CN102598276B - 形成半导体器件的方法 - Google Patents

形成半导体器件的方法 Download PDF

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Publication number
CN102598276B
CN102598276B CN201080049358.3A CN201080049358A CN102598276B CN 102598276 B CN102598276 B CN 102598276B CN 201080049358 A CN201080049358 A CN 201080049358A CN 102598276 B CN102598276 B CN 102598276B
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layer
silicon
epitaxial
wafer
conductivity type
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CN102598276A (zh
Inventor
汉密尔顿·吕
T·周
凯尔·特里尔
德瓦·N·帕坦纳亚克
莎伦·石
K·陈
罗伯特·许
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Vishay Siliconix Inc
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Vishay Siliconix Inc
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02636—Selective deposition, e.g. simultaneous growth of mono- and non-monocrystalline semiconductor materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2205—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02584—Delta-doping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02694—Controlling the interface between substrate and epitaxial layer, e.g. by ion implantation followed by annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/668—Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/60—Impurity distributions or concentrations
    • H10D62/605—Planar doped, e.g. atomic-plane doped or delta-doped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Chemical Vapour Deposition (AREA)
CN201080049358.3A 2009-09-03 2010-09-03 形成半导体器件的方法 Active CN102598276B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US23972909P 2009-09-03 2009-09-03
US61/239,729 2009-09-03
US12/873,147 US9230810B2 (en) 2009-09-03 2010-08-31 System and method for substrate wafer back side and edge cross section seals
US12/873,147 2010-08-31
PCT/US2010/047827 WO2011029010A2 (en) 2009-09-03 2010-09-03 Method of forming a semiconductor device

Publications (2)

Publication Number Publication Date
CN102598276A CN102598276A (zh) 2012-07-18
CN102598276B true CN102598276B (zh) 2015-05-06

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US (2) US9230810B2 (enExample)
EP (1) EP2474039B1 (enExample)
JP (1) JP6002037B2 (enExample)
KR (2) KR101752112B1 (enExample)
CN (1) CN102598276B (enExample)
WO (1) WO2011029010A2 (enExample)

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CN104810363B (zh) * 2014-01-26 2018-04-17 北大方正集团有限公司 功率集成器件及其制作方法
US9379185B2 (en) 2014-04-24 2016-06-28 International Business Machines Corporation Method of forming channel region dopant control in fin field effect transistor
WO2016021020A1 (ja) * 2014-08-07 2016-02-11 ユニサンティス エレクトロニクス シンガポール プライベート リミテッド 半導体装置の製造方法、及び、半導体装置
CN106835269A (zh) * 2017-03-03 2017-06-13 上海新傲科技股份有限公司 用于氮化物外延生长的叠层基板及其形成方法
JP2019075438A (ja) * 2017-10-13 2019-05-16 明広 石田 半導体レーザ素子及び半導体レーザ素子の製造方法
CN112595949A (zh) * 2020-12-28 2021-04-02 上海超硅半导体有限公司 一种晶圆自动测试装置及测试方法
CN120656944A (zh) * 2024-03-13 2025-09-16 朗姆研究公司 半导体衬底的背面密封
CN118380332B (zh) * 2024-06-21 2024-09-06 日月新半导体(威海)有限公司 一种集成电路封装体及其制备方法

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Publication number Publication date
US20110049682A1 (en) 2011-03-03
KR20120059559A (ko) 2012-06-08
WO2011029010A2 (en) 2011-03-10
CN102598276A (zh) 2012-07-18
EP2474039A2 (en) 2012-07-11
WO2011029010A3 (en) 2011-07-21
KR20160042462A (ko) 2016-04-19
JP6002037B2 (ja) 2016-10-05
KR101752112B1 (ko) 2017-06-28
US10546750B2 (en) 2020-01-28
US9230810B2 (en) 2016-01-05
EP2474039B1 (en) 2020-11-04
US20160225622A1 (en) 2016-08-04
JP2013504217A (ja) 2013-02-04
EP2474039A4 (en) 2014-01-08

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