DE69125762D1 - Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat - Google Patents

Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat

Info

Publication number
DE69125762D1
DE69125762D1 DE69125762T DE69125762T DE69125762D1 DE 69125762 D1 DE69125762 D1 DE 69125762D1 DE 69125762 T DE69125762 T DE 69125762T DE 69125762 T DE69125762 T DE 69125762T DE 69125762 D1 DE69125762 D1 DE 69125762D1
Authority
DE
Germany
Prior art keywords
piezoelectric
ceramic substrate
drive element
electrostrictive drive
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69125762T
Other languages
English (en)
Other versions
DE69125762T2 (de
Inventor
Yukihisa Takeuchi
Kouji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69125762D1 publication Critical patent/DE69125762D1/de
Application granted granted Critical
Publication of DE69125762T2 publication Critical patent/DE69125762T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
    • H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
DE69125762T 1990-07-26 1991-07-25 Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat Expired - Lifetime DE69125762T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19837490 1990-07-26
JP4598291 1991-02-19

Publications (2)

Publication Number Publication Date
DE69125762D1 true DE69125762D1 (de) 1997-05-28
DE69125762T2 DE69125762T2 (de) 1997-09-11

Family

ID=26386083

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69125762T Expired - Lifetime DE69125762T2 (de) 1990-07-26 1991-07-25 Piezoelektrisches/elektrostriktives Antriebselement mit keramischem Substrat

Country Status (3)

Country Link
US (2) US5210455A (de)
EP (1) EP0468796B1 (de)
DE (1) DE69125762T2 (de)

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US5210455A (en) 1993-05-11
EP0468796B1 (de) 1997-04-23
DE69125762T2 (de) 1997-09-11
US5681410A (en) 1997-10-28
EP0468796A1 (de) 1992-01-29

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