CN103092443B - 单层触摸敏感显示器 - Google Patents
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Abstract
公开了具有形成在衬底的单个侧面上的共面单层触摸传感器的触摸传感器面板。驱动线和感测线可被制作为第一定向上的列状图案和第二定向上的片,其中第一定向上的每个列状图案连接到触摸传感器面板的边界区域中的单独的金属迹线,并且第二定向上多个行中每个行中的所有片利用触摸传感器面板的边界区域中的单独的金属迹线被连接在一起。边界区域中的金属迹线可被形成在衬底的与片和列相同的侧面上,但通过电介质层而与片和列状图案隔开。
Description
本申请是申请日为2008年9月27日、申请号为200810168120.7、发明名称为“单层触摸敏感显示器”的专利申请的分案申请。
技术领域
本发明一般涉及用于计算系统的输入设备,尤其涉及能够被制作在衬底的单个侧面上的互电容多点触摸传感器面板。
背景技术
目前有很多类型的输入设备可用来在计算系统中执行操作,诸如按钮或键、鼠标、轨迹球、触摸传感器面板、操纵杆、触摸屏等。尤其是触摸屏,由于容易操作和操作的通用性以及其不断下降的价格而变得越来越流行。触摸屏可包括触摸传感器面板,其可以是具有触摸敏感表面的透明(clear)面板。触摸传感器面板可被定位于显示屏前面,使得触摸敏感表面覆盖显示屏的可视区域。触摸屏可允许用户通过仅仅由手指或指示笔触摸显示屏而进行选择和移动光标。通常,触摸屏可识别触摸和触摸在显示屏上的位置,并且计算系统可解释该触摸,然后基于触摸事件而执行动作。
触摸传感器面板可被实现为由多条驱动线(例如行)与多条感测线(例如列)相交而形成的像素(pixel)阵列,其中驱动线(drive line)和感测线(sense line)由电介质材料隔开。这样的触摸传感器面板的一个例子在本申请人于2007年1月3日所提交的名为“Double-Sided Touch Sensitive Panel and Flex Circuit Bonding”的共同未决美国专利申请No.11/650049中描述,该申请的全部内容被包括在此以供参考。但是,生产具有在单个衬底的底面和顶面上所形成的驱动线和感测线的触摸传感器面板可能花费很高。该额外花费的一个原因是,必须在玻璃衬底的两个侧面上均执行薄膜处理步骤,这就要求在一个侧面正被处理时对处理过的另一个侧面提供保护措施。另一个原因是柔性电路制作的费用和为了连接衬底的两个侧面所需要的联结(bonding)。
发明内容
本发明涉及基本透明的触摸传感器面板,其具有制作在衬底的单个侧面上的共面单层触摸传感器,用于检测单点或多点触摸事件(触摸敏感表面上一个或多个手指或其他物体几乎同时触摸不同的位置)。为避免必须在相同衬底的相对两个侧面上制作基本上透明的驱动线和感测线,本发明的实施例可在衬底的相同侧面上在共面单层上形成驱动线和感测线。驱动线和感测线可被制作为在第一定向(orientation)上的列状图案和在第二定向上的片(patch),其中第一定向上的每个列状图案连接到触摸传感器面板的边界区域中的单独的金属迹线,并且第二定向上的多个行中每一个行中的所有片利用触摸传感器面板的边界区域中的单独的金属迹线(或其他导电材料)连接在一起。边界区域中的金属迹线可被形成在衬底的与片和列相同的侧面上,但是通过电介质层而与片和列状图案隔开。金属迹线可允许片和列状图案都被布线到衬底的相同短边沿,使得小的柔性电路可被联结到仅在衬底的一个侧面上的小区域。
附图说明
图1A示出了根据本发明一个实施例的示例性的基本透明的触摸传感器面板的部分视图,所述触摸传感器面板具有制作在衬底的单个侧面上的共面单层触摸传感器。
图1B示出了根据本发明一个实施例的示例性的基本透明的触摸传感器面板的部分视图,所述触摸传感器面板包括在触摸传感器面板的边界区域中延伸的金属迹线。
图1C示出了根据本发明一个实施例的列和行片到触摸传感器面板边界区域中的金属迹线的示例性连接。
图2A示出了根据本发明一个实施例的触摸传感器面板的示例性横截面,示出了通过电介质材料中的通孔连接的SITO迹线和金属迹线。
图2B是根据本发明一个实施例的在图2A中所示的示例性横截面的特写(close-up)视图。
图3示出了根据本发明的一个实施例的示例性的列和相邻行片的顶视图。
图4A是手指触摸的x坐标与在对于具有宽间距的单个行中两个相邻像素a-5和b-5的一个像素处看到的互电容的关系曲线图。
图4B是手指触摸的x坐标与在对于具有宽间距的单个行中两个相邻像素a-5和b-5的一个像素处看到的互电容的关系曲线图,其中根据本发明一个实施例已经提供了空间插值。
图4C示出了根据本发明一个实施例的对于较大像素间距有用的示例性的列和相邻行片图案的顶视图。
图5示出了根据本发明一个实施例的联结到盖玻片的触摸传感器面板衬底上的SITO的示例性层叠。
图6示出了根据本发明一个实施例的可以与触摸传感器面板一起操作的计算系统。
图7A示出了根据本发明一个实施例的可以包括触摸传感器面板和计算系统的示例性移动电话。
图7B示出了根据本发明一个实施例的可包括触摸传感器面板和计算系统的示例性数字音频/视频播放器。
具体实施方式
在下面对优选实施例的描述中,参考作为本说明书一部分的附图,在附图中通过说明而示出了本发明在其中可以被实施的特定实施例。应当理解,可使用其他实施例,并且可以进行结构变化,而不背离本发明实施例的范围。
本发明涉及基本透明的触摸传感器面板,其具有制作在衬底的单个侧面上的共面单层触摸传感器,用于检测单点或多点触摸事件(触摸敏感表面上一个或多个手指或其他物体几乎同时触摸不同的位置)。为避免必须在相同衬底的相对两个侧面上制作基本上透明的驱动线和感测线,本发明的实施例可在衬底的相同侧面上在共面单层上形成驱动线和感测线。驱动线和感测线可被制作为第一定向上的列状图案和在第二定向上的片,其中第一定向上的每个列状图案被连接到触摸传感器面板的边界区域中的单独的金属迹线,并且第二定向上多个行中每个行中的所有片利用触摸传感器面板的边界区域中的单独的金属迹线(或其他导电材料)而被连接在一起。边界区域中的金属迹线可被形成在衬底的与片和列相同的侧面上,但是通过电介质层而与片和列状图案隔开。金属迹线可允许片和列状图案都被布线到衬底的相同短边沿,使得小的柔性电路可被联结到仅在衬底的一个侧面上的小区域。
尽管这里可能按照互电容多点触摸传感器面板来描述本发明的某些实施例,但是应当理解,本发明的实施例不限于此,而是还可以被应用于自电容传感器面板和单点触摸传感器面板。而且,尽管这里可能按照具有行和列的触摸传感器正交阵列来描述传感器面板中的触摸传感器,但是本发明的实施例不限于正交阵列,而可以被一般地应用于以任何数目的维度和定向布置的触摸传感器,包括对角线、同心圆、三维和随机定向。
图1A示出了根据本发明实施例的示例性的基本透明的触摸传感器面板100的部分视图,所述触摸传感器面板具有制作在衬底的单个侧面上的共面单层触摸传感器。在图1A的例子中,示出了具有8列(标注为a到h)和6行(标注为1到6)的触摸传感器面板100,但是应当理解,可采用任意数目的列和行。列a到h通常可以为柱状的,但是在图1A的例子中,每个列的一个侧包括交错边缘和凹槽,其被设计用于在每个列中形成分离的多个段。行1到6中每一个可由多个不同的片(patch)或垫(pad)形成,每个片包括由与片相同的材料构成的迹线,并被布线(route)到触摸传感器面板100的边界区域,用于使特定行中的所有片能够通过在边界区域中延伸的金属迹线(图1A中未示出)而被连接在一起。这些金属迹线可被布线到触摸传感器面板100的一个侧面上的小区域,并被连接到柔性电路102。如图1A的例子所示,形成行的片可被布置为通常为金字塔形的结构。例如,在图1A中,列a和列b之间行1到3的片被布置为倒金字塔结构,而列a和列b之间行4到6的片被布置为正金字塔结构。
图1A的列和片可被形成在导电材料的共面单层中。在触摸屏实施例中,导电材料可以是基本透明的材料,诸如单层氧化铟锡(SITO),但是也可使用其他材料。SITO层可被形成在盖玻片(cover glass)的背面上或被形成在单独衬底的顶部上。虽然这里可能为了简化公开的目的提到SITO,但是应当理解,根据本发明的实施例,也可使用其他导电材料。
