DE69220399T2 - Verfahren zur Herstellung von einer Verbindung über einer Halbleitervorrichtung - Google Patents
Verfahren zur Herstellung von einer Verbindung über einer HalbleitervorrichtungInfo
- Publication number
- DE69220399T2 DE69220399T2 DE69220399T DE69220399T DE69220399T2 DE 69220399 T2 DE69220399 T2 DE 69220399T2 DE 69220399 T DE69220399 T DE 69220399T DE 69220399 T DE69220399 T DE 69220399T DE 69220399 T2 DE69220399 T2 DE 69220399T2
- Authority
- DE
- Germany
- Prior art keywords
- making
- semiconductor device
- connection over
- over
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB919105943A GB9105943D0 (en) | 1991-03-20 | 1991-03-20 | A method of manufacturing a semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69220399D1 DE69220399D1 (de) | 1997-07-24 |
DE69220399T2 true DE69220399T2 (de) | 1998-01-02 |
Family
ID=10691918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69220399T Expired - Fee Related DE69220399T2 (de) | 1991-03-20 | 1992-03-11 | Verfahren zur Herstellung von einer Verbindung über einer Halbleitervorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US5240879A (de) |
EP (1) | EP0504984B1 (de) |
JP (1) | JP2522879B2 (de) |
KR (1) | KR100237096B1 (de) |
DE (1) | DE69220399T2 (de) |
GB (1) | GB9105943D0 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3211290B2 (ja) * | 1991-10-21 | 2001-09-25 | ソニー株式会社 | 半導体装置の形成方法 |
US5474949A (en) * | 1992-01-27 | 1995-12-12 | Matsushita Electric Industrial Co., Ltd. | Method of fabricating capacitor or contact for semiconductor device by forming uneven oxide film and reacting silicon with metal containing gas |
US5429987A (en) * | 1993-01-25 | 1995-07-04 | Sharp Microelectronics Technology, Inc. | Method for profile control of selective metallization |
US5462897A (en) * | 1993-02-01 | 1995-10-31 | International Business Machines Corporation | Method for forming a thin film layer |
JPH06260441A (ja) * | 1993-03-03 | 1994-09-16 | Nec Corp | 半導体装置の製造方法 |
US5529953A (en) * | 1994-10-14 | 1996-06-25 | Toshiba America Electronic Components, Inc. | Method of forming studs and interconnects in a multi-layered semiconductor device |
US5725739A (en) * | 1996-07-08 | 1998-03-10 | Micron Technology, Inc. | Low angle, low energy physical vapor deposition of alloys |
US5909637A (en) * | 1996-09-20 | 1999-06-01 | Sharp Microelectronics Technology, Inc. | Copper adhesion to a diffusion barrier surface and method for same |
US5913144A (en) * | 1996-09-20 | 1999-06-15 | Sharp Microelectronics Technology, Inc. | Oxidized diffusion barrier surface for the adherence of copper and method for same |
US6236101B1 (en) | 1997-11-05 | 2001-05-22 | Texas Instruments Incorporated | Metallization outside protective overcoat for improved capacitors and inductors |
US6863593B1 (en) | 1998-11-02 | 2005-03-08 | Applied Materials, Inc. | Chemical mechanical polishing a substrate having a filler layer and a stop layer |
SG87886A1 (en) * | 1999-02-11 | 2002-04-16 | Applied Materials Inc | Chemical mechanical polishing processes and components |
US6399479B1 (en) | 1999-08-30 | 2002-06-04 | Applied Materials, Inc. | Processes to improve electroplating fill |
US6368953B1 (en) | 2000-05-09 | 2002-04-09 | International Business Machines Corporation | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same |
US6368484B1 (en) | 2000-05-09 | 2002-04-09 | International Business Machines Corporation | Selective plating process |
