DE602004020550D1 - Verfahren zur Untersuchung von Halbleitern - Google Patents
Verfahren zur Untersuchung von HalbleiternInfo
- Publication number
- DE602004020550D1 DE602004020550D1 DE602004020550T DE602004020550T DE602004020550D1 DE 602004020550 D1 DE602004020550 D1 DE 602004020550D1 DE 602004020550 T DE602004020550 T DE 602004020550T DE 602004020550 T DE602004020550 T DE 602004020550T DE 602004020550 D1 DE602004020550 D1 DE 602004020550D1
- Authority
- DE
- Germany
- Prior art keywords
- studying
- semiconductors
- studying semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003274511A JP4136832B2 (ja) | 2003-07-15 | 2003-07-15 | 半導体レーザーダイオードチップの検査方法および検査装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602004020550D1 true DE602004020550D1 (de) | 2009-05-28 |
Family
ID=33475552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602004020550T Active DE602004020550D1 (de) | 2003-07-15 | 2004-07-05 | Verfahren zur Untersuchung von Halbleitern |
Country Status (6)
Country | Link |
---|---|
US (2) | US7015051B2 (de) |
EP (1) | EP1498727B1 (de) |
JP (1) | JP4136832B2 (de) |
KR (1) | KR100633460B1 (de) |
DE (1) | DE602004020550D1 (de) |
TW (1) | TWI245356B (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6898138B2 (en) * | 2002-08-29 | 2005-05-24 | Micron Technology, Inc. | Method of reducing variable retention characteristics in DRAM cells |
JP4334927B2 (ja) * | 2003-06-27 | 2009-09-30 | キヤノン株式会社 | 半導体レーザーダイオードチップの検査方法および検査装置 |
KR100688551B1 (ko) | 2005-06-07 | 2007-03-02 | 삼성전자주식회사 | 인터록기능을 구비한 반도체 웨이퍼 마킹장치 및 이를이용한 반도체 웨이퍼 마킹방법 |
JP4363368B2 (ja) * | 2005-06-13 | 2009-11-11 | 住友電気工業株式会社 | 化合物半導体部材のダメージ評価方法、及び化合物半導体部材の製造方法 |
JP2007081197A (ja) * | 2005-09-15 | 2007-03-29 | Sony Corp | 半導体レーザおよびその製造方法 |
JP4694970B2 (ja) * | 2006-01-16 | 2011-06-08 | 三洋電機株式会社 | 半導体素子解析方法 |
FR2902926B1 (fr) * | 2006-06-22 | 2008-10-24 | Commissariat Energie Atomique | Procede et dispositif de suivi d'un traitement thermique d'un substrat microtechnologique. |
KR100827819B1 (ko) * | 2007-02-21 | 2008-05-07 | 전북대학교산학협력단 | 반도체 나노물질의 캐리어 타입 측정 시스템 및 반도체나노물질의 캐리어 타입의 측정 방법 |
JP4374552B2 (ja) * | 2007-04-12 | 2009-12-02 | ソニー株式会社 | 基板の製造方法および基板製造システム、並びに表示装置の製造方法 |
US7919973B2 (en) * | 2007-06-22 | 2011-04-05 | Microchip Technology Incorporated | Method and apparatus for monitoring via's in a semiconductor fab |
JP2009008626A (ja) | 2007-06-29 | 2009-01-15 | Nec Electronics Corp | 故障解析方法及び故障解析装置 |
JP6137536B2 (ja) * | 2013-04-26 | 2017-05-31 | 日本電産リード株式会社 | 基板検査装置、及び基板検査方法 |
DE102016008509A1 (de) * | 2016-07-13 | 2018-01-18 | Siltectra Gmbh | Laserkonditionierung von Festkörpern mit Vorwissen aus vorherigen Bearbeitungsschritten |
CN110031188B (zh) * | 2019-03-29 | 2021-08-27 | 上海华岭集成电路技术股份有限公司 | 集成电路光学芯片光圈测试方法 |
JP7092089B2 (ja) * | 2019-04-10 | 2022-06-28 | 株式会社Sumco | 半導体製品の導電型判別装置および導電型判別方法 |
JP2022191643A (ja) * | 2021-06-16 | 2022-12-28 | 住友電気工業株式会社 | 面発光レーザの製造方法、面発光レーザの検査方法及び面発光レーザの検査装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5422498A (en) * | 1993-04-13 | 1995-06-06 | Nec Corporation | Apparatus for diagnosing interconnections of semiconductor integrated circuits |
US5708371A (en) * | 1995-03-16 | 1998-01-13 | Mitsubishi Denki Kabushiki Kaisha | Scanning photoinduced current analyzer capable of detecting photoinduced current in nonbiased specimen |
US5952837A (en) * | 1995-07-18 | 1999-09-14 | Mitsubishi Denki Kabushiki Kaisha | Scanning photoinduced current analyzer capable of detecting photoinduced current in nonbiased specimen |
DE19725679A1 (de) | 1997-06-18 | 1999-01-28 | Innomess Elektronik Gmbh | Verfahren und Vorrichtung zur Bestimmung der elektrischen Inhomogenität von Halbleitern |
DE69940335D1 (de) * | 1998-09-28 | 2009-03-12 | Nec Electronics Corp | Vorrichtung und Verfahren zum zerstörungsfreien Prüfen einer Halbleiteranordnung |
JP4334927B2 (ja) * | 2003-06-27 | 2009-09-30 | キヤノン株式会社 | 半導体レーザーダイオードチップの検査方法および検査装置 |
-
2003
- 2003-07-15 JP JP2003274511A patent/JP4136832B2/ja not_active Expired - Fee Related
-
2004
- 2004-06-25 TW TW093118671A patent/TWI245356B/zh not_active IP Right Cessation
- 2004-06-30 US US10/879,060 patent/US7015051B2/en not_active Expired - Fee Related
- 2004-07-05 EP EP04015767A patent/EP1498727B1/de not_active Expired - Fee Related
- 2004-07-05 DE DE602004020550T patent/DE602004020550D1/de active Active
- 2004-07-15 KR KR1020040054978A patent/KR100633460B1/ko not_active IP Right Cessation
-
2005
- 2005-11-28 US US11/287,458 patent/US7332362B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW200504910A (en) | 2005-02-01 |
TWI245356B (en) | 2005-12-11 |
KR20050008530A (ko) | 2005-01-21 |
JP2005039054A (ja) | 2005-02-10 |
JP4136832B2 (ja) | 2008-08-20 |
US20060079058A1 (en) | 2006-04-13 |
US7332362B2 (en) | 2008-02-19 |
US20050012923A1 (en) | 2005-01-20 |
US7015051B2 (en) | 2006-03-21 |
EP1498727B1 (de) | 2009-04-15 |
KR100633460B1 (ko) | 2006-10-16 |
EP1498727A1 (de) | 2005-01-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |