TWI395807B - 水性研磨粒分散媒介組成物 - Google Patents

水性研磨粒分散媒介組成物 Download PDF

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TWI395807B
TWI395807B TW095126730A TW95126730A TWI395807B TW I395807 B TWI395807 B TW I395807B TW 095126730 A TW095126730 A TW 095126730A TW 95126730 A TW95126730 A TW 95126730A TW I395807 B TWI395807 B TW I395807B
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dispersion medium
glycol
medium composition
particle dispersion
abrasive particle
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TW200708605A (en
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Shingo Kikuchi
Hideto Nakada
Yasumasa Ohashi
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Yushiro Chem Ind
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Description

水性研磨粒分散媒介組成物 技術領域
本發明係有關於一種用於切削加工、研磨加工及切斷加工等之水性研磨粒分散媒介組成物及使用有該水性研磨粒分散媒介組成物之加工用水性漿體。
背景技術
在對矽、石英、水晶、化合物半導體、陶瓷、玻璃、金屬氧化物、超硬合金及燒結合金等易碎材料進行切削加工、研削加工、研磨加工及切斷加工時，常會用到分散媒介中分散有研磨粒之漿體。在加工時，該漿體係作為切削液一面供應至加工裝置之刃部，一面進行作業。
以往大多是使用以礦油或合成油等為主成分之非水溶性分散媒介來作為漿體之分散媒介。但是，因該等非水溶性分散媒介大多屬於具易燃性之危險物質，存在著加工時之易燃問題或依消防法而有儲藏量受限的問題，所以最近多改用水溶性研磨粒分散媒介。
一般市售之水溶性研磨粒分散媒介組成物多是設計成以二醇類為基油，再添加主要用以混合、分散研磨粒之添加劑，例如專利文獻1~3中，揭示在水-二醇系分散媒介中添加有特定添加劑之研磨粒分散媒介組成物。又，專利文獻4亦揭示在有未含有水之二醇系分散媒介中添加有機酸及有機膨潤石之研磨粒分散媒介組成物。
【專利文獻1】特開平10-81872號公報
【專利文獻2】特開平10-259396號公報
【專利文獻3】特開平10-324889號公報
【專利文獻4】特開2002-80883號公報
發明揭示
在使用有如專利文獻1~3之水-二醇系分散媒介之研磨粒分散媒介組成物中，在加工初期時，亦可得到具有與非水溶性者不相上下之良好性能。但是，大多數使用有該等水性研磨粒分散媒介組成物之漿體在使用時會混入加工物之切屑，使漿體粘度上升，而有加工品質因而降低之粘度安定性的問題。而且，為避免燃著，需要增加系中之水分量，同時，在被加工材為使用於半導體基板等之矽時，一旦增加水分量，則矽就會與含在分散媒介中之水發生反應，而有產生氫或更增加粘度等的問題，故在可使用之組成上有極大限制。
另外，在專利文獻4所揭示之非水系研磨粒分散媒介組成物中，由於添加有有機酸或有機膨潤石等，故還是會引起研磨粒分散媒介組成物增加粘度的問題。又，在要回收利用水性研磨粒分散媒介組成物時，也會有再生物組成不固定而難以回收利用的問題。而且，因未含有水，亦有易燃性之問題。
因此，本發明之目的在於提供無易燃問題，且研磨粒 分散安定性及使用時之長時間黏度安定性優異之水性研磨粒分散媒介組成物及加工用水性漿體。
本發明之第一態樣係提供含有二醇類、以下列通式(1)表示之二醇醚類、及水之水性研磨粒分散媒介組成物，來解決前述問題。
【化1】R2O-(CHR1CH2O)m-R3 (1)
(在式中，R1表示氫原子或甲基，而R2表示碳數1~18之烷基或烯基，且R3表示氫原子、或是碳數1~18之烷基或烯基，m則表示數字1~20)。
本發明之第二態樣係提供由二醇類、以下列通式(1)表示之二醇醚類、水、及脂族多價羧酸之鹼鹽構成之水性研磨粒分散媒介組成物，來解決前述問題。
【化2】R2O-(CHR1CH2O)m-R3 (1)
(在式中，R1表示氫原子或甲基，而R2表示碳數1~18之烷基或烯基，且R3表示氫原子、或是碳數1~18之烷基或烯基，m則表示數字1~20)。
在第二態樣中，若令前述水性研磨粒分散媒介組成物全量為100質量%，則脂族多價羧酸之鹼鹽的含量最好為0.01~10質量%。
另外，在第一及二態樣中，若令前述水性研磨粒分散媒介組成物全量為100質量%，則前述二醇類和前述二醇醚 類的含量合計最好為50~98質量%，且若令前述水性研磨粒分散媒介組成物全量為100質量%，則前述水的含量最好為2~50質量%。
而且，在第一及二態樣中，以質量為基準，前述二醇類與前述二醇醚類的含有比率最好為前述二醇類：前述二醇醚類=50：50~99：1。
根據該等發明，即可提供無易燃問題，且研磨粒之分散安定性及使用時之長時間黏度安定性優異之水性研磨粒分散媒介組成物。
本發明之第三態樣係提供含有申請專利範圍第1項之水性研磨粒分散媒介組成物及研磨粒之加工用水性漿體，來解決前述問題。
根據該發明，即可提供無易燃問題，且研磨粒之分散安定性及使用時之長時間黏度安定性優異之水性研磨粒分散媒介組成物。
本發明之第四態樣係提供使用申請專利範圍第10項之加工用水性漿體來進行切削加工、研削加工、研磨加工或切斷加工之加工方法，來解決前述問題。
本發明之第五態樣係提供使用申請專利範圍第10項之加工用水性漿體來進行線鋸加工或帶鋸加工之加工方法，來解決前述問題。
在第四及第五態樣中，係使用矽、石英、水晶、化合物半導體、陶瓷、玻璃、金屬氧化物、超硬合金及燒結合金中至少一種作為被加工材。
根據第四及第五態樣之發明，即可提供安全性、加工性優異之加工方法。
在利用二醇類和添加劑所設計之習知水性研磨粒分散媒介組成物中，添加劑雖極有助於混合．分散研磨粒，但漿體黏度容易因在使用時混入加工物切屑而上升，易降低加工精度。而本發明之水性研磨粒分散媒介組成物不僅可安定地分散研磨粒，還可藉由含有二醇醚類來抑制該漿體黏度上升，故可保持使用初期之優異加工精度。又，所添加之水不僅具有消除易燃危險性的效果，還具有冷卻切削時所產生之熱、及抑制增黏的效果，藉由並用二醇醚類及水，即可成為優異之水性研磨粒分散媒介組成物。
由以下說明之實施本發明之最佳形態便可知本發明之此種作用及益處。
實施發明之最佳形態
本發明之水性研磨粒分散媒介組成物含有二醇類、以通式(1)表示之二醇醚類、及水。其中，所使用之二醇類並未特別限定，可舉例如下：乙二醇、丙二醇、二乙二醇、三乙二醇、四乙二醇、丁二醇、己二醇、丙三醇、1,3-丙二醇、1,4-丁二醇、1,6-己二醇、聚乙二醇、聚丙二醇、及其他聚乙二醇烷類。而其中尤以聚丙二醇、二乙二醇為佳。又，該等化合物可單獨使用、亦可並用二種以上。
二醇醚類可使用以後述通式(1)表示之二醇醚類。
【化3】R2O-(CHR1CH2O)m-R3 (1)
在通式(1)中，R1表示氫原子或甲基，而R2表示碳數1~18之烷基或烯基，且R3表示氫原子、或是碳數1~18之烷基或烯基，m則表示數字1~20。以通式(1)表示之化合物可具體舉例如下：二乙二醇甲基醚、二乙二醇乙基醚、二乙二醇丙基醚、二乙二醇丁基醚、二乙二醇二甲基醚、二乙二醇二乙基醚、二乙二醇二丙基醚、二乙二醇二丁基醚、二丙二醇甲基醚、二丙二醇乙基醚、二丙二醇丙基醚、二丙二醇丁基醚、二丙二醇二甲基醚、二丙二醇二乙基醚、二丙二醇二丙基醚、二丙二醇二丁基醚、三乙二醇甲基醚、三乙二醇乙基醚、三乙二醇丙基醚、三乙二醇丁基醚、三乙二醇二甲基醚、三乙二醇二乙基醚、三乙二醇二丙基醚、三乙二醇二丁基醚、三丙二醇甲基醚、三丙二醇乙基醚、三丙二醇丙基醚、三丙二醇丁基醚、三丙二醇二甲基醚、三丙二醇二乙基醚、三丙二醇二丙基醚、三丙二醇二丁基醚等。其中，尤以二乙二醇丁基醚、二乙二醇二甲基醚、三乙二醇乙基醚。又，該等化合物可單獨使用，亦可並用二種以上。
在本發明之水性研磨粒分散媒介組成物中，令水性研磨粒分散媒介組成物全量為100質量%，則二醇類及二醇醚類之含量合計最好為50~98質量%，尤以85~98%為佳。以質量為基準，二醇類與二醇醚類的含有比率最好為二醇類：二醇醚類=50：50~99：1。
水可使用工業用水、自來水、去離子水、及蒸餾水任一種，但其中以無雜質之蒸餾水為佳，尤以去離子水為佳。由防止易燃性和抑制黏度的觀點來看，在本發明之水性研磨粒分散媒介組成物中，令水性研磨粒分散媒介組成物全量為100質量%，則水的含量以2~50質量%為宜，尤以2~15質量%為宜。
本發明之水性研磨粒分散媒介組成物最好是由二醇類、以通式(1)表示之二醇醚類、水、及脂族多價羧酸之鹼鹽構成。脂族多價羧酸具體上可舉檸檬酸、草酸為例；而構成鹼鹽之鹼則可舉鈉、鉀、胺類等為例；脂族多價羧酸之鹼鹽尤以草酸鉀為宜。又，該等化合物可單獨使用，亦可並用二種以上。在本發明之水性研磨粒分散媒介組成物中，令水性研磨粒分散媒介組成物全量為100質量%，則脂族多價羧酸之鹼鹽含量最好為0.01~10質量%。在使水性研磨粒分散媒介組成物中含有該等化合物時，可添加脂族多價羧酸之鹼鹽本身，亦可同時添加作為其原料之脂族多價羧酸、及鹼金屬之氫氧化物或胺等。此時，不一定要等量添加，亦可使用比鹼金屬之氫氧化物或胺等還要多之脂族多價羧酸。
本發明之水性研磨粒分散媒介組成物係藉由混合、均勻地分散以SiC等構成之研磨粒來形成加工用水性漿體。本發明之加工用水性漿體適合用於切削加工、研削加工、研磨加工、或切斷加工，且在對矽、石英、水晶、化合物半導體、陶瓷、玻璃、金屬氧化物、超硬合金、燒結合金等 進行加工時，可作為供應至刃部之切削液。又，作為可顯著地發揮本發明之水性研磨粒分散媒介組成物及使用有該組成物之加工用水性漿體的效果的切斷裝置，則可舉線鋸、帶踞、及將該等裝置多工化之多線鋸、多帶踞等為例。
【實施例】
以下根據實施例具體地說明本發明。
首先，將本發明之水性研磨粒分散媒介組成物(實施例1~4)及本發明以外之水性研磨粒分散媒介組成物(比較例1~4)，作成如表1之組成方式。然後，再分別對水性研磨粒分散媒介組成物1L添加1kg之GC研磨粒(#1500)，用攪拌機以100rpm攪拌1小時，藉此可得到加工用水性漿體。又，對應表1中之各成分之數值係質量部分。
對前述所作成之各加工用水性漿體加入10質量%之矽粉(粒徑1~2μm)，再於攪拌混合後測定漿體黏度(η0)。接著，在該等漿體中加入不鏽鋼鋼球(直徑2mm)，以1000rpm攪拌10小時，再於矽粉粉碎後，測定用金屬絲網(50網目)過濾不鏽鋼鋼球後之漿體黏度(η1)。又，將剛作成之加工用 水性漿體放入容器(200ml燒杯)內，然後再於靜置24小時後，觀察有無研磨粒沉降之硬塊化。結果如表2所示。
由表2可知，比較例之加工用水性漿體的黏度在矽粉粉碎前後有很大變化，相對於此，本發明之加工用水性漿體的黏度在矽粉粉碎前後幾乎看不到變化，使用時之長時間黏度安定性優異。又，本發明之加工用水性漿體也不會引起硬塊化，也具優異之分散安定性。
以上，雖然在現時點說明有關本發明最具實踐性且理想之實施形態，但本發明並不限定於本申請說明書中所揭示之實施形態，且可在不違反由申請專利範圍及說明書全體讀取之發明要旨或思想的範圍內作適當變更，並且伴隨此種變更之水性研磨粒分散媒介組成物及加工用水性漿體亦包含在本發明之技術範圍內。

Claims (13)

  1. 一種水性研磨粒分散媒介組成物，係含有二醇類、以下列通式(1)表示之二醇醚類、及水者；令前述水性研磨粒分散媒介組成物全量為100質量%時，前述二醇類與前述二醇醚類之含量合計為85~98質量%；並且，以前述水性研磨粒分散媒介組成物全量為基準，前述二醇類係作為主成分而包含於該組成物中；【化1】R2O-(CHR1CH2O)m-R3 (1)(在式中，R1表示氫原子或甲基，而R2表示碳數1~18之烷基或烯基，且R3表示氫原子、或是碳數1~18之烷基或烯基，m則表示數字1~20)。
  2. 如申請專利範圍第1項之水性研磨粒分散媒介組成物，其中前述二醇類係選自於由丙二醇及二乙二醇所構成群組中之一種以上二醇類，且前述二醇醚類係選自於由二乙二醇單丁醚、二乙二醇二甲醚及三乙二醇單乙醚所構成群組中之一種以上二醇醚類。
  3. 一種水性研磨粒分散媒介組成物，係由二醇類、以下列通式(1)表示之二醇醚類、水、及脂族多價羧酸之鹼鹽構成者；令前述水性研磨粒分散媒介組成物全量為100質量%時，前述二醇類與前述二醇醚類之含量合計為85~98質量%； 並且，以前述水性研磨粒分散媒介組成物全量為基準，前述二醇類係作為主成分而包含於該組成物中；【化2】R2O-(CHR1CH2O)m-R3 (1)(在式中，R1表示氫原子或甲基，而R2表示碳數1~18之烷基或烯基，且R3表示氫原子、或是碳數1~18之烷基或烯基，m則表示數字1~20)。
  4. 如申請專利範圍第3項之水性研磨粒分散媒介組成物，其令前述水性研磨粒分散媒介組成物全量為100質量%時，則前述脂族多價羧酸之鹼鹽的含量為0.01~10質量%。
  5. 如申請專利範圍第3項之水性研磨粒分散媒介組成物，其中前述二醇類係選自於由丙二醇及二乙二醇所構成群組中之一種以上二醇類，且前述二醇醚類係選自於由二乙二醇單丁醚、二乙二醇二甲醚及三乙二醇單乙醚所構成群組中之一種以上二醇醚類。
  6. 如申請專利範圍第3項之水性研磨粒分散媒介組成物，其中前述脂族多價羧酸係選自檸檬酸及草酸。
  7. 一種加工用水性漿體，係含有如申請專利範圍第1項之水性研磨粒分散媒介組成物及研磨粒者。
  8. 一種加工用水性漿體，係含有如申請專利範圍第3項之水性研磨粒分散媒介組成物及研磨粒者。
  9. 一種加工方法，係使用如申請專利範圍第7項之加工用水性漿體來進行切削加工、研削加工、研磨加工或切斷 加工。
  10. 一種加工方法，係使用如申請專利範圍第8項之加工用水性漿體來進行切削加工、研削加工、研磨加工或切斷加工。
  11. 一種加工方法，係使用如申請專利範圍第7項之加工用水性漿體來進行線鋸加工或帶鋸加工。
  12. 一種加工方法，係使用如申請專利範圍第8項之加工用水性漿體來進行線鋸加工或帶鋸加工。
  13. 如申請專利範圍第9~12項中任一項之加工方法，其中被加工材為矽、石英、水晶、化合物半導體、陶瓷、玻璃、金屬氧化物、超硬合金及燒結合金中之至少一種。
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TW397861B (en) * 1996-08-12 2000-07-11 Nippei Toyama Corp Aqueous working liquid composition for wire saw

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JP4481898B2 (ja) 2010-06-16
CN1903968A (zh) 2007-01-31
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