DE60331042D1 - Verfahren zur Bearbeitung von einem Nitrid-Halbleiterwafer - Google Patents
Verfahren zur Bearbeitung von einem Nitrid-HalbleiterwaferInfo
- Publication number
- DE60331042D1 DE60331042D1 DE60331042T DE60331042T DE60331042D1 DE 60331042 D1 DE60331042 D1 DE 60331042D1 DE 60331042 T DE60331042 T DE 60331042T DE 60331042 T DE60331042 T DE 60331042T DE 60331042 D1 DE60331042 D1 DE 60331042D1
- Authority
- DE
- Germany
- Prior art keywords
- processing
- semiconductor wafer
- nitride semiconductor
- nitride
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000004767 nitrides Chemical class 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/38—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/959—Mechanical polishing of wafer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Weting (AREA)
- Recrystallisation Techniques (AREA)
- Led Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003128060 | 2003-05-06 | ||
JP2003281647A JP3581145B6 (ja) | 2003-05-06 | 2003-07-29 | 窒化物半導体基板の加工方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60331042D1 true DE60331042D1 (de) | 2010-03-11 |
Family
ID=32993114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60331042T Expired - Lifetime DE60331042D1 (de) | 2003-05-06 | 2003-10-23 | Verfahren zur Bearbeitung von einem Nitrid-Halbleiterwafer |
Country Status (6)
Country | Link |
---|---|
US (4) | US6875082B2 (de) |
EP (1) | EP1475826B1 (de) |
KR (1) | KR100550491B1 (de) |
CN (1) | CN100416868C (de) |
DE (1) | DE60331042D1 (de) |
TW (1) | TWI239045B (de) |
Families Citing this family (77)
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JP4340866B2 (ja) * | 2003-11-14 | 2009-10-07 | 日立電線株式会社 | 窒化物半導体基板及びその製造方法 |
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JP4696886B2 (ja) * | 2005-12-08 | 2011-06-08 | 日立電線株式会社 | 自立した窒化ガリウム単結晶基板の製造方法、および窒化物半導体素子の製造方法 |
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US6488767B1 (en) | 2001-06-08 | 2002-12-03 | Advanced Technology Materials, Inc. | High surface quality GaN wafer and method of fabricating same |
US6648966B2 (en) * | 2001-08-01 | 2003-11-18 | Crystal Photonics, Incorporated | Wafer produced thereby, and associated methods and devices using the wafer |
JP3864870B2 (ja) | 2001-09-19 | 2007-01-10 | 住友電気工業株式会社 | 単結晶窒化ガリウム基板およびその成長方法並びにその製造方法 |
JP4131101B2 (ja) | 2001-11-28 | 2008-08-13 | 日亜化学工業株式会社 | 窒化物半導体素子の製造方法 |
KR100550491B1 (ko) * | 2003-05-06 | 2006-02-09 | 스미토모덴키고교가부시키가이샤 | 질화물 반도체 기판 및 질화물 반도체 기판의 가공 방법 |
-
2003
- 2003-08-20 KR KR1020030057423A patent/KR100550491B1/ko not_active IP Right Cessation
- 2003-08-26 TW TW092123467A patent/TWI239045B/zh not_active IP Right Cessation
- 2003-09-04 CN CNB031580572A patent/CN100416868C/zh not_active Expired - Lifetime
- 2003-09-22 US US10/665,483 patent/US6875082B2/en not_active Expired - Fee Related
- 2003-10-23 EP EP03024444A patent/EP1475826B1/de not_active Expired - Fee Related
- 2003-10-23 DE DE60331042T patent/DE60331042D1/de not_active Expired - Lifetime
-
2005
- 2005-02-11 US US11/055,599 patent/US7535082B2/en not_active Expired - Lifetime
-
2009
- 2009-02-27 US US12/394,477 patent/US7786488B2/en not_active Expired - Lifetime
-
2010
- 2010-07-14 US US12/836,001 patent/US8008165B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1475826A2 (de) | 2004-11-10 |
KR100550491B1 (ko) | 2006-02-09 |
JP2004356609A (ja) | 2004-12-16 |
US20090250790A1 (en) | 2009-10-08 |
CN1549357A (zh) | 2004-11-24 |
EP1475826B1 (de) | 2010-01-20 |
CN100416868C (zh) | 2008-09-03 |
US20040221799A1 (en) | 2004-11-11 |
KR20040095138A (ko) | 2004-11-12 |
US7786488B2 (en) | 2010-08-31 |
US20100279440A1 (en) | 2010-11-04 |
US6875082B2 (en) | 2005-04-05 |
US8008165B2 (en) | 2011-08-30 |
TW200425286A (en) | 2004-11-16 |
EP1475826A3 (de) | 2005-04-27 |
US20050145879A1 (en) | 2005-07-07 |
TWI239045B (en) | 2005-09-01 |
US7535082B2 (en) | 2009-05-19 |
JP3581145B1 (ja) | 2004-10-27 |
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