CN104718622B - 半导体装置、固体摄像装置和电子设备 - Google Patents

半导体装置、固体摄像装置和电子设备 Download PDF

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CN104718622B
CN104718622B CN201380053203.0A CN201380053203A CN104718622B CN 104718622 B CN104718622 B CN 104718622B CN 201380053203 A CN201380053203 A CN 201380053203A CN 104718622 B CN104718622 B CN 104718622B
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wiring layer
semiconductor portion
semiconductor substrate
semiconductor
conductive material
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CN104718622A (zh
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梅林拓
田谷圭司
井上肇
金村龙
金村龙一
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Sony Corp
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Sony Corp
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Priority to CN201611216307.0A priority Critical patent/CN107425021B/zh
Priority to CN201710220017.1A priority patent/CN107482024B/zh
Priority to CN201910189180.5A priority patent/CN110265414B/zh
Priority to CN201910188795.6A priority patent/CN110246854B/zh
Priority to CN201910196678.4A priority patent/CN110233157B/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182—Colour image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/018—Manufacture or treatment of image sensors covered by group H10F39/12 of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/199—Back-illuminated image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8053—Colour filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings
    • H10F39/8057—Optical shielding
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/809—Constructional details of image sensors of hybrid image sensors

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  • Solid State Image Pick-Up Elements (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
CN201380053203.0A 2012-10-18 2013-10-10 半导体装置、固体摄像装置和电子设备 Active CN104718622B (zh)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201611216307.0A CN107425021B (zh) 2012-10-18 2013-10-10 半导体装置、固体摄像装置和电子设备
CN201710220017.1A CN107482024B (zh) 2012-10-18 2013-10-10 固体摄像装置和电子设备
CN201910189180.5A CN110265414B (zh) 2012-10-18 2013-10-10 摄像装置
CN201910188795.6A CN110246854B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备
CN201910196678.4A CN110233157B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备

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JP2012-230805 2012-10-18
JP2012230805 2012-10-18
JP2013-089580 2013-04-22
JP2013089580A JP2014099582A (ja) 2012-10-18 2013-04-22 固体撮像装置
PCT/JP2013/006055 WO2014061240A1 (en) 2012-10-18 2013-10-10 Semiconductor device, solid-state imaging device and electronic apparatus

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CN201611216307.0A Division CN107425021B (zh) 2012-10-18 2013-10-10 半导体装置、固体摄像装置和电子设备
CN201910196678.4A Division CN110233157B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备
CN201910188795.6A Division CN110246854B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备
CN201910189180.5A Division CN110265414B (zh) 2012-10-18 2013-10-10 摄像装置
CN201710220017.1A Division CN107482024B (zh) 2012-10-18 2013-10-10 固体摄像装置和电子设备

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CN104718622B true CN104718622B (zh) 2019-04-05

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CN201710220017.1A Active CN107482024B (zh) 2012-10-18 2013-10-10 固体摄像装置和电子设备
CN201910188795.6A Active CN110246854B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备
CN201611216307.0A Active CN107425021B (zh) 2012-10-18 2013-10-10 半导体装置、固体摄像装置和电子设备
CN201910196678.4A Active CN110233157B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备
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CN201910188795.6A Active CN110246854B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备
CN201611216307.0A Active CN107425021B (zh) 2012-10-18 2013-10-10 半导体装置、固体摄像装置和电子设备
CN201910196678.4A Active CN110233157B (zh) 2012-10-18 2013-10-10 光检测装置和电子设备
CN201910189180.5A Active CN110265414B (zh) 2012-10-18 2013-10-10 摄像装置

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US (10) US9431450B2 (enExample)
EP (3) EP3605611B1 (enExample)
JP (1) JP2014099582A (enExample)
KR (4) KR102278755B1 (enExample)
CN (6) CN104718622B (enExample)
TW (1) TWI595638B (enExample)
WO (1) WO2014061240A1 (enExample)

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