图1B示出了根据本发明实施例的示例性的基本透明的触摸传感器面板100的部分视图,其中触摸传感器面板包括在触摸传感器面板的边界区域中延伸的金属迹线104和106。图1B示出了金字塔形金属布局,注意,为清楚起见,图1B中的边界区域被放大了。每个列a到h可包括SITO迹线108,其允许列经通孔(图1B中未示出)被连接到金属迹线。每列的一个侧包括交错边缘114和凹槽116,其被设计用来在每个列中形成多个单独的段。每个行片1到6可包括SITO迹线110,其允许片经通孔(图1B中未示出)被连接到金属迹线。SITO迹线110可使特定行中的每个片能够彼此相连。因为所有金属迹线104和106被形成在同一层上,所以它们可都被布线到相同的柔性电路102。
如果触摸传感器面板100作为互电容触摸传感器面板工作,则列a到h或行1到6可由一个或多个激励信号驱动,并且可以在相邻的列区域和行片之间形成边缘电场线(fringing electric field lines)。在图1B中,应当理解,虽然出于说明的目的仅仅示出了列a和行片1(a-1)之间的电场线112,但是根据哪些列或行被激励,在其他相邻列和行片(例如a-2、b-4、g-5等)之间可以形成电场线。因此,应当理解,每个列-行片对(例如a-1、a-2、b-4、g-5等)可代表两电极像素或传感器,其中电荷可从驱动电极被耦合到感测电极上。当手指在这些像素中的一个之上向下触摸时,延伸超出触摸传感器面板的覆盖的边缘电场线中的一些被手指阻挡,从而减少了耦合到感测电极上的电荷量。可检测被耦合电荷量的这个减少,作为确定所得到的触摸“图像”的一部分。应当注意,在如图1B所示的互电容触摸传感器面板设计中,不需要单独的参考地电势(reference ground),因而不需要衬底的背面上或单独的衬底上的第二层。
触摸传感器面板100也可以作为自电容触摸传感器面板而工作。在这样的实施例中,参考接地面可被形成在衬底的背面上、被形成在与片和列相同的侧面上但通过电介质而与片和列分隔开、或被形成在单独的衬底上。在自电容触摸传感器面板中,每个像素或传感器具有可由于手指的存在而改变的到参考地电势的自电容。在自电容实施例中,列a到h的自电容可独立地被感测,并且行1到6的自电容也可独立地被感测。
图1C示出了根据本发明实施例的列和行片到触摸传感器面板边界区域中的金属迹线的示例性连接。图1C代表图1B中所示的“细节A”,并且示出通过SITO迹线108和110连接到金属迹线118的列“a”和行片4到6。由于SITO迹线108和110通过电介质材料而与金属迹线118分隔开,所以在电介质材料中形成的通孔120允许SITO迹线连接到金属迹线。
图2A示出了根据本发明实施例的触摸传感器面板200的示例性横截面,其示出了通过电介质材料222中的通孔220连接的SITO迹线208和金属迹线218。图2A代表图1C中所示的B-B视图。
图2B是根据本发明实施例的在图2A中所示的示例性横截面的特写视图。图2B示出一个示例性实施例,其中SITO迹线208具有最大约为每方块155欧姆(155ohms per square)的电阻率。在一个实施例中,电介质222可以是大约为1500埃的无机SiO2,其可在较高温度下被处理,并因此允许SITO层以较高品质被溅射(sputter)。在另一个实施例中,电介质222可以是大约为3.0微米的有机聚合物。1500埃的无机SiO2可被用于足够小以至于使得(SITO迹线208和金属迹线218之间的)的跨接电容(crossover capacitance)不构成问题的触摸传感器面板。
对于较大的触摸传感器面板(对角线尺寸大约为3.5英寸(3.5”)或更大),跨接电容可能成为问题,从而产生只能被部分补偿的错误信号。因此,对于较大的触摸传感器面板,具有较低电介质常数的较厚的电介质层222,诸如大约3.0微米的有机聚合物,可被用来降低跨接电容。但是,使用较厚的电介质层可能迫使SITO层在较低的温度下被溅射,从而导致较低的光学质量和较高的电阻率。
再次参考图1C中的例子,列边缘114和行片4到6可在x维度上交错(stagger),因为必须为连接行片4和5的SITO迹线110留出空间。(应当理解,图1C的例子中的行片4实际上是附着(stick)在一起的两个片。)为了获得最佳触摸灵敏度,可能期望平衡像素a-6、a-5和a-4中电极的面积。但是,如果列“a”保持为直线,则行片6可以比行片5或6细,并且会在像素a-6的电极之间产生不平衡。
图3示出了根据本发明实施例的示例性的列和相邻行片的顶视图。可能一般期望使像素a-4、a-5和a-6的互电容特征相对为常量,以产生在触摸传感电路范围内保持相对一致的z方向触摸灵敏度。因此,列面积a4、a5、a6应当大致与行片面积4、5、6相同。为此,列段a4和a5与行片4和5可以在y方向上相对于列段a6和行片6收缩,使得列段a4的面积与列段a5和a6的面积相匹配。换而言之,像素a4-4将比像素a6-6更宽但更短,而像素a6-6将更窄但更长。
从前面提到的图中应当看到,原始的空间灵敏度可能有点失真。换而言之,例如,由于像素或传感器可能在x方向上轻微地歪斜或未对准,所以像素a-6上的最大化的触摸事件(例如手指被直接放在像素a-6上)的x坐标可能与在像素a-4上的最大化的触摸事件的x坐标稍有不同。因此,在本发明的实施例中,这个未对准可在软件算法中被纠正(de-warp),以重新绘制像素并去除失真。
虽然典型的触摸面板网格维度(grid dimension)可具有布置在5.0毫米中心上的像素,但是可能期望例如具有大约6.0毫米中心的更展看的网格(grid)来减小触摸传感器面板中电气连接的总数量。但是,展开(spread out)传感器图案可能导致错误的触摸读取。
图4A是手指触摸的x坐标与在对于具有宽间距的单个行中两个相邻像素a-5和b-5的一个像素处看到的互电容的关系曲线图。在图4A中,曲线400代表当手指触摸从左向右连续移动时在像素a-5处看到的互电容,曲线402代表当手指触摸从左向右连续移动时在像素b-5处看到的互电容。正如所预期的那样,当手指触摸直接在像素a-5上经过时,在像素a-5处看到互电容的下降404,并且当手指触摸直接在像素b-5上经过时,在像素b-5处看到互电容的类似下降406。如果线408代表用于检测触摸事件的阈值,则图4A说明,即使手指从来没有从触摸传感器面板的表面提起,也可能在410处错误地看到好像手指已经短暂地离开了表面。这个位置410可代表这两个展开的像素之间大约半程的点。
图4B是手指触摸的x坐标与在对于具有宽间距的单个行中两个相邻像素a-5和b-5的一个像素处看到的互电容的关系曲线图,其中根据本发明的实施例已经提供了空间插值。正如所预期的那样,当手指触摸直接在像素a-5上经过时,在像素a-5处看到互电容的下降404,并且当手指触摸直接在像素b-5上经过时,在像素b-5处看到互电容的类似下降406。但是,注意,互电容值的上升和下降比图4A中发生的更加平缓。如果线408代表用于检测触摸事件的阈值,则图4B说明,当手指从左向右在像素a-5和b-5上移动时,在像素a-5或b-5处始终检测到触摸事件。即,触摸事件的这个“平滑(blurring)”有助于防止错误的无接触读取的出现。
在本发明的一个实施例中,可增加触摸传感器面板的盖玻片的厚度,以实现图4B中所示的空间平滑或滤波的部分或全部。
图4C示出了根据本发明实施例的对较大像素间距有用的示例性的列和相邻行片图案的顶视图。图4C示出了一个示例性的实施例,其中在x方向上被拉伸的像素内采用锯齿状电极边缘412。锯齿状电极边缘可允许边缘电场线414出现在x方向上较大区域上,从而可在x方向上较大距离上由相同像素来检测触摸事件。应当理解,图4C的锯齿状结构仅仅是示例性的,也可使用诸如蛇形边缘等之类的其他结构。这些结构还可使触摸图案柔和,并在图4B所示的相邻像素之间产生额外的空间滤波和插值。
图5示出了根据本发明实施例的联结到盖玻片的触摸传感器面板衬底上的SITO的示例性层叠。层叠可包括可由玻璃形成的触摸传感器面板衬底500,其中在其之上,可在一个侧面上形成增透(AR:anti-reflective)膜510,并且金属502可被沉积和图案化在另一侧面上,以形成边界区域中的总线。金属502可具有最大为每方块0.8欧姆的电阻率。然后,绝缘层504可被沉积在衬底500和金属502之上。绝缘层例如可以是厚度为1500埃的SiO2,或者3微米的有机聚合物。光刻法可被用于在绝缘体504中形成通孔506,然后导电材料508可在绝缘体和金属502的顶部被沉积并图案化。可由诸如电阻率最大为每方块155欧姆的ITO之类的透明导电材料形成的单层导电材料508可比多层设计更透明,并可以更加容易制造。可利用诸如各向异性导电膜(ACF)之类的粘合剂514将柔性电路512联结到导电材料503和金属502。然后,可利用诸如压敏粘合剂(PSA)之类的粘合剂518,将整个组件联结到盖玻片516和黑色掩模(black mask)520。
在可替换的实施例中,上述金属、绝缘体、导电材料可被直接形成在盖玻片的背面上。
图6示出了根据本发明实施例的可以与上述触摸传感器面板一起操作的示例性计算系统600。可包括触摸传感器面板624和显示设备640(例如LCD模块)的触摸屏642可通过集成形成在传感器面板上的连接器或利用柔性电路被连接到计算系统600中的其他组件。计算系统600可包括一个和多个面板处理器602和外围设备604、以及面板子系统606。这一个和多个处理器602可包括例如ARM968处理器或具有类似功能和性能的其他处理器。但是,在其他实施例中,可通过诸如状态机之类的专用逻辑来替代实现面板处理器功能。外围设备604可包括、但不限于随机存取存储器(RAM)或其他类型的存储器或储存器、看门狗计时器等。
面板子系统606可包括、但不限于一个或多个模拟通道608、通道扫描逻辑电路610和驱动逻辑电路614。通道扫描逻辑电路610可访问RAM612,自主地(autonomously)从模拟通道读取数据并提供用于模拟通道的控制。该控制可包括将触摸传感器面板624的感测线复用或以其他方式连接到模拟通道608。此外,通道扫描逻辑电路610可控制驱动逻辑电路和被选择性地施加于触摸传感器面板624的驱动线的激励信号。在某些实施例中,面板子系统606、面板处理器602和外围设备604可被集成到单个特定用途集成电路(ASIC)中。
驱动逻辑电路614可提供多个面板子系统输出616,并可提供驱动高电压驱动器618的专用接口。高电压驱动器618可提供从低电压电平(例如互补金属氧化物半导体(CMOS)电平)到高电压电平的电平转变,从而提供更好的信噪比(S/N)以减小噪声。面板子系统输出616可被发送到解码器620和电平转换器/驱动器638,电平转换器/驱动器638可通过专用接口选择性地将一个或多个高电压驱动器输出连接到一个或多个面板行或驱动线输入622,并使得在高电压驱动器618中可使用较少的高电压驱动器电路。每个面板行输入622可驱动触摸传感器面板624中的一个或多个驱动线。在某些实施例中,高电压驱动器618和解码器620可被集成到单个ASIC中。但是,在其他实施例中,高电压驱动器618和解码器620可被集成到驱动逻辑电路614中,而在另外一些实施例中,可完全不需要高电压驱动器618和解码器620。
计算系统600还可包括用于接收来自面板处理器602的输出并基于该输出执行动作的主机处理器628,所述输出可以包括、但不限于移动诸如光标或指针之类的对象、滚动或摇动(panning)、调整控制设置、打开文件或文档、查看菜单、进行选择、执行指令、操作连接到主机设备的外围设备、接听电话、进行电话呼叫、挂断电话、改变音量或音频设置、存储诸如地址、常用号码、已接电话、未接电话之类的关于电话通信的信息、登录到计算机或计算机网络、允许授权个体访问计算机或计算机网络的受限区域、加载与计算机桌面的用户偏好配置相关联的用户概况、允许访问网页内容、运行特定程序、加密或解码消息,等等。主机处理器628还可执行可能与面板处理无关的附加功能,并可被耦接到程序存储器632和诸如LCD之类的用于向设备用户提供用户界面(UI)的显示设备640。
上述触摸传感器面板可有利地被用在图6的系统中,以提供成本较低、更便于制造,并适合现有机械控制概要(相同的物理包络)的空间高效的触摸传感器面板和UI。
图7A示出了根据本发明实施例的示例性移动电话736,其可包括触摸传感器面板724和显示设备730层叠(可选地用PSA734联结在一起)以及上述计算系统。图7B示出了根据本发明实施例的示例性数字音频/视频播放器740,其可以包括触摸传感器面板724和显示设备730层叠(可选地用PSA734联结在一起)以及上述计算系统。图7A和7B的移动电话和数字音频/视频播放器可有利地得益于上述触摸传感器面板,因为触摸传感器面板可使这些设备能够更小并且更便宜,而这是可对消费者满意度和商业成功具有重大影响的重要消费者因素。
尽管已经参考附图完整描述了本发明的实施例,但是需要注意,对于本领域技术人员,各种变化和修改将是显而易见的。这类变化和修改应当被理解为包含在所附权利要求所限定的本发明实施例的范围内。
Claims (17)
1.一种触摸传感器面板,包括:
形成在单个层上并支撑在衬底的一个侧面上的沿第一方向设置的多个导电材料图案;以及
支撑在所述衬底的与所述多个导电材料图案相同的侧面上的多个导电材料片,该多个片设置在相同的单个层中,该多个片的多个分组沿不同于第一方向的第二方向设置,其中特定分组中的所有片连接在一起;
其中,所述多个片中的每一个片与和该片邻近的导电材料图案的段一起形成互电容传感器,每一个互电容传感器对所述多个片中的一个片的段与所述多个导电材料图案中的一个图案的邻近非重叠的共面的段之间的边缘电场进行响应;
并且其中:
沿第一方向设置的所述多个导电材料图案被配置作为互电容传感器阵列的驱动线和感测线中的一者,并且沿第二方向设置的所述多个片的所述多个分组被配置作为共面的互电容传感器单层阵列的驱动线和感测线中的另一者;以及
在操作中,驱动线通过一个或多个激励信号被驱动以建立所述边缘电场,用于将电荷耦合到感测线上。
2.如权利要求1所述的触摸传感器面板,其中所述导电材料图案是列状的。
3.如权利要求1所述的触摸传感器面板,其中,特定分组中的所有片是利用形成在与所述片和导电材料图案不同的层上的导电迹线而连接在一起的。
4.如权利要求1所述的触摸传感器面板,其中,导电材料图案形成用于每一条驱动线的连续图案,或者形成用于每一条感测线的连续图案。
5.如权利要求2所述的触摸传感器面板,其中导电材料图案是由凹槽和交错边缘形成的,以形成所述导电材料图案的段。
6.如权利要求1所述的触摸传感器面板,其中,形成互电容传感器的对应的片和导电材料图案的段具有大致相同的表面积。
7.如权利要求1所述的触摸传感器面板,其中,互电容传感器中的每一个在x方向上被拉伸,以创建空间平滑。
8.如权利要求1所述的触摸传感器面板,所述触摸传感器面板被集成到计算系统中。
9.如权利要求8所述的触摸传感器面板,所述计算系统被集成到移动电话中。
10.如权利要求8所述的触摸传感器面板,所述计算系统被集成到数字媒体播放器中。
11.一种形成触摸传感器面板的方法,包括:
在衬底的一个侧面上在单个层上形成多个导电材料图案;
在所述衬底的与所述多个导电材料图案相同的侧面上形成多个导电材料片,并将该多个片布置为多个行;
将特定行中的所有片连接在一起;以及
由所述多个片中的每一个片与和该片邻近的导电材料图案的段一起形成互电容传感器,每一个互电容传感器对所述多个片中的一个片的段与所述多个导电材料图案中的邻近的一个图案之间的边缘电场进行响应;以及
将所述多个导电材料图案配置作为驱动线和感测线中的一者,并且
将所述多个片配置作为驱动线和感测线中的另一者;以及
通过一个或多个激励信号对驱动线进行驱动以建立所述边缘电场,用于将电荷耦合到感测线上。
12.如权利要求11所述的方法,还包括:以列状形成所述导电材料图案。
13.如权利要求11所述的方法,还包括:利用形成在与所述导电材料图案和片不同的层上的导电迹线来将特定行中的片连接在一起。
14.如权利要求11所述的方法,还包括:将导电材料图案形成为多个列,并且将每一列形成为连续的导电材料图案。
15.如权利要求12所述的方法,还包括:由凹槽和交错边缘形成所述导电材料图案,以形成列状的段。
16.如权利要求11所述的方法,还包括:将形成互电容传感器的对应的片和导电材料图案的段形成为具有大致相同的表面积。
17.如权利要求11所述的方法,还包括:在x方向上拉伸互电容传感器中的每一个,以创建空间平滑。
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