DE60127035D1 - Thermal spray coating process and rare earth oxide powders therefor - Google Patents

Thermal spray coating process and rare earth oxide powders therefor

Info

Publication number
DE60127035D1
DE60127035D1 DE60127035T DE60127035T DE60127035D1 DE 60127035 D1 DE60127035 D1 DE 60127035D1 DE 60127035 T DE60127035 T DE 60127035T DE 60127035 T DE60127035 T DE 60127035T DE 60127035 D1 DE60127035 D1 DE 60127035D1
Authority
DE
Germany
Prior art keywords
rare earth
coating process
spray coating
thermal spray
earth oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60127035T
Other languages
German (de)
Other versions
DE60127035T2 (en
Inventor
Toshihiko Tsukatani
Yasushi Takai
Takao Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001064249A external-priority patent/JP3672833B2/en
Priority claimed from JP2001109099A external-priority patent/JP3523216B2/en
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Publication of DE60127035D1 publication Critical patent/DE60127035D1/en
Application granted granted Critical
Publication of DE60127035T2 publication Critical patent/DE60127035T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11Oxides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/25Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982Particulate matter [e.g., sphere, flake, etc.]
DE60127035T 2000-06-29 2001-06-25 Thermal spray coating process and rare earth oxide powders therefor Expired - Lifetime DE60127035T2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2000196037 2000-06-29
JP2000196037 2000-06-29
JP2001064249A JP3672833B2 (en) 2000-06-29 2001-03-08 Thermal spray powder and thermal spray coating
JP2001064249 2001-03-08
JP2001109099A JP3523216B2 (en) 2001-04-06 2001-04-06 Rare earth-containing compound particles for thermal spraying, thermal spraying member sprayed with the same
JP2001109099 2001-04-06

Publications (2)

Publication Number Publication Date
DE60127035D1 true DE60127035D1 (en) 2007-04-19
DE60127035T2 DE60127035T2 (en) 2007-11-08

Family

ID=27343891

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60127035T Expired - Lifetime DE60127035T2 (en) 2000-06-29 2001-06-25 Thermal spray coating process and rare earth oxide powders therefor

Country Status (6)

Country Link
US (2) US6576354B2 (en)
EP (2) EP1642994B8 (en)
KR (1) KR100612796B1 (en)
CN (1) CN1201030C (en)
DE (1) DE60127035T2 (en)
TW (1) TW593761B (en)

