DE69422234D1 - Verfahren zur Herstellung einer Feldemissionsanordnung - Google Patents

Verfahren zur Herstellung einer Feldemissionsanordnung

Info

Publication number
DE69422234D1
DE69422234D1 DE69422234T DE69422234T DE69422234D1 DE 69422234 D1 DE69422234 D1 DE 69422234D1 DE 69422234 T DE69422234 T DE 69422234T DE 69422234 T DE69422234 T DE 69422234T DE 69422234 D1 DE69422234 D1 DE 69422234D1
Authority
DE
Germany
Prior art keywords
making
field emission
emission device
field
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69422234T
Other languages
English (en)
Other versions
DE69422234T2 (de
Inventor
Yoshikazu Hori
Keisuke Koga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69422234D1 publication Critical patent/DE69422234D1/de
Application granted granted Critical
Publication of DE69422234T2 publication Critical patent/DE69422234T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/319—Circuit elements associated with the emitters by direct integration
DE69422234T 1993-07-16 1994-07-15 Verfahren zur Herstellung einer Feldemissionsanordnung Expired - Lifetime DE69422234T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP17645093 1993-07-16
JP26458493 1993-10-22
JP9139794 1994-04-28

Publications (2)

Publication Number Publication Date
DE69422234D1 true DE69422234D1 (de) 2000-01-27
DE69422234T2 DE69422234T2 (de) 2000-06-15

Family

ID=27306729

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69422234T Expired - Lifetime DE69422234T2 (de) 1993-07-16 1994-07-15 Verfahren zur Herstellung einer Feldemissionsanordnung

Country Status (3)

Country Link
US (1) US5494179A (de)
EP (1) EP0637050B1 (de)
DE (1) DE69422234T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5591352A (en) * 1995-04-27 1997-01-07 Industrial Technology Research Institute High resolution cold cathode field emission display method
US5727978A (en) * 1995-12-19 1998-03-17 Advanced Micro Devices, Inc. Method of forming electron beam emitting tungsten filament
JP2874709B2 (ja) * 1996-02-07 1999-03-24 日本電気株式会社 電界放出型冷陰極の製造方法
KR100442982B1 (ko) * 1996-04-15 2004-09-18 마츠시타 덴끼 산교 가부시키가이샤 전계방출형전자원및그제조방법
JP3494864B2 (ja) * 1997-11-20 2004-02-09 セイコーインスツルメンツ株式会社 円形パターニング方法
US6572425B2 (en) * 2001-03-28 2003-06-03 Intel Corporation Methods for forming microtips in a field emission device
US7112920B2 (en) 2003-04-21 2006-09-26 National instutute of advanced industrial science and technology Field emission source with plural emitters in an opening
US7239076B2 (en) * 2003-09-25 2007-07-03 General Electric Company Self-aligned gated rod field emission device and associated method of fabrication
US7422913B2 (en) * 2004-05-24 2008-09-09 Arima Display Corp. Method for checking a condition of a heat treatment
WO2007070004A2 (en) * 2005-12-14 2007-06-21 Silex Microsystems Ab Methods for making micro needles and applications thereof
US7808082B2 (en) * 2006-11-14 2010-10-05 International Business Machines Corporation Structure and method for dual surface orientations for CMOS transistors
US8652339B1 (en) * 2013-01-22 2014-02-18 The United States Of America, As Represented By The Secretary Of The Navy Patterned lift-off of thin films deposited at high temperatures
US10141155B2 (en) * 2016-12-20 2018-11-27 Kla-Tencor Corporation Electron beam emitters with ruthenium coating

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5436828B2 (de) * 1974-08-16 1979-11-12
US4572765A (en) * 1983-05-02 1986-02-25 Fairchild Camera & Instrument Corporation Method of fabricating integrated circuit structures using replica patterning
GB2227362B (en) * 1989-01-18 1992-11-04 Gen Electric Co Plc Electronic devices
US4943343A (en) * 1989-08-14 1990-07-24 Zaher Bardai Self-aligned gate process for fabricating field emitter arrays
JP2550798B2 (ja) * 1991-04-12 1996-11-06 富士通株式会社 微小冷陰極の製造方法
JP3235172B2 (ja) * 1991-05-13 2001-12-04 セイコーエプソン株式会社 電界電子放出装置

Also Published As

Publication number Publication date
EP0637050A2 (de) 1995-02-01
DE69422234T2 (de) 2000-06-15
US5494179A (en) 1996-02-27
EP0637050A3 (de) 1996-04-03
EP0637050B1 (de) 1999-12-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: PANASONIC CORP., KADOMA, OSAKA, JP