DE60127035D1 - Thermisches Sprühbeschichtungsverfahren und Pulver aus Oxyden der seltenen Erden dafür - Google Patents
Thermisches Sprühbeschichtungsverfahren und Pulver aus Oxyden der seltenen Erden dafürInfo
- Publication number
- DE60127035D1 DE60127035D1 DE60127035T DE60127035T DE60127035D1 DE 60127035 D1 DE60127035 D1 DE 60127035D1 DE 60127035 T DE60127035 T DE 60127035T DE 60127035 T DE60127035 T DE 60127035T DE 60127035 D1 DE60127035 D1 DE 60127035D1
- Authority
- DE
- Germany
- Prior art keywords
- rare earth
- coating process
- spray coating
- thermal spray
- earth oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title 1
- 239000000843 powder Substances 0.000 title 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 title 1
- 238000005507 spraying Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000196037 | 2000-06-29 | ||
JP2000196037 | 2000-06-29 | ||
JP2001064249 | 2001-03-08 | ||
JP2001064249A JP3672833B2 (ja) | 2000-06-29 | 2001-03-08 | 溶射粉及び溶射被膜 |
JP2001109099 | 2001-04-06 | ||
JP2001109099A JP3523216B2 (ja) | 2001-04-06 | 2001-04-06 | 溶射用希土類含有化合物粒子、これを溶射した溶射部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60127035D1 true DE60127035D1 (de) | 2007-04-19 |
DE60127035T2 DE60127035T2 (de) | 2007-11-08 |
Family
ID=27343891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60127035T Expired - Lifetime DE60127035T2 (de) | 2000-06-29 | 2001-06-25 | Thermisches Sprühbeschichtungsverfahren und Pulver aus Oxyden der seltenen Erden dafür |
Country Status (6)
Country | Link |
---|---|
US (2) | US6576354B2 (de) |
EP (2) | EP1642994B8 (de) |
KR (1) | KR100612796B1 (de) |
CN (1) | CN1201030C (de) |
DE (1) | DE60127035T2 (de) |
TW (1) | TW593761B (de) |
Families Citing this family (91)
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US20050112289A1 (en) * | 2003-03-03 | 2005-05-26 | Trickett Douglas M. | Method for coating internal surface of plasma processing chamber |
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JP4571561B2 (ja) * | 2005-09-08 | 2010-10-27 | トーカロ株式会社 | 耐プラズマエロージョン性に優れる溶射皮膜被覆部材およびその製造方法 |
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JP6939853B2 (ja) * | 2018-08-15 | 2021-09-22 | 信越化学工業株式会社 | 溶射皮膜、溶射皮膜の製造方法、及び溶射部材 |
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TW503449B (en) * | 2000-04-18 | 2002-09-21 | Ngk Insulators Ltd | Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members |
-
2001
- 2001-06-25 EP EP05291531.1A patent/EP1642994B8/de not_active Expired - Lifetime
- 2001-06-25 DE DE60127035T patent/DE60127035T2/de not_active Expired - Lifetime
- 2001-06-25 EP EP01401676A patent/EP1167565B1/de not_active Expired - Lifetime
- 2001-06-28 KR KR1020010037364A patent/KR100612796B1/ko active IP Right Grant
- 2001-06-29 US US09/893,565 patent/US6576354B2/en not_active Expired - Lifetime
- 2001-06-29 CN CNB011259418A patent/CN1201030C/zh not_active Expired - Lifetime
- 2001-06-29 TW TW090116050A patent/TW593761B/zh not_active IP Right Cessation
-
2003
- 2003-04-28 US US10/423,903 patent/US6733843B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6576354B2 (en) | 2003-06-10 |
TW593761B (en) | 2004-06-21 |
DE60127035T2 (de) | 2007-11-08 |
CN1201030C (zh) | 2005-05-11 |
KR100612796B1 (ko) | 2006-08-17 |
EP1642994A3 (de) | 2008-03-19 |
US20030203120A1 (en) | 2003-10-30 |
US6733843B2 (en) | 2004-05-11 |
EP1642994B1 (de) | 2016-12-21 |
EP1642994A2 (de) | 2006-04-05 |
EP1167565A3 (de) | 2002-02-20 |
US20020018902A1 (en) | 2002-02-14 |
EP1167565A2 (de) | 2002-01-02 |
EP1167565B1 (de) | 2007-03-07 |
CN1342782A (zh) | 2002-04-03 |
KR20020001650A (ko) | 2002-01-09 |
EP1642994B8 (de) | 2017-04-19 |
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