CN110663107A - 一种连续进行晶界扩散和热处理的装置以及方法 - Google Patents

一种连续进行晶界扩散和热处理的装置以及方法 Download PDF

Info

Publication number
CN110663107A
CN110663107A CN201880029289.6A CN201880029289A CN110663107A CN 110663107 A CN110663107 A CN 110663107A CN 201880029289 A CN201880029289 A CN 201880029289A CN 110663107 A CN110663107 A CN 110663107A
Authority
CN
China
Prior art keywords
chamber
heat treatment
cooling
grain boundary
boundary diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201880029289.6A
Other languages
English (en)
Other versions
CN110663107B (zh
Inventor
王清江
廖宗博
林玉麟
黄长庚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujian Jinlong Rare Earth Co ltd
Original Assignee
Fujian Changting Jinlong Rare Earth Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujian Changting Jinlong Rare Earth Co Ltd filed Critical Fujian Changting Jinlong Rare Earth Co Ltd
Priority claimed from PCT/CN2018/113970 external-priority patent/WO2019148918A1/zh
Publication of CN110663107A publication Critical patent/CN110663107A/zh
Application granted granted Critical
Publication of CN110663107B publication Critical patent/CN110663107B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0062Heat-treating apparatus with a cooling or quenching zone
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24After-treatment of workpieces or articles
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/56General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering characterised by the quenching agents
    • C21D1/613Gases; Liquefied or solidified normally gaseous material
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/68Temporary coatings or embedding materials applied before or during heat treatment
    • C21D1/72Temporary coatings or embedding materials applied before or during heat treatment during chemical change of surfaces
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006Details, accessories not peculiar to any of the following furnaces
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0056Furnaces through which the charge is moved in a horizontal straight path
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0068Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for particular articles not mentioned below
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • C22C38/005Ferrous alloys, e.g. steel alloys containing rare earths, i.e. Sc, Y, Lanthanides
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/02Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated of multiple-chamber type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/18Arrangement of controlling, monitoring, alarm or like devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/028Multi-chamber type furnaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/0536Alloys characterised by their composition containing rare earth metals sintered
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0571Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H01F1/0575Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together
    • H01F1/0577Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together sintered
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0293Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24After-treatment of workpieces or articles
    • B22F2003/248Thermal after-treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00Treatment under specific atmosphere
    • B22F2201/10Inert gases
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D2201/00Treatment for obtaining particular effects
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories, or equipment peculiar to furnaces of these types
    • F27B2005/062Cooling elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • F27D2009/007Cooling of charges therein
    • F27D2009/0072Cooling of charges therein the cooling medium being a gas

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Hard Magnetic Materials (AREA)
  • Powder Metallurgy (AREA)
  • Heat Treatment Of Articles (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Disintegrating Or Milling (AREA)

Abstract

本发明公开了一种连续进行晶界扩散和热处理的装置以及方法,其特征在于:所述合金工件或金属工件连同扩散源设置在相对独立的处理箱内,所述装置包括依序设置的晶界扩散室、第一冷却室、热处理室、第二冷却室、以及设置在各个室之间的用以运送所述处理箱的运送系统,所述第一冷却室和所述第二冷却室均采用风冷系统,所述第一冷却室的冷却风温度在25℃以上、并与所述晶界扩散室的晶界扩散温度至少相差550℃,所述第二冷却室的冷却风温度在25℃以上、并与所述热处理室的热处理温度至少相差300℃,所述冷却室的压力50kPa‑100kPa。本发明提供的装置可以提升冷却速率和生产效率,提高产品一致性。

Description

PCT国内申请,说明书已公开。

Claims (12)

  1. PCT国内申请,权利要求书已公开。
CN201880029289.6A 2018-02-01 2018-11-05 一种连续进行晶界扩散和热处理的装置以及方法 Active CN110663107B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201810100874 2018-02-01
CN2018101008742 2018-02-01
PCT/CN2018/113970 WO2019148918A1 (zh) 2018-02-01 2018-11-05 一种连续进行晶界扩散和热处理的装置以及方法

Publications (2)

Publication Number Publication Date
CN110663107A true CN110663107A (zh) 2020-01-07
CN110663107B CN110663107B (zh) 2022-10-11

Family

ID=67483231

Family Applications (4)

Application Number Title Priority Date Filing Date
CN201810306660.0A Active CN110106334B (zh) 2018-02-01 2018-04-08 一种连续进行晶界扩散和热处理的装置以及方法
CN201810307941.8A Active CN110106335B (zh) 2018-02-01 2018-04-08 一种合金工件或金属工件的连续热处理装置以及方法
CN201880028565.7A Active CN110997950B (zh) 2018-02-01 2018-10-09 一种合金工件或金属工件的连续热处理装置以及方法
CN201880029289.6A Active CN110663107B (zh) 2018-02-01 2018-11-05 一种连续进行晶界扩散和热处理的装置以及方法

