DE3923980A1 - Halbleiterlaser und verfahren zu seiner herstellung - Google Patents

Halbleiterlaser und verfahren zu seiner herstellung

Info

Publication number
DE3923980A1
DE3923980A1 DE3923980A DE3923980A DE3923980A1 DE 3923980 A1 DE3923980 A1 DE 3923980A1 DE 3923980 A DE3923980 A DE 3923980A DE 3923980 A DE3923980 A DE 3923980A DE 3923980 A1 DE3923980 A1 DE 3923980A1
Authority
DE
Germany
Prior art keywords
layer
upper cladding
laser
thickness
mesa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE3923980A
Other languages
German (de)
English (en)
Other versions
DE3923980C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shigeru Mitsui
Ryo Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of DE3923980A1 publication Critical patent/DE3923980A1/de
Application granted granted Critical
Publication of DE3923980C2 publication Critical patent/DE3923980C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/223—Buried stripe structure
    • H01S5/2231—Buried stripe structure with inner confining structure only between the active layer and the upper electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/065—Mode locking; Mode suppression; Mode selection ; Self pulsating
    • H01S5/0658—Self-pulsating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
    • H01S5/32316—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm comprising only (Al)GaAs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/025—Deposition multi-step
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/095—Laser devices

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
DE3923980A 1988-07-20 1989-07-20 Halbleiterlaser und verfahren zu seiner herstellung Granted DE3923980A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63182392A JPH0231487A (ja) 1988-07-20 1988-07-20 半導体レーザ装置とその製造方法

Publications (2)

Publication Number Publication Date
DE3923980A1 true DE3923980A1 (de) 1990-01-25
DE3923980C2 DE3923980C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-03

Family

ID=16117517

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3923980A Granted DE3923980A1 (de) 1988-07-20 1989-07-20 Halbleiterlaser und verfahren zu seiner herstellung

Country Status (4)

Country Link
US (2) US5003549A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH0231487A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3923980A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2221094B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3924197A1 (de) * 1988-07-22 1990-04-05 Mitsubishi Electric Corp Halbleiterlaser
DE4240539A1 (en) * 1992-01-21 1993-07-22 Mitsubishi Electric Corp Semiconductor device mfr. e.g. for ridge waveguide semiconductor laser prodn.
DE19963807A1 (de) * 1999-12-30 2001-07-19 Osram Opto Semiconductors Gmbh Streifenlaserdiodenelement

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5236864A (en) * 1988-12-28 1993-08-17 Research Development Corporation Of Japan Method of manufacturing a surface-emitting type semiconductor laser device
US5182228A (en) * 1989-06-29 1993-01-26 Omron Corporation Method of manufacturing a semiconductor light-emitting device
US5192711A (en) * 1989-09-18 1993-03-09 Mitsubishi Denki Kabushiki Kaisha Method for producing a semiconductor laser device
EP0458409B1 (en) * 1990-05-23 2002-02-20 Uniphase Opto Holdings, Inc. Radiation-emitting semiconductor device and method of manufacturing same
JP2508409B2 (ja) * 1990-11-26 1996-06-19 三菱電機株式会社 半導体レ―ザ装置
US5208183A (en) * 1990-12-20 1993-05-04 At&T Bell Laboratories Method of making a semiconductor laser
JP2656397B2 (ja) * 1991-04-09 1997-09-24 三菱電機株式会社 可視光レーザダイオードの製造方法
SG55125A1 (en) * 1991-12-30 2000-06-20 Koninkl Philips Electronics Nv Device in which electromagnetic radiation is raised in frequency and apparatus for optically scanning an information plane comprising such a device
ATE150573T1 (de) * 1991-12-30 1997-04-15 Philips Electronics Nv Optische einrichtung und mit einer solchen optischen einrichtung versehenes gerät zum abtasten einer informationsebene
US5316967A (en) * 1992-01-21 1994-05-31 Mitsubishi Denki Kabushiki Kaisha Method for producing semiconductor device
JP3250270B2 (ja) * 1992-09-11 2002-01-28 三菱化学株式会社 半導体レーザ素子及びその製造方法
US5416790A (en) * 1992-11-06 1995-05-16 Sanyo Electric Co., Ltd. Semiconductor laser with a self-sustained pulsation
JPH06314841A (ja) * 1993-04-28 1994-11-08 Mitsubishi Electric Corp 半導体レーザ及びその製造方法
JPH0715082A (ja) * 1993-06-24 1995-01-17 Mitsubishi Electric Corp 半導体パルセーションレーザ
JP2822868B2 (ja) * 1993-12-10 1998-11-11 日本電気株式会社 半導体レーザの製造方法
JPH08116135A (ja) * 1994-10-17 1996-05-07 Mitsubishi Electric Corp 導波路集積素子の製造方法，及び導波路集積素子
CN1146091C (zh) * 1995-03-31 2004-04-14 松下电器产业株式会社 半导体激光装置和采用它的光盘设备
DE19513198A1 (de) * 1995-03-31 1996-10-02 Hertz Inst Heinrich Selbstpulsierender Mehrsektionslaser
JP2783210B2 (ja) * 1995-09-04 1998-08-06 日本電気株式会社 面発光型ダイオード
US5850411A (en) * 1996-09-17 1998-12-15 Sdl, Inc Transverse electric (TE) polarization mode AlGaInP/GaAs red laser diodes, especially with self-pulsating operation
US6639926B1 (en) * 1998-03-25 2003-10-28 Mitsubishi Chemical Corporation Semiconductor light-emitting device
US6528829B1 (en) * 1999-03-25 2003-03-04 Trw Inc. Integrated circuit structure having a charge injection barrier
JP2001230493A (ja) 2000-02-21 2001-08-24 Sony Corp 半導体レーザ発光装置
US6977953B2 (en) * 2001-07-27 2005-12-20 Sanyo Electric Co., Ltd. Nitride-based semiconductor light-emitting device and method of fabricating the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2856507A1 (de) * 1978-12-28 1980-07-17 Amann Markus Christian Dipl In Halbleiter-laserdiode
DE3234389A1 (de) * 1982-09-16 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Halbleiter-laserdiode
DE3736497A1 (de) * 1986-10-29 1988-05-05 Seiko Epson Corp Halbleiterlaser und verfahren zu seiner herstellung
EP0273726A2 (en) * 1986-12-26 1988-07-06 Sharp Kabushiki Kaisha A semiconductor laser device
DE3908305A1 (de) * 1988-03-16 1989-09-28 Mitsubishi Electric Corp Halbleiterlaser

