CN104583812B - 微细结构体、光学构件、防反射膜和微细结构体制造方法 - Google Patents

微细结构体、光学构件、防反射膜和微细结构体制造方法 Download PDF

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CN104583812B
CN104583812B CN201380043698.9A CN201380043698A CN104583812B CN 104583812 B CN104583812 B CN 104583812B CN 201380043698 A CN201380043698 A CN 201380043698A CN 104583812 B CN104583812 B CN 104583812B
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mesopores
film
protrusions
microstructure
mesostructure
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CN104583812A (zh
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黑田幸
黑田一幸
北村伸
宫田浩克
高桥祐彦
菅野阳将
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Canon Inc
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Canon Inc
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/107—Porous materials, e.g. for reducing the refractive index
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Laminated Bodies (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
CN201380043698.9A 2012-07-04 2013-07-03 微细结构体、光学构件、防反射膜和微细结构体制造方法 Active CN104583812B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2012150232 2012-07-04
JP2012-150232 2012-07-04
JP2013105491A JP6386700B2 (ja) 2012-07-04 2013-05-17 構造体、光学部材、反射防止膜、撥水性膜、質量分析用基板、位相板、構造体の製造方法、及び反射防止膜の製造方法
JP2013-105491 2013-05-17
PCT/JP2013/068801 WO2014007401A1 (en) 2012-07-04 2013-07-03 Fine structure, optical member, antireflection film, water-repellent film, substrate for mass spectrometry, phase plate, process for producing fine structure, and process for producing antireflection film

Publications (2)

Publication Number Publication Date
CN104583812A CN104583812A (zh) 2015-04-29
CN104583812B true CN104583812B (zh) 2017-05-03

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Country Status (8)

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US (1) US10473823B2 (enExample)
EP (1) EP2870493A4 (enExample)
JP (1) JP6386700B2 (enExample)
KR (1) KR20150052834A (enExample)
CN (1) CN104583812B (enExample)
BR (1) BR112014032796A2 (enExample)
RU (1) RU2015103481A (enExample)
WO (1) WO2014007401A1 (enExample)

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WO2014007401A1 (en) 2014-01-09
EP2870493A4 (en) 2016-07-20
RU2015103481A (ru) 2016-08-20
EP2870493A1 (en) 2015-05-13
KR20150052834A (ko) 2015-05-14
BR112014032796A2 (pt) 2017-06-27
CN104583812A (zh) 2015-04-29
US10473823B2 (en) 2019-11-12
JP2014029476A (ja) 2014-02-13
US20150160377A1 (en) 2015-06-11
JP6386700B2 (ja) 2018-09-05

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