DE69125762D1 - Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat - Google Patents
Piezoelektrisches/elektrostriktives Antriebselement mit keramischem SubstratInfo
- Publication number
- DE69125762D1 DE69125762D1 DE69125762T DE69125762T DE69125762D1 DE 69125762 D1 DE69125762 D1 DE 69125762D1 DE 69125762 T DE69125762 T DE 69125762T DE 69125762 T DE69125762 T DE 69125762T DE 69125762 D1 DE69125762 D1 DE 69125762D1
- Authority
- DE
- Germany
- Prior art keywords
- piezoelectric
- ceramic substrate
- drive element
- electrostrictive drive
- electrostrictive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
- H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19837490 | 1990-07-26 | ||
JP4598291 | 1991-02-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69125762D1 true DE69125762D1 (de) | 1997-05-28 |
DE69125762T2 DE69125762T2 (de) | 1997-09-11 |
Family
ID=26386083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69125762T Expired - Lifetime DE69125762T2 (de) | 1990-07-26 | 1991-07-25 | Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat |
Country Status (3)
Country | Link |
---|---|
US (2) | US5210455A (de) |
EP (1) | EP0468796B1 (de) |
DE (1) | DE69125762T2 (de) |
Families Citing this family (96)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69026765T2 (de) * | 1989-07-11 | 1996-10-24 | Ngk Insulators Ltd | Einen piezoelektrischen/elektrostriktiven Film enthaltende piezoelektrischer/elektrostriktiver Antrieb |
US5265315A (en) * | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
JPH0487253U (de) * | 1990-11-30 | 1992-07-29 | ||
DE69223096T2 (de) * | 1991-07-18 | 1998-05-28 | Ngk Insulators Ltd | Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid |
JP2665106B2 (ja) * | 1992-03-17 | 1997-10-22 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
JP3144949B2 (ja) * | 1992-05-27 | 2001-03-12 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JP3120260B2 (ja) * | 1992-12-26 | 2000-12-25 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
DE4302457A1 (de) * | 1993-01-29 | 1994-08-04 | Schlattl Werner Bavaria Tech | Punktschweißzange und Betätigungselement für eine solche Zange |
JP3106026B2 (ja) * | 1993-02-23 | 2000-11-06 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JP3151644B2 (ja) * | 1993-03-08 | 2001-04-03 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
US5504388A (en) * | 1993-03-12 | 1996-04-02 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element having electrode film(s) with specified surface roughness |
JP3318687B2 (ja) * | 1993-06-08 | 2002-08-26 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
DE4323148B4 (de) * | 1993-07-10 | 2004-04-22 | Audi Ag | Vorrichtung zum Widerstandsschweißen von Blechen |
EP0636593B1 (de) * | 1993-07-27 | 1998-09-30 | Ngk Insulators, Ltd. | Membranstruktur aus Zirkoniumoxid, Verfahren zu ihrer Herstellung und eine piezoelektrische/elektrostriktive Schichtenanordnung mit der Membranstruktur aus Zirkoniumoxid |
US6004644A (en) * | 1994-07-26 | 1999-12-21 | Ngk Insulators, Ltd. | Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure |
IT1268870B1 (it) | 1993-08-23 | 1997-03-13 | Seiko Epson Corp | Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione. |
US5345139A (en) * | 1993-08-27 | 1994-09-06 | Hewlett-Packard Company | Electrostrictive ultrasonic probe having expanded operating temperature range |
JP3280799B2 (ja) * | 1993-10-14 | 2002-05-13 | 日本碍子株式会社 | 薄肉ジルコニアダイヤフラム構造体及びその製造法並びにそれを用いた圧電/電歪膜型素子 |
US5889871A (en) * | 1993-10-18 | 1999-03-30 | The United States Of America As Represented By The Secretary Of The Navy | Surface-laminated piezoelectric-film sound transducer |
JP3521499B2 (ja) * | 1993-11-26 | 2004-04-19 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
US5612536A (en) * | 1994-02-07 | 1997-03-18 | Matsushita Electric Industrial Co., Ltd. | Thin film sensor element and method of manufacturing the same |
JP3162584B2 (ja) * | 1994-02-14 | 2001-05-08 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
US5545461A (en) * | 1994-02-14 | 1996-08-13 | Ngk Insulators, Ltd. | Ceramic diaphragm structure having convex diaphragm portion and method of producing the same |
US6049158A (en) * | 1994-02-14 | 2000-04-11 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same |
JP3187669B2 (ja) * | 1994-04-01 | 2001-07-11 | 日本碍子株式会社 | ディスプレイ素子及びディスプレイ装置 |
JPH07280637A (ja) * | 1994-04-01 | 1995-10-27 | Ngk Insulators Ltd | 失火センサ |
JP3323343B2 (ja) * | 1994-04-01 | 2002-09-09 | 日本碍子株式会社 | センサ素子及び粒子センサ |
US5552655A (en) * | 1994-05-04 | 1996-09-03 | Trw Inc. | Low frequency mechanical resonator |
JPH0820109A (ja) * | 1994-07-08 | 1996-01-23 | Nec Corp | インクジェット記録ヘッドおよびその製造方法 |
CN1050229C (zh) * | 1994-08-11 | 2000-03-08 | 日本碍子株式会社 | 压电/电致伸缩膜元件及其制作方法 |
CN1050008C (zh) * | 1994-08-11 | 2000-03-01 | 日本碍子株式会社 | 压电/电致伸缩膜元件及其制作方法 |
US5634999A (en) * | 1994-09-06 | 1997-06-03 | Ngk Insulators, Ltd. | Method of producing ceramic diaphragm structure having convex diaphragm portion |
US5790156A (en) * | 1994-09-29 | 1998-08-04 | Tektronix, Inc. | Ferroelectric relaxor actuator for an ink-jet print head |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
JP3501860B2 (ja) * | 1994-12-21 | 2004-03-02 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
WO1996020503A1 (en) * | 1994-12-27 | 1996-07-04 | Seiko Epson Corporation | Thin-film piezoelectric element, process for preparing the same, and ink jet recording head made by using said element |
JP3320596B2 (ja) | 1995-09-27 | 2002-09-03 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
JP3432974B2 (ja) * | 1995-10-13 | 2003-08-04 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
JP3344888B2 (ja) * | 1995-12-28 | 2002-11-18 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
EP0800920B1 (de) * | 1996-04-10 | 2002-02-06 | Seiko Epson Corporation | Tintenstrahlaufzeichnungskopf |
US6217158B1 (en) † | 1996-04-11 | 2001-04-17 | Seiko Epson Corporation | Layered type ink jet recording head with improved piezoelectric actuator unit |
DE19620826C2 (de) * | 1996-05-23 | 1998-07-09 | Siemens Ag | Piezoelektrischer Biegewandler sowie Verfahren zu dessen Herstellung |
EP0810676B1 (de) * | 1996-05-27 | 2002-08-28 | Ngk Insulators, Ltd. | Piezoelektrisches Element des Dünnschichttyps |
DE69707359T2 (de) * | 1996-06-14 | 2002-06-27 | Ngk Insulators Ltd | Verfahren zur Herstellung einer keramischen Membranstruktur |
US5755909A (en) * | 1996-06-26 | 1998-05-26 | Spectra, Inc. | Electroding of ceramic piezoelectric transducers |
DE19631026C2 (de) * | 1996-08-01 | 1998-09-03 | Eurocopter Deutschland | Verformbare Vorrichtung |
US5925972A (en) * | 1996-09-27 | 1999-07-20 | Ngk Insulators, Ltd. | Multiple element particle sensor and signal processing electronics |
US6091182A (en) | 1996-11-07 | 2000-07-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
US6265811B1 (en) | 1996-11-29 | 2001-07-24 | Ngk Insulators, Ltd. | Ceramic element, method for producing ceramic element, display device, relay device and capacitor |
US6211853B1 (en) * | 1996-12-16 | 2001-04-03 | Ngk Insulators, Ltd. | Optical waveguide display with voltage-modulated controlled movable actuators which cause light leakage in waveguide at each display element to provide gradation in a display image |
JPH10326088A (ja) | 1997-03-24 | 1998-12-08 | Ngk Insulators Ltd | ディスプレイの駆動装置及びディスプレイの駆動方法 |
US6247371B1 (en) * | 1997-04-04 | 2001-06-19 | Ngk Insulators, Ltd. | Three-axis sensor |
JP3411584B2 (ja) * | 1997-05-30 | 2003-06-03 | 日本碍子株式会社 | 表示装置 |
CN1246930A (zh) | 1997-11-06 | 2000-03-08 | 日本碍子株式会社 | 显示装置及其制造方法 |
US6246156B1 (en) * | 1998-03-27 | 2001-06-12 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
JP3762568B2 (ja) | 1998-08-18 | 2006-04-05 | 日本碍子株式会社 | ディスプレイの駆動装置及びディスプレイの駆動方法 |
US6572830B1 (en) | 1998-10-09 | 2003-06-03 | Motorola, Inc. | Integrated multilayered microfludic devices and methods for making the same |
US6592696B1 (en) | 1998-10-09 | 2003-07-15 | Motorola, Inc. | Method for fabricating a multilayered structure and the structures formed by the method |
US6594875B2 (en) | 1998-10-14 | 2003-07-22 | Samsung Electro-Mechanics Co. | Method for producing a piezoelectric/electrostrictive actuator |
JP4357659B2 (ja) * | 1998-10-26 | 2009-11-04 | セイコーインスツル株式会社 | 圧電体装置及びその製造方法 |
US6335586B1 (en) * | 1998-12-28 | 2002-01-01 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive device and production method thereof |
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FR2790635B1 (fr) | 1999-03-05 | 2001-04-13 | France Etat | Dispositif triboelectrique |
DE19920576C1 (de) | 1999-05-04 | 2000-06-21 | Siemens Ag | Piezoelektrischer Biegewandler |
US6690344B1 (en) | 1999-05-14 | 2004-02-10 | Ngk Insulators, Ltd. | Method and apparatus for driving device and display |
JP3845543B2 (ja) * | 1999-10-01 | 2006-11-15 | 日本碍子株式会社 | 圧電/電歪デバイス及びその製造方法 |
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EP1158333A1 (de) | 1999-12-27 | 2001-11-28 | Ngk Insulators, Ltd. | ANZEIGEVORRICHTUNG UND DAZUGEHöRIGES HERSTELLUNGSVERFAHREN |
JP3611198B2 (ja) * | 2000-02-16 | 2005-01-19 | 松下電器産業株式会社 | アクチュエータとこれを用いた情報記録再生装置 |
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JP4393068B2 (ja) * | 2001-03-12 | 2010-01-06 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータ及び製造方法 |
JP4074493B2 (ja) | 2001-08-31 | 2008-04-09 | 日本碍子株式会社 | セラミック素子 |
US6953241B2 (en) | 2001-11-30 | 2005-10-11 | Brother Kogyo Kabushiki Kaisha | Ink-jet head having passage unit and actuator units attached to the passage unit, and ink-jet printer having the ink-jet head |
JP3832338B2 (ja) * | 2001-12-25 | 2006-10-11 | 松下電工株式会社 | 電歪ポリマーアクチュエータ |
KR100599083B1 (ko) | 2003-04-22 | 2006-07-12 | 삼성전자주식회사 | 캔틸레버 형태의 압전 박막 공진 소자 및 그 제조방법 |
JP4421910B2 (ja) * | 2004-01-29 | 2010-02-24 | 日本碍子株式会社 | 熱処理用トレー及びそれを用いたセラミック製品の製造方法 |
JP5026796B2 (ja) * | 2004-12-22 | 2012-09-19 | 日本碍子株式会社 | ダイヤフラム構造体 |
CN102084133A (zh) * | 2008-04-30 | 2011-06-01 | 丹佛斯强力聚合公司 | 由聚合物换能器提供动力的泵 |
KR101578271B1 (ko) | 2010-11-26 | 2015-12-16 | 캐논 가부시끼가이샤 | 압전 세라믹, 압전 세라믹의 제조 방법, 압전 소자, 액체 토출 헤드, 초음파 모터 및 먼지 클리너 |
EP2663538B1 (de) | 2011-02-28 | 2014-12-24 | Canon Kabushiki Kaisha | Piezoelektrisches material, piezoelektrisches element, flüssigkeitsausstosskopf, ultraschallmotor und staubentferner |
US9679779B2 (en) | 2011-03-30 | 2017-06-13 | The Aerospace Corporation | Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same |
US9583354B2 (en) * | 2011-03-30 | 2017-02-28 | The Aerospace Corporation | Systems and methods for depositing materials on either side of a freestanding film using laser-assisted chemical vapor deposition (LA-CVD), and structures formed using same |
US8692442B2 (en) | 2012-02-14 | 2014-04-08 | Danfoss Polypower A/S | Polymer transducer and a connector for a transducer |
US8891222B2 (en) | 2012-02-14 | 2014-11-18 | Danfoss A/S | Capacitive transducer and a method for manufacturing a transducer |
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CN104271533A (zh) | 2012-03-30 | 2015-01-07 | 佳能株式会社 | 压电陶瓷、用于制造压电陶瓷的方法、压电元件和电子装置 |
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US4906840A (en) * | 1988-01-27 | 1990-03-06 | The Board Of Trustees Of Leland Stanford Jr., University | Integrated scanning tunneling microscope |
WO1989008336A1 (en) * | 1988-02-29 | 1989-09-08 | The Regents Of The University Of California | Plate-mode ultrasonic sensor |
US4825227A (en) * | 1988-02-29 | 1989-04-25 | Spectra, Inc. | Shear mode transducer for ink jet systems |
US4806188A (en) * | 1988-03-04 | 1989-02-21 | E. I. Du Pont De Nemours And Company | Method for fabricating multilayer circuits |
US4848643A (en) * | 1988-09-19 | 1989-07-18 | Honeywell Inc. | Process of bonding plates |
JP2886588B2 (ja) * | 1989-07-11 | 1999-04-26 | 日本碍子株式会社 | 圧電/電歪アクチュエータ |
JP2842448B2 (ja) * | 1989-07-11 | 1999-01-06 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータ |
US5089071A (en) * | 1989-11-03 | 1992-02-18 | Nitto Electrical Industrial | Process for producing a multilayered ceramic structure using an adhesive film |
US5075641A (en) * | 1990-12-04 | 1991-12-24 | Iowa State University Research Foundation, Inc. | High frequency oscillator comprising cointegrated thin film resonator and active device |
US5176771A (en) * | 1991-12-23 | 1993-01-05 | Hughes Aircraft Company | Multilayer ceramic tape substrate having cavities formed in the upper layer thereof and method of fabricating the same by printing and delamination |
-
1991
- 1991-07-23 US US07/734,695 patent/US5210455A/en not_active Expired - Lifetime
- 1991-07-25 DE DE69125762T patent/DE69125762T2/de not_active Expired - Lifetime
- 1991-07-25 EP EP91306804A patent/EP0468796B1/de not_active Expired - Lifetime
-
1993
- 1993-02-04 US US08/013,046 patent/US5681410A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5210455A (en) | 1993-05-11 |
EP0468796B1 (de) | 1997-04-23 |
DE69125762T2 (de) | 1997-09-11 |
US5681410A (en) | 1997-10-28 |
EP0468796A1 (de) | 1992-01-29 |
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