CN110663107A - 一种连续进行晶界扩散和热处理的装置以及方法 - Google Patents
一种连续进行晶界扩散和热处理的装置以及方法 Download PDFInfo
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- CN110663107A CN110663107A CN201880029289.6A CN201880029289A CN110663107A CN 110663107 A CN110663107 A CN 110663107A CN 201880029289 A CN201880029289 A CN 201880029289A CN 110663107 A CN110663107 A CN 110663107A
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- chamber
- heat treatment
- cooling
- grain boundary
- boundary diffusion
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Classifications
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
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- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
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Abstract
本发明公开了一种连续进行晶界扩散和热处理的装置以及方法,其特征在于:所述合金工件或金属工件连同扩散源设置在相对独立的处理箱内,所述装置包括依序设置的晶界扩散室、第一冷却室、热处理室、第二冷却室、以及设置在各个室之间的用以运送所述处理箱的运送系统,所述第一冷却室和所述第二冷却室均采用风冷系统,所述第一冷却室的冷却风温度在25℃以上、并与所述晶界扩散室的晶界扩散温度至少相差550℃,所述第二冷却室的冷却风温度在25℃以上、并与所述热处理室的热处理温度至少相差300℃,所述冷却室的压力50kPa‑100kPa。本发明提供的装置可以提升冷却速率和生产效率,提高产品一致性。
Description
PCT国内申请,说明书已公开。
Claims (12)
- PCT国内申请,权利要求书已公开。
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Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201016120Y (zh) * | 2007-02-02 | 2008-02-06 | 厦门钨业股份有限公司 | 连续式三室气冷真空退火炉 |
EP2178096A1 (en) * | 2007-07-27 | 2010-04-21 | Hitachi Metals, Ltd. | R-Fe-B RARE EARTH SINTERED MAGNET |
CN102191473A (zh) * | 2010-03-10 | 2011-09-21 | 东京毅力科创株式会社 | 立式热处理装置及其冷却方法 |
CN103000555A (zh) * | 2011-09-13 | 2013-03-27 | 东京毅力科创株式会社 | 热处理装置、温度控制系统、热处理方法、温度控制方法 |
CN103140903A (zh) * | 2010-09-30 | 2013-06-05 | 日立金属株式会社 | R-t-b类烧结磁体的制造方法 |
CN103231059A (zh) * | 2013-05-05 | 2013-08-07 | 沈阳中北真空磁电科技有限公司 | 一种钕铁硼稀土永磁器件的制造方法 |
CN103996521A (zh) * | 2014-05-11 | 2014-08-20 | 沈阳中北通磁科技股份有限公司 | 一种钕铁硼稀土永磁体的真空预烧结方法和设备 |
CN104112580A (zh) * | 2013-04-16 | 2014-10-22 | 北京中科三环高技术股份有限公司 | 一种稀土永磁体的制备方法 |
US20150144622A1 (en) * | 2013-11-27 | 2015-05-28 | Tokyo Electron Limited | Microwave heat treatment apparatus and microwave heat treatment method |
WO2017033861A1 (ja) * | 2015-08-24 | 2017-03-02 | 日立金属株式会社 | 拡散処理装置およびそれを用いたr-t-b系焼結磁石の製造方法 |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2039203A (en) * | 1932-10-27 | 1936-04-28 | Ogilvy-Webb Arthur William | Furnace apparatus for the heat treatment of metallic or other bodies |
DE3223954A1 (de) * | 1982-03-26 | 1983-12-29 | Ludwig Riedhammer GmbH & Co KG, 8500 Nürnberg | Verfahren zum erniedrigen des sauerstoffgehaltes der atmosphaere eines gluehofens |
JPS6320419A (ja) * | 1986-07-15 | 1988-01-28 | Kawasaki Steel Corp | 迅速球状化処理の可能な低合金鋼線材およびその製造方法 |
JPS63148088A (ja) * | 1986-07-17 | 1988-06-20 | 大亜真空株式会社 | 連続式真空熱処理炉 |
JPH0382707A (ja) * | 1989-08-26 | 1991-04-08 | Daido Steel Co Ltd | 連続式真空熱処理炉 |
DE19747018A1 (de) | 1997-10-24 | 1999-04-29 | Ald Vacuum Techn Gmbh | Vorrichtung zur Wärmebehandlung von Werkstücken |
US6533996B2 (en) * | 2001-02-02 | 2003-03-18 | The Boc Group, Inc. | Method and apparatus for metal processing |
JP2004346412A (ja) * | 2003-05-26 | 2004-12-09 | Chugai Ro Co Ltd | 連続式真空浸炭炉 |
CN1570155A (zh) * | 2004-04-29 | 2005-01-26 | 山西汇镪磁性材料制作有限公司 | 烧结钕铁硼永磁体的回火工艺 |
KR100830194B1 (ko) * | 2005-08-05 | 2008-05-16 | 히로히사 타니구치 | 연속식 금속 열처리 장치 |
CN101460770B (zh) * | 2006-04-06 | 2012-09-26 | 株式会社Ihi | 冷却处理装置或者多室型热处理装置的密封构造、该密封构造的压力调节方法和运转方法 |
KR100796767B1 (ko) * | 2007-02-28 | 2008-01-22 | 최병길 | 분위기가스 소모 최소화 및 이산화탄소 가스 발생 최소화를위한 열처리장치 |
US20100239878A1 (en) * | 2007-10-31 | 2010-09-23 | Hiroshi Nagata | Method of manufacturing permanent magnet and permanent magnet |
JP5117219B2 (ja) | 2008-02-20 | 2013-01-16 | 株式会社アルバック | 永久磁石の製造方法 |
WO2009104640A1 (ja) | 2008-02-20 | 2009-08-27 | 株式会社アルバック | 永久磁石の製造方法及び永久磁石 |
WO2010041416A1 (ja) * | 2008-10-08 | 2010-04-15 | 株式会社アルバック | 蒸発材料及び蒸発材料の製造方法 |
JP5407281B2 (ja) * | 2008-11-04 | 2014-02-05 | トヨタ自動車株式会社 | 熱処理方法 |
CN102308008B (zh) * | 2009-02-10 | 2015-06-03 | 株式会社Ihi | 热处理装置以及热处理方法 |
CN102473516B (zh) * | 2009-07-10 | 2015-09-09 | 日立金属株式会社 | R-Fe-B类稀土烧结磁体的制造方法和蒸气控制部件 |
JP5088596B2 (ja) | 2010-09-30 | 2012-12-05 | 日立金属株式会社 | R−t−b系焼結磁石の製造方法 |
CN102031350B (zh) * | 2010-11-02 | 2012-09-05 | 徐州金石彭源稀土材料厂 | 烧结钕铁硼回火工艺 |
WO2012105399A1 (ja) * | 2011-01-31 | 2012-08-09 | 日立金属株式会社 | R-t-b系焼結磁石の製造方法 |
JP5572673B2 (ja) * | 2011-07-08 | 2014-08-13 | 昭和電工株式会社 | R−t−b系希土類焼結磁石用合金、r−t−b系希土類焼結磁石用合金の製造方法、r−t−b系希土類焼結磁石用合金材料、r−t−b系希土類焼結磁石、r−t−b系希土類焼結磁石の製造方法およびモーター |
JP5472236B2 (ja) * | 2011-08-23 | 2014-04-16 | トヨタ自動車株式会社 | 希土類磁石の製造方法、及び希土類磁石 |
PH12013000103B1 (en) * | 2012-04-11 | 2015-09-07 | Shinetsu Chemical Co | Rare earth sintered magnet and making method |
CN102921950B (zh) * | 2012-10-16 | 2015-09-23 | 山东依诺威强磁材料有限公司 | 用于制取钕铁硼永磁材料的烧结时效工艺 |
CN103060658B (zh) * | 2013-01-22 | 2014-11-05 | 徐州金石彭源稀土材料厂 | 烧结1千克~5.5千克钕铁硼永磁材料的制备工艺 |
