DE69223096D1 - Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid - Google Patents

Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid

Info

Publication number
DE69223096D1
DE69223096D1 DE69223096T DE69223096T DE69223096D1 DE 69223096 D1 DE69223096 D1 DE 69223096D1 DE 69223096 T DE69223096 T DE 69223096T DE 69223096 T DE69223096 T DE 69223096T DE 69223096 D1 DE69223096 D1 DE 69223096D1
Authority
DE
Germany
Prior art keywords
piezoelectric
ceramic substrate
substrate made
zirconium dioxide
electrostrictive element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69223096T
Other languages
English (en)
Other versions
DE69223096T2 (de
Inventor
Yukihisa Takeuchi
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3203831A external-priority patent/JP3009945B2/ja
Priority claimed from JP28349491A external-priority patent/JP3272004B2/ja
Priority claimed from JP04094742A external-priority patent/JP3126212B2/ja
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69223096D1 publication Critical patent/DE69223096D1/de
Application granted granted Critical
Publication of DE69223096T2 publication Critical patent/DE69223096T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
    • H10N30/706—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings characterised by the underlying bases, e.g. substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
DE69223096T 1991-07-18 1992-07-16 Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid Expired - Lifetime DE69223096T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3203831A JP3009945B2 (ja) 1991-07-18 1991-07-18 圧電／電歪膜型素子
JP28349491A JP3272004B2 (ja) 1991-10-03 1991-10-03 圧電／電歪膜型素子
JP04094742A JP3126212B2 (ja) 1992-03-21 1992-03-21 圧電／電歪膜型素子

Publications (2)

Publication Number Publication Date
DE69223096D1 true DE69223096D1 (de) 1997-12-18
DE69223096T2 DE69223096T2 (de) 1998-05-28

Family

ID=27307629

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69223096T Expired - Lifetime DE69223096T2 (de) 1991-07-18 1992-07-16 Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid

Country Status (4)

Country Link
US (2) US5430344A (de)
EP (1) EP0526048B1 (de)
DE (1) DE69223096T2 (de)
HK (1) HK1003608A1 (de)

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Also Published As

Publication number Publication date
US5691594A (en) 1997-11-25
EP0526048A1 (de) 1993-02-03
US5430344A (en) 1995-07-04
EP0526048B1 (de) 1997-11-12
DE69223096T2 (de) 1998-05-28
HK1003608A1 (en) 1998-10-30

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