DE69627951D1 - Verfahren zur Herstellung einer elektronenemittierende Vorrichtung - Google Patents

Verfahren zur Herstellung einer elektronenemittierende Vorrichtung

Info

Publication number
DE69627951D1
DE69627951D1 DE69627951T DE69627951T DE69627951D1 DE 69627951 D1 DE69627951 D1 DE 69627951D1 DE 69627951 T DE69627951 T DE 69627951T DE 69627951 T DE69627951 T DE 69627951T DE 69627951 D1 DE69627951 D1 DE 69627951D1
Authority
DE
Germany
Prior art keywords
electron
manufacturing
emitting device
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69627951T
Other languages
English (en)
Other versions
DE69627951T2 (de
Inventor
Taiko Motoi
Takeo Tsukamoto
Sotomitsu Ikeda
Kumi Nakamura
Toyoko Kobayashi
Naoko Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69627951D1 publication Critical patent/DE69627951D1/de
Application granted granted Critical
Publication of DE69627951T2 publication Critical patent/DE69627951T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/022Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/027Manufacture of electrodes or electrode systems of cold cathodes of thin film cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/316Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165Surface conduction emission type cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
DE69627951T 1995-10-12 1996-10-14 Verfahren zur Herstellung einer elektronenemittierende Vorrichtung Expired - Lifetime DE69627951T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP28915295 1995-10-12
JP28915295 1995-10-12
JP28915495 1995-10-12
JP28915395 1995-10-12
JP28915495 1995-10-12
JP28915395 1995-10-12
JP17547296 1996-06-17
JP17547296 1996-06-17
JP28734696A JP3241613B2 (ja) 1995-10-12 1996-10-11 電子放出素子、電子源および画像形成装置の製造方法
JP28734696 1996-10-11

Publications (2)

Publication Number Publication Date
DE69627951D1 true DE69627951D1 (de) 2003-06-12
DE69627951T2 DE69627951T2 (de) 2004-05-13

Family

ID=27528639

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69627951T Expired - Lifetime DE69627951T2 (de) 1995-10-12 1996-10-14 Verfahren zur Herstellung einer elektronenemittierende Vorrichtung

Country Status (6)

Country Link
US (1) US6017259A (de)
EP (1) EP0769796B1 (de)
JP (1) JP3241613B2 (de)
KR (1) KR100238607B1 (de)
CN (1) CN1099691C (de)
DE (1) DE69627951T2 (de)