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60192380A (ja) * 1984-03-13 1985-09-30 Mitsubishi Electric Corp 半導体レ−ザ装置
JPS61125184A (ja) * 1984-11-22 1986-06-12 Toshiba Corp 半導体レ−ザ装置
US4799228A (en) * 1985-08-23 1989-01-17 Kabushiki Kaisha Toshiba Transverse-mode stabilized semiconductor laser diode with slab-coupled waveguide
JPS62142387A (ja) * 1985-12-17 1987-06-25 Furukawa Electric Co Ltd:The 半導体レ−ザ
JPS62166587A (ja) * 1986-01-20 1987-07-23 Nec Corp 半導体レ−ザ装置
JPS62179790A (ja) * 1986-02-04 1987-08-06 Seiko Epson Corp 半導体レ−ザ
US4946802A (en) * 1986-05-31 1990-08-07 Mitsubishi Denki Kabushiki Kaisha Semiconductor laser device fabricating method
JPS63100788A (ja) * 1986-10-17 1988-05-02 Nec Corp ＡｌＧａＩｎＰ発光素子およびその製造方法
JPS63269593A (ja) * 1987-04-27 1988-11-07 Mitsubishi Electric Corp 半導体レ−ザ装置とその製造方法
JP2685499B2 (ja) * 1988-06-01 1997-12-03 株式会社日立製作所 半導体レーザ素子

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2856507A1 (de) * 1978-12-28 1980-07-17 Amann Markus Christian Dipl In Halbleiter-laserdiode
DE3234389A1 (de) * 1982-09-16 1984-03-22 Siemens AG, 1000 Berlin und 8000 München Halbleiter-laserdiode
DE3736497A1 (de) * 1986-10-29 1988-05-05 Seiko Epson Corp Halbleiterlaser und verfahren zu seiner herstellung
EP0273726A2 (en) * 1986-12-26 1988-07-06 Sharp Kabushiki Kaisha A semiconductor laser device
DE3908305A1 (de) * 1988-03-16 1989-09-28 Mitsubishi Electric Corp Halbleiterlaser

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
FEKETE, D.: Uniformity of an embedded stripe large optical-cavity GaAs / GaAlAs double-heterostructure laser grown by metallo-organic chemical vapor deposition. In: US-Z.: J. Appl. Phys., Vol. 59, No. 4, 1986, S. 1028-1030 *
HARDER, C. et.al.: High-Power Ridge-Waveguide AlGaAs GRIN-SCH Laser Diode. In: GB-Z.: Electro- nics Letters, Vol. 22, No. 20, 1986, S.1081-1082 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3924197A1 (de) * 1988-07-22 1990-04-05 Mitsubishi Electric Corp Halbleiterlaser
DE3924197C2 (de) * 1988-07-22 1996-09-26 Mitsubishi Electric Corp Halbleiterlaser
DE4240539A1 (en) * 1992-01-21 1993-07-22 Mitsubishi Electric Corp Semiconductor device mfr. e.g. for ridge waveguide semiconductor laser prodn.
DE4240539C2 (de) * 1992-01-21 1997-07-03 Mitsubishi Electric Corp Verfahren zur Herstellung eines Halbleiterlasers
DE19963807A1 (de) * 1999-12-30 2001-07-19 Osram Opto Semiconductors Gmbh Streifenlaserdiodenelement

Also Published As

Publication number Publication date
DE3923980C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-03
JPH0231487A (ja) 1990-02-01
GB2221094B (en) 1992-02-12
US5053356A (en) 1991-10-01
GB8916501D0 (en) 1989-09-06
GB2221094A (en) 1990-01-24
US5003549A (en) 1991-03-26

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee