot carrier injection from the channel
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1519193 | 1993-02-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69407318D1 true DE69407318D1 (de) | 1998-01-29 |
DE69407318T2 DE69407318T2 (de) | 1998-07-02 |
Family
ID=11881962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69407318T Expired - Fee Related DE69407318T2 (de) | 1993-02-02 | 1994-02-01 | Nichtflüchtige Halbleiterspeicheranordnung und Verfahren zur Herstellung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5510639A (de) |
EP (1) | EP0609829B1 (de) |
KR (1) | KR0125113B1 (de) |
DE (1) | DE69407318T2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5640031A (en) * | 1993-09-30 | 1997-06-17 | Keshtbod; Parviz | Spacer flash cell process |
JP3081543B2 (ja) * | 1996-03-29 | 2000-08-28 | 三洋電機株式会社 | スプリットゲート型トランジスタ、スプリットゲート型トランジスタの製造方法、不揮発性半導体メモリ |
DE19639026C1 (de) * | 1996-09-23 | 1998-04-09 | Siemens Ag | Selbstjustierte nichtflüchtige Speicherzelle |
KR100241523B1 (ko) * | 1996-12-28 | 2000-02-01 | 김영환 | 플래쉬 메모리 소자 및 이를 이용한 프로그램, 소거 및 독출방법 |
KR100607837B1 (ko) | 1997-07-25 | 2006-08-04 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 비대칭 측대역들을 갖는 변조된 반송파를 수신하기 위한 수신기 및 방법, 및 비대칭 측대역들을 갖는 변조된 반송파를 처리하기 위한 집적 회로 |
EP1111683A3 (de) * | 1999-12-17 | 2005-02-02 | Matsushita Electric Industrial Co., Ltd. | Hochspannungshalbleiteranordnung |
FR2812753B1 (fr) * | 2000-08-03 | 2003-01-03 | St Microelectronics Sa | Point memoire non volatile |
FR2823900B1 (fr) | 2001-04-20 | 2003-08-15 | St Microelectronics Sa | Memoire non volatile de type famos |
US7274076B2 (en) * | 2003-10-20 | 2007-09-25 | Micron Technology, Inc. | Threshold voltage adjustment for long channel transistors |
US7151302B1 (en) * | 2005-06-24 | 2006-12-19 | Freescale Semiconductor, Inc. | Method and apparatus for maintaining topographical uniformity of a semiconductor memory array |
TWI310501B (en) * | 2005-10-06 | 2009-06-01 | Via Tech Inc | Bus controller and data buffer allocation method |
KR100695487B1 (ko) | 2006-03-20 | 2007-03-16 | 주식회사 하이닉스반도체 | 반도체 소자 및 그 제조 방법 |
JP5404149B2 (ja) | 2009-04-16 | 2014-01-29 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置 |
CN101930982B (zh) * | 2010-07-07 | 2012-04-18 | 中国电子科技集团公司第五十八研究所 | 基于flotox结构的抗辐射eeprom存储单元结构 |
JP5606388B2 (ja) * | 2011-05-13 | 2014-10-15 | 株式会社東芝 | パターン形成方法 |
CN104067392B (zh) * | 2012-04-30 | 2016-10-26 | 惠普发展公司,有限责任合伙企业 | 包括小于沟道面积的活跃浮栅区面积的器件 |
CN115249659B (zh) * | 2021-04-28 | 2024-05-03 | 长鑫存储技术有限公司 | 半导体结构的制作方法 |
WO2024084438A1 (en) * | 2022-10-20 | 2024-04-25 | King Abdullah University Of Science And Technology | Ga2O3 BASED NONVOLATILE FLASH MEMORY FOR OXIDE ELECTRONICS AND METHOD |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4290077A (en) * | 1979-05-30 | 1981-09-15 | Xerox Corporation | High voltage MOSFET with inter-device isolation structure |
GB2111745B (en) * | 1981-12-07 | 1985-06-19 | Philips Electronic Associated | Insulated-gate field-effect transistors |
US4561168A (en) * | 1982-11-22 | 1985-12-31 | Siliconix Incorporated | Method of making shadow isolated metal DMOS FET device |
JPS61150366A (ja) * | 1984-12-25 | 1986-07-09 | Nec Corp | Mis型メモリ−セル |
JPH0682800B2 (ja) * | 1985-04-16 | 1994-10-19 | 株式会社東芝 | 半導体記憶装置 |
JPS61290767A (ja) * | 1985-06-19 | 1986-12-20 | Hitachi Ltd | Mos電界効果トランジスタ |
JPS6384161A (ja) * | 1986-09-29 | 1988-04-14 | Matsushita Electronics Corp | 半導体装置の製造方法 |
JPH03132079A (ja) * | 1989-10-17 | 1991-06-05 | Matsushita Electron Corp | 半導体不揮発性記憶装置 |
JPH03187272A (ja) * | 1989-12-15 | 1991-08-15 | Mitsubishi Electric Corp | Mos型電界効果トランジスタ及びその製造方法 |
US5053842A (en) * | 1990-05-30 | 1991-10-01 | Seiko Instruments Inc. | Semiconductor nonvolatile memory |
JP2877462B2 (ja) * | 1990-07-23 | 1999-03-31 | 株式会社東芝 | 不揮発性半導体記憶装置 |
-
1994
- 1994-01-29 KR KR1019940001621A patent/KR0125113B1/ko not_active IP Right Cessation
- 1994-02-01 DE DE69407318T patent/DE69407318T2/de not_active Expired - Fee Related
- 1994-02-01 EP EP94101463A patent/EP0609829B1/de not_active Expired - Lifetime
-
1995
- 1995-02-09 US US08/384,791 patent/US5510639A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0609829A3 (de) | 1995-02-01 |
DE69407318T2 (de) | 1998-07-02 |
KR0125113B1 (ko) | 1997-12-11 |
EP0609829B1 (de) | 1997-12-17 |
US5510639A (en) | 1996-04-23 |
EP0609829A2 (de) | 1994-08-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |