CN1903968B - 水性磨料分散剂组合物 - Google Patents
水性磨料分散剂组合物 Download PDFInfo
- Publication number
- CN1903968B CN1903968B CN200610099284XA CN200610099284A CN1903968B CN 1903968 B CN1903968 B CN 1903968B CN 200610099284X A CN200610099284X A CN 200610099284XA CN 200610099284 A CN200610099284 A CN 200610099284A CN 1903968 B CN1903968 B CN 1903968B
- Authority
- CN
- China
- Prior art keywords
- mentioned
- abrasive particles
- aqueous dispersion
- dispersion composition
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000006185 dispersion Substances 0.000 title claims abstract description 65
- 239000000203 mixture Substances 0.000 title claims abstract description 57
- 239000002245 particle Substances 0.000 title claims description 51
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims abstract description 31
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims abstract description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000003082 abrasive agent Substances 0.000 claims abstract description 14
- 125000003342 alkenyl group Chemical group 0.000 claims abstract description 12
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims abstract description 6
- -1 glycol ethers Chemical class 0.000 claims description 30
- 239000002002 slurry Substances 0.000 claims description 30
- 150000002334 glycols Chemical class 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- 239000002253 acid Substances 0.000 claims description 11
- 125000001931 aliphatic group Chemical group 0.000 claims description 10
- 125000000217 alkyl group Chemical group 0.000 claims description 10
- 125000004432 carbon atom Chemical group C* 0.000 claims description 10
- 150000001447 alkali salts Chemical class 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 abstract description 10
- 239000002173 cutting fluid Substances 0.000 abstract description 3
- 125000006702 (C1-C18) alkyl group Chemical group 0.000 abstract 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract 2
- 239000002612 dispersion medium Substances 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- 235000013312 flour Nutrition 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 230000006641 stabilisation Effects 0.000 description 4
- 238000011105 stabilization Methods 0.000 description 4
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 4
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 150000001412 amines Chemical class 0.000 description 3
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 3
- POLCUAVZOMRGSN-UHFFFAOYSA-N dipropyl ether Chemical compound CCCOCCC POLCUAVZOMRGSN-UHFFFAOYSA-N 0.000 description 3
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 230000008719 thickening Effects 0.000 description 3
- WFSMVVDJSNMRAR-UHFFFAOYSA-N 2-[2-(2-ethoxyethoxy)ethoxy]ethanol Chemical compound CCOCCOCCOCCO WFSMVVDJSNMRAR-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 2
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 150000007524 organic acids Chemical class 0.000 description 2
- 229910017059 organic montmorillonite Inorganic materials 0.000 description 2
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 2
- 208000009146 rhinoscleroma Diseases 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 1
- SVTBMSDMJJWYQN-RXMQYKEDSA-N (4r)-2-methylpentane-2,4-diol Chemical compound C[C@@H](O)CC(C)(C)O SVTBMSDMJJWYQN-RXMQYKEDSA-N 0.000 description 1
- CUVLMZNMSPJDON-UHFFFAOYSA-N 1-(1-butoxypropan-2-yloxy)propan-2-ol Chemical compound CCCCOCC(C)OCC(C)O CUVLMZNMSPJDON-UHFFFAOYSA-N 0.000 description 1
- UOWSVNMPHMJCBZ-UHFFFAOYSA-N 1-[2-(2-butoxypropoxy)propoxy]butane Chemical compound CCCCOCC(C)OCC(C)OCCCC UOWSVNMPHMJCBZ-UHFFFAOYSA-N 0.000 description 1
- BOGFHOWTVGAYFK-UHFFFAOYSA-N 1-[2-(2-propoxyethoxy)ethoxy]propane Chemical compound CCCOCCOCCOCCC BOGFHOWTVGAYFK-UHFFFAOYSA-N 0.000 description 1
- KTSVVTQTKRGWGU-UHFFFAOYSA-N 1-[2-[2-(2-butoxyethoxy)ethoxy]ethoxy]butane Chemical compound CCCCOCCOCCOCCOCCCC KTSVVTQTKRGWGU-UHFFFAOYSA-N 0.000 description 1
- OHRSSDYDJRJIMN-UHFFFAOYSA-N 1-[2-[2-(2-butoxypropoxy)propoxy]propoxy]butane Chemical compound CCCCOCC(C)OCC(C)OCC(C)OCCCC OHRSSDYDJRJIMN-UHFFFAOYSA-N 0.000 description 1
- DSPIZZQMSHIZLS-UHFFFAOYSA-N 1-[2-[2-(2-propoxyethoxy)ethoxy]ethoxy]propane Chemical compound CCCOCCOCCOCCOCCC DSPIZZQMSHIZLS-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- KIAMPLQEZAMORJ-UHFFFAOYSA-N 1-ethoxy-2-[2-(2-ethoxyethoxy)ethoxy]ethane Chemical compound CCOCCOCCOCCOCC KIAMPLQEZAMORJ-UHFFFAOYSA-N 0.000 description 1
- ORRRIJVZQZKAKQ-UHFFFAOYSA-N 1-ethoxy-2-[2-(2-ethoxypropoxy)propoxy]propane Chemical compound CCOCC(C)OCC(C)OCC(C)OCC ORRRIJVZQZKAKQ-UHFFFAOYSA-N 0.000 description 1
- JOERQAIRIDZWHX-UHFFFAOYSA-N 1-propoxy-2-(2-propoxypropoxy)propane Chemical compound CCCOCC(C)OCC(C)OCCC JOERQAIRIDZWHX-UHFFFAOYSA-N 0.000 description 1
- BZUIVEXNWZABBK-UHFFFAOYSA-N 1-propoxy-2-[2-(2-propoxypropoxy)propoxy]propane Chemical compound CCCOCC(C)OCC(C)OCC(C)OCCC BZUIVEXNWZABBK-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- DJCYDDALXPHSHR-UHFFFAOYSA-N 2-(2-propoxyethoxy)ethanol Chemical compound CCCOCCOCCO DJCYDDALXPHSHR-UHFFFAOYSA-N 0.000 description 1
- COBPKKZHLDDMTB-UHFFFAOYSA-N 2-[2-(2-butoxyethoxy)ethoxy]ethanol Chemical compound CCCCOCCOCCOCCO COBPKKZHLDDMTB-UHFFFAOYSA-N 0.000 description 1
- JDSQBDGCMUXRBM-UHFFFAOYSA-N 2-[2-(2-butoxypropoxy)propoxy]propan-1-ol Chemical compound CCCCOC(C)COC(C)COC(C)CO JDSQBDGCMUXRBM-UHFFFAOYSA-N 0.000 description 1
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 description 1
- UXFQFBNBSPQBJW-UHFFFAOYSA-N 2-amino-2-methylpropane-1,3-diol Chemical compound OCC(N)(C)CO UXFQFBNBSPQBJW-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- 101100373011 Drosophila melanogaster wapl gene Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000002199 base oil Substances 0.000 description 1
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- FUGIIBWTNARRSF-UHFFFAOYSA-N decane-5,6-diol Chemical compound CCCCC(O)C(O)CCCC FUGIIBWTNARRSF-UHFFFAOYSA-N 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- 150000002009 diols Chemical class 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003925 fat Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 239000013056 hazardous product Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229960003511 macrogol Drugs 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003020 moisturizing effect Effects 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 210000004483 pasc Anatomy 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- 235000015870 tripotassium citrate Nutrition 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
- B28D1/025—Use, recovery or regeneration of abrasive mediums
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/007—Use, recovery or regeneration of abrasive mediums
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M111/00—Lubrication compositions characterised by the base-material being a mixture of two or more compounds covered by more than one of the main groups C10M101/00 - C10M109/00, each of these compounds being essential
- C10M111/04—Lubrication compositions characterised by the base-material being a mixture of two or more compounds covered by more than one of the main groups C10M101/00 - C10M109/00, each of these compounds being essential at least one of them being a macromolecular organic compound
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M173/00—Lubricating compositions containing more than 10% water
- C10M173/02—Lubricating compositions containing more than 10% water not containing mineral or fatty oils
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
- C10M2201/06—Metal compounds
- C10M2201/062—Oxides; Hydroxides; Carbonates or bicarbonates
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/02—Hydroxy compounds
- C10M2207/021—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/022—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups
- C10M2207/0225—Hydroxy compounds having hydroxy groups bound to acyclic or cycloaliphatic carbon atoms containing at least two hydroxy groups used as base material
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
- C10M2207/0406—Ethers; Acetals; Ortho-esters; Ortho-carbonates used as base material
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/04—Ethers; Acetals; Ortho-esters; Ortho-carbonates
- C10M2207/046—Hydroxy ethers
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
- C10M2207/128—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids containing hydroxy groups; Ethers thereof
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
- C10M2209/1045—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only used as base material
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/105—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/105—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only
- C10M2209/1055—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing three carbon atoms only used as base material
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/108—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified
- C10M2209/1085—Polyethers, i.e. containing di- or higher polyoxyalkylene groups etherified used as base material
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2010/00—Metal present as such or in compounds
- C10N2010/02—Groups 1 or 11
-
- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
- C10N2020/00—Specified physical or chemical properties or characteristics, i.e. function, of component of lubricating compositions
- C10N2020/01—Physico-chemical properties
- C10N2020/055—Particles related characteristics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Mechanical Engineering (AREA)
- Mining & Mineral Resources (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Lubricants (AREA)
Abstract
本发明提供一种没有引火问题、磨料的分散稳定性和使用中的长期粘度稳定性优良的水性磨料分散剂组合物以及加工用水性浆料。一种水性磨料分散剂组合物,其特征在于:含有二醇类、以通式(1)表示的二醇醚类和水。式中,R1表示氢原子或甲基,R2表示碳原子数为1~18的烷基或链烯基,R3表示氢原子、或碳原子数为1~18的烷基或链烯基,m表示1~20的数。R2O-(CHR1CH2O)m-R3 (1)。
Description
技术领域
本发明涉及一种在切削加工、磨削加工、研磨加工、切割加工等中使用的水性磨料分散剂组合物以及使用该水性磨料分散剂组合物的加工用水性浆料。
背景技术
在对硅、石英、水晶、化合物半导体、陶瓷、玻璃、金属氧化物、超硬合金、烧结合金等所谓的脆性材料进行切削加工、磨削加工、研磨加工、切割加工时,经常使用在分散剂中分散磨料制成的浆料。在加工时,该浆料作为切削液一边供给到加工装置的刃部分一边进行作业。
目前,作为浆料的分散剂,多使用以矿物油和合成油等作为主要成分的非水溶性的分散剂。但是,这些非水溶性的分散剂大多是引火性危险物品,存在加工时引火的问题和根据消防法贮藏量受限制的问题,因此,最近水溶性的磨料分散剂被大量使用起来。
一般市售的水溶性的磨料分散剂组合物大多设计成以二醇类作为基础油,并添加主要用于混合和分散磨料的添加剂,例如在专利文献1~3中公开了在水-二醇系分散剂中添加特定的添加剂制成的磨料分散剂组合物。另外,在专利文献4中公开了在不含水的二醇系分散剂中添加有机酸和有机蒙脱石制成的磨料分散剂组合物。
[专利文献1]日本专利特开平10-81872号公报
[专利文献2]日本专利特开平10-259396号公报
[专利文献3]日本专利特开平10-324889号公报
[专利文献4]日本专利特开2002-80883号公报
发明内容
发明要解决的课题
使用专利文献1~3那样的水-二醇系分散剂的磨料分散剂组合物,可以得到在加工初期与非水溶性的磨料分散剂组合物相媲美的良好的性能。但是,使用该水性磨料分散剂组合物的浆料大多存在在长期使用下由于混进加工物的切屑而导致浆料的粘度上升,由此带来加工品质降低的所谓粘度稳定性的问题。进而,为了避免引火,体系中的水分量必须多,而另一方面,当被加工材料是用于半导体基板等中的硅的情况下,若增加水分量,就存在包含在分散剂中的水与硅反应而生成氢、导致进一步增稠的问题,因而大大限制了可以使用的组成。
另外,在专利文献4中公开的非水系的磨料分散剂组合物中,由于所添加的有机酸、有机蒙脱石,而依旧存在引起磨料分散剂组合物的增稠的问题,并且,欲重复利用水性磨料分散剂组合物时,存在再生品的组成不固定、难以重复利用的问题。而且,还具有因为不含水而带来的引火性的问题。
因此,本发明的课题在于提供一种没有引火的问题、磨料的分散稳定性和使用中的长期粘度稳定性优良的水性磨料分散剂组合物以及加工用水性浆料。
解决课题的手段
本发明的第一形态是提供一种水性磨料分散剂组合物来解决上述课题,该组合物的特征在于:含有二醇类、以通式(1)表示的二醇醚类和水。
R2O-(CHR1CH2O)m-R3 (1)
式中,R1表示氢原子或甲基,R2表示碳原子数为1~18的烷基或链烯基,R3表示氢原子、或碳原子数为1~18的烷基或链烯基,m表示1~20的数。
本发明的第二形态是提供一种水性磨料分散剂组合物来解决上述课题,该组合物的特征在于:由二醇类、以通式(1)表示的二醇醚类、水和脂肪族多元羧酸的碱性盐组成。
R2O-(CHR1CH2O)m-R3 (1)
式中,R1表示氢原子或甲基,R2表示碳原子数为1~18的烷基或链烯基,R3表示氢原子、或碳原子数为1~18的烷基或链烯基,m表示1~20的数。
在第二形态中,以上述水性磨料分散剂组合物总量为100重量%计,脂肪族多元羧酸的碱性盐的含量优选为0.01~10重量%。
另外,在第一和第二形态中,以上述水性磨料分散剂组合物总量为100重量%计,优选上述二醇类和上述二醇醚类的含量总计为50~98重量%;以上述水性磨料分散剂组合物总量为100重量%计,上述水的含量优选为2~50重量%。
进一步,在第一和第二形态中,以重量为基准,上述二醇类与上述二醇醚类的含量比例优选为上述二醇类∶上述二醇醚类=50∶50~99∶1。
根据这些发明,可以提供一种没有引火的问题、磨料的分散稳定性和使用中的长期粘度稳定性优良的水性磨料分散剂组合物。
本发明的第三形态是提供一种加工用水性浆料来解决上述课题,该加工用水性浆料的特征在于:包含本发明的上述水性磨料分散剂组合物、和磨料。
根据该发明,可以提供一种没有引火的问题、磨料的分散稳定性和使用中的长期粘度稳定性优良的加工用水性浆料。
本发明的第四形态是提供一种加工方法来解决上述课题,该加工方法的特征在于:使用本发明的上述加工用水性浆料,进行切削加工、磨削加工、研磨加工或切割加工。
本发明的第五形态是提供一种加工方法来解决上述课题,该加工方法的特征在于:使用本发明的上述加工用水性浆料,进行钢丝锯加工或带锯加工。
在第四和第五形态中,被加工材料优选为硅、石英、水晶、化合物半导体、陶瓷、玻璃、金属氧化物、超硬合金和烧结合金中的至少一种。
根据第四和第五形态的发明,可以提供安全性、加工性优良的加工方法。
发明效果
设计成二醇类和添加剂的现有的水性磨料分散剂组合物,其磨料的混合·分散大大依赖于添加剂,但在长期使用时,由于工件切屑的混入而导致浆料的粘度上升,加工精度容易降低。本发明的水性磨料分散剂组合物不仅可以稳定地分散磨料,而且通过含有二醇醚类,可以抑制其浆料的粘度上升,因而能保持使用初期的优良的加工精度。而且,所添加的水不仅具有消除引火的危险性的效果,还具有对切削时产生的热的冷却效果、抑制增稠的效果,通过结合使用二醇醚类和水,可以制成优良的水性磨料分散剂组合物。
本发明的这些作用和优点通过下面说明的本发明的具体实施方式可明了。
具体实施方式
本发明的水性磨料分散剂组合物含有二醇类、以通式(1)表示的二醇醚类和水。其中,所使用的二醇类并没有特别限制,可以列举例如乙二醇、丙二醇、二乙二醇、三乙二醇、四乙二醇、丁二醇、己二醇、甘油、1,3-丙二醇、1,4-丁二醇、1,6-己二醇、聚乙二醇、聚丙二醇、其它聚亚烷基二醇。其中,特别优选的是丙二醇、二乙二醇。这些可以单独使用,也可以二种以上结合使用。
作为二醇醚类,可以使用以下述通式(1)表示的二醇醚类。
R2O-(CHR1CH2O)m-R3 (1)
在通式(1)中,R1表示氢原子或甲基,R2表示碳原子数为1~18的烷基或链烯基,R3表示氢原子、或碳原子数为1~18的烷基或链烯基,m表示1~20的数。作为以通式(1)表示的化合物,具体可以列举二乙二醇单甲醚、二乙二醇单乙醚、二乙二醇单丙醚、二乙二醇单丁醚、二乙二醇二甲醚、二乙二醇二乙醚、二乙二醇二丙醚、二乙二醇二丁醚、二丙二醇单甲醚、二丙二醇单乙醚、二丙二醇单丙醚、二丙二醇单丁醚、二丙二醇二甲醚、二丙二醇二乙醚、二丙二醇二丙醚、二丙二醇二丁醚、三乙二醇单甲醚、三乙二醇单乙醚、三乙二醇单丙醚、三乙二醇单丁醚、三乙二醇二甲醚、三乙二醇二乙醚、三乙二醇二丙醚、三乙二醇二丁醚、三丙二醇单甲醚、三丙二醇单乙醚、三丙二醇单丙醚、三丙二醇单丁醚、三丙二醇二甲醚、三丙二醇二乙醚、三丙二醇二丙醚、三丙二醇二丁醚等。其中,特别优选的是二乙二醇单丁醚、二乙二醇二甲醚、三乙二醇单乙醚。这些可以单独使用,也可以二种以上结合使用。
关于本发明的水性磨料分散剂组合物中的二醇类和二醇醚类的含量,以水性磨料分散剂组合物总量为100重量%计,优选二醇类和二醇醚类的含量总计为50~98重量%,更优选为85~98重量%。以重量为基准,二醇类与二醇醚类的含量比例优选为二醇类∶二醇醚类=50∶50~99∶1。
水可以使用工业用水、自来水、去离子水、蒸馏水的任意一种,其中优选没有杂质的蒸馏水,更优选去离子水。从防止引火和抑制粘度的方面考虑,以水性磨料分散剂组合物总量为100重量%,本发明的水性磨料分散剂组合物中的水的含量优选为2~50重量%,更优选2~15重量%。
本发明的水性磨料分散剂组合物优选由二醇类、以通式(1)表示的二醇醚类、水和脂肪族多元羧酸的碱性盐组成。作为脂肪族多元羧酸,具体可以列举柠檬酸、草酸等;构成碱性盐的碱,可以列举钠、钾、胺类等。作为脂肪族多元羧酸的碱性盐特别优选为柠檬酸钾。它们可以单独使用,也可以二种以上结合使用。以水性磨料分散剂组合物总量为100重量%计,本发明的水性磨料分散剂组合物中的脂肪族多元羧酸的碱性盐的含量优选为0.01~10重量%。当在水性磨料分散剂组合物中包含这些化合物时,可以直接添加脂肪族多元羧酸的碱性盐,也可以同时添加作为原料的脂肪族多元羧酸和碱金属氢氧化物或胺。此时,不必是当量,可以使用相对于碱金属氢氧化物或胺过量的脂肪族多元羧酸。
本发明的水性磨料分散剂组合物通过将由SiC等形成的磨料混入其中并使其均匀分散而被制成加工用水性浆料。本发明的加工用水性浆料适合用于切削加工、磨削加工、研磨加工或者切割加工,可以用作对硅、石英、水晶、化合物半导体、陶瓷、玻璃、金属氧化物、超硬合金、烧结合金等进行加工时供应到刃上的切削液。作为可以特别显著地发挥本发明的水性磨料分散剂组合物和使用其制得的加工用水性浆料的效果的切割装置,可以列举钢丝锯、带锯和将这些多重使用的多重钢丝锯、多重带锯等。
实施例
下面通过实施例来具体说明本发明。
按照表1的组成来制备本发明的水性磨料分散剂组合物(实施例1~4)和本发明以外的水性磨料分散剂组合物(比较例1~4)。进一步,通过对各水性磨料分散剂组合物1L添加1kg的GC磨料(#1500),用搅拌机以1000rpm搅拌1小时,得到加工用水性浆料。另外,表1中记载的各成分相对应的数值是重量份。
表1
实施例1 | 实施例2 | 实施例3 | 实施例4 | 比较例1 | 比较例2 | 比较例3 | 比较例4 | |
丙二醇 | 70 | - | - | 85 | 100 | - | - | 85 |
二乙二醇 | - | 70 | 80 | - | - | 90 | - | - |
聚乙二醇200 | - | - | - | - | - | - | 85 | - |
三乙二醇单乙醚 | 20 | - | 10 | - | - | - | - | - |
二乙二醇二甲醚 | - | 10 | - | - | - | 10 | - | - |
二乙二醇单丁醚 | - | - | - | 5 | - | - | - | - |
水 | 9 | 19 | 10 | 10 | - | - | 15 | 14 |
柠檬酸 | 1 | 2 | - | - | - | - | - | 1 |
氢氧化钾 | 0.5 | 1 | - | - | - | - | - | 0.5 |
对上述制备的各加工用水性浆料,加入10重量%的硅粉(粒径1~2μm),搅拌混合后,测定浆料粘度(η0)。接着,在这些浆料中加入不锈钢钢球(直径2mm),以1000rpm搅拌10小时粉碎硅粉,然后用金属丝网(50目)过滤掉不锈钢钢球后,测定浆料粘度(η1)。并且,将刚刚制备后的加工用水性浆料放入容器(200ml烧杯)中,静置24小时后,观察有没有磨料的沉降导致的硬结块。结果示于表2中。
从表2可知,相对于比较例的加工用水性浆料在碎粉硅粉前后粘度发生较大变化,本发明的加工用水性浆料在粉碎硅粉前后粘度几乎没有变化,长期使用时的粘度稳定性优良。另外,本发明的加工用水性浆料不会引起硬结块,其分散稳定性也优良。
以上结合在目前认为最为实用、且优选的实施方式来对本发明进行说明,但本发明并不限于本申请说明书中公开的实施方式,在不违背从权利要求书和说明书整体看出的发明要旨或思想的范围内可以适宜修改,应当理解由这些修改产生的水性磨料分散剂组合物和加工用水性浆料也包含在本发明的技术范围内。
Claims (10)
1.一种水性磨料分散剂组合物,其特征在于,由二醇类、以通式(1)表示的二醇醚类和水组成;其中,以上述水性磨料分散剂组合物总量为100重量%计,上述二醇类和上述二醇醚类的含量总计为50~98重量%,上述水的含量为2~50重量%;
R2O-(CHR1CH2O)m-R3 (1)
式中,R1表示氢原子或甲基,R2表示碳原子数为1~18的烷基或链烯基,R3表示氢原子、或碳原子数为1~18的烷基或链烯基,m表示1~20的数。
2.根据权利要求1所述的水性磨料分散剂组合物,其中,以上述水性磨料分散剂组合物总量为100重量%计,上述二醇类和上述二醇醚类的含量总计为85~98重量%。
3.根据权利要求1所述的水性磨料分散剂组合物,其中,以重量为基准,上述二醇类与上述二醇醚类的含量比例为上述二醇类∶上述二醇醚类=50∶50~99∶1。
4.一种水性磨料分散剂组合物,其特征在于,由二醇类、通式(1)表示的二醇醚类、水、和脂肪族多元羧酸的碱性盐组成;其中,以上述水性磨料分散剂组合物总量为100重量%计,上述脂肪族多元羧酸的碱性盐的含量为0.01~10重量%,上述二醇类和上述二醇醚类的含量总计为50~98重量%,上述水的含量为2~50重量%;
R2O-(CHR1CH2O)m-R3 (1)
式中,R1表示氢原子或甲基,R2表示碳原子数为1~18的烷基或链烯基,R3表示氢原子、或碳原子数为1~18的烷基或链烯基,m表示1~20的数。
5.根据权利要求4所述的水性磨料分散剂组合物,其中,以上述水性磨料分散剂组合物总量为100重量%计,上述二醇类和上述二醇醚类的含量总计为85~98重量%。
6.根据权利要求4所述的水性磨料分散剂组合物,其中,以重量为基准,上述二醇类与上述二醇醚类的含量比例为上述二醇类∶上述二醇醚类=50∶50~99∶1。
7.一种加工用水性浆料,其特征在于,包含权利要求1~6中任意一项所述的水性磨料分散剂组合物、和磨料。
8.一种加工方法,其特征在于,使用权利要求7所述的加工用水性浆料,进行切削加工、磨削加工、研磨加工或切割加工。
9.一种加工方法,其特征在于,使用权利要求7所述的加工用水性浆料,进行钢丝锯加工或带锯加工。
10.根据权利要求8或9所述的加工方法,其中,被加工材料为硅、石英、水晶、化合物半导体、陶瓷、玻璃、金属氧化物、超硬合金和烧结合金中的至少一种。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005213868A JP4481898B2 (ja) | 2005-07-25 | 2005-07-25 | 水性砥粒分散媒組成物 |
JP2005-213868 | 2005-07-25 | ||
JP2005213868 | 2005-07-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1903968A CN1903968A (zh) | 2007-01-31 |
CN1903968B true CN1903968B (zh) | 2012-08-22 |
Family
ID=37402581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200610099284XA Expired - Fee Related CN1903968B (zh) | 2005-07-25 | 2006-07-25 | 水性磨料分散剂组合物 |
Country Status (6)
Country | Link |
---|---|
US (2) | US20070169422A1 (zh) |
EP (1) | EP1752521A1 (zh) |
JP (1) | JP4481898B2 (zh) |
KR (1) | KR101254339B1 (zh) |
CN (1) | CN1903968B (zh) |
TW (1) | TWI395807B (zh) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090032006A1 (en) * | 2007-07-31 | 2009-02-05 | Chul Woo Nam | Wire saw process |
US8157876B2 (en) * | 2007-07-31 | 2012-04-17 | Cabot Microelectronics Corporation | Slurry composition containing non-ionic polymer and method for use |
JP2009062426A (ja) * | 2007-09-05 | 2009-03-26 | Kyodo Yushi Co Ltd | 遊離砥粒ワイヤソー用水溶性加工油剤、スラリー及び切断加工方法 |
JP2009079083A (ja) * | 2007-09-25 | 2009-04-16 | Kyodo Yushi Co Ltd | 遊離砥粒ワイヤソー用水溶性加工油剤 |
WO2009133612A1 (ja) | 2008-04-30 | 2009-11-05 | パレス化学株式会社 | 水溶性切断液組成物、水溶性切断液及びその水溶性切断液を用いた切断方法 |
JP5464055B2 (ja) | 2009-06-02 | 2014-04-09 | 日信化学工業株式会社 | 水性切削液及び水性切削剤 |
WO2010143649A1 (ja) | 2009-06-12 | 2010-12-16 | 日信化学工業株式会社 | 水性切削液及び水性切削剤 |