Families Citing this family (89)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6686045B2 (en) * 2001-01-31 2004-02-03 Shin-Etsu Chemical Co., Ltd. Composite fine particles, conductive paste, and conductive film
EP1239055B1 (en) * 2001-03-08 2017-03-01 Shin-Etsu Chemical Co., Ltd. Thermal spray spherical particles, and sprayed components
EP1243666B1 (en) * 2001-03-21 2008-05-07 Shin-Etsu Chemical Co., Ltd. Thermal spray rare earth oxide particles, sprayed components and corrosion resistant components
US6596397B2 (en) * 2001-04-06 2003-07-22 Shin-Etsu Chemical Co., Ltd. Thermal spray particles and sprayed components
JP2003073794A (en) 2001-06-18 2003-03-12 Shin Etsu Chem Co Ltd Heat-resistant coated member
US7479304B2 (en) * 2002-02-14 2009-01-20 Applied Materials, Inc. Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate
US6780787B2 (en) * 2002-03-21 2004-08-24 Lam Research Corporation Low contamination components for semiconductor processing apparatus and methods for making components
US7166200B2 (en) * 2002-09-30 2007-01-23 Tokyo Electron Limited Method and apparatus for an improved upper electrode plate in a plasma processing system
JP3825737B2 (en) 2002-10-24 2006-09-27 住友重機械工業株式会社 Precision positioning device and processing machine using the same
TW200420431A (en) * 2002-11-20 2004-10-16 Shinetsu Chemical Co Heat resistant coated member, making method, and treatment using the same
JP3829935B2 (en) 2002-12-27 2006-10-04 信越化学工業株式会社 High voltage resistance member
DE60209295T2 (en) * 2002-12-30 2006-11-02 Shin-Etsu Chemical Co., Ltd. Heat-resistant coated element
CN1705561A (en) * 2003-01-27 2005-12-07 东京毅力科创株式会社 Method and apparatus for improved fastening hardware
JP2004241203A (en) * 2003-02-04 2004-08-26 Hitachi High-Technologies Corp Treatment method of plasma treatment chamber wall
ES2464782T3 (en) * 2003-02-25 2014-06-04 A.L.M.T. Corp. Refractory metal plate coated with an oxide surface layer, and load support for sintering that uses it
US20050112289A1 (en) * 2003-03-03 2005-05-26 Trickett Douglas M. Method for coating internal surface of plasma processing chamber
JP2004332081A (en) * 2003-05-12 2004-11-25 Shin Etsu Chem Co Ltd Plasma resistant member, and its production method
JP4666575B2 (en) * 2004-11-08 2011-04-06 東京エレクトロン株式会社 Manufacturing method of ceramic sprayed member, program for executing the method, storage medium, and ceramic sprayed member
JP4560387B2 (en) * 2004-11-30 2010-10-13 株式会社フジミインコーポレーテッド Thermal spray powder, thermal spraying method and thermal spray coating
US7552521B2 (en) * 2004-12-08 2009-06-30 Tokyo Electron Limited Method and apparatus for improved baffle plate
US7601242B2 (en) * 2005-01-11 2009-10-13 Tokyo Electron Limited Plasma processing system and baffle assembly for use in plasma processing system
US20060225654A1 (en) * 2005-03-29 2006-10-12 Fink Steven T Disposable plasma reactor materials and methods
US7527832B2 (en) * 2005-04-27 2009-05-05 Ferro Corporation Process for structuring self-cleaning glass surfaces
US7666494B2 (en) * 2005-05-04 2010-02-23 3M Innovative Properties Company Microporous article having metallic nanoparticle coating
JP2009501095A (en) * 2005-07-14 2009-01-15 スリーエム イノベイティブ プロパティズ カンパニー Water-soluble polymer substrate with metallic nanoparticle coating
KR101021459B1 (en) * 2005-08-22 2011-03-15 도카로 가부시키가이샤 Structural member coated with spray coating film excellent in damage resistance and the like, and method for production thereof
JP4555864B2 (en) * 2005-08-22 2010-10-06 トーカロ株式会社 Thermal spray coating coated member having excellent heat radiation characteristics and method for producing the same
JP4571561B2 (en) * 2005-09-08 2010-10-27 トーカロ株式会社 Thermal spray coating coated member having excellent plasma erosion resistance and method for producing the same
DE102006046517A1 (en) * 2005-09-30 2007-05-03 Fujimi Incorporated, Kiyosu Thermal spray powder and method of forming a thermal spray coating
KR101333149B1 (en) * 2005-09-30 2013-11-26 가부시키가이샤 후지미인코퍼레이티드 Thermal spray coating
US8017230B2 (en) * 2005-10-31 2011-09-13 Praxair S.T. Technology, Inc. Ceramic powders and thermal barrier coatings made therefrom
JP4630799B2 (en) * 2005-11-02 2011-02-09 株式会社フジミインコーポレーテッド Thermal spray powder and method of forming thermal spray coating
JP2007126712A (en) * 2005-11-02 2007-05-24 Fujimi Inc Powder for thermal spraying and method for forming thermally sprayed coating
US7850864B2 (en) * 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method
US20080032065A1 (en) * 2006-03-30 2008-02-07 High Performance Coatings, Inc. Methods for coating engine valves with protective coatings using infrared radiation
JP5159204B2 (en) * 2006-10-31 2013-03-06 株式会社フジミインコーポレーテッド Thermal spray powder, thermal spray coating formation method, plasma resistant member, and plasma processing chamber
JP2008115407A (en) * 2006-10-31 2008-05-22 Fujimi Inc Thermal-spraying powder and method for depositing sprayed coating
US8802192B2 (en) * 2006-12-07 2014-08-12 National Institute For Materials Science Warm spray coating method and particles used therefor
US20080241377A1 (en) * 2007-03-29 2008-10-02 Tokyo Electron Limited Vapor deposition system and method of operating
US9157152B2 (en) * 2007-03-29 2015-10-13 Tokyo Electron Limited Vapor deposition system
US10622194B2 (en) 2007-04-27 2020-04-14 Applied Materials, Inc. Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance
US10242888B2 (en) 2007-04-27 2019-03-26 Applied Materials, Inc. Semiconductor processing apparatus with a ceramic-comprising surface which exhibits fracture toughness and halogen plasma resistance
KR100868093B1 (en) * 2007-05-28 2008-11-10 주식회사 포스코 Hearth roll manufacture method which uses the centrifugal casting
US20090226614A1 (en) * 2008-03-04 2009-09-10 Tokyo Electron Limited Porous gas heating device for a vapor deposition system
US8291856B2 (en) * 2008-03-07 2012-10-23 Tokyo Electron Limited Gas heating device for a vapor deposition system
US20110104449A1 (en) * 2008-06-10 2011-05-05 Nippon Steel Hardfacing Co., Ltd. Hearth roll having excellent mn build-up resistance, thermal shock resistance, and abrasion resistance, and thermal spray material therefor
WO2010053687A2 (en) * 2008-11-04 2010-05-14 Praxair Technology, Inc. Thermal spray coatings for semiconductor applications
EP2191809A1 (en) * 2008-11-27 2010-06-02 3M Innovative Properties Company Dental ceramic article, process for production and use thereof
US8450552B2 (en) 2009-05-18 2013-05-28 Exxonmobil Chemical Patents Inc. Pyrolysis reactor materials and methods
US8272347B2 (en) * 2009-09-14 2012-09-25 Tokyo Electron Limited High temperature gas heating device for a vapor deposition system
CN102137554A (en) * 2010-01-26 2011-07-27 深圳富泰宏精密工业有限公司 Housing of electronic device and manufacturing method thereof
US9139910B2 (en) 2010-06-11 2015-09-22 Tokyo Electron Limited Method for chemical vapor deposition control
US8852347B2 (en) 2010-06-11 2014-10-07 Tokyo Electron Limited Apparatus for chemical vapor deposition control
US20120183790A1 (en) * 2010-07-14 2012-07-19 Christopher Petorak Thermal spray composite coatings for semiconductor applications
US20130032529A1 (en) * 2011-02-07 2013-02-07 Molycorp Minerals, Llc Rare earth-containing filter block and method for making and using the same
US9034199B2 (en) 2012-02-21 2015-05-19 Applied Materials, Inc. Ceramic article with reduced surface defect density and process for producing a ceramic article
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
US20130288037A1 (en) * 2012-04-27 2013-10-31 Applied Materials, Inc. Plasma spray coating process enhancement for critical chamber components
US9343289B2 (en) 2012-07-27 2016-05-17 Applied Materials, Inc. Chemistry compatible coating material for advanced device on-wafer particle performance
FR2998561B1 (en) * 2012-11-29 2014-11-21 Saint Gobain Ct Recherches HIGH PURITY POWDER FOR THERMAL PROJECTION
US9865434B2 (en) 2013-06-05 2018-01-09 Applied Materials, Inc. Rare-earth oxide based erosion resistant coatings for semiconductor application
US9850568B2 (en) 2013-06-20 2017-12-26 Applied Materials, Inc. Plasma erosion resistant rare-earth oxide based thin film coatings
US9583369B2 (en) 2013-07-20 2017-02-28 Applied Materials, Inc. Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles
US10468235B2 (en) * 2013-09-18 2019-11-05 Applied Materials, Inc. Plasma spray coating enhancement using plasma flame heat treatment
US9725799B2 (en) 2013-12-06 2017-08-08 Applied Materials, Inc. Ion beam sputtering with ion assisted deposition for coatings on chamber components
US9869013B2 (en) 2014-04-25 2018-01-16 Applied Materials, Inc. Ion assisted deposition top coat of rare-earth oxide
KR102419886B1 (en) * 2014-09-03 2022-07-12 가부시키가이샤 후지미인코퍼레이티드 Slurry for thermal spraying, thermal sprayed film and thermal sprayed film formation method
US20170342539A1 (en) * 2015-02-10 2017-11-30 Nippon Yttrium Co., Ltd. Powder for film formation and material for film formation
JP6578106B2 (en) 2015-02-24 2019-09-18 株式会社フジミインコーポレーテッド Thermal spray powder
JP6384536B2 (en) 2015-10-23 2018-09-05 信越化学工業株式会社 Yttrium fluoride spray material and method for producing yttrium oxyfluoride film-forming component
CN105235310A (en) * 2015-10-30 2016-01-13 申文明 Corrosion-resistant composite plate
CN105603352B (en) * 2016-01-15 2018-07-24 中国科学院上海硅酸盐研究所 Al2O3/ YAG amorphous/eutectic composite ceramic coat and preparation method thereof
JP6443380B2 (en) * 2016-04-12 2018-12-26 信越化学工業株式会社 Yttrium-based fluoride sprayed coating and corrosion resistant coating containing the sprayed coating
CN105755423B (en) * 2016-04-14 2019-04-30 航天材料及工艺研究所 A kind of antioxidant coating and preparation method thereof
KR101935380B1 (en) * 2016-05-17 2019-01-07 마이크로크래프트코리아 주식회사 A method of ink jet resin composition
TWI733897B (en) 2016-09-16 2021-07-21 日商福吉米股份有限公司 Materials for spraying
US11306383B2 (en) 2016-09-16 2022-04-19 Fujimi Incorporated Thermal spraying material
RU2646299C2 (en) * 2016-11-18 2018-03-02 Общество с ограниченной ответственностью "ТСО материалы" Material for gas-thermal application, method of its manufacture and method of its application
CN109954885A (en) * 2017-12-25 2019-07-02 中国石油化工股份有限公司 A kind of increasing material manufacturing composite powder and preparation method thereof
FR3077287B1 (en) * 2018-01-31 2023-09-22 Saint Gobain Ct Recherches POWDER FOR ENGRAVING CHAMBER COATING
US11047035B2 (en) 2018-02-23 2021-06-29 Applied Materials, Inc. Protective yttria coating for semiconductor equipment parts
JP7147675B2 (en) 2018-05-18 2022-10-05 信越化学工業株式会社 Thermal spray material and method for producing thermal spray member
JP7156203B2 (en) * 2018-08-10 2022-10-19 信越化学工業株式会社 Slurry for suspension plasma thermal spraying and method for forming thermal spray coating
JP6939853B2 (en) * 2018-08-15 2021-09-22 信越化学工業株式会社 Thermal spray coating, method of manufacturing thermal spray coating, and thermal spraying member
US11236023B2 (en) 2018-11-07 2022-02-01 Honeywell International Inc. Method of forming a protective coating on a surface of a ceramic substrate
JP7331762B2 (en) * 2019-04-12 2023-08-23 信越化学工業株式会社 Thermal spray material, method for producing same, and method for forming thermal spray coating
CN110903719A (en) * 2019-11-25 2020-03-24 杨腾跃 Rare earth metal coating for surface protection of steel material and preparation method thereof
CN110904361B (en) * 2019-12-16 2020-10-30 北京君山表面技术工程有限公司 Preparation method of nickel-based alloy composite powder and cladding coating for plasma spraying
CN114231879B (en) * 2021-12-17 2023-02-03 武汉苏泊尔炊具有限公司 Thermal spray powder, method for producing same, and corrosion-resistant coating

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4590090A (en) * 1982-07-28 1986-05-20 General Electric Company Method for making interdiffused, substantially spherical ceramic powders
EP0167723A1 (en) * 1984-05-02 1986-01-15 The Perkin-Elmer Corporation Zirconium oxide powder containing zinc oxide and yttrium oxide
US4645716A (en) * 1985-04-09 1987-02-24 The Perkin-Elmer Corporation Flame spray material
DE3543802A1 (en) * 1985-12-12 1987-06-19 Bbc Brown Boveri & Cie HIGH TEMPERATURE PROTECTIVE LAYER AND METHOD FOR THEIR PRODUCTION
JPH0757690B2 (en) * 1989-06-16 1995-06-21 信越化学工業株式会社 Manufacturing method of rare earth oxide-enhanced spherical particles
JPH05320860A (en) * 1992-05-18 1993-12-07 Tosoh Corp Zirconia powder for thermal spraying
JPH06142822A (en) * 1992-11-09 1994-05-24 Kawasaki Steel Corp Production of casting mold for casting high melting active metal
US6447937B1 (en) * 1997-02-26 2002-09-10 Kyocera Corporation Ceramic materials resistant to halogen plasma and components using the same
EP0990713B1 (en) * 1998-09-07 2003-03-12 Sulzer Markets and Technology AG Thermal barrier coating process
TW503449B (en) * 2000-04-18 2002-09-21 Ngk Insulators Ltd Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members

Also Published As

Publication number Publication date
US6733843B2 (en) 2004-05-11
EP1642994A2 (en) 2006-04-05
KR20020001650A (en) 2002-01-09
EP1167565A2 (en) 2002-01-02
US6576354B2 (en) 2003-06-10
EP1167565A3 (en) 2002-02-20
EP1642994B8 (en) 2017-04-19
EP1167565B1 (en) 2007-03-07
CN1201030C (en) 2005-05-11
EP1642994B1 (en) 2016-12-21
US20030203120A1 (en) 2003-10-30
TW593761B (en) 2004-06-21
KR100612796B1 (en) 2006-08-17
DE60127035T2 (en) 2007-11-08
EP1642994A3 (en) 2008-03-19
US20020018902A1 (en) 2002-02-14
CN1342782A (en) 2002-04-03

Similar Documents

Publication Publication Date Title
DE60127035D1 (en) Thermal spray coating process and rare earth oxide powders therefor
DE60129768D1 (en) Polyester and melt-made articles
HK1045817B (en) Texture masked particles containing an active ingredient
TWI316062B (en) Anti-inflammatory compounds and uses thereof
DE60100154T2 (en) Rare earth magnet and manufacturing process
DE60118460D1 (en) Coating material and coated powder
EP1311551A4 (en) Bioactive coating compositions and methods
HK1043016B (en) Passive electrical article and method of manufacturing it
DE60136515D1 (en) Atomizing device and coating manufacturing process
IL138471A0 (en) Novel semiconductor materials and their uses
DE69836284D1 (en) FERROMAGNETIC POWDER
DE60140783D1 (en) Rare earth alloy, rare earth sintered magnet and manufacturing process
EP1337373A4 (en) Methods and materials for reducing damage from environmental electromagnetic effects
EP1173049A4 (en) Organic electroluminescent element and method of manufacture thereof
SG106647A1 (en) Thermally-stabilized thermal barrier coating and process therefor
GB2367186B (en) Field electron emission materials and devices
AU9071501A (en) Aminoplast-based crosslinkers and powder coating compositions containing such crosslinkers
DE60118265D1 (en) Spacecraft protected by a pyro / ferroelectric particle-containing coating and coating material
DE60226370D1 (en) Particles from rare earth oxides for thermal spraying, sprayed objects and corrosion objects
SG96218A1 (en) Sic-formed materials and method for manufacturing same
GB0004081D0 (en) Magnetic ceramic composition and inductor component using the same
AU9099801A (en) Aminoplast-based crosslinkers and powder coating compositions containing such crosslinkers
DE60031642D1 (en) MAGNETIC POWDER AND MANUFACTURING METHOD
AU2001249894A1 (en) Passive aerosol sampler and methods
NO20031089L (en) Nanocrystalline metal oxide powder and process for its preparation

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN