CN1204791C - 用激光开孔的开孔铜箔及其制造方法 - Google Patents
用激光开孔的开孔铜箔及其制造方法 Download PDFInfo
- Publication number
- CN1204791C CN1204791C CNB008152152A CN00815215A CN1204791C CN 1204791 C CN1204791 C CN 1204791C CN B008152152 A CNB008152152 A CN B008152152A CN 00815215 A CN00815215 A CN 00815215A CN 1204791 C CN1204791 C CN 1204791C
- Authority
- CN
- China
- Prior art keywords
- copper foil
- layer
- zinc
- copper
- cobalt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 132
- 239000011889 copper foil Substances 0.000 title claims abstract description 103
- 238000005553 drilling Methods 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000011701 zinc Substances 0.000 claims abstract description 48
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 45
- 239000010941 cobalt Substances 0.000 claims abstract description 43
- 229910017052 cobalt Inorganic materials 0.000 claims abstract description 43
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims abstract description 39
- 229910000990 Ni alloy Inorganic materials 0.000 claims abstract description 24
- 229910000531 Co alloy Inorganic materials 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 22
- 229910052738 indium Inorganic materials 0.000 claims abstract description 16
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000011135 tin Substances 0.000 claims abstract description 15
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052718 tin Inorganic materials 0.000 claims abstract description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 80
- 238000000034 method Methods 0.000 claims description 42
- 229910052759 nickel Inorganic materials 0.000 claims description 41
- 239000010949 copper Substances 0.000 claims description 31
- 229910052802 copper Inorganic materials 0.000 claims description 28
- 230000005855 radiation Effects 0.000 claims description 28
- 229910052698 phosphorus Inorganic materials 0.000 claims description 19
- 239000011651 chromium Substances 0.000 claims description 18
- 239000011574 phosphorus Substances 0.000 claims description 18
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 16
- 229910052804 chromium Inorganic materials 0.000 claims description 15
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 14
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 14
- 238000005286 illumination Methods 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 239000011347 resin Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 239000010410 layer Substances 0.000 abstract description 43
- 239000011229 interlayer Substances 0.000 abstract description 7
- 238000009713 electroplating Methods 0.000 description 23
- 238000007747 plating Methods 0.000 description 20
- 238000000576 coating method Methods 0.000 description 14
- 239000011248 coating agent Substances 0.000 description 13
- 239000003792 electrolyte Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000011120 plywood Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 206010028980 Neoplasm Diseases 0.000 description 2
- 229910001096 P alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- RYTYSMSQNNBZDP-UHFFFAOYSA-N cobalt copper Chemical compound [Co].[Cu] RYTYSMSQNNBZDP-UHFFFAOYSA-N 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- QELJHCBNGDEXLD-UHFFFAOYSA-N nickel zinc Chemical compound [Ni].[Zn] QELJHCBNGDEXLD-UHFFFAOYSA-N 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- 229910000570 Cupronickel Inorganic materials 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- HSSJULAPNNGXFW-UHFFFAOYSA-N [Co].[Zn] Chemical compound [Co].[Zn] HSSJULAPNNGXFW-UHFFFAOYSA-N 0.000 description 1
- VDGMIGHRDCJLMN-UHFFFAOYSA-N [Cu].[Co].[Ni] Chemical compound [Cu].[Co].[Ni] VDGMIGHRDCJLMN-UHFFFAOYSA-N 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 210000004877 mucosa Anatomy 0.000 description 1
- SIBIBHIFKSKVRR-UHFFFAOYSA-N phosphanylidynecobalt Chemical compound [Co]#P SIBIBHIFKSKVRR-UHFFFAOYSA-N 0.000 description 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/18—Working by laser beam, e.g. welding, cutting or boring using absorbing layers on the workpiece, e.g. for marking or protecting purposes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
- H05K3/0038—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material combined with laser drilling through a metal layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/382—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
- H05K3/384—Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/34—Coated articles, e.g. plated or painted; Surface treated articles
- B23K2101/35—Surface treated articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/08—Non-ferrous metals or alloys
- B23K2103/12—Copper or alloys thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0723—Electroplating, e.g. finish plating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12361—All metal or with adjacent metals having aperture or cut
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12431—Foil or filament smaller than 6 mils
- Y10T428/12438—Composite
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12639—Adjacent, identical composition, components
- Y10T428/12646—Group VIII or IB metal-base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12903—Cu-base component
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Electroplating Methods And Accessories (AREA)
- Laser Beam Processing (AREA)
- Laminated Bodies (AREA)
Abstract
Description
附着量μg(mg)/dm2 | 开孔率% | ||||||||||
P | In | Sn | Cr | Zn | Co | Ni | Cu | At12.5mJ/脉冲 | At20.9mJ/脉冲 | At32mJ/脉冲 | |
实施例1 | 5060 | 2 | 74 | 100 | |||||||
实施例2 | 9370 | 67 | 93 | 100 | |||||||
实施例3 | 2530 | 31 | 85 | 100 | |||||||
实施例4 | 3400 | 880 | 52 | 94 | 100 | ||||||
实施例5 | 3400 | 51(mg) | 99 | 100 | 100 | ||||||
实施例6 | 2400 | 44.8(mg) | 98 | 100 | 100 | ||||||
实施例7 | 200 | 3780 | 75 | 99 | 100 | ||||||
实施例8 | 100 | 1920 | 0 | 82 | 100 | ||||||
实施例9 | 43 | 6 | 3400 | 650 | 19(mg) | 99 | 100 | 100 | |||
实施例10 | 4400 | 1230 | 14 | 99 | 100 | ||||||
实施例11 | 3470 | 490 | 1 | 80 | 100 | ||||||
比较例1 | 32 | 270 | 9 |
Claims (21)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000026174A JP3258308B2 (ja) | 2000-02-03 | 2000-02-03 | レーザー穴開け性に優れた銅箔及びその製造方法 |
JP26174/00 | 2000-02-03 | ||
JP26174/2000 | 2000-02-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1387745A CN1387745A (zh) | 2002-12-25 |
CN1204791C true CN1204791C (zh) | 2005-06-01 |
Family
ID=18551938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB008152152A Expired - Lifetime CN1204791C (zh) | 2000-02-03 | 2000-12-04 | 用激光开孔的开孔铜箔及其制造方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US6638642B2 (zh) |
EP (2) | EP1781073A3 (zh) |
JP (1) | JP3258308B2 (zh) |
KR (1) | KR100483517B1 (zh) |
CN (1) | CN1204791C (zh) |
DE (1) | DE60039257D1 (zh) |
MY (1) | MY126842A (zh) |
TW (1) | TW578451B (zh) |
WO (1) | WO2001058225A1 (zh) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3628585B2 (ja) | 2000-04-05 | 2005-03-16 | 株式会社日鉱マテリアルズ | 銅張り積層板及び銅張り積層板のレーザーによる穴開け方法 |
JP3690962B2 (ja) * | 2000-04-26 | 2005-08-31 | 三井金属鉱業株式会社 | キャリア箔付電解銅箔及びそのキャリア箔付電解銅箔の製造方法並びに銅張積層板 |
US6893742B2 (en) * | 2001-02-15 | 2005-05-17 | Olin Corporation | Copper foil with low profile bond enhancement |
CN100488766C (zh) * | 2002-03-05 | 2009-05-20 | 日立化成工业株式会社 | 贴附树脂的金属箔、粘合金属的层压板、使用它们的印刷电路板及其制造方法 |
JP2004006612A (ja) * | 2002-04-12 | 2004-01-08 | Mitsui Mining & Smelting Co Ltd | キャリア箔付銅箔及びそのキャリア箔付銅箔の製造方法並びにそのキャリア箔付銅箔を用いた銅張積層板 |
JP4115293B2 (ja) * | 2003-02-17 | 2008-07-09 | 古河サーキットフォイル株式会社 | チップオンフィルム用銅箔 |
JP2004307884A (ja) * | 2003-04-03 | 2004-11-04 | Fukuda Metal Foil & Powder Co Ltd | プリント配線板用銅箔 |
JP2004314568A (ja) * | 2003-04-21 | 2004-11-11 | Fukuda Metal Foil & Powder Co Ltd | プリント配線板用銅箔 |
JP4065215B2 (ja) * | 2003-05-13 | 2008-03-19 | 福田金属箔粉工業株式会社 | プリント配線板用銅箔 |
KR100852863B1 (ko) * | 2004-02-17 | 2008-08-18 | 닛코킨조쿠 가부시키가이샤 | 흑화 처리 면 또는 층을 가지는 동박 |
JP4466925B2 (ja) * | 2004-08-10 | 2010-05-26 | 日鉱金属株式会社 | フレキシブル銅基板用バリア膜及びバリア膜形成用スパッタリングターゲット |
CN100418695C (zh) * | 2004-09-20 | 2008-09-17 | 长春石油化学股份有限公司 | 铜箔的制法 |
JP2006312265A (ja) * | 2005-05-09 | 2006-11-16 | Furukawa Circuit Foil Kk | キャリア付き極薄銅箔および該極薄銅箔を用いたプリント配線板、多層プリント配線板 |
US20090208762A1 (en) * | 2005-06-23 | 2009-08-20 | Nippon Mining & Metals Co., Ltd. | Copper Foil for Printed Wiring Board |
WO2007145164A1 (ja) * | 2006-06-12 | 2007-12-21 | Nippon Mining & Metals Co., Ltd. | 粗化処理面を備えた圧延銅又は銅合金箔及び圧延銅又は銅合金箔の粗化方法 |
US20100040873A1 (en) * | 2006-11-29 | 2010-02-18 | Nippon Mining & Metals Co., Ltd. | Two-Layered Copper-Clad Laminate |
JP5043094B2 (ja) * | 2007-03-20 | 2012-10-10 | Jx日鉱日石金属株式会社 | 無接着剤フレキシブルラミネート及びその製造方法 |
JP5351012B2 (ja) * | 2007-04-20 | 2013-11-27 | Jx日鉱日石金属株式会社 | リチウム二次電池用電解銅箔及び該銅箔の製造方法 |
US8642893B2 (en) * | 2007-09-28 | 2014-02-04 | Jx Nippon Mining & Metals Corporation | Copper foil for printed circuit and copper-clad laminate |
KR101136774B1 (ko) * | 2007-10-18 | 2012-04-19 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 금속 피복 폴리이미드 복합체 및 그 복합체의 제조 방법 그리고 전자 회로 기판의 제조 방법 |
US20100215982A1 (en) * | 2007-10-18 | 2010-08-26 | Nippon Mining And Metals Co., Ltd. | Metal Covered Polyimide Composite, Process for Producing the Composite, and Apparatus for Producing the Composite |
WO2009084412A1 (ja) * | 2007-12-27 | 2009-07-09 | Nippon Mining & Metals Co., Ltd. | 2層銅張積層板の製造方法及び2層銅張積層板 |
US20110003169A1 (en) * | 2008-02-04 | 2011-01-06 | Nippon Mining & Metals Co., Ltd. | Non-Adhesive Flexible Laminate |
KR101289803B1 (ko) * | 2008-05-16 | 2013-07-26 | 삼성테크윈 주식회사 | 회로 기판 및 그 제조 방법 |