CN100380051C (zh) | 2001-12-28 | 2008-04-09 | 夏普株式会社 | 加热烹调器 |
CN1278409C (zh) * | 2002-06-10 | 2006-10-04 | 株式会社东芝 | 半导体器件的制造方法和半导体器件 |
US20070244335A1 (en) * | 2006-04-17 | 2007-10-18 | Teva Pharmaceutical Industries Ltd. | Isolation of tetracycline derivatives |
TW200812943A (en) * | 2006-04-24 | 2008-03-16 | Teva Pharma | Processes for preparation of tigecycline crystalline forms I and II |
KR102001511B1 (ko) * | 2012-12-26 | 2019-07-19 | 에스케이하이닉스 주식회사 | 에어갭을 구비한 반도체장치 및 그 제조 방법 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5360567A (en) * | 1976-11-11 | 1978-05-31 | Mitsubishi Electric Corp | Electrode formation method of semiconductor device |
NL8202009A (nl) * | 1982-05-14 | 1983-12-01 | Philips Nv | Werkwijze voor de vervaardiging van fijn-gestructureerde metaalpatronen op metaal- of halfgeleider oppervlak. |
US4465716A (en) * | 1982-06-02 | 1984-08-14 | Texas Instruments Incorporated | Selective deposition of composite materials |
DE3232837A1 (de) * | 1982-09-03 | 1984-03-08 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum herstellen einer 2-ebenen-metallisierung fuer halbleiterbauelemente, insbesondere fuer leistungshalbleiterbauelemente wie thyristoren |
JPS59150421A (ja) * | 1983-02-10 | 1984-08-28 | Toshiba Corp | 半導体装置の製造方法 |
GB2143372B (en) * | 1983-07-12 | 1987-07-01 | Control Data Corp | Applying barrier metal to a semiconductor |
GB2168841B (en) * | 1984-12-22 | 1988-07-20 | Stc Plc | Semiconductor processing |
US4944836A (en) * | 1985-10-28 | 1990-07-31 | International Business Machines Corporation | Chem-mech polishing method for producing coplanar metal/insulator films on a substrate |
US5055423A (en) * | 1987-12-28 | 1991-10-08 | Texas Instruments Incorporated | Planarized selective tungsten metallization system |
US4822753A (en) * | 1988-05-09 | 1989-04-18 | Motorola, Inc. | Method for making a w/tin contact |
US4983543A (en) * | 1988-09-07 | 1991-01-08 | Fujitsu Limited | Method of manufacturing a semiconductor integrated circuit having an interconnection wire embedded in a protective layer covering the semiconductor integrated circuit |
EP0366013A3 (de) * | 1988-10-27 | 1990-06-27 | Texas Instruments Incorporated | Selektive Dielektrikumsablagerung auf Horizontalstrukturen eines IC-Bauelementes |
JPH02185205A (ja) * | 1989-01-12 | 1990-07-19 | Agency Of Ind Science & Technol | 加飾した貴金属製品の製造法 |
US4992135A (en) | 1990-07-24 | 1991-02-12 | Micron Technology, Inc. | Method of etching back of tungsten layers on semiconductor wafers, and solution therefore |
-
1991
- 1991-03-20 GB GB919105943A patent/GB9105943D0/en active Pending
-
1992
- 1992-03-10 US US07/848,806 patent/US5240879A/en not_active Expired - Fee Related
- 1992-03-11 EP EP92200697A patent/EP0504984B1/de not_active Expired - Lifetime
- 1992-03-11 DE DE69220399T patent/DE69220399T2/de not_active Expired - Fee Related
- 1992-03-17 KR KR1019920004317A patent/KR100237096B1/ko not_active IP Right Cessation
- 1992-03-18 JP JP4062416A patent/JP2522879B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5240879A (en) | 1993-08-31 |
EP0504984A3 (en) | 1992-10-28 |
DE69220399D1 (de) | 1997-07-24 |
KR920018848A (ko) | 1992-10-22 |
JP2522879B2 (ja) | 1996-08-07 |
EP0504984B1 (de) | 1997-06-18 |
GB9105943D0 (en) | 1991-05-08 |
KR100237096B1 (ko) | 2000-01-15 |
JPH0590204A (ja) | 1993-04-09 |
EP0504984A2 (de) | 1992-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N |
|
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |