CN101459103B - 台装置 - Google Patents

台装置 Download PDF

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Publication number
CN101459103B
CN101459103B CN2008100870894A CN200810087089A CN101459103B CN 101459103 B CN101459103 B CN 101459103B CN 2008100870894 A CN2008100870894 A CN 2008100870894A CN 200810087089 A CN200810087089 A CN 200810087089A CN 101459103 B CN101459103 B CN 101459103B
Authority
CN
China
Prior art keywords
base station
mentioned
frame
upper frame
table apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2008100870894A
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English (en)
Chinese (zh)
Other versions
CN101459103A (zh
Inventor
吉田达矢
中森靖仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of CN101459103A publication Critical patent/CN101459103A/zh
Application granted granted Critical
Publication of CN101459103B publication Critical patent/CN101459103B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
CN2008100870894A 2007-12-12 2008-04-11 台装置 Expired - Fee Related CN101459103B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP321307/2007 2007-12-12
JP2007321307A JP4195497B2 (ja) 2007-12-12 2007-12-12 ステージ装置

Publications (2)

Publication Number Publication Date
CN101459103A CN101459103A (zh) 2009-06-17
CN101459103B true CN101459103B (zh) 2011-11-30

Family

ID=39242917

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2008100870894A Expired - Fee Related CN101459103B (zh) 2007-12-12 2008-04-11 台装置

Country Status (4)

Country Link
JP (1) JP4195497B2 (ja)
KR (1) KR100993473B1 (ja)
CN (1) CN101459103B (ja)
TW (1) TWI383467B (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010225687A (ja) * 2009-03-19 2010-10-07 Shibaura Mechatronics Corp 基板の処理装置
WO2010118002A1 (en) * 2009-04-07 2010-10-14 Trumpf, Inc. A workpiece processing machine with a processing head, a suction duct and structural connecting frame section for transporting the processing machine
WO2010117993A1 (en) 2009-04-07 2010-10-14 Trumpf, Inc. Cutting machine with a cutting head using a beam and a suction duct coupled to the motion unit moving the cutting head
JP5380225B2 (ja) * 2009-09-24 2014-01-08 株式会社日立ハイテクノロジーズ ガラス基板の検査装置
WO2011059003A1 (ja) * 2009-11-10 2011-05-19 株式会社アルバック 検査装置
KR101055214B1 (ko) * 2010-08-02 2011-08-09 김복인 현장조립형 중,대형 가공기
JP5605502B2 (ja) 2011-03-24 2014-10-15 村田機械株式会社 工作機械システム
CN103594280B (zh) * 2013-10-31 2015-08-26 西安交通大学 一种新型复合触头真空灭弧室及其应用的真空断路器
DE102017007962A1 (de) * 2017-08-24 2019-02-28 Deckel Maho Seebach Gmbh Werkzeugmaschine
WO2020217413A1 (ja) * 2019-04-25 2020-10-29 三菱電機株式会社 レーザ加工機
CN110000578A (zh) * 2019-04-29 2019-07-12 广船国际有限公司 一种镗孔设备的支撑结构及法兰的加工方法
JP7223289B2 (ja) * 2020-09-24 2023-02-16 日新イオン機器株式会社 搬送装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003340343A (ja) * 2002-05-24 2003-12-02 Dainippon Screen Mfg Co Ltd 基板処理装置
CN1727970A (zh) * 2004-07-30 2006-02-01 激光先进技术股份公司 移动式xy载物台
JP2006269509A (ja) * 2005-03-22 2006-10-05 Nsk Ltd 位置決め装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3548353B2 (ja) * 1996-10-15 2004-07-28 キヤノン株式会社 ステージ装置およびこれを用いた露光装置ならびにデバイス製造方法
JP3810039B2 (ja) * 1998-05-06 2006-08-16 キヤノン株式会社 ステージ装置
JP2002365026A (ja) * 2001-06-07 2002-12-18 Sigma Technos Kk 基板検査装置
JP2006224039A (ja) * 2005-02-21 2006-08-31 Dainippon Printing Co Ltd パターン形成装置、パターニング方法、基板処理装置、基板処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003340343A (ja) * 2002-05-24 2003-12-02 Dainippon Screen Mfg Co Ltd 基板処理装置
CN1727970A (zh) * 2004-07-30 2006-02-01 激光先进技术股份公司 移动式xy载物台
JP2006269509A (ja) * 2005-03-22 2006-10-05 Nsk Ltd 位置決め装置

Also Published As

Publication number Publication date
KR20090063076A (ko) 2009-06-17
TW200926345A (en) 2009-06-16
JP2008060614A (ja) 2008-03-13
JP4195497B2 (ja) 2008-12-10
CN101459103A (zh) 2009-06-17
KR100993473B1 (ko) 2010-11-10
TWI383467B (zh) 2013-01-21

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20111130

Termination date: 20140411