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US5996488A (en) * 1994-11-25 1999-12-07 Canon Kabushiki Kaisha Preparation of an electron source by offset printing electrodes having thickness less than 200 nm
DE69629864T2 (de) 1995-04-03 2004-07-15 Canon K.K. Verfahren zur Herstellung einer elektronenemittierende Vorrichtung, einer Elektronenquelle und eines Bilderzeugungsgerätes
DE69622618T2 (de) * 1995-04-04 2003-03-20 Canon Kk Metallenthaltende Zusammensetzung zum Bilden einer elektronenemittierenden Vorrichtung und Verfahren zur Herstellung einer elektronenemittierenden Vorrichtung, einer Elektronenquelle und eines Bilderzeugungsgerätes
JP3302278B2 (ja) * 1995-12-12 2002-07-15 キヤノン株式会社 電子放出素子の製造方法並びに該製造方法を用いた電子源及び画像形成装置の製造方法
JP3352385B2 (ja) 1997-03-21 2002-12-03 キヤノン株式会社 電子源基板およびそれを用いた電子装置の製造方法
JPH1125851A (ja) * 1997-05-09 1999-01-29 Canon Inc 電子源、その製造方法及び製造装置並びに画像形成装置及びその製造方法
US6220912B1 (en) * 1997-05-09 2001-04-24 Canon Kabushiki Kaisha Method and apparatus for producing electron source using dispenser to produce electron emitting portions
EP0936653B1 (de) * 1998-02-16 2003-07-16 Canon Kabushiki Kaisha Verfahren zur Herstellung einer elektronenemittierenden Vorrichtung, einer Elektronenquelle und eines Bilderzeugungsgeräts
US6878028B1 (en) * 1998-05-01 2005-04-12 Canon Kabushiki Kaisha Method of fabricating electron source and image forming apparatus
US6060219A (en) * 1998-05-21 2000-05-09 Micron Technology, Inc. Methods of forming electron emitters, surface conduction electron emitters and field emission display assemblies
JP2000155555A (ja) 1998-09-16 2000-06-06 Canon Inc 電子放出素子の駆動方法及び、該電子放出素子を用いた電子源の駆動方法、並びに該電子源を用いた画像形成装置の駆動方法
US6492769B1 (en) * 1998-12-25 2002-12-10 Canon Kabushiki Kaisha Electron emitting device, electron source, image forming apparatus and producing methods of them
JP2001319567A (ja) * 2000-02-28 2001-11-16 Ricoh Co Ltd 電子源基板および該電子源基板を用いた画像表示装置
US6848961B2 (en) * 2000-03-16 2005-02-01 Canon Kabushiki Kaisha Method and apparatus for manufacturing image displaying apparatus
US6648950B2 (en) 2001-10-15 2003-11-18 Hewlett-Packard Development Company, L.P. Electro-thermal odor-releasing inks and methods for releasing odors from the same
JP3902998B2 (ja) 2001-10-26 2007-04-11 キヤノン株式会社 電子源及び画像形成装置の製造方法
JP3647436B2 (ja) * 2001-12-25 2005-05-11 キヤノン株式会社 電子放出素子、電子源、画像表示装置、及び電子放出素子の製造方法
JP3578162B2 (ja) * 2002-04-16 2004-10-20 セイコーエプソン株式会社 パターンの形成方法、パターン形成装置、導電膜配線、デバイスの製造方法、電気光学装置、並びに電子機器
JP2004055965A (ja) * 2002-07-23 2004-02-19 Seiko Epson Corp 配線基板及び半導体装置並びにこれらの製造方法、回路基板並びに電子機器
JP3998241B2 (ja) * 2002-10-18 2007-10-24 キヤノン株式会社 カーボンファイバーが固定された基体の製造方法
US7405775B2 (en) * 2003-01-17 2008-07-29 Cbrite Inc. Display employing organic material
JP3966294B2 (ja) * 2003-03-11 2007-08-29 セイコーエプソン株式会社 パターンの形成方法及びデバイスの製造方法
JP3966293B2 (ja) * 2003-03-11 2007-08-29 セイコーエプソン株式会社 パターンの形成方法及びデバイスの製造方法
JP3966292B2 (ja) * 2003-03-27 2007-08-29 セイコーエプソン株式会社 パターンの形成方法及びパターン形成装置、デバイスの製造方法、導電膜配線、電気光学装置、並びに電子機器
JP2005012179A (ja) * 2003-05-16 2005-01-13 Seiko Epson Corp 薄膜パターン形成方法、デバイスとその製造方法及び電気光学装置並びに電子機器、アクティブマトリクス基板の製造方法
US7537799B2 (en) * 2003-07-11 2009-05-26 Hewlett-Packard Development Company, L.P. Methods of forming electrically conductive pathways using palladium aliphatic amine complexes
US7683107B2 (en) * 2004-02-09 2010-03-23 E.I. Du Pont De Nemours And Company Ink jet printable thick film compositions and processes
US20050176246A1 (en) * 2004-02-09 2005-08-11 Haixin Yang Ink jet printable thick film ink compositions and processes
US20050173680A1 (en) * 2004-02-10 2005-08-11 Haixin Yang Ink jet printable thick film ink compositions and processes
US20060000081A1 (en) * 2004-06-30 2006-01-05 Canon Kabushiki Kaisha Manufacturing method for electronic device with functional thin film
JP2006210225A (ja) * 2005-01-31 2006-08-10 Seiko Epson Corp 電子放出素子および電子放出素子の製造方法、画像表示装置および電子機器
JP4016993B2 (ja) 2005-03-23 2007-12-05 セイコーエプソン株式会社 電子放出素子及び電子放出素子の製造方法、並びに表示装置及び電子機器
KR100690634B1 (ko) * 2005-07-15 2007-03-09 엘지전자 주식회사 표면 전도형 전자방출 소자 및 그 제조 방법
US9741901B2 (en) 2006-11-07 2017-08-22 Cbrite Inc. Two-terminal electronic devices and their methods of fabrication
CN101622712B (zh) * 2006-11-07 2011-06-15 希百特股份有限公司 双端开关装置及其制造方法
US7898042B2 (en) * 2006-11-07 2011-03-01 Cbrite Inc. Two-terminal switching devices and their methods of fabrication

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3611077A (en) * 1969-02-26 1971-10-05 Us Navy Thin film room-temperature electron emitter
JP2610143B2 (ja) * 1987-10-27 1997-05-14 キヤノン株式会社 電子放出素子及びその製造方法
JP2631007B2 (ja) * 1989-03-22 1997-07-16 キヤノン株式会社 電子放出素子及びその製造方法と、該素子を用いた画像形成装置
CA2126509C (en) * 1993-12-27 2000-05-23 Toshikazu Ohnishi Electron-emitting device and method of manufacturing the same as well as electron source and image-forming apparatus
JP3416266B2 (ja) * 1993-12-28 2003-06-16 キヤノン株式会社 電子放出素子とその製造方法、及び該電子放出素子を用いた電子源及び画像形成装置
JPH07325279A (ja) * 1994-06-01 1995-12-12 Dainippon Screen Mfg Co Ltd 減圧処理装置及び方法
JP2909702B2 (ja) * 1994-09-22 1999-06-23 キヤノン株式会社 電子放出素子、電子源、画像形成装置及びこれらの製造方法
JP3241251B2 (ja) * 1994-12-16 2001-12-25 キヤノン株式会社 電子放出素子の製造方法及び電子源基板の製造方法

Also Published As

Publication number Publication date
EP0769796B1 (de) 2003-05-07
CN1162244A (zh) 1997-10-15
JP3241613B2 (ja) 2001-12-25
DE69627951T2 (de) 2004-05-13
KR970024839A (ko) 1997-05-30
US6017259A (en) 2000-01-25
CN1099691C (zh) 2003-01-22
KR100238607B1 (ko) 2000-01-15
JPH1069850A (ja) 1998-03-10
EP0769796A1 (de) 1997-04-23

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