Family Applications Before (3)

Application Number Title Priority Date Filing Date
CN201810306660.0A Active CN110106334B (zh) 2018-02-01 2018-04-08 一种连续进行晶界扩散和热处理的装置以及方法
CN201810307941.8A Active CN110106335B (zh) 2018-02-01 2018-04-08 一种合金工件或金属工件的连续热处理装置以及方法
CN201880028565.7A Active CN110997950B (zh) 2018-02-01 2018-10-09 一种合金工件或金属工件的连续热处理装置以及方法

Country Status (7)

Country Link
US (2) US11508519B2 (zh)
EP (2) EP3626839B1 (zh)
JP (2) JP7108688B2 (zh)
KR (2) KR102378901B1 (zh)
CN (4) CN110106334B (zh)
DK (2) DK3626839T3 (zh)
ES (2) ES2924190T3 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109735687B (zh) * 2018-10-18 2021-05-04 福建省长汀金龙稀土有限公司 一种连续进行晶界扩散和热处理的装置以及方法
CN113314327B (zh) * 2021-06-02 2023-06-16 中国科学院力学研究所 一种烧结钕铁硼磁体晶界扩散多元素重稀土的方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201016120Y (zh) * 2007-02-02 2008-02-06 厦门钨业股份有限公司 连续式三室气冷真空退火炉
EP2178096A1 (en) * 2007-07-27 2010-04-21 Hitachi Metals, Ltd. R-Fe-B RARE EARTH SINTERED MAGNET
CN102191473A (zh) * 2010-03-10 2011-09-21 东京毅力科创株式会社 立式热处理装置及其冷却方法
CN103000555A (zh) * 2011-09-13 2013-03-27 东京毅力科创株式会社 热处理装置、温度控制系统、热处理方法、温度控制方法
CN103140903A (zh) * 2010-09-30 2013-06-05 日立金属株式会社 R-t-b类烧结磁体的制造方法
CN103231059A (zh) * 2013-05-05 2013-08-07 沈阳中北真空磁电科技有限公司 一种钕铁硼稀土永磁器件的制造方法
CN103996521A (zh) * 2014-05-11 2014-08-20 沈阳中北通磁科技股份有限公司 一种钕铁硼稀土永磁体的真空预烧结方法和设备
CN104112580A (zh) * 2013-04-16 2014-10-22 北京中科三环高技术股份有限公司 一种稀土永磁体的制备方法
US20150144622A1 (en) * 2013-11-27 2015-05-28 Tokyo Electron Limited Microwave heat treatment apparatus and microwave heat treatment method
WO2017033861A1 (ja) * 2015-08-24 2017-03-02 日立金属株式会社 拡散処理装置およびそれを用いたr-t-b系焼結磁石の製造方法

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2039203A (en) * 1932-10-27 1936-04-28 Ogilvy-Webb Arthur William Furnace apparatus for the heat treatment of metallic or other bodies
DE3223954A1 (de) * 1982-03-26 1983-12-29 Ludwig Riedhammer GmbH & Co KG, 8500 Nürnberg Verfahren zum erniedrigen des sauerstoffgehaltes der atmosphaere eines gluehofens
JPS6320419A (ja) * 1986-07-15 1988-01-28 Kawasaki Steel Corp 迅速球状化処理の可能な低合金鋼線材およびその製造方法
JPS63148088A (ja) * 1986-07-17 1988-06-20 大亜真空株式会社 連続式真空熱処理炉
JPH0382707A (ja) * 1989-08-26 1991-04-08 Daido Steel Co Ltd 連続式真空熱処理炉
DE19747018A1 (de) 1997-10-24 1999-04-29 Ald Vacuum Techn Gmbh Vorrichtung zur Wärmebehandlung von Werkstücken
US6533996B2 (en) * 2001-02-02 2003-03-18 The Boc Group, Inc. Method and apparatus for metal processing
JP2004346412A (ja) * 2003-05-26 2004-12-09 Chugai Ro Co Ltd 連続式真空浸炭炉
CN1570155A (zh) * 2004-04-29 2005-01-26 山西汇镪磁性材料制作有限公司 烧结钕铁硼永磁体的回火工艺
KR100830194B1 (ko) * 2005-08-05 2008-05-16 히로히사 타니구치 연속식 금속 열처리 장치
CN101460770B (zh) * 2006-04-06 2012-09-26 株式会社Ihi 冷却处理装置或者多室型热处理装置的密封构造、该密封构造的压力调节方法和运转方法
KR100796767B1 (ko) * 2007-02-28 2008-01-22 최병길 분위기가스 소모 최소화 및 이산화탄소 가스 발생 최소화를위한 열처리장치
US20100239878A1 (en) * 2007-10-31 2010-09-23 Hiroshi Nagata Method of manufacturing permanent magnet and permanent magnet
JP5117219B2 (ja) 2008-02-20 2013-01-16 株式会社アルバック 永久磁石の製造方法
WO2009104640A1 (ja) 2008-02-20 2009-08-27 株式会社アルバック 永久磁石の製造方法及び永久磁石
WO2010041416A1 (ja) * 2008-10-08 2010-04-15 株式会社アルバック 蒸発材料及び蒸発材料の製造方法
JP5407281B2 (ja) * 2008-11-04 2014-02-05 トヨタ自動車株式会社 熱処理方法
CN102308008B (zh) * 2009-02-10 2015-06-03 株式会社Ihi 热处理装置以及热处理方法
CN102473516B (zh) * 2009-07-10 2015-09-09 日立金属株式会社 R-Fe-B类稀土烧结磁体的制造方法和蒸气控制部件
JP5088596B2 (ja) 2010-09-30 2012-12-05 日立金属株式会社 R−t−b系焼結磁石の製造方法
CN102031350B (zh) * 2010-11-02 2012-09-05 徐州金石彭源稀土材料厂 烧结钕铁硼回火工艺
WO2012105399A1 (ja) * 2011-01-31 2012-08-09 日立金属株式会社 R-t-b系焼結磁石の製造方法
JP5572673B2 (ja) * 2011-07-08 2014-08-13 昭和電工株式会社 R−t−b系希土類焼結磁石用合金、r−t−b系希土類焼結磁石用合金の製造方法、r−t−b系希土類焼結磁石用合金材料、r−t−b系希土類焼結磁石、r−t−b系希土類焼結磁石の製造方法およびモーター
JP5472236B2 (ja) * 2011-08-23 2014-04-16 トヨタ自動車株式会社 希土類磁石の製造方法、及び希土類磁石
PH12013000103B1 (en) * 2012-04-11 2015-09-07 Shinetsu Chemical Co Rare earth sintered magnet and making method
CN102921950B (zh) * 2012-10-16 2015-09-23 山东依诺威强磁材料有限公司 用于制取钕铁硼永磁材料的烧结时效工艺
CN103060658B (zh) * 2013-01-22 2014-11-05 徐州金石彭源稀土材料厂 烧结1千克~5.5千克钕铁硼永磁材料的制备工艺
CN103555901A (zh) * 2013-11-22 2014-02-05 江阴市晶磁电子有限公司 立柜式常压非晶铁芯热处理炉
CN103990806B (zh) * 2014-05-11 2016-05-25 沈阳中北通磁科技股份有限公司 一种钕铁硼稀土永磁合金的氢破碎方法和设备
CN204162746U (zh) * 2014-10-27 2015-02-18 佛山市巨亚铝业有限公司 一种铝材连续退火线
JP6596703B2 (ja) 2015-03-04 2019-10-30 株式会社Ihi 多室型熱処理装置
CN107077965B (zh) 2015-07-30 2018-12-28 日立金属株式会社 R-t-b系烧结磁体的制造方法
CN105177598A (zh) * 2015-10-15 2015-12-23 杭州科德磁业有限公司 钕铁硼磁体晶界扩散重稀土工艺
CN107326156B (zh) * 2016-04-29 2019-08-09 沈阳中北通磁科技股份有限公司 一种钕铁硼永磁真空烧结热处理方法及真空热处理设备
CN106128672B (zh) * 2016-06-20 2018-03-30 钢铁研究总院 一种扩散烧结连续化RE‑Fe‑B磁体及其制备方法
JP6724865B2 (ja) * 2016-06-20 2020-07-15 信越化学工業株式会社 R−Fe−B系焼結磁石及びその製造方法
CN106282948B (zh) * 2016-07-28 2017-12-01 北京中科三环高技术股份有限公司 一种镀膜方法和镀膜系统及稀土磁体的制备方法
CN106920617B (zh) * 2017-03-21 2019-04-16 四川大学 高性能钕铁硼稀土永磁材料及其制备方法

