CN1016191B - 半导体器件的高氧含量硅单晶基片制法 - Google Patents
半导体器件的高氧含量硅单晶基片制法Info
- Publication number
- CN1016191B CN1016191B CN86106346A CN86106346A CN1016191B CN 1016191 B CN1016191 B CN 1016191B CN 86106346 A CN86106346 A CN 86106346A CN 86106346 A CN86106346 A CN 86106346A CN 1016191 B CN1016191 B CN 1016191B
- Authority
- CN
- China
- Prior art keywords
- silicon
- crystal
- crucible
- oxygen level
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60244562A JPS62105998A (ja) | 1985-10-31 | 1985-10-31 | シリコン基板の製法 |
JP244562/85 | 1985-10-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN86106346A CN86106346A (zh) | 1987-06-17 |
CN1016191B true CN1016191B (zh) | 1992-04-08 |
Family
ID=17120560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN86106346A Expired CN1016191B (zh) | 1985-10-31 | 1986-10-31 | 半导体器件的高氧含量硅单晶基片制法 |
Country Status (14)
Country | Link |
---|---|
JP (1) | JPS62105998A (de) |
KR (1) | KR870004498A (de) |
CN (1) | CN1016191B (de) |
AT (1) | ATA289086A (de) |
AU (1) | AU597599B2 (de) |
CA (1) | CA1336061C (de) |
DE (1) | DE3637006A1 (de) |
DK (1) | DK518486A (de) |
FR (1) | FR2589489B1 (de) |
GB (1) | GB2182262B (de) |
IT (1) | IT1198454B (de) |
MY (1) | MY100449A (de) |
NL (1) | NL8602738A (de) |
SE (1) | SE8604627L (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5196085A (en) * | 1990-12-28 | 1993-03-23 | Massachusetts Institute Of Technology | Active magnetic flow control in Czochralski systems |
JP2613498B2 (ja) * | 1991-03-15 | 1997-05-28 | 信越半導体株式会社 | Si単結晶ウエーハの熱処理方法 |
JPH07247197A (ja) * | 1994-03-09 | 1995-09-26 | Fujitsu Ltd | 半導体装置とその製造方法 |
JP3443822B2 (ja) * | 1996-03-27 | 2003-09-08 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
DE19711922A1 (de) * | 1997-03-21 | 1998-09-24 | Wacker Siltronic Halbleitermat | Vorrichtung und Verfahren zum Ziehen eines Einkristalls |
CN100547122C (zh) | 1997-04-09 | 2009-10-07 | Memc电子材料有限公司 | 缺陷密度低,空位占优势的硅 |
US6379642B1 (en) | 1997-04-09 | 2002-04-30 | Memc Electronic Materials, Inc. | Vacancy dominated, defect-free silicon |
US6190631B1 (en) | 1997-04-09 | 2001-02-20 | Memc Electronic Materials, Inc. | Low defect density, ideal oxygen precipitating silicon |
JPH11268987A (ja) * | 1998-03-20 | 1999-10-05 | Shin Etsu Handotai Co Ltd | シリコン単結晶およびその製造方法 |
JP2003517412A (ja) | 1998-06-26 | 2003-05-27 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | 任意に大きい直径を有する無欠陥シリコン結晶の成長方法 |
JP2002524845A (ja) | 1998-09-02 | 2002-08-06 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | 欠陥密度が低い単結晶シリコンから得られるシリコン・オン・インシュレーター構造体 |
US6416836B1 (en) | 1998-10-14 | 2002-07-09 | Memc Electronic Materials, Inc. | Thermally annealed, low defect density single crystal silicon |
KR20010034789A (ko) | 1998-10-14 | 2001-04-25 | 헨넬리 헬렌 에프 | 실질적으로 성장 결점이 없는 에피택시얼 실리콘 웨이퍼 |
US6312516B2 (en) | 1998-10-14 | 2001-11-06 | Memc Electronic Materials, Inc. | Process for preparing defect free silicon crystals which allows for variability in process conditions |
US6858307B2 (en) | 2000-11-03 | 2005-02-22 | Memc Electronic Materials, Inc. | Method for the production of low defect density silicon |
US7105050B2 (en) | 2000-11-03 | 2006-09-12 | Memc Electronic Materials, Inc. | Method for the production of low defect density silicon |
WO2002059400A2 (en) | 2001-01-26 | 2002-08-01 | Memc Electronic Materials, Inc. | Low defect density silicon substantially free of oxidation induced stacking faults having a vacancy-dominated core |
DE10103691A1 (de) * | 2001-01-26 | 2002-08-08 | Crystal Growing Systems Gmbh | Elektrische Energieversorgung für eine elektrische Heizung |
TWI404836B (zh) | 2006-05-19 | 2013-08-11 | Memc Electronic Materials | 控制由單晶矽在卓式成長過程側向表面產生的聚集點缺陷及氧團簇的形成 |
JP5974978B2 (ja) | 2013-05-29 | 2016-08-23 | 信越半導体株式会社 | シリコン単結晶製造方法 |
CN105780113B (zh) * | 2016-03-10 | 2017-11-28 | 江西赛维Ldk太阳能高科技有限公司 | 一种表征晶体硅生长界面和生长速度的方法 |
CN112095154B (zh) * | 2019-06-18 | 2021-05-14 | 上海新昇半导体科技有限公司 | 一种半导体晶体生长装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5556098A (en) * | 1978-10-17 | 1980-04-24 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Method and apparatus for producing si single crystal rod |
DE3069547D1 (en) * | 1980-06-26 | 1984-12-06 | Ibm | Process for controlling the oxygen content of silicon ingots pulled by the czochralski method |
GB2084046B (en) * | 1980-08-27 | 1984-07-25 | Secr Defence | Method and apparatus for crystal growth |
DE3170781D1 (en) * | 1980-12-29 | 1985-07-04 | Monsanto Co | Method for regulating concentration and distribution of oxygen in czochralski grown silicon |
NL8102102A (nl) * | 1981-04-29 | 1982-11-16 | Philips Nv | Werkwijze voor het optrekken van een siliciumstaaf en halfgeleiderinrichting vervaardigd uit de siliciumstaaf. |
JPH0244799B2 (ja) * | 1981-10-26 | 1990-10-05 | Sony Corp | Ketsushoseichohoho |
US4511428A (en) * | 1982-07-09 | 1985-04-16 | International Business Machines Corporation | Method of controlling oxygen content and distribution in grown silicon crystals |
JPS6027684A (ja) * | 1983-07-26 | 1985-02-12 | Fujitsu Ltd | 単結晶製造装置 |
JPS6033289A (ja) * | 1983-07-29 | 1985-02-20 | Toshiba Corp | シリコン単結晶の製造方法 |
JPS6094722A (ja) * | 1983-08-16 | 1985-05-27 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | シリコン・ウエハ |
JPS6153187A (ja) * | 1984-08-24 | 1986-03-17 | Sony Corp | 単結晶成長装置 |
IT1207497B (it) * | 1985-05-29 | 1989-05-25 | Montedison Spa | Monocristalli di arseniuro di gallio a bassa densita' di dislocazioni e di elevata purezza. |
-
1985
- 1985-10-31 JP JP60244562A patent/JPS62105998A/ja active Pending
-
1986
- 1986-08-25 KR KR1019860007019A patent/KR870004498A/ko not_active Application Discontinuation
- 1986-10-16 CA CA000520610A patent/CA1336061C/en not_active Expired - Fee Related
- 1986-10-28 IT IT48592/86A patent/IT1198454B/it active
- 1986-10-29 FR FR868615075A patent/FR2589489B1/fr not_active Expired - Fee Related
- 1986-10-30 DK DK518486A patent/DK518486A/da not_active Application Discontinuation
- 1986-10-30 SE SE8604627A patent/SE8604627L/ not_active Application Discontinuation
- 1986-10-30 DE DE19863637006 patent/DE3637006A1/de not_active Ceased
- 1986-10-30 AU AU64550/86A patent/AU597599B2/en not_active Ceased
- 1986-10-30 AT AT0289086A patent/ATA289086A/de not_active Application Discontinuation
- 1986-10-30 NL NL8602738A patent/NL8602738A/nl not_active Application Discontinuation
- 1986-10-31 MY MYPI86000057A patent/MY100449A/en unknown
- 1986-10-31 CN CN86106346A patent/CN1016191B/zh not_active Expired
- 1986-10-31 GB GB8626074A patent/GB2182262B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
AU597599B2 (en) | 1990-06-07 |
GB2182262B (en) | 1989-09-27 |
GB8626074D0 (en) | 1986-12-03 |
IT1198454B (it) | 1988-12-21 |
KR870004498A (ko) | 1987-05-09 |
DE3637006A1 (de) | 1987-05-07 |
MY100449A (en) | 1990-10-15 |
FR2589489A1 (fr) | 1987-05-07 |
AU6455086A (en) | 1987-05-07 |
JPS62105998A (ja) | 1987-05-16 |
DK518486A (da) | 1987-05-01 |
SE8604627D0 (sv) | 1986-10-30 |
CN86106346A (zh) | 1987-06-17 |
FR2589489B1 (fr) | 1994-06-10 |
IT8648592A0 (it) | 1986-10-28 |
SE8604627L (sv) | 1987-05-01 |
ATA289086A (de) | 1996-01-15 |
NL8602738A (nl) | 1987-05-18 |
DK518486D0 (da) | 1986-10-30 |
CA1336061C (en) | 1995-06-27 |
GB2182262A (en) | 1987-05-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C13 | Decision | ||
GR02 | Examined patent application | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |