CN102803174A - 薄层的沉积方法和获得的产品 - Google Patents

薄层的沉积方法和获得的产品 Download PDF

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Publication number
CN102803174A
CN102803174A CN201080025936XA CN201080025936A CN102803174A CN 102803174 A CN102803174 A CN 102803174A CN 201080025936X A CN201080025936X A CN 201080025936XA CN 201080025936 A CN201080025936 A CN 201080025936A CN 102803174 A CN102803174 A CN 102803174A
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CN
China
Prior art keywords
layer
stacked body
stack
equal
substrate
Prior art date
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Pending
Application number
CN201080025936XA
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English (en)
Chinese (zh)
Inventor
V.雷蒙
A.卡申科
N.纳多
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Saint Gobain Glass France SAS
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Saint Gobain Glass France SAS
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Filing date
Publication date
Application filed by Saint Gobain Glass France SAS filed Critical Saint Gobain Glass France SAS
Priority to CN201810153647.6A priority Critical patent/CN108545962A/zh
Publication of CN102803174A publication Critical patent/CN102803174A/zh
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639Multilayers containing at least two functional metal layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007Other surface treatment of glass not in the form of fibres or filaments by thermal treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thermal Sciences (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
CN201080025936XA 2009-06-12 2010-06-11 薄层的沉积方法和获得的产品 Pending CN102803174A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810153647.6A CN108545962A (zh) 2009-06-12 2010-06-11 薄层的沉积方法和获得的产品

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0953956A FR2946639B1 (fr) 2009-06-12 2009-06-12 Procede de depot de couche mince et produit obtenu.
FR0953956 2009-06-12
PCT/FR2010/051172 WO2010142926A1 (fr) 2009-06-12 2010-06-11 Procede de depot de couche mince et produit obtenu

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201810153647.6A Division CN108545962A (zh) 2009-06-12 2010-06-11 薄层的沉积方法和获得的产品

Publications (1)

Publication Number Publication Date
CN102803174A true CN102803174A (zh) 2012-11-28

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CN201080025936XA Pending CN102803174A (zh) 2009-06-12 2010-06-11 薄层的沉积方法和获得的产品

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Country Status (17)

Country Link
US (1) US9481603B2 (enExample)
EP (1) EP2440503B1 (enExample)
JP (3) JP2012529419A (enExample)
KR (1) KR101710219B1 (enExample)
CN (2) CN108545962A (enExample)
AU (1) AU2010258455B2 (enExample)
BR (1) BRPI1013090B1 (enExample)
CA (1) CA2762319C (enExample)
DE (2) DE202010018236U1 (enExample)
EA (1) EA022242B1 (enExample)
EG (1) EG26585A (enExample)
ES (1) ES2852923T3 (enExample)
FR (1) FR2946639B1 (enExample)
HU (1) HUE053560T2 (enExample)
MX (1) MX346709B (enExample)
PL (1) PL2440503T3 (enExample)
WO (1) WO2010142926A1 (enExample)

Cited By (22)

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CN105026331A (zh) * 2013-03-01 2015-11-04 法国圣戈班玻璃厂 用于热处理涂层的方法
CN105408271A (zh) * 2013-03-14 2016-03-16 分子间公司 热处理后对相同颜色产生高太阳光增益低发射率涂层的方法
CN105452519A (zh) * 2013-08-20 2016-03-30 法国圣戈班玻璃厂 用于获得被提供有包含不连续的薄金属层的涂层的基材的方法
CN105473328A (zh) * 2013-03-13 2016-04-06 分子间公司 用于生产包括三元合金的低辐射玻璃的涂层系统、方法和装置
CN105658592A (zh) * 2013-10-17 2016-06-08 法国圣戈班玻璃厂 制造涂覆有包括导电透明氧化物膜的叠层的基底的方法
CN105849597A (zh) * 2013-12-31 2016-08-10 美国圣戈班性能塑料公司 具有优良的光学和太阳能性能的复合膜
CN106132741A (zh) * 2014-03-25 2016-11-16 韦巴斯托股份公司 具有玻璃支撑体的车辆顶部的镶板部件
CN106338790A (zh) * 2015-07-07 2017-01-18 丰田自动车工程及制造北美公司 具有半导体吸收体层的全向高色度红色结构色料
CN106414357A (zh) * 2014-05-28 2017-02-15 法国圣戈班玻璃厂 含在氧化镍层上结晶银‑基功能层的材料
CN106715350A (zh) * 2014-09-30 2017-05-24 法国圣戈班玻璃厂 被提供有具有热性质和金属末端层的堆叠体的基材
CN107667077A (zh) * 2015-05-29 2018-02-06 法国圣戈班玻璃厂 提供有具有热性质的含金属末端层和氧化物前‑末端层的堆叠体的基材
CN109790067A (zh) * 2016-09-26 2019-05-21 法国圣戈班玻璃厂 用低辐射率涂层涂覆的基材
CN109790066A (zh) * 2016-09-26 2019-05-21 法国圣戈班玻璃厂 用低辐射率涂层涂覆的基材
CN110418710A (zh) * 2016-12-20 2019-11-05 墨西哥平板玻璃可变资本股份有限公司 用于玻璃基材的低发射率涂层
US10690823B2 (en) 2007-08-12 2020-06-23 Toyota Motor Corporation Omnidirectional structural color made from metal and dielectric layers
US10788608B2 (en) 2007-08-12 2020-09-29 Toyota Jidosha Kabushiki Kaisha Non-color shifting multilayer structures
CN112041282A (zh) * 2017-12-29 2020-12-04 维特罗平板玻璃有限责任公司 太阳控制涂层和用于形成太阳控制涂层的方法
US10870740B2 (en) 2007-08-12 2020-12-22 Toyota Jidosha Kabushiki Kaisha Non-color shifting multilayer structures and protective coatings thereon
CN112499987A (zh) * 2020-12-10 2021-03-16 四川南玻节能玻璃有限公司 一种红外反射组合膜层及镀膜玻璃
CN112679109A (zh) * 2020-12-11 2021-04-20 安徽凤阳玻璃有限公司 一种被动式低能耗离线可钢化low-e镀膜玻璃及其制备工艺
US11086053B2 (en) 2014-04-01 2021-08-10 Toyota Motor Engineering & Manufacturing North America, Inc. Non-color shifting multilayer structures
CN115903321A (zh) * 2014-12-31 2023-04-04 法国圣-戈班玻璃公司 用于完整的全固态电致变色堆叠体的快速热处理方法

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FR2949774B1 (fr) * 2009-09-08 2011-08-26 Saint Gobain Materiau comprenant un substrat en verre revetu d'un empilement de couches minces
FR2950878B1 (fr) 2009-10-01 2011-10-21 Saint Gobain Procede de depot de couche mince
US11155493B2 (en) 2010-01-16 2021-10-26 Cardinal Cg Company Alloy oxide overcoat indium tin oxide coatings, coated glazings, and production methods
US9862640B2 (en) 2010-01-16 2018-01-09 Cardinal Cg Company Tin oxide overcoat indium tin oxide coatings, coated glazings, and production methods
US10000965B2 (en) 2010-01-16 2018-06-19 Cardinal Cg Company Insulating glass unit transparent conductive coating technology
US10000411B2 (en) 2010-01-16 2018-06-19 Cardinal Cg Company Insulating glass unit transparent conductivity and low emissivity coating technology
US10060180B2 (en) 2010-01-16 2018-08-28 Cardinal Cg Company Flash-treated indium tin oxide coatings, production methods, and insulating glass unit transparent conductive coating technology
US8815059B2 (en) * 2010-08-31 2014-08-26 Guardian Industries Corp. System and/or method for heat treating conductive coatings using wavelength-tuned infrared radiation
US10654748B2 (en) * 2010-03-29 2020-05-19 Vitro Flat Glass Llc Solar control coatings providing increased absorption or tint
US8337988B2 (en) 2010-04-22 2012-12-25 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Coated article having low-E coating with absorber layer(s)
US9028956B2 (en) * 2010-04-22 2015-05-12 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Coated article having low-E coating with absorber layer(s)
BE1019345A3 (fr) 2010-05-25 2012-06-05 Agc Glass Europe Vitrage de controle solaire a faible facteur solaire.
FR2969391B1 (fr) * 2010-12-17 2013-07-05 Saint Gobain Procédé de fabrication d'un dispositif oled
DE102010054858C5 (de) * 2010-12-17 2024-04-11 Interpane Entwicklungs- Und Beratungsgesellschaft Mbh Verfahren und Vorrichtung zur Herstellung einer reflexionsmindernden Beschichtung
US8557391B2 (en) 2011-02-24 2013-10-15 Guardian Industries Corp. Coated article including low-emissivity coating, insulating glass unit including coated article, and/or methods of making the same
US8790783B2 (en) 2011-03-03 2014-07-29 Guardian Industries Corp. Barrier layers comprising Ni and/or Ti, coated articles including barrier layers, and methods of making the same
US8709604B2 (en) 2011-03-03 2014-04-29 Guardian Industries Corp. Barrier layers comprising Ni-inclusive ternary alloys, coated articles including barrier layers, and methods of making the same
FR2972447B1 (fr) 2011-03-08 2019-06-07 Saint-Gobain Glass France Procede d'obtention d'un substrat muni d'un revetement
GB201106788D0 (en) * 2011-04-21 2011-06-01 Pilkington Group Ltd Heat treatable coated glass pane
DE102011105718B4 (de) * 2011-06-23 2014-03-06 Von Ardenne Anlagentechnik Gmbh Teiltransparentes Schichtsystem mit hoher IR-Reflexion, Verfahren zu dessen Herstellung sowie Architekturglaslement
KR101774278B1 (ko) * 2011-07-18 2017-09-04 엘지디스플레이 주식회사 플렉서블 표시장치의 제조방법
DE102011089884B4 (de) 2011-08-19 2016-03-10 Von Ardenne Gmbh Niedrigemittierende Beschichtung und Verfahren zur Herstellung eines niedrigemittierenden Schichtsystems
FR2981346B1 (fr) * 2011-10-18 2014-01-24 Saint Gobain Procede de traitement thermique de couches d'argent
FR2981646B1 (fr) 2011-10-21 2013-10-25 Saint Gobain Vitrage de controle solaire comprenant une couche d'un alliage nicu
FR2985724B1 (fr) * 2012-01-16 2014-03-07 Saint Gobain Substrat muni d'un empilement a proprietes thermiques comportant quatre couches fonctionnelles metalliques.
KR20140138137A (ko) * 2012-02-28 2014-12-03 아사히 가라스 가부시키가이샤 적층체의 제조 방법, 및 적층체
FR2989388B1 (fr) 2012-04-17 2019-10-18 Saint-Gobain Glass France Procede d'obtention d'un substrat muni d'un revetement
US9919959B2 (en) 2012-05-31 2018-03-20 Guardian Glass, LLC Window with UV-treated low-E coating and method of making same
FR2991980A1 (fr) * 2012-06-13 2013-12-20 Saint Gobain Procede de depot de couches minces avec etape de traitement sous vide et produit obtenu
KR101499288B1 (ko) 2012-06-19 2015-03-05 (주)엘지하우시스 저방사 코팅막 및 이를 포함하는 건축 자재
US9150003B2 (en) * 2012-09-07 2015-10-06 Guardian Industries Corp. Coated article with low-E coating having absorbing layers for low film side reflectance and low visible transmission
FR3002534B1 (fr) * 2013-02-27 2018-04-13 Saint-Gobain Glass France Substrat revetu d'un empilement bas-emissif.
US10604834B2 (en) 2013-03-12 2020-03-31 Guardian Glass, LLC Titanium nickel niobium alloy barrier for low-emissivity coatings
US20140272455A1 (en) * 2013-03-12 2014-09-18 Intermolecular Inc. Titanium nickel niobium alloy barrier for low-emissivity coatings
KR101768257B1 (ko) * 2013-09-02 2017-08-14 (주)엘지하우시스 저방사 코팅 및 이를 포함하는 창호용 건축 자재
FR3021650A1 (fr) * 2014-05-28 2015-12-04 Saint Gobain Procede d'obtention d'un materiau comprenant une couche fonctionnelle a base d'argent resistant a un traitement a temperature elevee
FR3026404B1 (fr) 2014-09-30 2016-11-25 Saint Gobain Substrat muni d'un empilement a proprietes thermiques et a couche intermediaire sous stoechiometrique
FR3030491B1 (fr) * 2014-12-23 2016-12-30 Saint Gobain Vitrage comprenant un revetement protecteur
FR3030492B1 (fr) * 2014-12-23 2021-09-03 Saint Gobain Vitrage comprenant une couche de protection superieure a base de carbone
KR102269782B1 (ko) * 2014-12-26 2021-07-02 주식회사 케이씨씨글라스 차폐성능이 향상된 열처리 가능한 저방사 유리 및 그 제조방법
BR112017019742A2 (pt) * 2015-03-18 2018-05-29 Intermolecular Inc. barreira de liga de titânio, níquel e nióbio para revestimentos de baixa emissividade
US10011524B2 (en) 2015-06-19 2018-07-03 Guardian Glass, LLC Coated article with sequentially activated low-E coating, and/or method of making the same
KR101934062B1 (ko) * 2015-09-14 2019-01-02 (주)엘지하우시스 창호용 기능성 건축 자재
FR3042492B1 (fr) * 2015-10-16 2018-01-19 Saint-Gobain Glass France Procede de recuit rapide d'un empilement de couches minces contenant une surcouche a base d'indium
US10100202B2 (en) 2016-09-06 2018-10-16 Guardian Europe S.A.R.L. Coated article with IR reflecting layer and method of making same
KR20190053286A (ko) * 2016-10-21 2019-05-17 생-고뱅 퍼포먼스 플라스틱스 코포레이션 태양광 제어용 윈도우 필름
DK3646389T3 (da) 2017-06-30 2025-06-16 Saint Gobain Performance Plastics Corp Solbeskyttelsesfilm
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AU2010258455B2 (en) 2015-03-05
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