CN1324674C - 用于键合并转移一种材料以形成半导体器件的方法 - Google Patents

用于键合并转移一种材料以形成半导体器件的方法 Download PDF

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Publication number
CN1324674C
CN1324674C CNB028272463A CN02827246A CN1324674C CN 1324674 C CN1324674 C CN 1324674C CN B028272463 A CNB028272463 A CN B028272463A CN 02827246 A CN02827246 A CN 02827246A CN 1324674 C CN1324674 C CN 1324674C
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China
Prior art keywords
substrate
donor
semiconductor substrate
bonding
transfer layer
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Expired - Fee Related
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CNB028272463A
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English (en)
Chinese (zh)
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CN1615543A (zh
Inventor
罗伯特·E.·琼斯
塞巴斯蒂安·丘陶克
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NXP USA Inc
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Freescale Semiconductor Inc
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Publication of CN1615543A publication Critical patent/CN1615543A/zh
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Publication of CN1324674C publication Critical patent/CN1324674C/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
    • H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
    • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
    • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
  • Light Receiving Elements (AREA)
CNB028272463A 2001-12-17 2002-12-05 用于键合并转移一种材料以形成半导体器件的方法 Expired - Fee Related CN1324674C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/022,711 US6616854B2 (en) 2001-12-17 2001-12-17 Method of bonding and transferring a material to form a semiconductor device
US10/022,711 2001-12-17

Publications (2)

Publication Number Publication Date
CN1615543A CN1615543A (zh) 2005-05-11
CN1324674C true CN1324674C (zh) 2007-07-04

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Family Applications (1)

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CNB028272463A Expired - Fee Related CN1324674C (zh) 2001-12-17 2002-12-05 用于键合并转移一种材料以形成半导体器件的方法

Country Status (8)

Country Link
US (1) US6616854B2 (enExample)
EP (1) EP1500132A2 (enExample)
JP (1) JP4554930B2 (enExample)
KR (1) KR20040079916A (enExample)
CN (1) CN1324674C (enExample)
AU (1) AU2002353020A1 (enExample)
TW (1) TWI255525B (enExample)
WO (1) WO2003052817A2 (enExample)

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US7078320B2 (en) * 2004-08-10 2006-07-18 International Business Machines Corporation Partial wafer bonding and dicing
US7288458B2 (en) * 2005-12-14 2007-10-30 Freescale Semiconductor, Inc. SOI active layer with different surface orientation
KR100755368B1 (ko) * 2006-01-10 2007-09-04 삼성전자주식회사 3차원 구조를 갖는 반도체 소자의 제조 방법들 및 그에의해 제조된 반도체 소자들
US7682930B2 (en) * 2006-06-09 2010-03-23 Aptina Imaging Corporation Method of forming elevated photosensor and resulting structure
US7432174B1 (en) * 2007-03-30 2008-10-07 Advanced Micro Devices, Inc. Methods for fabricating semiconductor substrates with silicon regions having differential crystallographic orientations
EP1993126B1 (en) * 2007-05-18 2011-09-21 Semiconductor Energy Laboratory Co., Ltd. Manufacturing methods of semiconductor substrate
US8201325B2 (en) 2007-11-22 2012-06-19 International Business Machines Corporation Method for producing an integrated device
US7842583B2 (en) * 2007-12-27 2010-11-30 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor substrate and method for manufacturing semiconductor device
US7927975B2 (en) 2009-02-04 2011-04-19 Micron Technology, Inc. Semiconductor material manufacture
GB0914251D0 (en) * 2009-08-14 2009-09-30 Nat Univ Ireland Cork A hybrid substrate
KR101807777B1 (ko) * 2010-03-31 2017-12-11 소이텍 본딩된 반도체 구조들 및 이를 형성하는 방법
FR2965974B1 (fr) * 2010-10-12 2013-11-29 Soitec Silicon On Insulator Procédé de collage moléculaire de substrats en silicium et en verre
US8778737B2 (en) 2011-10-31 2014-07-15 International Business Machines Corporation Flattened substrate surface for substrate bonding
US9190379B2 (en) 2012-09-27 2015-11-17 Apple Inc. Perimeter trench sensor array package
US9209142B1 (en) * 2014-09-05 2015-12-08 Skorpios Technologies, Inc. Semiconductor bonding with compliant resin and utilizing hydrogen implantation for transfer-wafer removal
WO2017052646A1 (en) * 2015-09-25 2017-03-30 Intel Corporation Island transfer for optical, piezo and rf applications

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6093623A (en) * 1998-08-04 2000-07-25 Micron Technology, Inc. Methods for making silicon-on-insulator structures
CN1272684A (zh) * 1999-02-02 2000-11-08 佳能株式会社 衬底及其制造方法
US6191007B1 (en) * 1997-04-28 2001-02-20 Denso Corporation Method for manufacturing a semiconductor substrate

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4966646A (en) 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
US5389569A (en) * 1992-03-03 1995-02-14 Motorola, Inc. Vertical and lateral isolation for a semiconductor device
JP3114570B2 (ja) * 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
JPH09127352A (ja) * 1995-10-30 1997-05-16 Hitachi Ltd 半導体装置およびその製造方法
JP3257624B2 (ja) * 1996-11-15 2002-02-18 キヤノン株式会社 半導体部材の製造方法
JPH1140823A (ja) * 1997-05-22 1999-02-12 Fujitsu Ltd 光検出器モジュール
JPH1145862A (ja) * 1997-07-24 1999-02-16 Denso Corp 半導体基板の製造方法
US6271101B1 (en) * 1998-07-29 2001-08-07 Semiconductor Energy Laboratory Co., Ltd. Process for production of SOI substrate and process for production of semiconductor device
JP2001007362A (ja) * 1999-06-17 2001-01-12 Canon Inc 半導体基材および太陽電池の製造方法
JP2001102523A (ja) * 1999-09-28 2001-04-13 Sony Corp 薄膜デバイスおよびその製造方法
US6400009B1 (en) * 1999-10-15 2002-06-04 Lucent Technologies Inc. Hermatic firewall for MEMS packaging in flip-chip bonded geometry

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6191007B1 (en) * 1997-04-28 2001-02-20 Denso Corporation Method for manufacturing a semiconductor substrate
US6093623A (en) * 1998-08-04 2000-07-25 Micron Technology, Inc. Methods for making silicon-on-insulator structures
CN1272684A (zh) * 1999-02-02 2000-11-08 佳能株式会社 衬底及其制造方法

Also Published As

Publication number Publication date
WO2003052817B1 (en) 2003-09-25
US6616854B2 (en) 2003-09-09
JP2005513781A (ja) 2005-05-12
EP1500132A2 (en) 2005-01-26
US20030114001A1 (en) 2003-06-19
CN1615543A (zh) 2005-05-11
WO2003052817A2 (en) 2003-06-26
AU2002353020A1 (en) 2003-06-30
JP4554930B2 (ja) 2010-09-29
WO2003052817A3 (en) 2003-08-21
TWI255525B (en) 2006-05-21
AU2002353020A8 (en) 2003-06-30
TW200302548A (en) 2003-08-01
KR20040079916A (ko) 2004-09-16

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