DE3322680C2 - - Google Patents

Info

Publication number
DE3322680C2
DE3322680C2 DE3322680A DE3322680A DE3322680C2 DE 3322680 C2 DE3322680 C2 DE 3322680C2 DE 3322680 A DE3322680 A DE 3322680A DE 3322680 A DE3322680 A DE 3322680A DE 3322680 C2 DE3322680 C2 DE 3322680C2
Authority
DE
Germany
Prior art keywords
discharge
substrate
plasma
gas
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3322680A
Other languages
German (de)
English (en)
Other versions
DE3322680A1 (de
Inventor
Keizo Hachioji Jp Suzuki
Atsushi Kodaira Jp Hiraiwa
Shigeru Hachioji Jp Takahashi
Shingeru Kokubunji Jp Nishimatsu
Ken Tokio/Tokyo Jp Ninomiya
Sadayuki Ome Jp Okudaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of DE3322680A1 publication Critical patent/DE3322680A1/de
Application granted granted Critical
Publication of DE3322680C2 publication Critical patent/DE3322680C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/10—Heating of the reaction chamber or the substrate
    • C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
  • Silicon Compounds (AREA)
DE19833322680 1982-06-25 1983-06-23 Verfahren zum aufwachsenlassen eines silizium enthaltenden films durch plasmaablagerung Granted DE3322680A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57108336A JPH0635323B2 (ja) 1982-06-25 1982-06-25 表面処理方法

Publications (2)

Publication Number Publication Date
DE3322680A1 DE3322680A1 (de) 1984-01-05
DE3322680C2 true DE3322680C2 (US07754267-20100713-C00017.png) 1989-07-27

Family

ID=14482102

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19833322680 Granted DE3322680A1 (de) 1982-06-25 1983-06-23 Verfahren zum aufwachsenlassen eines silizium enthaltenden films durch plasmaablagerung

Country Status (4)

Country Link
US (1) US4481229A (US07754267-20100713-C00017.png)
JP (1) JPH0635323B2 (US07754267-20100713-C00017.png)
DE (1) DE3322680A1 (US07754267-20100713-C00017.png)
NL (1) NL8302261A (US07754267-20100713-C00017.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4229161A1 (de) * 1991-09-02 1993-03-04 Fuji Electric Co Ltd Verfahren und herstellung zur herstellung eines siliziumoxidfilms

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Publication number Priority date Publication date Assignee Title
DE4229161A1 (de) * 1991-09-02 1993-03-04 Fuji Electric Co Ltd Verfahren und herstellung zur herstellung eines siliziumoxidfilms
US5626679A (en) * 1991-09-02 1997-05-06 Fuji Electric Co., Ltd. Method and apparatus for preparing a silicon oxide film

Also Published As

Publication number Publication date
NL8302261A (nl) 1984-01-16
JPS593018A (ja) 1984-01-09
JPH0635323B2 (ja) 1994-05-11
DE3322680A1 (de) 1984-01-05
US4481229A (en) 1984-11-06

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