CN101661952B - 非晶氧化物半导体和使用其的薄膜晶体管 - Google Patents

非晶氧化物半导体和使用其的薄膜晶体管 Download PDF

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Publication number
CN101661952B
CN101661952B CN200910167482.9A CN200910167482A CN101661952B CN 101661952 B CN101661952 B CN 101661952B CN 200910167482 A CN200910167482 A CN 200910167482A CN 101661952 B CN101661952 B CN 101661952B
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thin film
oxide semiconductor
channel layer
film transistor
film
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CN101661952A (zh
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林享
大村秀之
云见日出也
重里有三
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Canon Inc
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Canon Inc
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6746—Amorphous silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H10D30/6756—Amorphous oxide semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies

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  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
CN200910167482.9A 2008-08-28 2009-08-25 非晶氧化物半导体和使用其的薄膜晶体管 Expired - Fee Related CN101661952B (zh)

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JP2008219888 2008-08-28
JP2008219888 2008-08-28
JP2008-219888 2008-08-28

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US (3) US8129718B2 (enExample)
EP (1) EP2159844B1 (enExample)
JP (1) JP5725698B2 (enExample)
KR (1) KR101194255B1 (enExample)
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AT (1) ATE534146T1 (enExample)

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Publication number Priority date Publication date Assignee Title
CN103077961A (zh) * 2008-08-28 2013-05-01 佳能株式会社 非晶氧化物半导体和使用其的薄膜晶体管

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