CN103555901A (zh) * | 2013-11-22 | 2014-02-05 | 江阴市晶磁电子有限公司 | 立柜式常压非晶铁芯热处理炉 |
CN103990806B (zh) * | 2014-05-11 | 2016-05-25 | 沈阳中北通磁科技股份有限公司 | 一种钕铁硼稀土永磁合金的氢破碎方法和设备 |
CN204162746U (zh) * | 2014-10-27 | 2015-02-18 | 佛山市巨亚铝业有限公司 | 一种铝材连续退火线 |
JP6596703B2 (ja) | 2015-03-04 | 2019-10-30 | 株式会社Ihi | 多室型熱処理装置 |
CN107077965B (zh) | 2015-07-30 | 2018-12-28 | 日立金属株式会社 | R-t-b系烧结磁体的制造方法 |
CN105177598A (zh) * | 2015-10-15 | 2015-12-23 | 杭州科德磁业有限公司 | 钕铁硼磁体晶界扩散重稀土工艺 |
CN107326156B (zh) * | 2016-04-29 | 2019-08-09 | 沈阳中北通磁科技股份有限公司 | 一种钕铁硼永磁真空烧结热处理方法及真空热处理设备 |
CN106128672B (zh) * | 2016-06-20 | 2018-03-30 | 钢铁研究总院 | 一种扩散烧结连续化RE‑Fe‑B磁体及其制备方法 |
JP6724865B2 (ja) * | 2016-06-20 | 2020-07-15 | 信越化学工業株式会社 | R−Fe−B系焼結磁石及びその製造方法 |
CN106282948B (zh) * | 2016-07-28 | 2017-12-01 | 北京中科三环高技术股份有限公司 | 一种镀膜方法和镀膜系统及稀土磁体的制备方法 |
CN106920617B (zh) * | 2017-03-21 | 2019-04-16 | 四川大学 | 高性能钕铁硼稀土永磁材料及其制备方法 |
-
2018
- 2018-04-08 CN CN201810306660.0A patent/CN110106334B/zh active Active
- 2018-04-08 CN CN201810307941.8A patent/CN110106335B/zh active Active
- 2018-10-09 ES ES18903258T patent/ES2924190T3/es active Active
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- 2018-10-09 US US16/620,712 patent/US11508519B2/en active Active
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- 2018-11-05 KR KR1020207001551A patent/KR102242966B1/ko active IP Right Grant
- 2018-11-05 US US16/623,191 patent/US11636976B2/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201016120Y (zh) * | 2007-02-02 | 2008-02-06 | 厦门钨业股份有限公司 | 连续式三室气冷真空退火炉 |
EP2178096A1 (en) * | 2007-07-27 | 2010-04-21 | Hitachi Metals, Ltd. | R-Fe-B RARE EARTH SINTERED MAGNET |
CN102191473A (zh) * | 2010-03-10 | 2011-09-21 | 东京毅力科创株式会社 | 立式热处理装置及其冷却方法 |
CN103140903A (zh) * | 2010-09-30 | 2013-06-05 | 日立金属株式会社 | R-t-b类烧结磁体的制造方法 |
CN103000555A (zh) * | 2011-09-13 | 2013-03-27 | 东京毅力科创株式会社 | 热处理装置、温度控制系统、热处理方法、温度控制方法 |
CN104112580A (zh) * | 2013-04-16 | 2014-10-22 | 北京中科三环高技术股份有限公司 | 一种稀土永磁体的制备方法 |
CN103231059A (zh) * | 2013-05-05 | 2013-08-07 | 沈阳中北真空磁电科技有限公司 | 一种钕铁硼稀土永磁器件的制造方法 |
US20150144622A1 (en) * | 2013-11-27 | 2015-05-28 | Tokyo Electron Limited | Microwave heat treatment apparatus and microwave heat treatment method |
CN103996521A (zh) * | 2014-05-11 | 2014-08-20 | 沈阳中北通磁科技股份有限公司 | 一种钕铁硼稀土永磁体的真空预烧结方法和设备 |
WO2017033861A1 (ja) * | 2015-08-24 | 2017-03-02 | 日立金属株式会社 | 拡散処理装置およびそれを用いたr-t-b系焼結磁石の製造方法 |
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