JPS5183777A - Kisoseichosochi - Google Patents

Kisoseichosochi

Info

Publication number
JPS5183777A
JPS5183777A JP901175A JP901175A JPS5183777A JP S5183777 A JPS5183777 A JP S5183777A JP 901175 A JP901175 A JP 901175A JP 901175 A JP901175 A JP 901175A JP S5183777 A JPS5183777 A JP S5183777A
Authority
JP
Japan
Prior art keywords
kisoseichosochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP901175A
Other languages
English (en)
Other versions
JPS5739050B2 (ja
Inventor
Shinichi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP901175A priority Critical patent/JPS5183777A/ja
Publication of JPS5183777A publication Critical patent/JPS5183777A/ja
Publication of JPS5739050B2 publication Critical patent/JPS5739050B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP901175A 1975-01-21 1975-01-21 Kisoseichosochi Granted JPS5183777A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP901175A JPS5183777A (ja) 1975-01-21 1975-01-21 Kisoseichosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP901175A JPS5183777A (ja) 1975-01-21 1975-01-21 Kisoseichosochi

Publications (2)

Publication Number Publication Date
JPS5183777A true JPS5183777A (ja) 1976-07-22
JPS5739050B2 JPS5739050B2 (ja) 1982-08-19

Family

ID=11708697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP901175A Granted JPS5183777A (ja) 1975-01-21 1975-01-21 Kisoseichosochi

Country Status (1)

Country Link
JP (1) JPS5183777A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61143578A (ja) * 1975-09-02 1986-07-01 テキサス、インスツルメンツ、インコ−ポレイテツド 化学蒸着反応器
JPS62173712A (ja) * 1986-01-27 1987-07-30 Hitachi Ltd 気相成長装置
JPH03108323A (ja) * 1989-09-19 1991-05-08 Watkins Johnson Co ヒータ組立体及び基板の加熱方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61143578A (ja) * 1975-09-02 1986-07-01 テキサス、インスツルメンツ、インコ−ポレイテツド 化学蒸着反応器
JPS62173712A (ja) * 1986-01-27 1987-07-30 Hitachi Ltd 気相成長装置
JPH0545054B2 (ja) * 1986-01-27 1993-07-08 Hitachi Ltd
JPH03108323A (ja) * 1989-09-19 1991-05-08 Watkins Johnson Co ヒータ組立体及び基板の加熱方法
JPH0652722B2 (ja) * 1989-09-19 1994-07-06 ワトキンズ―ジョンソン カンパニー ヒータ組立体及び基板の加熱方法

Also Published As

Publication number Publication date
JPS5739050B2 (ja) 1982-08-19

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