DE69305258D1 - Verfahren zur Herstellung einer Vorrichtung zur Feldemission - Google Patents

Verfahren zur Herstellung einer Vorrichtung zur Feldemission

Info

Publication number
DE69305258D1
DE69305258D1 DE69305258T DE69305258T DE69305258D1 DE 69305258 D1 DE69305258 D1 DE 69305258D1 DE 69305258 T DE69305258 T DE 69305258T DE 69305258 T DE69305258 T DE 69305258T DE 69305258 D1 DE69305258 D1 DE 69305258D1
Authority
DE
Germany
Prior art keywords
manufacturing
field emission
emission device
field
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69305258T
Other languages
English (en)
Other versions
DE69305258T2 (de
Inventor
Igor I Bol
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE69305258D1 publication Critical patent/DE69305258D1/de
Publication of DE69305258T2 publication Critical patent/DE69305258T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02—Manufacture of cathodes
    • H01J2209/022—Cold cathodes
    • H01J2209/0223—Field emission cathodes
    • H01J2209/0226—Sharpening or resharpening of emitting point or edge
DE69305258T 1992-07-02 1993-06-29 Verfahren zur Herstellung einer Vorrichtung zur Feldemission Expired - Lifetime DE69305258T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/908,200 US5269877A (en) 1992-07-02 1992-07-02 Field emission structure and method of forming same

Publications (2)

Publication Number Publication Date
DE69305258D1 true DE69305258D1 (de) 1996-11-14
DE69305258T2 DE69305258T2 (de) 1997-03-13

Family

ID=25425354

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69305258T Expired - Lifetime DE69305258T2 (de) 1992-07-02 1993-06-29 Verfahren zur Herstellung einer Vorrichtung zur Feldemission

Country Status (4)

Country Link
US (1) US5269877A (de)
EP (1) EP0578428B1 (de)
JP (1) JP3464500B2 (de)
DE (1) DE69305258T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5532177A (en) 1993-07-07 1996-07-02 Micron Display Technology Method for forming electron emitters
US6187604B1 (en) 1994-09-16 2001-02-13 Micron Technology, Inc. Method of making field emitters using porous silicon
AU4145196A (en) 1994-11-04 1996-05-31 Micron Display Technology, Inc. Method for sharpening emitter sites using low temperature oxidation processes
US5780347A (en) * 1996-05-20 1998-07-14 Kapoor; Ashok K. Method of forming polysilicon local interconnects
GB2378570B (en) * 2001-08-11 2005-11-16 Univ Dundee Improved field emission backplate
GB2378569B (en) * 2001-08-11 2006-03-22 Univ Dundee Improved field emission backplate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5472959A (en) * 1977-11-24 1979-06-11 Hitachi Ltd Formation method of electrode of semiconductor device
US4375643A (en) * 1980-02-14 1983-03-01 Xerox Corporation Application of grown oxide bumper insulators to a high-speed VLSI SASMESFET
US4878900A (en) * 1988-07-27 1989-11-07 Sundt Thoralf M Surgical probe and suction device

Also Published As

Publication number Publication date
EP0578428A1 (de) 1994-01-12
JP3464500B2 (ja) 2003-11-10
US5269877A (en) 1993-12-14
EP0578428B1 (de) 1996-10-09
DE69305258T2 (de) 1997-03-13
JPH0689655A (ja) 1994-03-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)