IT1207497B - Monocristalli di arseniuro di gallio a bassa densita' di dislocazioni e di elevata purezza. - Google Patents

Monocristalli di arseniuro di gallio a bassa densita' di dislocazioni e di elevata purezza.

Info

Publication number
IT1207497B
IT1207497B IT8520936A IT2093685A IT1207497B IT 1207497 B IT1207497 B IT 1207497B IT 8520936 A IT8520936 A IT 8520936A IT 2093685 A IT2093685 A IT 2093685A IT 1207497 B IT1207497 B IT 1207497B
Authority
IT
Italy
Prior art keywords
arseniuro
gallio
dislocations
low density
high purity
Prior art date
Application number
IT8520936A
Other languages
English (en)
Other versions
IT8520936A0 (it
Inventor
Adriano Mattera
Roberto Fornari
Renato Magnanini
Carlo Paorici
Lucio Zanotti
Giovanni Zuccalli
Original Assignee
Montedison Spa
Consiglio Nazionale Ricerche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Montedison Spa, Consiglio Nazionale Ricerche filed Critical Montedison Spa
Priority to IT8520936A priority Critical patent/IT1207497B/it
Publication of IT8520936A0 publication Critical patent/IT8520936A0/it
Priority to EP86304008A priority patent/EP0206541B1/en
Priority to DE8686304008T priority patent/DE3683547D1/de
Priority to US06/867,514 priority patent/US4776971A/en
Priority to CA000510229A priority patent/CA1277576C/en
Priority to JP61122408A priority patent/JPS6212700A/ja
Application granted granted Critical
Publication of IT1207497B publication Critical patent/IT1207497B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
    • C30B29/42—Gallium arsenide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Recrystallisation Techniques (AREA)
IT8520936A 1985-05-29 1985-05-29 Monocristalli di arseniuro di gallio a bassa densita' di dislocazioni e di elevata purezza. IT1207497B (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT8520936A IT1207497B (it) 1985-05-29 1985-05-29 Monocristalli di arseniuro di gallio a bassa densita' di dislocazioni e di elevata purezza.
EP86304008A EP0206541B1 (en) 1985-05-29 1986-05-27 Gallium arsenide single crystals, and process for the preparation thereof
DE8686304008T DE3683547D1 (de) 1985-05-29 1986-05-27 Galliumarsenideinkristalle und verfahren zu ihrer herstellung.
US06/867,514 US4776971A (en) 1985-05-29 1986-05-28 Gallium arsenide single crystals with low dislocation density and high purity
CA000510229A CA1277576C (en) 1985-05-29 1986-05-28 Gallium arsenide single crystals with low dislocation density and high purity
JP61122408A JPS6212700A (ja) 1985-05-29 1986-05-29 転位密度が小さくかつ純度が高いヒ化ガリウム単結晶

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT8520936A IT1207497B (it) 1985-05-29 1985-05-29 Monocristalli di arseniuro di gallio a bassa densita' di dislocazioni e di elevata purezza.

Publications (2)

Publication Number Publication Date
IT8520936A0 IT8520936A0 (it) 1985-05-29
IT1207497B true IT1207497B (it) 1989-05-25

Family

ID=11174314

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8520936A IT1207497B (it) 1985-05-29 1985-05-29 Monocristalli di arseniuro di gallio a bassa densita' di dislocazioni e di elevata purezza.

Country Status (6)

Country Link
US (1) US4776971A (it)
EP (1) EP0206541B1 (it)
JP (1) JPS6212700A (it)
CA (1) CA1277576C (it)
DE (1) DE3683547D1 (it)
IT (1) IT1207497B (it)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62105998A (ja) * 1985-10-31 1987-05-16 Sony Corp シリコン基板の製法
JPH01239089A (ja) * 1987-11-30 1989-09-25 Toshiba Corp 化合物半導体単結晶の製造方法及び製造装置
JPH0570288A (ja) * 1991-09-09 1993-03-23 Toshiba Corp 化合物半導体単結晶の製造方法及び製造装置
JPH06157294A (ja) * 1992-11-19 1994-06-03 Tanabe Seiyaku Co Ltd 脂肪微粒子製剤
JP4384774B2 (ja) * 2000-02-07 2009-12-16 Ｄｏｗａホールディングス株式会社 ＧａＡｓ結晶の製造用原料
US7175707B2 (en) * 2003-03-24 2007-02-13 Hitachi Cable Ltd. P-type GaAs single crystal and its production method
US7366368B2 (en) * 2004-06-15 2008-04-29 Intel Corporation Optical add/drop interconnect bus for multiprocessor architecture
EP1739210B1 (de) * 2005-07-01 2012-03-07 Freiberger Compound Materials GmbH Verfahren zur Herstellung von dotierten Halbleiter-Einkristallen, und III-V-Halbleiter-Einkristall
JP4631884B2 (ja) * 2007-08-22 2011-02-16 日立電線株式会社 閃亜鉛鉱型窒化物半導体自立基板、閃亜鉛鉱型窒化物半導体自立基板の製造方法、及び閃亜鉛鉱型窒化物半導体自立基板を用いた発光装置
US8329295B2 (en) 2008-07-11 2012-12-11 Freiberger Compound Materials Gmbh Process for producing doped gallium arsenide substrate wafers having low optical absorption coefficient
DE102008032628A1 (de) * 2008-07-11 2010-01-28 Freiberger Compound Materials Gmbh Verfahren zur Herstellung von dotierten Galliumarsenidsubstratwafern mit niedrigem optischen Absorptionskoeffizienten
JP5664239B2 (ja) 2009-01-20 2015-02-04 住友電気工業株式会社 導電性ＧａＡｓ単結晶と導電性ＧａＡｓ単結晶基板およびそれらの作製方法
JP5370393B2 (ja) * 2011-03-03 2013-12-18 住友電気工業株式会社 化合物半導体単結晶基板
JP5370394B2 (ja) * 2011-03-03 2013-12-18 住友電気工業株式会社 化合物半導体単結晶基板

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE795938A (fr) * 1972-03-01 1973-08-27 Siemens Ag Procede de fabrication d'une barre d'arseniure de gallium monocristalline exempte de dislocation
US4058429A (en) * 1975-12-04 1977-11-15 Westinghouse Electric Corporation Infrared temperature control of Czochralski crystal growth
JPS5914440B2 (ja) * 1981-09-18 1984-04-04 住友電気工業株式会社 ＣａＡｓ単結晶への硼素のド−ピング方法
JPS5869800A (ja) * 1981-10-16 1983-04-26 Nec Corp ３−５族化合物半導体の結晶成長方法
JPS58161999A (ja) * 1982-03-19 1983-09-26 Hitachi Cable Ltd 半絶縁性砒化ガリウム単結晶の製造方法
JPS6046998A (ja) * 1983-08-26 1985-03-14 Sumitomo Electric Ind Ltd 単結晶引上方法及びそのための装置

Also Published As

Publication number Publication date
IT8520936A0 (it) 1985-05-29
EP0206541A3 (en) 1988-12-14
EP0206541A2 (en) 1986-12-30
EP0206541B1 (en) 1992-01-22
JPS6212700A (ja) 1987-01-21
DE3683547D1 (de) 1992-03-05
CA1277576C (en) 1990-12-11
US4776971A (en) 1988-10-11

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