DE68914963T2 - Radiofrequenzquadrupolbeschleunigung mit Aussenresonanzkreis. - Google Patents
Radiofrequenzquadrupolbeschleunigung mit Aussenresonanzkreis.Info
- Publication number
- DE68914963T2 DE68914963T2 DE68914963T DE68914963T DE68914963T2 DE 68914963 T2 DE68914963 T2 DE 68914963T2 DE 68914963 T DE68914963 T DE 68914963T DE 68914963 T DE68914963 T DE 68914963T DE 68914963 T2 DE68914963 T2 DE 68914963T2
- Authority
- DE
- Germany
- Prior art keywords
- radio frequency
- resonance circuit
- external resonance
- frequency quadrupole
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/02—Circuits or systems for supplying or feeding radio-frequency energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63294775A JPH061678B2 (ja) | 1988-11-24 | 1988-11-24 | 外部共振回路型rfq加速器 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68914963D1 DE68914963D1 (de) | 1994-06-01 |
DE68914963T2 true DE68914963T2 (de) | 1994-10-20 |
Family
ID=17812133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68914963T Expired - Fee Related DE68914963T2 (de) | 1988-11-24 | 1989-11-24 | Radiofrequenzquadrupolbeschleunigung mit Aussenresonanzkreis. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5086256A (de) |
EP (1) | EP0375169B1 (de) |
JP (1) | JPH061678B2 (de) |
DE (1) | DE68914963T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5189302A (en) * | 1991-10-28 | 1993-02-23 | The United States Of America As Represented By The United States Department Of Energy | Small system for tritium accelerator mass spectrometry |
JP2863962B2 (ja) * | 1992-04-10 | 1999-03-03 | 株式会社日立製作所 | イオン打ち込み装置 |
US5504341A (en) * | 1995-02-17 | 1996-04-02 | Zimec Consulting, Inc. | Producing RF electric fields suitable for accelerating atomic and molecular ions in an ion implantation system |
US5914494A (en) * | 1996-03-27 | 1999-06-22 | Thermoceramix, Llc | Arc chamber for an ion implantation system |
US6239440B1 (en) | 1996-03-27 | 2001-05-29 | Thermoceramix, L.L.C. | Arc chamber for an ion implantation system |
US6022258A (en) * | 1996-03-27 | 2000-02-08 | Thermoceramix, Llc | ARC chamber for an ion implantation system |
US5857889A (en) * | 1996-03-27 | 1999-01-12 | Thermoceramix, Llc | Arc Chamber for an ion implantation system |
TW490703B (en) * | 1999-12-13 | 2002-06-11 | Axcelis Tech Inc | Diamond-like coated component in an ion implanter for reduced x-ray emissions |
US6291828B1 (en) | 1999-12-21 | 2001-09-18 | Axchlisrtechnologies, Inc. | Glass-like insulator for electrically isolating electrodes from ion implanter housing |
JP4514911B2 (ja) * | 2000-07-19 | 2010-07-28 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP4235586B2 (ja) | 2004-06-02 | 2009-03-11 | デュプロ精工株式会社 | 給紙装置 |
US8907295B2 (en) * | 2012-08-01 | 2014-12-09 | Varian Semiconductor Equipment Associates, Inc. | Hybrid electrostatic lens with increased natural frequency |
CN105120590B (zh) * | 2015-09-11 | 2018-07-24 | 北京大学 | 一种医用放射性同位素生产系统 |
US10383205B2 (en) * | 2016-05-04 | 2019-08-13 | Cornell University | Wafer-based charged particle accelerator, wafer components, methods, and applications |
JP6785189B2 (ja) * | 2017-05-31 | 2020-11-18 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置およびイオン注入方法 |
JP6785188B2 (ja) * | 2017-05-31 | 2020-11-18 | 住友重機械イオンテクノロジー株式会社 | イオン注入装置およびイオン注入方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3665245A (en) * | 1969-10-27 | 1972-05-23 | Research Corp | Quadrupole ionization gauge |
US3793063A (en) * | 1971-02-22 | 1974-02-19 | Bendix Corp | Method of making electrodes for quadrupole type mass spectrometers |
US4108751A (en) * | 1977-06-06 | 1978-08-22 | King William J | Ion beam implantation-sputtering |
US4135094A (en) * | 1977-07-27 | 1979-01-16 | E. I. Du Pont De Nemours And Company | Method and apparatus for rejuvenating ion sources |
US4330384A (en) * | 1978-10-27 | 1982-05-18 | Hitachi, Ltd. | Process for plasma etching |
US4234791A (en) * | 1978-11-13 | 1980-11-18 | Research Corporation | Tandem quadrupole mass spectrometer for selected ion fragmentation studies and low energy collision induced dissociator therefor |
US4266127A (en) * | 1978-12-01 | 1981-05-05 | Cherng Chang | Mass spectrometer for chemical ionization and electron impact ionization operation |
US4494040A (en) * | 1982-10-19 | 1985-01-15 | The United States Of America As Represented By The United States Department Of Energy | Radio frequency quadrupole resonator for linear accelerator |
JPH0612661B2 (ja) * | 1983-12-02 | 1994-02-16 | 株式会社日立製作所 | イオン打込み装置 |
JPS60115199A (ja) * | 1983-11-28 | 1985-06-21 | 株式会社日立製作所 | 四重極粒子加速器 |
WO1985002489A1 (en) * | 1983-11-28 | 1985-06-06 | Hitachi, Ltd. | Quadrupole particle accelerator |
US4755670A (en) * | 1986-10-01 | 1988-07-05 | Finnigan Corporation | Fourtier transform quadrupole mass spectrometer and method |
US4867939A (en) * | 1987-04-03 | 1989-09-19 | Deutch Bernhard I | Process for preparing antihydrogen |
US4792687A (en) * | 1987-04-30 | 1988-12-20 | Mobley Richard M | Freeman ion source |
US4843034A (en) * | 1987-06-12 | 1989-06-27 | Massachusetts Institute Of Technology | Fabrication of interlayer conductive paths in integrated circuits |
US4937206A (en) * | 1989-07-10 | 1990-06-26 | Applied Materials, Inc. | Method and apparatus for preventing cross contamination of species during the processing of semiconductor wafers |
-
1988
- 1988-11-24 JP JP63294775A patent/JPH061678B2/ja not_active Expired - Lifetime
-
1989
- 1989-11-20 US US07/438,018 patent/US5086256A/en not_active Expired - Fee Related
- 1989-11-24 EP EP89312238A patent/EP0375169B1/de not_active Expired - Lifetime
- 1989-11-24 DE DE68914963T patent/DE68914963T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE68914963D1 (de) | 1994-06-01 |
JPH02142046A (ja) | 1990-05-31 |
US5086256A (en) | 1992-02-04 |
EP0375169B1 (de) | 1994-04-27 |
JPH061678B2 (ja) | 1994-01-05 |
EP0375169A1 (de) | 1990-06-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |