DK3627539T3 - Anordning og fremgangsmåde til kontinuerlig udførelse af korngrænsediffusion og varmebehandling - Google Patents

Anordning og fremgangsmåde til kontinuerlig udførelse af korngrænsediffusion og varmebehandling Download PDF

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Publication number
DK3627539T3
DK3627539T3 DK18903208.9T DK18903208T DK3627539T3 DK 3627539 T3 DK3627539 T3 DK 3627539T3 DK 18903208 T DK18903208 T DK 18903208T DK 3627539 T3 DK3627539 T3 DK 3627539T3
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Denmark
Prior art keywords
heat treatment
grain boundary
continuously performing
boundary diffusion
performing grain
Prior art date
Application number
DK18903208.9T
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English (en)
Inventor
Zongbo Liao
Yulin Lin
Changgeng Huang
Qingjiang Wang
Original Assignee
Fujian Changting Golden Dragon Rare Earth Co Ltd
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Publication date
Application filed by Fujian Changting Golden Dragon Rare Earth Co Ltd filed Critical Fujian Changting Golden Dragon Rare Earth Co Ltd
Priority claimed from PCT/CN2018/113970 external-priority patent/WO2019148918A1/zh
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Publication of DK3627539T3 publication Critical patent/DK3627539T3/da

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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0293—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24—After-treatment of workpieces or articles
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/56—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering characterised by the quenching agents
    • C21D1/613—Gases; Liquefied or solidified normally gaseous material
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/68—Temporary coatings or embedding materials applied before or during heat treatment
    • C21D1/72—Temporary coatings or embedding materials applied before or during heat treatment during chemical change of surfaces
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0056—Furnaces through which the charge is moved in a horizontal straight path
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0062—Heat-treating apparatus with a cooling or quenching zone
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0068—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for particular articles not mentioned below
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C22C38/005—Ferrous alloys, e.g. steel alloys containing rare earths, i.e. Sc, Y, Lanthanides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/02—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated of multiple-chamber type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B5/18—Arrangement of controlling, monitoring, alarm or like devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F27B9/028—Multi-chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/0536—Alloys characterised by their composition containing rare earth metals sintered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047—Alloys characterised by their composition
    • H01F1/053—Alloys characterised by their composition containing rare earth metals
    • H01F1/055—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/057—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B
    • H01F1/0571—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes
    • H01F1/0575—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together
    • H01F1/0577—Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 and IIIa elements, e.g. Nd2Fe14B in the form of particles, e.g. rapid quenched powders or ribbon flakes pressed, sintered or bonded together sintered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/24—After-treatment of workpieces or articles
    • B22F2003/248—Thermal after-treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2201/00—Treatment under specific atmosphere
    • B22F2201/10—Inert gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D2201/00—Treatment for obtaining particular effects
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B2005/062—Cooling elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein
    • F27D2009/007—Cooling of charges therein
    • F27D2009/0072—Cooling of charges therein the cooling medium being a gas

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Hard Magnetic Materials (AREA)
  • Powder Metallurgy (AREA)
  • Heat Treatment Of Articles (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Disintegrating Or Milling (AREA)
DK18903208.9T 2018-02-01 2018-11-05 Anordning og fremgangsmåde til kontinuerlig udførelse af korngrænsediffusion og varmebehandling DK3627539T3 (da)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201810100874 2018-02-01
CN201810306660.0A CN110106334B (zh) 2018-02-01 2018-04-08 一种连续进行晶界扩散和热处理的装置以及方法
PCT/CN2018/113970 WO2019148918A1 (zh) 2018-02-01 2018-11-05 一种连续进行晶界扩散和热处理的装置以及方法

Publications (1)

Publication Number Publication Date
DK3627539T3 true DK3627539T3 (da) 2022-07-18

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DK18903258.4T DK3626839T3 (da) 2018-02-01 2018-10-09 Anordning og fremgangsmåde til kontinuerlig varmebehandling af legeringsemne eller metalemne
DK18903208.9T DK3627539T3 (da) 2018-02-01 2018-11-05 Anordning og fremgangsmåde til kontinuerlig udførelse af korngrænsediffusion og varmebehandling

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US (2) US11508519B2 (da)
EP (2) EP3626839B1 (da)
JP (2) JP7108688B2 (da)
KR (2) KR102378901B1 (da)
CN (4) CN110106334B (da)
DK (2) DK3626839T3 (da)
ES (2) ES2924190T3 (da)

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Publication number Priority date Publication date Assignee Title
CN109735687B (zh) * 2018-10-18 2021-05-04 福建省长汀金龙稀土有限公司 一种连续进行晶界扩散和热处理的装置以及方法
CN113314327B (zh) * 2021-06-02 2023-06-16 中国科学院力学研究所 一种烧结钕铁硼磁体晶界扩散多元素重稀土的方法

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2039203A (en) * 1932-10-27 1936-04-28 Ogilvy-Webb Arthur William Furnace apparatus for the heat treatment of metallic or other bodies
DE3223954A1 (de) * 1982-03-26 1983-12-29 Ludwig Riedhammer GmbH & Co KG, 8500 Nürnberg Verfahren zum erniedrigen des sauerstoffgehaltes der atmosphaere eines gluehofens
JPS6320419A (ja) * 1986-07-15 1988-01-28 Kawasaki Steel Corp 迅速球状化処理の可能な低合金鋼線材およびその製造方法
JPS63148088A (ja) * 1986-07-17 1988-06-20 大亜真空株式会社 連続式真空熱処理炉
JPH0382707A (ja) * 1989-08-26 1991-04-08 Daido Steel Co Ltd 連続式真空熱処理炉
DE19747018A1 (de) 1997-10-24 1999-04-29 Ald Vacuum Techn Gmbh Vorrichtung zur Wärmebehandlung von Werkstücken
US6533996B2 (en) * 2001-02-02 2003-03-18 The Boc Group, Inc. Method and apparatus for metal processing
JP2004346412A (ja) * 2003-05-26 2004-12-09 Chugai Ro Co Ltd 連続式真空浸炭炉
CN1570155A (zh) * 2004-04-29 2005-01-26 山西汇镪磁性材料制作有限公司 烧结钕铁硼永磁体的回火工艺
KR100830194B1 (ko) * 2005-08-05 2008-05-16 히로히사 타니구치 연속식 금속 열처리 장치
JP5200929B2 (ja) * 2006-04-06 2013-06-05 株式会社Ｉｈｉ 冷却処理装置または多室型熱処理装置におけるシール構造、そのシール構造の圧力調整方法と運転方法
CN201016120Y (zh) 2007-02-02 2008-02-06 厦门钨业股份有限公司 连续式三室气冷真空退火炉
KR100796767B1 (ko) * 2007-02-28 2008-01-22 최병길 분위기가스 소모 최소화 및 이산화탄소 가스 발생 최소화를위한 열처리장치
EP2178096B1 (en) * 2007-07-27 2015-12-23 Hitachi Metals, Ltd. R-Fe-B RARE EARTH SINTERED MAGNET
KR101271507B1 (ko) * 2007-10-31 2013-06-05 가부시키가이샤 알박 영구자석의 제조 방법 및 영구자석
JP5117219B2 (ja) 2008-02-20 2013-01-16 株式会社アルバック 永久磁石の製造方法
WO2009104640A1 (ja) 2008-02-20 2009-08-27 株式会社アルバック 永久磁石の製造方法及び永久磁石
RU2490367C2 (ru) * 2008-10-08 2013-08-20 Улвак, Инк. Иcпаряющийся материал и способ его изготовления
JP5407281B2 (ja) * 2008-11-04 2014-02-05 トヨタ自動車株式会社 熱処理方法
CN102308008B (zh) * 2009-02-10 2015-06-03 株式会社Ihi 热处理装置以及热处理方法
CN102473516B (zh) * 2009-07-10 2015-09-09 日立金属株式会社 R-Fe-B类稀土烧结磁体的制造方法和蒸气控制部件
JP5394360B2 (ja) * 2010-03-10 2014-01-22 東京エレクトロン株式会社 縦型熱処理装置およびその冷却方法
JP5849956B2 (ja) * 2010-09-30 2016-02-03 日立金属株式会社 Ｒ−ｔ−ｂ系焼結磁石の製造方法
JP5088596B2 (ja) 2010-09-30 2012-12-05 日立金属株式会社 Ｒ−ｔ−ｂ系焼結磁石の製造方法
CN102031350B (zh) * 2010-11-02 2012-09-05 徐州金石彭源稀土材料厂 烧结钕铁硼回火工艺
KR101522805B1 (ko) * 2011-01-31 2015-05-26 히타치 긴조쿠 가부시키가이샤 R－t－b계 소결자석의 제조방법
JP5572673B2 (ja) * 2011-07-08 2014-08-13 昭和電工株式会社 Ｒ−ｔ−ｂ系希土類焼結磁石用合金、ｒ−ｔ−ｂ系希土類焼結磁石用合金の製造方法、ｒ−ｔ−ｂ系希土類焼結磁石用合金材料、ｒ−ｔ−ｂ系希土類焼結磁石、ｒ−ｔ−ｂ系希土類焼結磁石の製造方法およびモーター
JP5472236B2 (ja) * 2011-08-23 2014-04-16 トヨタ自動車株式会社 希土類磁石の製造方法、及び希土類磁石
JP2013062361A (ja) 2011-09-13 2013-04-04 Tokyo Electron Ltd 熱処理装置、温度制御システム、熱処理方法、温度制御方法及びその熱処理方法又はその温度制御方法を実行させるためのプログラムを記録した記録媒体
TWI556270B (zh) * 2012-04-11 2016-11-01 信越化學工業股份有限公司 稀土燒結磁體及製造方法
CN102921950B (zh) * 2012-10-16 2015-09-23 山东依诺威强磁材料有限公司 用于制取钕铁硼永磁材料的烧结时效工艺
CN103060658B (zh) * 2013-01-22 2014-11-05 徐州金石彭源稀土材料厂 烧结1千克～5.5千克钕铁硼永磁材料的制备工艺
CN104112580B (zh) * 2013-04-16 2017-04-12 北京中科三环高技术股份有限公司 一种稀土永磁体的制备方法
CN103231059B (zh) * 2013-05-05 2015-08-12 沈阳中北真空磁电科技有限公司 一种钕铁硼稀土永磁器件的制造方法
CN103555901A (zh) * 2013-11-22 2014-02-05 江阴市晶磁电子有限公司 立柜式常压非晶铁芯热处理炉
JP2015103726A (ja) * 2013-11-27 2015-06-04 東京エレクトロン株式会社 マイクロ波加熱処理装置及びマイクロ波加熱処理方法
CN103996521B (zh) * 2014-05-11 2016-05-25 沈阳中北通磁科技股份有限公司 一种钕铁硼稀土永磁体的真空预烧结方法和设备
CN103990806B (zh) * 2014-05-11 2016-05-25 沈阳中北通磁科技股份有限公司 一种钕铁硼稀土永磁合金的氢破碎方法和设备
CN204162746U (zh) * 2014-10-27 2015-02-18 佛山市巨亚铝业有限公司 一种铝材连续退火线
JP6596703B2 (ja) 2015-03-04 2019-10-30 株式会社Ｉｈｉ 多室型熱処理装置
EP3330984B1 (en) 2015-07-30 2020-03-18 Hitachi Metals, Ltd. Method for producing r-t-b system sintered magnet
WO2017033861A1 (ja) * 2015-08-24 2017-03-02 日立金属株式会社 拡散処理装置およびそれを用いたｒ－ｔ－ｂ系焼結磁石の製造方法
CN105177598A (zh) * 2015-10-15 2015-12-23 杭州科德磁业有限公司 钕铁硼磁体晶界扩散重稀土工艺
CN107326156B (zh) * 2016-04-29 2019-08-09 沈阳中北通磁科技股份有限公司 一种钕铁硼永磁真空烧结热处理方法及真空热处理设备
CN106128672B (zh) * 2016-06-20 2018-03-30 钢铁研究总院 一种扩散烧结连续化RE‑Fe‑B磁体及其制备方法
JP6724865B2 (ja) * 2016-06-20 2020-07-15 信越化学工業株式会社 Ｒ−Ｆｅ−Ｂ系焼結磁石及びその製造方法
CN106282948B (zh) * 2016-07-28 2017-12-01 北京中科三环高技术股份有限公司 一种镀膜方法和镀膜系统及稀土磁体的制备方法
CN106920617B (zh) * 2017-03-21 2019-04-16 四川大学 高性能钕铁硼稀土永磁材料及其制备方法

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