CN104684677B - 用于工件分离的方法及装置及借此制造的物品 - Google Patents

用于工件分离的方法及装置及借此制造的物品 Download PDF

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Publication number
CN104684677B
CN104684677B CN201380047456.7A CN201380047456A CN104684677B CN 104684677 B CN104684677 B CN 104684677B CN 201380047456 A CN201380047456 A CN 201380047456A CN 104684677 B CN104684677 B CN 104684677B
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China
Prior art keywords
workpiece
laser
pulse
laser pulses
modified
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Expired - Fee Related
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CN201380047456.7A
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English (en)
Chinese (zh)
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CN104684677A (zh
Inventor
张海滨
单芳
马修·雷克
张敏
格兰·西门森
徐倩
詹姆斯·布鲁克伊塞
乔瑟夫·法兰克尔
麦克·达尔文
杰克·罗戴尔
马修·赛谢尔
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Irecto Science Industry Co ltd
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Irecto Science Industry Co ltd
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Publication of CN104684677A publication Critical patent/CN104684677A/zh
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Expired - Fee Related legal-status Critical Current
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/57—Working by transmitting the laser beam through or within the workpiece the laser beam entering a face of the workpiece from which it is transmitted through the workpiece material to work on a different workpiece face, e.g. for effecting removal, fusion splicing, modifying or reforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)
CN201380047456.7A 2012-09-21 2013-09-23 用于工件分离的方法及装置及借此制造的物品 Expired - Fee Related CN104684677B (zh)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
US201261704038P 2012-09-21 2012-09-21
US61/704,038 2012-09-21
US201261735489P 2012-12-10 2012-12-10
US61/735,489 2012-12-10
US201361766274P 2013-02-19 2013-02-19
US61/766,274 2013-02-19
US201361866736P 2013-08-16 2013-08-16
US61/866,736 2013-08-16
US14/032,829 2013-09-20
US14/032,829 US9610653B2 (en) 2012-09-21 2013-09-20 Method and apparatus for separation of workpieces and articles produced thereby
PCT/US2013/061162 WO2014047549A1 (en) 2012-09-21 2013-09-23 Method and apparatus for separation of workpieces and articles produced thereby

Publications (2)

Publication Number Publication Date
CN104684677A CN104684677A (zh) 2015-06-03
CN104684677B true CN104684677B (zh) 2018-11-16

Family

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CN201380047456.7A Expired - Fee Related CN104684677B (zh) 2012-09-21 2013-09-23 用于工件分离的方法及装置及借此制造的物品

Country Status (6)

Country Link
US (1) US9610653B2 (https=)
JP (1) JP6397821B2 (https=)
KR (1) KR20150056597A (https=)
CN (1) CN104684677B (https=)
TW (1) TWI637807B (https=)
WO (1) WO2014047549A1 (https=)

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CN110139727B (zh) 2016-12-30 2022-04-05 伊雷克托科学工业股份有限公司 用于延长镭射处理设备中的光学器件生命期的方法和系统
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KR20250039487A (ko) 2018-06-05 2025-03-20 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 레이저 가공 장치, 그 작동 방법 및 이를 사용한 작업물 가공 방법
KR102240325B1 (ko) * 2018-06-18 2021-04-13 신에츠 엔지니어링 가부시키가이샤 워크 분리 장치 및 워크 분리 방법
TWI843784B (zh) 2019-01-31 2024-06-01 美商伊雷克托科學工業股份有限公司 雷射加工設備、與設備一起使用的控制器及非暫時性電腦可讀取媒體
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