CN1312319C - 透明导电膜的形成方法 - Google Patents
透明导电膜的形成方法 Download PDFInfo
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- CN1312319C CN1312319C CNB021529892A CN02152989A CN1312319C CN 1312319 C CN1312319 C CN 1312319C CN B021529892 A CNB021529892 A CN B021529892A CN 02152989 A CN02152989 A CN 02152989A CN 1312319 C CN1312319 C CN 1312319C
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- 238000000992 sputter etching Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- SITVSCPRJNYAGV-UHFFFAOYSA-L tellurite Chemical compound [O-][Te]([O-])=O SITVSCPRJNYAGV-UHFFFAOYSA-L 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001149 thermolysis Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical class CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- LSGOVYNHVSXFFJ-UHFFFAOYSA-N vanadate(3-) Chemical compound [O-][V]([O-])([O-])=O LSGOVYNHVSXFFJ-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45595—Atmospheric CVD gas inlets with no enclosed reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
Description
惰性气体 | 反应性气体1 | 反应性气体1浓度(体积%) | 制膜速度(nm/min) | 透过率(%) | 电阻率(10-4Ω·cm) | 载流子密度(1019cm-3) | 载流子迁移率(cm2/V·sec) | Sn/In比 | 碳量(at%) | |
实施例1 | He | H2 | 0.25 | 12 | 91 | 3.4 | 20 | 90 | 7.2 | 0.4 |
实施例2 | He | H2 | 0.10 | 11 | 89 | 3.8 | 19 | 85 | 7.5 | 0.5 |
实施例3 | He | H2 | 0.50 | 11 | 91 | 3.9 | 27 | 60 | 7.4 | 0.4 |
实施例4 | He | H2 | 1.00 | 10 | 89 | 4.2 | 46 | 32 | 7.3 | 0.6 |
实施例5 | He | H2S | 0.25 | 9 | 86 | 4.8 | 52 | 25 | 7.4 | 0.6 |
实施例6 | Ar | H2 | 0.25 | 10 | 87 | 3.9 | 21 | 76 | 7.1 | 0.6 |
实施例7 | Ar | H2 | 0.10 | 14 | 86 | 3.8 | 21 | 78 | 7.6 | 0.5 |
实施例8 | Ar/He | H2 | 0.25 | 12 | 91 | 3.7 | 20 | 83 | 7.9 | 0.4 |
实施例9 | Ar/He | H2 | 0.10 | 14 | 88 | 3.8 | 24 | 68 | 7.3 | 0.7 |
实施例10 | N2 | H2 | 0.25 | 9 | 86 | 4.7 | 44 | 30 | 7.2 | 0.5 |
比较例1 | - | - | - | 0.3 | 86 | 4.0 | 55 | 30 | 7.1 | 0.2 |
比较例2 | He | O2 | 0.25 | 8 | 84 | 34 | 9.3 | 20 | 7.6 | 0.5 |
比较例3 | He | O2 | 0.05 | 7 | 86 | 73 | 8.5 | 10 | 7.2 | 0.6 |
比较例4 | Ar | O2 | 0.25 | 9 | 87 | 36 | 16 | 11 | 7.3 | 0.8 |
比较例5 | Ar/He | O2 | 0.25 | 9 | 85 | 35 | 18 | 10 | 7.3 | 0.6 |
比较例6 | - | - | - | - | 81 | 160 | 3.0 | 13 | 7.3 | 1.1 |
反应气体1 | 反应气体2 | 反应气体3 | 制膜速度(nm/min) | 透过率(%) | 电阻率(10-4Ω·cm) | |
实施例11 | H2 | Zn(AcAc)2 | - | 13 | 89 | 13 |
实施例12 | H2 | DBTDA | - | 10 | 87 | 14 |
实施例13 | H2 | Sn(AcAc)2 | - | 12 | 88 | 9.7 |
实施例14 | H2 | Sn(AcAc)2 | CF4 | 12 | 87 | 6.9 |
实施例15 | H2 | In(AcAc)3 | Zn(AcAc)2 | 13 | 90 | 4.2 |
实施例16 | H2 | In(AcAc)3 | Sn(AcAc)2 | 14 | 92 | 3.2 |
实施例17 | H2 | In(TMHD)3 | Sn(AcAc)2 | 13 | 91 | 2.8 |
实施例18 | H2 | In(AcAc)3 | TBT | 9 | 85 | 5.1 |
实施例19 | H2 | In(C2H5)3 | DBDTA | 8 | 86 | 5.8 |
比较例7 | - | - | - | 0.4 | 88 | 16 |
比较例8 | - | - | - | 0.3 | 86 | 19 |
比较例9 | - | - | - | 0.3 | 89 | 6.2 |
比较例10 | O2 | Zn(AcAC)2 | - | 13 | 72 | 111 |
比较例11 | O2 | DBDTA | - | 12 | 77 | 42 |
比较例12 | O2 | Sn(AcAc)2 | - | 14 | 74 | 36 |
比较例13 | O2 | Sn(AcAc)2 | CF4 | 12 | 71 | 28 |
比较例14 | O2 | In(AcAc)3 | Zn(AcAc)2 | 12 | 79 | 42 |
比较例15 | O2 | In(AcAc)3 | Sn(AcAc)2 | 15 | 92 | 38 |
比较例16 | O2 | In(TMHD)3 | Sn(AcAc)2 | 15 | 91 | 24 |
制膜速度(nm/min) | 透过率(%) | 电阻率(10-4Ω·cm) | 临界曲率半径(mm) | |
实施例20 | 12 | 87 | 4.0 | 6 |
实施例21 | 13 | 86 | 4.6 | 5 |
实施例22 | 12 | 84 | 4.9 | 6 |
实施例23 | 11 | 87 | 4.2 | 5 |
比较例17 | 0.3 | 84 | 4.9 | 7 |
惰性气体 | 反应性气体1 | 反应性气体1浓度(体积%) | H/M比变动系数(%) | 氢浓度(atom%) | 电阻率(Ω·cm) | 光透过率(%) | |
实施例24 | He | H2O | 0.01 | 2.8 | 1.0 | 2×10-4 | 90 |
实施例25 | He | H2 | 0.15 | 1.5 | 0.8 | 2×10-4 | 91 |
实施例26 | He | H2 | 0.5 | 5.3 | 1.3 | 3.9×10-4 | 80 |
Claims (8)
Applications Claiming Priority (2)
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JP2001368412 | 2001-12-03 | ||
JP368412/2001 | 2001-12-03 |
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CN1422979A CN1422979A (zh) | 2003-06-11 |
CN1312319C true CN1312319C (zh) | 2007-04-25 |
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CNB021529892A Expired - Lifetime CN1312319C (zh) | 2001-12-03 | 2002-11-29 | 透明导电膜的形成方法 |
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US (2) | US20030207093A1 (zh) |
EP (1) | EP1316626B1 (zh) |
KR (1) | KR20030045607A (zh) |
CN (1) | CN1312319C (zh) |
DE (1) | DE60218109T2 (zh) |
TW (1) | TWI307920B (zh) |
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- 2002-11-25 TW TW091134199A patent/TWI307920B/zh not_active IP Right Cessation
- 2002-11-28 DE DE60218109T patent/DE60218109T2/de not_active Expired - Lifetime
- 2002-11-28 EP EP02026492A patent/EP1316626B1/en not_active Expired - Fee Related
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TWI307920B (en) | 2009-03-21 |
US20070036914A1 (en) | 2007-02-15 |
EP1316626A3 (en) | 2003-08-06 |
EP1316626A2 (en) | 2003-06-04 |
US7442627B2 (en) | 2008-10-28 |
KR20030045607A (ko) | 2003-06-11 |
DE60218109T2 (de) | 2007-06-21 |
CN1422979A (zh) | 2003-06-11 |
US20030207093A1 (en) | 2003-11-06 |
DE60218109D1 (de) | 2007-03-29 |
TW200301514A (en) | 2003-07-01 |
EP1316626B1 (en) | 2007-02-14 |
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