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201016120Y (zh) * 2007-02-02 2008-02-06 厦门钨业股份有限公司 连续式三室气冷真空退火炉
EP2178096A1 (en) * 2007-07-27 2010-04-21 Hitachi Metals, Ltd. R-Fe-B RARE EARTH SINTERED MAGNET
CN102191473A (zh) * 2010-03-10 2011-09-21 东京毅力科创株式会社 立式热处理装置及其冷却方法
CN103140903A (zh) * 2010-09-30 2013-06-05 日立金属株式会社 R-t-b类烧结磁体的制造方法
CN103000555A (zh) * 2011-09-13 2013-03-27 东京毅力科创株式会社 热处理装置、温度控制系统、热处理方法、温度控制方法
CN104112580A (zh) * 2013-04-16 2014-10-22 北京中科三环高技术股份有限公司 一种稀土永磁体的制备方法
CN103231059A (zh) * 2013-05-05 2013-08-07 沈阳中北真空磁电科技有限公司 一种钕铁硼稀土永磁器件的制造方法
US20150144622A1 (en) * 2013-11-27 2015-05-28 Tokyo Electron Limited Microwave heat treatment apparatus and microwave heat treatment method
CN103996521A (zh) * 2014-05-11 2014-08-20 沈阳中北通磁科技股份有限公司 一种钕铁硼稀土永磁体的真空预烧结方法和设备
WO2017033861A1 (ja) * 2015-08-24 2017-03-02 日立金属株式会社 拡散処理装置およびそれを用いたr-t-b系焼結磁石の製造方法

Also Published As

Publication number Publication date
US20210142943A1 (en) 2021-05-13
DK3627539T3 (da) 2022-07-18
CN110106334A (zh) 2019-08-09
EP3626839B1 (en) 2022-07-06
KR102242966B1 (ko) 2021-04-21
EP3626839A4 (en) 2020-08-26
KR20200019969A (ko) 2020-02-25
JP2020535312A (ja) 2020-12-03
CN110106334B (zh) 2021-06-22
JP2020535311A (ja) 2020-12-03
CN110997950B (zh) 2021-07-16
JP7130034B2 (ja) 2022-09-02
DK3626839T3 (da) 2022-07-18
CN110106335B (zh) 2021-04-13
EP3626839A1 (en) 2020-03-25
CN110663107B (zh) 2022-10-11
ES2924227T3 (es) 2022-10-05
EP3627539A1 (en) 2020-03-25
CN110106335A (zh) 2019-08-09
EP3627539A4 (en) 2020-07-22
KR20200020830A (ko) 2020-02-26
US11508519B2 (en) 2022-11-22
EP3627539B1 (en) 2022-07-06
ES2924190T3 (es) 2022-10-05
US20210142944A1 (en) 2021-05-13
JP7108688B2 (ja) 2022-07-28
KR102378901B1 (ko) 2022-03-25
CN110997950A (zh) 2020-04-10
US11636976B2 (en) 2023-04-25

Similar Documents

Publication Publication Date Title
US8673392B2 (en) Permanent magnet and method of manufacturing same
KR101242465B1 (ko) 영구자석의 제조 방법 및 영구자석
US8375891B2 (en) Vacuum vapor processing apparatus
CN110663107B (zh) 一种连续进行晶界扩散和热处理的装置以及方法
US11920236B2 (en) Coating machine and coating method
CN104036897B (zh) 一种永磁材料及其制造方法
JPWO2009104640A1 (ja) 永久磁石の製造方法及び永久磁石
CN102682987A (zh) 稀土永磁体的制备方法、制备装置及其制备的稀土永磁体
CN109735687B (zh) 一种连续进行晶界扩散和热处理的装置以及方法
CN103578734B (zh) 一种钕铁硼磁体的烧结工艺
JP5117219B2 (ja) 永久磁石の製造方法
WO2019148918A1 (zh) 一种连续进行晶界扩散和热处理的装置以及方法
CN108277416A (zh) 一种用于磁制冷的稀土高熵合金
WO2019148882A1 (zh) 一种合金工件或金属工件的连续热处理装置以及方法
JPH02137208A (ja) 希土類含有永久磁石の熱処理方法
CN113441717A (zh) 一种钕铁硼永磁材料的烧结方法
CN117778674A (zh) 一种铁镍软磁合金的退火工艺

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CP03 Change of name, title or address

Address after: 366300 new industrial zone, Changting Economic Development Zone, Longyan City, Fujian Province

Patentee after: Fujian Jinlong Rare Earth Co.,Ltd.

Country or region after: China

Address before: 366300 new industrial zone, Changting Economic Development Zone, Longyan City, Fujian Province

Patentee before: FUJIAN CHANGTING GOLDEN DRAGON RARE-EARTH Co.,Ltd.

Country or region before: China

CP03 Change of name, title or address