DE2954501C2 - - Google Patents

Info

Publication number
DE2954501C2
DE2954501C2 DE2954501A DE2954501A DE2954501C2 DE 2954501 C2 DE2954501 C2 DE 2954501C2 DE 2954501 A DE2954501 A DE 2954501A DE 2954501 A DE2954501 A DE 2954501A DE 2954501 C2 DE2954501 C2 DE 2954501C2
Authority
DE
Germany
Prior art keywords
layer
connecting conductor
connection
region
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE2954501A
Other languages
German (de)
English (en)
Inventor
Hiroshi Tokio/Tokyo Jp Shiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1425278A external-priority patent/JPS54107280A/ja
Priority claimed from JP1425178A external-priority patent/JPS54107279A/ja
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE2954501C2 publication Critical patent/DE2954501C2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76897—Formation of self-aligned vias or contact plugs, i.e. involving a lithographically uncritical step
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/32—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32105—Oxidation of silicon-containing layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3215—Doping the layers
    • H01L21/32155—Doping polycristalline - or amorphous silicon layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0688—Integrated circuits having a three-dimensional layout
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/07—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common
    • H01L27/0744—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration the components having an active region in common without components of the field effect type
    • H01L27/075—Bipolar transistors in combination with diodes, or capacitors, or resistors, e.g. lateral bipolar transistor, and vertical bipolar transistor and resistor
    • H01L27/0755—Vertical bipolar transistor in combination with diodes, or capacitors, or resistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H01L29/7302—Bipolar junction transistors structurally associated with other devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/019—Contacts of silicides

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Bipolar Integrated Circuits (AREA)
DE2954501A 1978-02-10 1979-02-09 Expired - Lifetime DE2954501C2 (US06534493-20030318-C00288.png)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1425278A JPS54107280A (en) 1978-02-10 1978-02-10 Semiconductor integrated circuit unit
JP1425178A JPS54107279A (en) 1978-02-10 1978-02-10 Semiconductor device

Publications (1)

Publication Number Publication Date
DE2954501C2 true DE2954501C2 (US06534493-20030318-C00288.png) 1990-08-30

Family

ID=26350166

Family Applications (3)

Application Number Title Priority Date Filing Date
DE19792905022 Granted DE2905022A1 (de) 1978-02-10 1979-02-09 Integrierte halbleiterschaltung
DE2954501A Expired - Lifetime DE2954501C2 (US06534493-20030318-C00288.png) 1978-02-10 1979-02-09
DE2954502A Expired - Lifetime DE2954502C2 (US06534493-20030318-C00288.png) 1978-02-10 1979-02-09

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19792905022 Granted DE2905022A1 (de) 1978-02-10 1979-02-09 Integrierte halbleiterschaltung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE2954502A Expired - Lifetime DE2954502C2 (US06534493-20030318-C00288.png) 1978-02-10 1979-02-09

Country Status (5)

Country Link
US (2) US4450470A (US06534493-20030318-C00288.png)
DE (3) DE2905022A1 (US06534493-20030318-C00288.png)
FR (1) FR2417187A1 (US06534493-20030318-C00288.png)
GB (4) GB2070860B (US06534493-20030318-C00288.png)
NL (1) NL190710C (US06534493-20030318-C00288.png)

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US5182627A (en) * 1991-09-30 1993-01-26 Sgs-Thomson Microelectronics, Inc. Interconnect and resistor for integrated circuits
US5332913A (en) * 1991-12-17 1994-07-26 Intel Corporation Buried interconnect structure for semiconductor devices
US5478771A (en) * 1993-05-28 1995-12-26 Sgs-Thomson Microelectronics, Inc. Method of forming local interconnect structure without P-N junction between active elements
US5975685A (en) * 1993-12-28 1999-11-02 Canon Kabushiki Kaisha Ink jet recording head having an oriented p-n junction diode, and recording apparatus using the head
US6112699A (en) * 1994-02-28 2000-09-05 Biozyme Systems, Inc. Euphausiid harvesting and processing method and apparatus
US5589415A (en) * 1995-06-07 1996-12-31 Sgs-Thomson Microelectronics, Inc. Method for forming a semiconductor structure with self-aligned contacts
US5670417A (en) * 1996-03-25 1997-09-23 Motorola, Inc. Method for fabricating self-aligned semiconductor component
KR100215841B1 (ko) * 1997-04-10 1999-08-16 구본준 바이폴라소자 제조방법
KR100313940B1 (ko) * 1999-04-02 2001-11-15 김영환 반도체 소자 및 그 제조방법
US6690083B1 (en) * 2000-06-01 2004-02-10 Koninklijke Philips Electronics N.V. Use of silicide blocking layer to create high valued resistor and diode for sub-1V bandgap
US7449099B1 (en) * 2004-04-13 2008-11-11 Novellus Systems, Inc. Selectively accelerated plating of metal features
US20040235258A1 (en) * 2003-05-19 2004-11-25 Wu David Donggang Method of forming resistive structures
JP2009254260A (ja) * 2008-04-15 2009-11-05 Sony Corp 反応処理装置
JP4544335B2 (ja) * 2008-04-15 2010-09-15 ソニー株式会社 反応処理装置

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DE2518010A1 (de) * 1974-04-26 1975-11-13 Western Electric Co Ic-halbleiterbauelement mit einer injektions-logikzelle
DE2537564A1 (de) * 1974-08-29 1976-03-11 Centre Electron Horloger Integrierte schaltung mit komplementaeren feldeffekt-transistoren
JPH05140866A (ja) * 1991-11-20 1993-06-08 Mitsubishi Rayon Co Ltd ポリエステル吸水性織編物の製法

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DE2518010A1 (de) * 1974-04-26 1975-11-13 Western Electric Co Ic-halbleiterbauelement mit einer injektions-logikzelle
DE2537564A1 (de) * 1974-08-29 1976-03-11 Centre Electron Horloger Integrierte schaltung mit komplementaeren feldeffekt-transistoren
JPH05140866A (ja) * 1991-11-20 1993-06-08 Mitsubishi Rayon Co Ltd ポリエステル吸水性織編物の製法

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* Cited by examiner, † Cited by third party
Title
IBM TDB, Bd. 14, 1972, No. 10, S. 3208 *
IBM TDB, Bd. 20, 1977, No. 1, S. 146-148 *

Also Published As

Publication number Publication date
GB2075259B (en) 1983-02-23
GB2070860B (en) 1982-12-22
DE2905022C2 (US06534493-20030318-C00288.png) 1990-09-06
DE2954502C2 (US06534493-20030318-C00288.png) 1990-05-03
US4450470A (en) 1984-05-22
US5017503A (en) 1991-05-21
NL190710B (nl) 1994-02-01
NL190710C (nl) 1994-07-01
GB2014785A (en) 1979-08-30
GB2075259A (en) 1981-11-11
FR2417187B1 (US06534493-20030318-C00288.png) 1984-12-14
DE2905022A1 (de) 1979-10-31
GB2102625A (en) 1983-02-02
NL7901023A (nl) 1979-08-14
GB2070860A (en) 1981-09-09
GB2102625B (en) 1983-06-29
FR2417187A1 (fr) 1979-09-07
GB2014785B (en) 1983-02-02

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