DE69009918T2 - Planare Heizungsvorrichtung mit einer Vielzahl von Bereichen und Betriebsweise. - Google Patents

Planare Heizungsvorrichtung mit einer Vielzahl von Bereichen und Betriebsweise.

Info

Publication number
DE69009918T2
DE69009918T2 DE69009918T DE69009918T DE69009918T2 DE 69009918 T2 DE69009918 T2 DE 69009918T2 DE 69009918 T DE69009918 T DE 69009918T DE 69009918 T DE69009918 T DE 69009918T DE 69009918 T2 DE69009918 T2 DE 69009918T2
Authority
DE
Germany
Prior art keywords
areas
variety
planar heater
heater
planar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69009918T
Other languages
English (en)
Other versions
DE69009918D1 (de
Inventor
Imad Mahawili
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Silicon Valley Group Thermal Systems LLC
Original Assignee
Watkins Johnson Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Watkins Johnson Co filed Critical Watkins Johnson Co
Application granted granted Critical
Publication of DE69009918D1 publication Critical patent/DE69009918D1/de
Publication of DE69009918T2 publication Critical patent/DE69009918T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/345—Arrangements for heating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
DE69009918T 1989-09-19 1990-08-10 Planare Heizungsvorrichtung mit einer Vielzahl von Bereichen und Betriebsweise. Expired - Fee Related DE69009918T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/409,125 US5059770A (en) 1989-09-19 1989-09-19 Multi-zone planar heater assembly and method of operation

Publications (2)

Publication Number Publication Date
DE69009918D1 DE69009918D1 (de) 1994-07-21
DE69009918T2 true DE69009918T2 (de) 1994-09-22

Family

ID=23619150

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69009918T Expired - Fee Related DE69009918T2 (de) 1989-09-19 1990-08-10 Planare Heizungsvorrichtung mit einer Vielzahl von Bereichen und Betriebsweise.

Country Status (5)

Country Link
US (1) US5059770A (de)
EP (1) EP0418541B1 (de)
JP (1) JPH0652722B2 (de)
KR (1) KR0160510B1 (de)
DE (1) DE69009918T2 (de)

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US7387811B2 (en) * 2004-09-21 2008-06-17 Superpower, Inc. Method for manufacturing high temperature superconducting conductors using chemical vapor deposition (CVD)
US7645342B2 (en) * 2004-11-15 2010-01-12 Cree, Inc. Restricted radiated heating assembly for high temperature processing
DE102004055449B4 (de) * 2004-11-17 2008-10-23 Steag Hamatech Ag Verfahren und Vorrichtung zum thermischen Behandeln von Substraten
US7926440B1 (en) * 2004-11-27 2011-04-19 Etamota Corporation Nanostructure synthesis apparatus and method
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Also Published As

Publication number Publication date
US5059770A (en) 1991-10-22
JPH03108323A (ja) 1991-05-08
KR910007069A (ko) 1991-04-30
EP0418541A2 (de) 1991-03-27
DE69009918D1 (de) 1994-07-21
KR0160510B1 (ko) 1999-02-01
EP0418541B1 (de) 1994-06-15
JPH0652722B2 (ja) 1994-07-06
EP0418541A3 (en) 1992-02-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN

8327 Change in the person/name/address of the patent owner

Owner name: SILICON VALLEY GROUP, THERMAL SYSTEMS LLC, SCOTTS

8339 Ceased/non-payment of the annual fee