CN101981230B (zh) * | 2008-06-17 | 2013-01-16 | Jx日矿日石金属株式会社 | 印刷电路板用铜箔及印刷电路板用包铜层压板 |
EP2366469A1 (en) * | 2008-11-25 | 2011-09-21 | JX Nippon Mining & Metals Corporation | Method of winding up copper foil or copper-clad laminate |
US8524378B2 (en) | 2008-11-25 | 2013-09-03 | Jx Nippon Mining & Metals Corporation | Copper foil for printed circuit |
JP2009143234A (ja) | 2008-12-24 | 2009-07-02 | Nippon Mining & Metals Co Ltd | キャリア付金属箔 |
WO2010074056A1 (ja) | 2008-12-26 | 2010-07-01 | 日鉱金属株式会社 | フレキシブルラミネート及び該ラミネートを用いて形成したフレキシブル電子回路基板 |
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EP2624671A4 (en) | 2010-09-27 | 2016-12-21 | Jx Nippon Mining & Metals Corp | COPPER FOIL FOR FITTED PCB, METHOD FOR MAKING THIS COPPER FILM, RESIN COVER FOR FITTED PCB AND FITTED PCB |
CN103459679B (zh) | 2011-03-25 | 2016-06-15 | 吉坤日矿日石金属株式会社 | 具备粗化处理面的压延铜或铜合金箔 |
CN104160792B (zh) * | 2012-03-09 | 2017-05-17 | 三井金属矿业株式会社 | 印刷布线板的制造方法及激光加工用铜箔 |
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WO2014136763A1 (ja) * | 2013-03-05 | 2014-09-12 | 三井金属鉱業株式会社 | レーザー加工用銅箔、キャリア箔付レーザー加工用銅箔、銅張積層体及びプリント配線板の製造方法 |
TWI483657B (zh) * | 2013-11-15 | 2015-05-01 | Unimicron Technology Corp | 線路板的鑽孔方法 |
CN110537393B (zh) * | 2017-04-17 | 2022-09-20 | 住友金属矿山株式会社 | 导电性基板、导电性基板的制造方法 |
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JPH0619852B2 (ja) * | 1985-12-13 | 1994-03-16 | ダイセル化学工業株式会社 | 高密度記録媒体 |
AU579517B2 (en) * | 1986-06-20 | 1988-11-24 | Gould Inc. | Double matte finish copper foil |
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US6132887A (en) * | 1995-06-16 | 2000-10-17 | Gould Electronics Inc. | High fatigue ductility electrodeposited copper foil |
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JP3295308B2 (ja) * | 1996-06-28 | 2002-06-24 | 株式会社日鉱マテリアルズ | 電解銅箔 |
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JP3906347B2 (ja) | 1998-06-11 | 2007-04-18 | 三井金属鉱業株式会社 | 印刷回路用銅箔 |
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-
2000
- 2000-02-03 JP JP2000026174A patent/JP3258308B2/ja not_active Expired - Lifetime
- 2000-12-04 KR KR10-2002-7009841A patent/KR100483517B1/ko active IP Right Grant
- 2000-12-04 WO PCT/JP2000/008578 patent/WO2001058225A1/ja active IP Right Grant
- 2000-12-04 EP EP07003605A patent/EP1781073A3/en not_active Withdrawn
- 2000-12-04 DE DE60039257T patent/DE60039257D1/de not_active Expired - Lifetime
- 2000-12-04 CN CNB008152152A patent/CN1204791C/zh not_active Expired - Lifetime
- 2000-12-04 EP EP00979078A patent/EP1276358B1/en not_active Expired - Lifetime
- 2000-12-04 US US10/169,965 patent/US6638642B2/en not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
---|---|
MY126842A (en) | 2006-10-31 |
EP1781073A3 (en) | 2007-05-30 |
EP1276358A1 (en) | 2003-01-15 |
US6638642B2 (en) | 2003-10-28 |
KR100483517B1 (ko) | 2005-04-15 |
JP2001217516A (ja) | 2001-08-10 |
DE60039257D1 (de) | 2008-07-31 |
TW578451B (en) | 2004-03-01 |
EP1276358B1 (en) | 2008-06-18 |
EP1781073A2 (en) | 2007-05-02 |
KR20020074223A (ko) | 2002-09-28 |
EP1276358A4 (en) | 2005-06-22 |
CN1387745A (zh) | 2002-12-25 |
WO2001058225A1 (fr) | 2001-08-09 |
US20030031888A1 (en) | 2003-02-13 |
JP3258308B2 (ja) | 2002-02-18 |
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