CN108507557B - 传感器装置 - Google Patents

传感器装置 Download PDF

Info

Publication number
CN108507557B
CN108507557B CN201810527812.XA CN201810527812A CN108507557B CN 108507557 B CN108507557 B CN 108507557B CN 201810527812 A CN201810527812 A CN 201810527812A CN 108507557 B CN108507557 B CN 108507557B
Authority
CN
China
Prior art keywords
sensor element
sensor device
substrate
substrate body
base material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201810527812.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN108507557A (zh
Inventor
椛泽秀年
渡边成人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Semiconductor Solutions Corp
Original Assignee
Sony Semiconductor Solutions Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Semiconductor Solutions Corp filed Critical Sony Semiconductor Solutions Corp
Publication of CN108507557A publication Critical patent/CN108507557A/zh
Application granted granted Critical
Publication of CN108507557B publication Critical patent/CN108507557B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
CN201810527812.XA 2012-07-03 2013-06-24 传感器装置 Expired - Fee Related CN108507557B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012149228A JP6016228B2 (ja) 2012-07-03 2012-07-03 センサデバイス
JP2012-149228 2012-07-03
CN201310253619.9A CN103528579B (zh) 2012-07-03 2013-06-24 传感器装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201310253619.9A Division CN103528579B (zh) 2012-07-03 2013-06-24 传感器装置

Publications (2)

Publication Number Publication Date
CN108507557A CN108507557A (zh) 2018-09-07
CN108507557B true CN108507557B (zh) 2022-01-14

Family

ID=49877506

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201310253619.9A Expired - Fee Related CN103528579B (zh) 2012-07-03 2013-06-24 传感器装置
CN201810527812.XA Expired - Fee Related CN108507557B (zh) 2012-07-03 2013-06-24 传感器装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201310253619.9A Expired - Fee Related CN103528579B (zh) 2012-07-03 2013-06-24 传感器装置

Country Status (3)

Country Link
US (1) US9310200B2 (enExample)
JP (1) JP6016228B2 (enExample)
CN (2) CN103528579B (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6014978B2 (ja) 2011-09-22 2016-10-26 ソニー株式会社 液晶表示素子および液晶表示装置
JP2014050224A (ja) * 2012-08-31 2014-03-17 Seiko Epson Corp 発電装置、２次電池、電子機器、及び移動手段
JP6102646B2 (ja) 2013-01-23 2017-03-29 ソニー株式会社 入力装置、電子機器及びセンサシート
JP6119518B2 (ja) 2013-02-12 2017-04-26 ソニー株式会社 センサ装置、入力装置及び電子機器
US10055067B2 (en) 2013-03-18 2018-08-21 Sony Corporation Sensor device, input device, and electronic apparatus
US10615793B2 (en) 2013-04-04 2020-04-07 Sony Corporation Deformable input apparatus and electronic apparatus including key regions
CN103633036B (zh) * 2013-08-07 2017-03-08 中国科学院电子学研究所 基于高阻材料的电场传感器封装元件
JP6142745B2 (ja) 2013-09-10 2017-06-07 ソニー株式会社 センサ装置、入力装置及び電子機器
JP2015170770A (ja) * 2014-03-07 2015-09-28 イビデン株式会社 プリント配線板
JP2015185281A (ja) 2014-03-20 2015-10-22 ソニー株式会社 キーボードカバーおよび電子機器
JP2015190859A (ja) 2014-03-28 2015-11-02 ソニー株式会社 センサ装置、入力装置及び電子機器
KR20150140136A (ko) * 2014-06-05 2015-12-15 엘지전자 주식회사 와치 타입 이동 단말기
JP6252678B2 (ja) * 2014-07-04 2017-12-27 株式会社村田製作所 圧電センサおよび圧電素子
JP6319026B2 (ja) * 2014-09-29 2018-05-09 日亜化学工業株式会社 発光装置及びその製造方法
JP6597069B2 (ja) * 2015-09-02 2019-10-30 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
US10516943B2 (en) * 2016-05-04 2019-12-24 Infineon Technologies Ag Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device
US10840430B2 (en) * 2016-06-30 2020-11-17 Intel Corporation Piezoelectric package-integrated sensing devices
JP2018112466A (ja) * 2017-01-11 2018-07-19 ソニーセミコンダクタソリューションズ株式会社 センサデバイス及び電子機器
EP3680211B1 (en) * 2019-01-10 2024-03-06 TE Connectivity Solutions GmbH Sensor unit and method of interconnecting a substrate and a carrier
WO2021140850A1 (ja) * 2020-01-10 2021-07-15 株式会社村田製作所 モジュール
CN112346065A (zh) * 2020-12-04 2021-02-09 深圳市多泰吉科技有限公司 超声波传感头及具有其的倒车雷达
JP7779093B2 (ja) * 2021-11-10 2025-12-03 セイコーエプソン株式会社 慣性計測装置
CN117439496B (zh) * 2023-12-20 2024-03-15 江苏亚力防爆电机有限公司 矿用防爆电机的运行减震控制方法及系统

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0727785A (ja) * 1993-07-08 1995-01-31 Nitta Ind Corp 加速度センサー
JPH08145832A (ja) * 1994-11-24 1996-06-07 Toyota Motor Corp 半導体加速度センサ
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
US6094981A (en) * 1998-09-25 2000-08-01 Itt Automotive Electrical Systems, Inc. Capacitive rain sensor for windshield
JP2000187040A (ja) * 1998-12-22 2000-07-04 Matsushita Electric Works Ltd 加速度センサおよびその製造方法
FR2805039B1 (fr) * 2000-02-15 2002-04-19 Sagem Capteur gyroscopique
JP2001337104A (ja) * 2000-05-26 2001-12-07 Matsushita Electric Works Ltd 半導体加速度センサ
JP2002181550A (ja) * 2000-10-02 2002-06-26 Ngk Insulators Ltd 角速度測定装置
JP4701505B2 (ja) * 2001-01-29 2011-06-15 パナソニック株式会社 慣性トランスデューサ
JP3926202B2 (ja) * 2002-05-14 2007-06-06 アルプス電気株式会社 検出装置
EP1589329A4 (en) * 2003-01-30 2011-09-28 Fujikura Ltd SEMICONDUCTOR PRESSURE SENSOR AND PROCESS FOR ITS MANUFACTURE
JP4238724B2 (ja) * 2003-03-27 2009-03-18 株式会社デンソー 半導体装置
JP2005283393A (ja) * 2004-03-30 2005-10-13 Fujitsu Media Device Kk 慣性センサ
JP2005331258A (ja) * 2004-05-18 2005-12-02 Denso Corp 振動型角速度センサ
JP4442339B2 (ja) * 2004-07-08 2010-03-31 株式会社デンソー 角速度検出装置
JP2006201041A (ja) * 2005-01-20 2006-08-03 Oki Electric Ind Co Ltd 加速度センサ
JP4049160B2 (ja) * 2005-03-16 2008-02-20 ヤマハ株式会社 蓋体フレーム、半導体装置、及びその製造方法
JP4832802B2 (ja) * 2005-05-30 2011-12-07 Ｏｋｉセミコンダクタ株式会社 半導体加速度センサ装置及びその製造方法
JP4740678B2 (ja) * 2005-07-27 2011-08-03 Ｏｋｉセミコンダクタ株式会社 半導体装置
US7571647B2 (en) * 2005-08-30 2009-08-11 Oki Semiconductor Co., Ltd. Package structure for an acceleration sensor
JP4692260B2 (ja) * 2005-12-12 2011-06-01 株式会社デンソー 半導体力学量センサ装置およびその製造方法
JP2007255953A (ja) * 2006-03-22 2007-10-04 Hitachi Ltd 力学量測定装置
CN101796374A (zh) * 2007-09-03 2010-08-04 松下电器产业株式会社 惯性力传感器
US8256288B2 (en) * 2008-12-16 2012-09-04 Seiko Epson Corporation Sensor device
JP5427476B2 (ja) * 2009-06-02 2014-02-26 株式会社フジクラ 半導体センサ装置
JP4752952B2 (ja) * 2009-06-03 2011-08-17 株式会社デンソー 力学量センサ、及び該力学量センサの製造方法
JP5299353B2 (ja) * 2010-05-20 2013-09-25 株式会社デンソー 半導体装置
JP2012084766A (ja) * 2010-10-14 2012-04-26 Panasonic Corp モジュールの製造方法

Also Published As

Publication number Publication date
US20140007682A1 (en) 2014-01-09
CN103528579B (zh) 2018-06-29
CN108507557A (zh) 2018-09-07
US9310200B2 (en) 2016-04-12
CN103528579A (zh) 2014-01-22
JP2014010131A (ja) 2014-01-20
JP6016228B2 (ja) 2016-10-26

Similar Documents

Publication Publication Date Title
CN108507557B (zh) 传感器装置
US9666787B2 (en) Sensor device and electronic apparatus
US9854685B2 (en) Electronic component, method for manufacturing the electronic component, and circuit board
US9041476B2 (en) Crystal controlled oscillator
US9632105B2 (en) Angular velocity sensor for suppressing fluctuation of detection sensitivity
US20120000288A1 (en) Physical quantity sensor
US7468552B2 (en) Physical quantity sensor
WO2008001908A1 (en) Oscillation gyro sensor
CN103219967A (zh) 压电模块
US20070044558A1 (en) Angular velocity mount arrangement
JP2007101531A (ja) 力学量センサ
JP4380618B2 (ja) センサ装置
US9123883B2 (en) Vibration device
JP2008014633A (ja) 振動型ジャイロセンサ
EP1688706B1 (en) Piezoelectric device and electronic apparatus
JP4935126B2 (ja) 角速度センサ
JP2007043017A (ja) 半導体センサ装置
US8749001B2 (en) Electronic component, electronic device, and method of manufacturing the electronic component
JPWO2014002416A1 (ja) 歪センサ
JP2007316091A (ja) 慣性センサ
JP2007316090A (ja) 慣性センサ
JP2006234462A5 (enExample)
JP2008039576A (ja) 振動型ジャイロセンサ
JP2006234462A (ja) 慣性センサ
JP2010266320A (ja) 角速度センサ装置およびその製造方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20220114