JP5679642B2 (ja) * | 2009-07-15 | 2015-03-04 | ユシロ化学工業株式会社 | 固定砥粒ワイヤソー用水溶性加工液 |
JP2011148974A (ja) * | 2009-08-31 | 2011-08-04 | Sanyo Chem Ind Ltd | シリコンインゴットスライス用水溶性切削液 |
KR20120061821A (ko) | 2009-08-31 | 2012-06-13 | 산요가세이고교 가부시키가이샤 | 실리콘 잉곳 슬라이스용 수용성 절삭액 |
KR20130001210A (ko) * | 2009-11-12 | 2013-01-03 | 팰리스 카가쿠 가부시기가이샤 | 고정 저립 와이어 톱용 수용성 절단액, 그것을 이용한 잉곳의 절단방법, 그 리사이클 방법 및 절단에 의해서 얻어진 웨이퍼 |
DE102010015111A1 (de) * | 2010-03-23 | 2011-09-29 | Schott Solar Ag | Fluide Trennmedien und deren Verwendung |
JP2012172117A (ja) * | 2011-02-23 | 2012-09-10 | Yushiro Chemical Industry Co Ltd | 固定砥粒ワイヤソー用水溶性加工液 |
DE102011014828A1 (de) | 2011-03-23 | 2012-09-27 | Schott Solar Ag | Fluide Trennmedien und deren Verwendung |
JP5755479B2 (ja) * | 2011-03-31 | 2015-07-29 | 三洋化成工業株式会社 | 含水切削液組成物およびその製造方法 |
KR20140088535A (ko) * | 2011-11-01 | 2014-07-10 | 아사히 가라스 가부시키가이샤 | 유리 기판의 제조 방법 |
EP2809754A1 (de) | 2012-02-01 | 2014-12-10 | Basf Se | Kühl- und/oder schmierflüssigkeiten zur waferherstellung |
CN103131331B (zh) * | 2013-01-30 | 2014-05-21 | 东莞市垠星科技发展有限公司 | 一种沉降性水基研磨液及其制备方法 |
JP6462321B2 (ja) * | 2014-11-10 | 2019-01-30 | トーヨーエイテック株式会社 | ワイヤソー用ガイドローラ及びそれを備えたワイヤソー、並びにそのガイドローラの製造方法及び外被層再生方法 |
JP6371681B2 (ja) * | 2014-11-10 | 2018-08-08 | トーヨーエイテック株式会社 | ワイヤソ−用ガイドローラの樹脂層再生方法 |
JP2016124915A (ja) * | 2014-12-26 | 2016-07-11 | 株式会社フジミインコーポレーテッド | 研磨用組成物、研磨方法、及びセラミック製部品の製造方法 |
CN106675696A (zh) * | 2016-12-28 | 2017-05-17 | 苏州协鑫光伏科技有限公司 | 硅片切割用砂浆 |
CN111298950B (zh) * | 2019-08-07 | 2022-04-05 | 西安隆基锂电新材料有限公司 | 一种水系研磨硅粉的方法及硅粉 |
JP7231934B2 (ja) * | 2019-08-28 | 2023-03-02 | パレス化学株式会社 | 水溶性切削加工液 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5817711A (en) * | 1996-08-12 | 1998-10-06 | Nippei Toyama Corporation | Aqueous working liquid composition for wire saw |
CN1417278A (zh) * | 2002-12-13 | 2003-05-14 | 清华大学 | 一种用于存储器硬盘的磁盘基片抛光浆料 |
CN1422922A (zh) * | 2001-11-28 | 2003-06-11 | 不二见株式会社 | 磁盘基材的抛光组合物和使用该组合物的抛光方法 |
CN1494740A (zh) * | 2000-11-16 | 2004-05-05 | 英特尔公司 | 铜的化学机械抛光所用的浆料和方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62297062A (ja) * | 1986-06-16 | 1987-12-24 | Yushiro Chem Ind Co Ltd | ラツプ剤組成物およびその製造方法 |
JPS63168493A (ja) * | 1986-12-29 | 1988-07-12 | Yushiro Chem Ind Co Ltd | 難燃性切削油剤 |
JPH04216897A (ja) * | 1990-12-19 | 1992-08-06 | Nippon Steel Corp | ワイヤソーによる切断法および加工液 |
JP3790314B2 (ja) * | 1997-01-16 | 2006-06-28 | 三洋化成工業株式会社 | ラップ液組成物 |
JP3296781B2 (ja) * | 1998-04-21 | 2002-07-02 | 信越半導体株式会社 | 水性切削液、その製造方法、ならびにこの水性切削液を用いた切削方法 |
JP2002080883A (ja) * | 2000-06-20 | 2002-03-22 | Neos Co Ltd | ワイヤソ−用水溶性加工液 |
JP2002114970A (ja) * | 2000-10-04 | 2002-04-16 | Asahi Denka Kogyo Kk | 水系ラップ液及び水系ラップ剤 |
JPWO2002067309A1 (ja) * | 2001-02-20 | 2004-06-24 | 日立化成工業株式会社 | 研磨剤及び基板の研磨方法 |
JP2003082380A (ja) * | 2001-09-07 | 2003-03-19 | Dai Ichi Kogyo Seiyaku Co Ltd | 非引火性水系切削液組成物及び非引火性水系切削液 |
JP2003124159A (ja) * | 2001-10-16 | 2003-04-25 | Asahi Denka Kogyo Kk | 水系ラップ液及び水系ラップ剤 |
JP2003129080A (ja) * | 2001-10-24 | 2003-05-08 | Kyodo Yushi Co Ltd | 切断加工用水溶性油剤 |
JP2004244593A (ja) * | 2003-02-17 | 2004-09-02 | Asahi Denka Kogyo Kk | 防錆剤組成物 |
US20050121969A1 (en) * | 2003-12-04 | 2005-06-09 | Ismail Emesh | Lubricant for wafer polishing using a fixed abrasive pad |
-
2005
- 2005-07-25 JP JP2005213868A patent/JP4481898B2/ja active Active
-
2006
- 2006-07-18 US US11/488,507 patent/US20070169422A1/en not_active Abandoned
- 2006-07-21 TW TW095126730A patent/TWI395807B/zh active
- 2006-07-21 EP EP06253826A patent/EP1752521A1/en not_active Withdrawn
- 2006-07-24 KR KR1020060068981A patent/KR101254339B1/ko active IP Right Grant
- 2006-07-25 CN CN200610099284XA patent/CN1903968B/zh not_active Expired - Fee Related
-
2009
- 2009-06-18 US US12/486,949 patent/US20090258580A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5817711A (en) * | 1996-08-12 | 1998-10-06 | Nippei Toyama Corporation | Aqueous working liquid composition for wire saw |
CN1494740A (zh) * | 2000-11-16 | 2004-05-05 | 英特尔公司 | 铜的化学机械抛光所用的浆料和方法 |
CN1422922A (zh) * | 2001-11-28 | 2003-06-11 | 不二见株式会社 | 磁盘基材的抛光组合物和使用该组合物的抛光方法 |
CN1417278A (zh) * | 2002-12-13 | 2003-05-14 | 清华大学 | 一种用于存储器硬盘的磁盘基片抛光浆料 |
Also Published As
Publication number | Publication date |
---|---|
CN1903968A (zh) | 2007-01-31 |
US20090258580A1 (en) | 2009-10-15 |
US20070169422A1 (en) | 2007-07-26 |
TW200708605A (en) | 2007-03-01 |
EP1752521A1 (en) | 2007-02-14 |
KR20070013221A (ko) | 2007-01-30 |
KR101254339B1 (ko) | 2013-04-12 |
TWI395807B (zh) | 2013-05-11 |
JP4481898B2 (ja) | 2010-06-16 |
JP2007031502A (ja) | 2007-02-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1903968B (zh) | 水性磨料分散剂组合物 | |
CN1234827C (zh) | 非易燃性水系切削液组合物以及非易燃性水系切削液 | |
CN101531946A (zh) | 一种绿色半合成双基础油金属切削液及其制备方法 | |
CN108165362A (zh) | 一种全合成水基蓝宝石切削液及其制备方法 | |
KR19980018614A (ko) | 줄톱형 수성 작용액 조성물 | |
JP3933748B2 (ja) | ワイヤソー用水溶性切削液 | |
KR101718988B1 (ko) | 수용성 절단액 조성물, 수용성 절단액 및 그 수용성 절단액을 이용한 절단방법 | |
JP2006111728A (ja) | ワイヤソー用切削油剤 | |
CN111254003A (zh) | 一种切割过程中使用的冷却液及其制备方法和用途 | |
CN110846118A (zh) | 一种环保水基切削液及其制备方法 | |
JP5751521B2 (ja) | 硬質脆性材料の工作物を切削又は研削工具で切断する際に使用するための加工組成物 | |
JP2007106835A (ja) | 金属加工油剤組成物及び金属加工方法 | |
CN111254002A (zh) | 一种切割过程中使用的冷却液及其制备方法和用途 | |
JP2002080883A (ja) | ワイヤソ−用水溶性加工液 | |
KR20110039725A (ko) | 와이어 쏘우용 수용성 절삭액 조성물 | |
JP4194783B2 (ja) | 水溶性切断加工用油剤 | |
KR20130046290A (ko) | 수성 절삭액 조성물 | |
JPH09194824A (ja) | 水溶性ラップ液組成物 | |
KR101680383B1 (ko) | 와이어 쏘우용 수성 절삭액 조성물 | |
JP5408639B2 (ja) | 含水性スライシング用加工液組成物 | |
KR20110015192A (ko) | 와이어 쏘우용 수용성 절삭액 조성물 | |
KR20130046289A (ko) | 수성 절삭액 조성물 | |
KR20130047436A (ko) | 고정연마용 수성 절삭액 조성물 | |
JP2011241293A (ja) | 切削液用水性組成物及びその製造方法並びに水性切削液 | |
KR20120021748A (ko) | 와이어 쏘우용 수성 절삭액 조성물 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120822 Termination date: 20200725 |